JPS63283848A - Supersonic wave working device - Google Patents

Supersonic wave working device

Info

Publication number
JPS63283848A
JPS63283848A JP11582487A JP11582487A JPS63283848A JP S63283848 A JPS63283848 A JP S63283848A JP 11582487 A JP11582487 A JP 11582487A JP 11582487 A JP11582487 A JP 11582487A JP S63283848 A JPS63283848 A JP S63283848A
Authority
JP
Japan
Prior art keywords
grindstone
workpiece
ultrasonic
supersonic wave
horn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11582487A
Other languages
Japanese (ja)
Inventor
Katsumi Miyaki
宮木 克巳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP11582487A priority Critical patent/JPS63283848A/en
Publication of JPS63283848A publication Critical patent/JPS63283848A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency

Abstract

PURPOSE:To spread kind of works and working range and facilitate maintenance by using the device used independently for the turn of a grindstone and the supersonic wave vibration for a workpiece and applying the composite action onto a working part without taking consideration of the transmission efficiency of the supersonic wave vibration for the grindstone. CONSTITUTION:A turning device R1 for a grindstone 16 and a supersonic wave vibrating device U for a workpiece 1 are placed so as to cross at right angles, and the vibrating direction and feeding direction for the workpiece 1 and a table 2 are set at right angles with a shaft 15, grindstone 16, and the turning axis of a motor 9, and each single operation is carried out, and the turning of the grindstone 16 and the supersonic wave vibration of the workpiece 1 are compositely applied onto the working part of the workpiece 1. Therefore, the need of transporting the supersonic wave vibration through the grindstone 16 is avoided, and the thin and large-sized grindstone which possesses a low rigidity can be used, and the need of the half-wave resonance between a horn 17 and a vibrating element 14 is avoided, and the working range can be widened by arbitrarily selecting the length of the shaft 15. Further, the need of using a carbon brush is avoided, and the simple constitution can be obtained, and the maintenance cost can be reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ファインセラミックス、ガラス等の硬脆材料
を、砥石の回転運動と材料の加工部に加えられる超音波
振動との複合作用により加工する超音波加工装置に係わ
り、特に加工の種類および範囲が拡大できしかも能率よ
く加工するのに好適な装置に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention processes hard and brittle materials such as fine ceramics and glass by the combined effect of the rotational movement of a grindstone and ultrasonic vibrations applied to the processed part of the material. The present invention relates to an ultrasonic machining device for processing, and particularly to a device that can expand the types and range of machining and is suitable for efficient machining.

〔従来の技術〕[Conventional technology]

