JPH01103253A - Supersonic wave vibration polishing or grinding machine - Google Patents

Abstract

PURPOSE:To efficiently grind-work the surface of a highly brittle material free from the generation of crack by installing a supersonic wave vibration generating device onto the rotary driving shaft of a grinder and assembling a supersonic wave vibration generator onto each work installation shaft. CONSTITUTION:A work installation part 22 is swung horizontally for a polishing plate 1 by the drive of a swing motor 25, and a ceramics 21 installed onto the work installation part 22 is pressed onto the polishing plate 1 revolution- driven by a revolving motor in a rotary driving part 2, and the surface of the ceramics 21 is grinding-worked. In this case, the polishing plate 1 is supersonic wave-vibrated by the drive of a supersonic wave vibrator 9 built in the rotary driving shaft 4 of the polishing plate 4, and the ceramics 21 is supersonic wave vibrated by the drive of a supersonic wave vibrator 34 assembled into the work installation part 22, and the surface of the ceramics 21 is grind-worked efficiently free from the generation of crack.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a highly efficient and highly accurate surface polishing machine or grinding machine for polishing or grinding the surface of highly brittle materials.

[Conventional technology]

Conventionally, equipment for polishing or grinding the surface of highly brittle materials is
Equipment used for processing metal materials, etc. was used as is, and a lapping agent or grindstone suitable for highly brittle materials was selected and used.

Highly brittle materials such as ceramics are hard and brittle and difficult to polish or grind, resulting in significantly low processing efficiency. Also, when trying to increase machining efficiency.

There is a contradiction in that surface accuracy, such as surface roughness and flatness, is impaired, and there are also problems such as fine racks being generated.

[Problem that the invention seeks to solve]

The present invention was developed in view of the above circumstances, and an object of the present invention is to provide a polishing or grinding device with high processing efficiency and high processing accuracy.

[Means for solving problems]

The present invention is a polishing machine or grinding machine for highly brittle materials, which includes: (1) an ultrasonic vibration generator built into the rotary drive shaft; and (2) a plurality of workpiece mounting shafts oscillating on a polishing or grinding disk. Flexible arrangement (3) This is an ultrasonic vibration polishing or grinding machine whose technical feature is that an ultrasonic vibration generator is built into the workpiece mounting shaft.

A dressing material can be attached to the workpiece attachment shaft instead of the workpiece.

[Effect]

The present invention is a processing machine used for polishing or grinding highly brittle materials, and since the surface of the workpiece is polished or ground while applying ultrasonic vibration, the machining efficiency is increased 3 to 5 times compared to conventional methods. Highly brittle materials can be polished or ground without impairing surface precision, and cracks or the like will not occur in the highly brittle materials.

〔Example〕

@1 Figures are (a) a plan view and (a) of a polishing machine according to an embodiment of the present invention;
b) is a front longitudinal sectional view (B-B arrow view in Fig. 1(a));
(c) shows a side longitudinal sectional view (view taken along the line CC in FIG. 1(a)).

In FIG. 1, a polishing plate 1 is supported by a rotation drive unit 2 and rotates in a horizontal plane.

FIG. 2 shows a vertical cross-sectional view of an embodiment of the rotation drive unit 2. A drive shaft 4 is built into the casing 3, and a rotation motor 7 consisting of a rotor 5 and a stator 6 is mounted on the drive shaft 4. An ultrasonic vibrator 9 is also attached to the zero-rotation shaft 4, which is supported by a bearing 8 and rotates the polishing plate 1, and is supplied with power via a slip ring 10. The ultrasonic vibrator generated longitudinal vibration, and its frequency was 20k) fz. Note that the ultrasonic vibrations applied to the rotational drive shaft and the workpiece mounting shaft may be synchronized or may have different frequencies and phases.

Next, a plurality of workpiece mounting portions 22 to which workpieces 21 are attached are arranged on the polishing plate l, and the polishing plate is moved as shown by the arrow 26 by the swinging arm 23, the swinging shaft 24, and the swinging motor 25. swing horizontally above.

The workpiece 21 presses the processed surface onto the polishing plate 1, and
move almost uniformly in the radial direction.

An embodiment of the workpiece attachment part 22 is shown in FIG.

A workpiece mounting shaft 32 is fixed within the casing 31, a workpiece holding portion 33 is provided at one end thereof, and an ultrasonic vibrator 34 is mounted at the other end. At least two workpiece attachment parts 22 are provided on the polishing plate 1, one of which serves as a dresser, and the others serve as attachment processing parts, thereby ensuring high polishing accuracy by constantly dressing the processing surface of the polishing plate. can.

Since the ultrasonic vibration polishing machine of the example applies ultrasonic vibration to the workpiece and the polishing plate, the processing efficiency was increased 3 to 5 times that of the conventional one.

〔Effect of the invention〕

According to the present invention, the polishing or grinding efficiency of the surface of a highly brittle material can be significantly improved, and the excellent effect of facilitating the processing of ceramics, etc., can be achieved without producing fine cracks or the like.

[Brief explanation of the drawing]

FIG. 1 shows (a) a plan view of a polishing disk according to an embodiment of the present invention, and (
b) is a front longitudinal sectional view (B-B arrow view in Fig. 1(a));
(c) is a side longitudinal cross-sectional view, (view taken along the line C-C in Fig. 1 (a)), Fig. 2 is a longitudinal cross-sectional view of the rotary drive part, and Fig. 3 is a longitudinal cross-sectional view of the workpiece mounting part. 1... Polishing plate 2... Rotation drive unit 3...
Casing 4... Drive shaft 5... Rotor
6... Stator 7... Rotating motor 8...
Bearing 9...Ultrasonic vibrator 10...Three-to-pull ring 21...Work 22...Work mounting portion 23...Arm 24...Swing shaft 25...
Swing motor 31...Casing 32...Workpiece mounting shaft 33...Workpiece holding part 34...Ultrasonic vibrator

Claims (1)

[Claims] 1. An ultrasonic vibration generator is built into the rotational drive shaft of the polishing or grinding machine, and multiple workpiece mounting shafts are horizontally oscillatably arranged on the polishing or grinding disk, and the workpiece mounting shafts are equipped with an ultrasonic vibration generator. An ultrasonic vibration polishing or grinding machine characterized by incorporating a vibration generator.