ファインセラミックス、ソーダガラス等の硬脆材料を加
工する従来の超音波加工装置を第4図を参照して説明す
る。図示の構成の装置はすでに市販されており文献にも
発表されている。(たとえば、海野邦昭著「工作機械8
5」昭60.9.20. (株)大河出版発行P、43
〜P、48)図において、lは硬脆材料の被加工物で、
テーブル2上に止着されている。テーブル2は図示して
いない加圧機構により図示矢印方向に定荷重Fが作用し
て移動させられ、その移動量はテーブル2および被加工
物lの加工時の送りとなっている。3は高周波パルス波
を発信し電気的な振動を発生する超音波発振器、4はジ
ルコン酸チタン酸鉛系磁器製の電歪形の振動子で、超音
波発振器3で発生する電気的な振動をカーボンブラシ5
および軸6を介して受け、機械的な振動つまり超音波振
動に変換する。7は大径の基端側に振動子4が取り付け
られた段付き形のホーンで、振動子4の先端の数μmの
振動変位を30〜50μm程度に機械的に増幅する。ホ
ーン7は振動子4とともにその軸線をテーブル2の送り
方向と一致させて間隔を設けた2個の軸受8′で支持さ
れ、前記超音波振動させられるほかDCモータ9により
軸継手10.軸6を介してO〜5000rp11の範囲
で回動させられる。11’は振動子4.カーボンブラシ
5.軸受8′等を内設し、外部一端側にDCモータ9を
取り付けたケーシングである。12はホーン7の先端に
その先端の直径とほぼ同径のねし止めまたは一体的な焼
結構造で取り付けられたダイヤモンド砥石(以下単に砥
石という)で、振動子4.ホーン7の回動とホーン7を
介した振動子4の超音波振動とを受ける。この場合砥石
12に対する超音波振動の伝搬効率を高めるため、砥石
12が取り付けられたホーン7と振動子4との固有振動
数を一致させ、通常半波長共振となるようにホーン7と
砥石12との合計長さを選定している。
A conventional ultrasonic processing apparatus for processing hard and brittle materials such as fine ceramics and soda glass will be explained with reference to FIG. Devices with the configuration shown are already commercially available and have been published in the literature. (For example, "Machine Tools 8" by Kuniaki Unno
5” 1986.9.20. Published by Taiga Publishing Co., Ltd. P, 43
~P, 48) In the figure, l is a workpiece made of hard and brittle material,
It is fixed on the table 2. The table 2 is moved by a pressure mechanism (not shown) under the action of a constant load F in the direction of the arrow shown in the drawing, and the amount of movement corresponds to the feed of the table 2 and the workpiece 1 during processing. 3 is an ultrasonic oscillator that transmits high-frequency pulse waves and generates electrical vibrations; 4 is an electrostrictive vibrator made of lead zirconate titanate porcelain; carbon brush 5
and is received via the shaft 6 and converted into mechanical vibrations, that is, ultrasonic vibrations. Reference numeral 7 denotes a stepped horn with a large diameter vibrator 4 attached to its base end, which mechanically amplifies the vibration displacement of several μm at the tip of the vibrator 4 to about 30 to 50 μm. The horn 7 is supported together with the vibrator 4 by two bearings 8' spaced apart so that its axis coincides with the feeding direction of the table 2, and in addition to being vibrated by the ultrasonic waves, the horn 7 is also moved by a DC motor 9 to a shaft coupling 10. It is rotated via the shaft 6 in a range of 0 to 5000 rpm11. 11' is the vibrator 4. Carbon brush5. This is a casing in which a bearing 8' etc. are installed inside and a DC motor 9 is attached to one end of the outside. Reference numeral 12 denotes a diamond grindstone (hereinafter simply referred to as the grindstone) attached to the tip of the horn 7 with a screw having a diameter approximately the same as that of the tip or with an integral sintered structure. It receives the rotation of the horn 7 and the ultrasonic vibration of the vibrator 4 via the horn 7. In this case, in order to increase the propagation efficiency of ultrasonic vibrations to the grinding wheel 12, the natural frequencies of the horn 7 and the vibrator 4, to which the grinding wheel 12 is attached, are made to match, and the horn 7 and the grinding wheel 12 are normally arranged to have half-wavelength resonance. The total length is selected.

13′は加工時に切りくずの排出を容易にするためにホ
ーン7の外周に取り付けたウォータジャケットで、砥石
12に対してホーン7に設けた中空部を介して研削液と
して水道水を供給する。14は加工中に被加工物1の加
工部に水を供給するノズルである。
Reference numeral 13' denotes a water jacket attached to the outer periphery of the horn 7 to facilitate the discharge of chips during machining, and supplies tap water as a grinding fluid to the grindstone 12 through a hollow portion provided in the horn 7. 14 is a nozzle that supplies water to the processing section of the workpiece 1 during processing.

前記超音波加工装置においては前記文献に記載されてい
るように、加工時における砥石の回転のみによる通常の
ダイヤモンド研削と比較して除去速度および食込み速度
が非常に高く、約10倍もしくはそれ以上の値を示し高
能率の加工を行うことができる。しかし、前記装置にお
いては、被加工物1およびテーブル2の送りの方向とホ
ーン7゜振動子4等の軸心とが同一方向になるように構
成され、そして砥石12がホーン7の先端に取り付けら
れているから、砥石12に与えられる有効な超音波振動
はホーン7の先端部またはその先端とほぼ同径の砥石1
2の大きさの範囲に限定される。このため被加工物1の
加工が穴あけ加工やエンドミル加工のような前記砥石1
2の大きさの範囲で可能な局部的な加工の場合は前記し
た高能率加工が行えるが、切断加工のようにできるだけ
大径でしかも薄刃の砥石を使用して加工する場合は、砥
石の剛性が不足して超音波振動が刃先となる砥石の外周
部に伝わりに<<、加工に必要な超音波振動と回転運動
との複合作用が得られない、これは細溝加工1面研削の
場合も同様で、これらの加工を前記従来の装置で行おう
とすれば砥石12の移動範囲が大きくなり加工能率およ
び加工精度が低下する。
As described in the above-mentioned literature, the ultrasonic machining device has a very high removal rate and penetration rate, about 10 times or more, compared to normal diamond grinding, which only uses the rotation of the grindstone during machining. value and can perform highly efficient machining. However, in the above device, the direction of feed of the workpiece 1 and the table 2 is configured so that the axis of the horn 7° vibrator 4, etc. is in the same direction, and the grinding wheel 12 is attached to the tip of the horn 7. Therefore, the effective ultrasonic vibration given to the grinding wheel 12 is caused by the tip of the horn 7 or the grinding wheel 1 having approximately the same diameter as the tip of the horn 7.
limited to a size range of 2. Therefore, when processing the workpiece 1 with the grinding wheel 1, such as drilling or end milling,
In the case of local machining that is possible within the size range of 2, the above-mentioned high efficiency machining can be achieved, but when machining is performed using a grindstone with as large a diameter as possible and a thin blade, such as cutting, the rigidity of the whetstone If the ultrasonic vibrations are insufficient and the ultrasonic vibrations are transmitted to the outer periphery of the grindstone, which becomes the cutting edge, the combined effect of ultrasonic vibrations and rotational motion necessary for machining cannot be obtained. Similarly, if these processes were to be performed using the conventional apparatus, the range of movement of the grindstone 12 would increase, resulting in a decrease in processing efficiency and processing accuracy.

またホーン7は振動子4と半波長共振をさせるために寸
法制限を受け、さらにカーボンブラシ5を使用するため
その消耗が激しく、交換および補修作業が作業員の大き
な負担となっているなど多くの問題点を有している。
In addition, the horn 7 is subject to size restrictions in order to achieve half-wavelength resonance with the vibrator 4, and since the carbon brush 5 is used, it is subject to significant wear and tear, and replacement and repair work is a heavy burden on workers. There are problems.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前記の如〈従来の超音波加工装置は、被加工物に対する
高能率加工の種類および範囲が穴あけおよびエンドミル
加工のような局部的で狭範囲の加工に限定され、その他
の加工においては能率および精度とも低下する問題点の
ほか、ホーンの寸法制限、カーボンブラシの保守作業の
負担増加等の問題点を有していた。
As mentioned above, with conventional ultrasonic machining equipment, the type and scope of high-efficiency machining of workpieces is limited to local and narrow-range machining such as drilling and end milling, and efficiency and accuracy are limited in other machining. In addition to the problem of reduced performance, there were other problems such as limited horn dimensions and increased maintenance work for carbon brushes.

本発明は前記従来技術の問題点を解消するものであって
、被加工物に対する高能率加工の種類および範囲を拡大
できるとともにメンテナンスの容易な超音波加工装置を
提供することを目的とする。
The present invention solves the problems of the prior art, and aims to provide an ultrasonic machining device that can expand the types and scope of high-efficiency machining of workpieces and is easy to maintain.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、被加工物を砥石の回動と超音波振動との複合
作用により加工する超音波加工装置において、砥石を回
動する軸に取付は該軸をモータにより駆動する砥石の回
動装置と、先端側に被加工物を付着するテーブルを固設
し基端側に超音波発振器に接続された振動子を装着した
ホーンからなる超音波振動装置とを、被加工物を加工す
る際組み合わせて使用可能に分離して各独立に設けたこ
とを特徴とする超音波加工装置としたことにより、硬脆
材料の被加工物に対する高能率加工の種類および範囲を
拡大できるとともに、メンテナンスも容易にできるよう
にしたものである。
The present invention relates to an ultrasonic machining device that processes a workpiece by a combined effect of rotation of a grindstone and ultrasonic vibration, and a grindstone rotation device that is attached to a shaft that rotates the grindstone and drives the shaft by a motor. and an ultrasonic vibrating device consisting of a horn with a fixed table on the distal end to which the workpiece is attached and a vibrator connected to an ultrasonic oscillator on the proximal end when processing the workpiece. The ultrasonic machining equipment is characterized by being separated and installed independently so that it can be used independently, making it possible to expand the types and range of high-efficiency machining for workpieces made of hard and brittle materials, and also simplify maintenance. It has been made possible.

〔作 用〕[For production]

軸受に回動自在に支持されている軸を、該軸を回動させ
るモータに連結し、該軸に取り付けられている砥石とと
もに回動させる。この砥石、軸。
A shaft rotatably supported by a bearing is connected to a motor that rotates the shaft, and the shaft is rotated together with a grindstone attached to the shaft. This whetstone, shaft.

モータ等は組み立てられて独立の砥石の回動装置となっ
ている。一方、砥石の回動装置とは分離して、ホーンの
先端側に加工される被加工物を止着するテーブルを固着
し、ホーンの基端側には振動子を装着し該振動子に超音
波発振器を接続した独立の超音波振動装置を設ける。砥
石の回動装置と被加工物の超音波振動装置とをそれぞれ
独立した装置にしたことにより、砥石は回動をまた被加
工物は超音波振動を各単独に与えられることになる。
The motor and other components are assembled to form an independent grinding wheel rotation device. On the other hand, a table that fixes the workpiece to be machined is fixed to the tip side of the horn, separate from the rotating device of the grinding wheel, and a vibrator is attached to the base end of the horn, and the vibrator is superimposed on the table. An independent ultrasonic vibration device connected to a sonic oscillator is provided. By making the rotating device for the grindstone and the ultrasonic vibration device for the workpiece independent of each other, the grindstone can be rotated and the workpiece can be individually subjected to ultrasonic vibration.

このため砥石に対する超音波振動の伝達効率を一切考慮
する必要がなくなり、従来の砥石のほか大径でしかも薄
厚の剛゛性の低い砥石の使用も可能となる。前記両装置
はたがいに分離した独立の装置であるから被加工物の加
工に際して両者の配置を任意に組み合わせて使用可能に
なり、また加工時には被加工物の加工部に対して砥石の
回動と被加工物の超音波振動とを複合して作用させられ
るから、加工の種類や加工範囲に応じて最適の砥石およ
び両装置の組み合せの配置を選択することにより、加工
を高能率化し、しかもその幅を拡大することができる。
Therefore, there is no need to consider the transmission efficiency of ultrasonic vibrations to the grindstone at all, and in addition to conventional grindstones, it is also possible to use a grindstone with a large diameter, thin thickness, and low rigidity. Since both of the above-mentioned devices are separate and independent devices, they can be used in any combination when processing the workpiece, and during processing, the rotation of the grinding wheel and the Since the ultrasonic vibrations of the workpiece can be applied in combination, machining can be made more efficient by selecting the optimal grinding wheel and arrangement of the combination of both devices according to the type of machining and the scope of machining. Width can be expanded.

〔実施例〕〔Example〕

本発明の実施例を第1図ないし第3図を参照して説明す
る。第1図は第1の実施例の超音波加工装置の全体図で
、細溝または切断加工の例を示す。
Embodiments of the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 is an overall view of the ultrasonic machining apparatus of the first embodiment, and shows an example of thin groove or cutting machining.

第2図は第1図と同じく第2の実施例の装置の全体図で
、面研削加工の例を示す。第3図は第3の実施例の装置
の全体図で、穴加工の場合を示す。
FIG. 2 is an overall view of the apparatus of the second embodiment, similar to FIG. 1, and shows an example of surface grinding. FIG. 3 is an overall view of the apparatus of the third embodiment, showing the case of hole drilling.

図において第4図と同符号のものは同じものまたは同機
能のものを示す。15は先端に砥石16を取り付けた軸
で、反砥石側かケーシング11内に挿入されており、ケ
ーシング11内で軸受8で回動可能に支持され、軸接手
10を介してモータ9に連結されている。13は軸15
の外周に取り付けたウォータジャケットで、砥石16に
対して軸15に設けた中空部を経て研削液の水を供給す
る。上記の砥石16は大径で厚さの薄い切断加工用のも
のが装着されている。前記砥石16を取り付けた軸15
および軸15を回動させるモータ9等は一体に組み立て
られて独立の砥石16の回動装置R1を構成している。
In the figure, the same reference numerals as in FIG. 4 indicate the same parts or parts with the same function. Reference numeral 15 denotes a shaft with a grindstone 16 attached to its tip, which is inserted into the casing 11 on the side opposite to the grindstone, is rotatably supported within the casing 11 by a bearing 8, and is connected to the motor 9 via a shaft joint 10. ing. 13 is axis 15
A water jacket attached to the outer periphery of the grinding fluid is supplied to the grindstone 16 through a hollow part provided in the shaft 15. The above-mentioned grindstone 16 has a large diameter and a thin thickness for cutting. The shaft 15 to which the grindstone 16 is attached
The motor 9 and the like that rotate the shaft 15 are assembled together to constitute an independent rotating device R1 for the grindstone 16.

17は先端側にテーブル2を固着し基端側に振動子4を
装着した段付き形のホーンで、装着した振動子4が超音
波発振器3により発生させられた微小振幅の超音波振動
を実用的な30〜50μm程度に機械的に増幅する。こ
の場合振動子4およびホーン17は回転しないから振動
子4と超音波発振器3との接続はカーボンブラシ5を介
することなく直接接続することができ、またテーブル2
に止着される被加工物1にはホーン17による超音波振
動のみが伝搬される。ホーン17.テーブル2.振動子
4および超音波発振器3は、前記砥石16の回動装置と
は分離した独立の超音波振動装置Uを構成している。
17 is a stepped horn with a table 2 fixed to the distal end and a vibrator 4 attached to the proximal end. It is mechanically amplified to approximately 30 to 50 μm. In this case, since the vibrator 4 and the horn 17 do not rotate, the vibrator 4 and the ultrasonic oscillator 3 can be directly connected without using the carbon brush 5, and the table 2
Only the ultrasonic vibrations from the horn 17 are propagated to the workpiece 1 fixed to the workpiece 1 . Horn 17. Table 2. The vibrator 4 and the ultrasonic oscillator 3 constitute an independent ultrasonic vibrating device U that is separate from the rotating device for the grindstone 16.

かかる構成により砥石16は回動のみさせられ、−力抜
加工物lは超音波振動のみさせられることになる。
With this configuration, the grindstone 16 is only rotated, and the stress-relieving workpiece 1 is only subjected to ultrasonic vibration.

本実施例は被加工物1の細溝加工または切断加工を能率
良く行うもので、そのため砥石16の回動装置R1と被
加工物1の超音波振動装置Uを直交させて配置する0本
配置により被加工物1およびテーブル2の振動方向およ
び送りの方向は、軸15゜砥石16等の回動軸と直角方
向になる。そして加工前は砥石16の回動と被加工物l
の超音波振動は各単独の動作をしているが、加工時は被
加工物1の加工部に砥石16の回動と被加工物lの超音
波振動とが複合して作用するから、従来のように砥石1
6を介して被加工物lに超音波振動を伝搬する必要がな
く大径で薄刃の剛性の低い砥石16を使用して゛も高能
率の加工を行うことができる。また砥石16とホーン1
7を分離した構成にしたから、従来のように砥石16を
取り付けたホーン17と振動子4とを半波長共振させる
必要がなくなり、砥石16を取り付けた軸15の長さを
任意に選定することができて加工範囲を広くすることが
可能である。さらにカーボンブラシが不要になり構造が
簡素化されたたためメンテナンス上の作業員の負担を軽
減する等の効果を有する。
This embodiment efficiently performs fine groove machining or cutting of the workpiece 1, and therefore has a zero-width arrangement in which the rotation device R1 of the grindstone 16 and the ultrasonic vibration device U of the workpiece 1 are arranged orthogonally. Therefore, the vibration direction and feeding direction of the workpiece 1 and the table 2 are perpendicular to the rotational axis of the grindstone 16 and the like at an angle of 15 degrees. Before processing, the rotation of the grindstone 16 and the workpiece l
The ultrasonic vibrations in the workpiece 1 act independently, but during machining, the rotation of the grindstone 16 and the ultrasonic vibration of the workpiece 1 act in combination on the machining part of the workpiece 1. Whetstone 1
There is no need to propagate ultrasonic vibrations to the workpiece l through the grinding wheel 6, and highly efficient machining can be performed using the grindstone 16 with a large diameter, thin blade, and low rigidity. Also, grindstone 16 and horn 1
7 is separated, it is no longer necessary to cause the horn 17 to which the grindstone 16 is attached and the vibrator 4 to resonate at a half wavelength, as in the conventional case, and the length of the shaft 15 to which the grindstone 16 is attached can be arbitrarily selected. This makes it possible to widen the processing range. Furthermore, since the carbon brush is no longer necessary and the structure is simplified, it has the effect of reducing the burden on maintenance workers.

第2図に示す第2の実施例は、前記第1の実施例の砥石
16に変えて面研削用の砥石18を使用する面研削加工
の場合を示す。R2は砥石18を装着した回動装置であ
る0図は被加工物1の側面の研削加工の例を示したが、
上面の加工も同様に可能で、砥石18を使用するほかは
前記第1の実施例の場合と構成1作用、効果等において
同様である。
A second embodiment shown in FIG. 2 shows a case of surface grinding in which a grindstone 18 for surface grinding is used in place of the grindstone 16 of the first embodiment. R2 is a rotating device equipped with a grindstone 18. Figure 0 shows an example of grinding the side surface of the workpiece 1.
Processing of the upper surface is also possible in the same way, and except for the use of the grindstone 18, the operation, effects, etc. of Structure 1 are the same as in the case of the first embodiment.

第3図に示す第3の実施例は、砥石19の回動装置R5
と被加工物1の超音波振動装置Uとの軸心を同方向にし
て配置した穴加工に適する例である。
The third embodiment shown in FIG. 3 is a rotating device R5 for the grindstone 19.
This is an example suitable for hole machining in which the axes of the ultrasonic vibrator U of the workpiece 1 and the ultrasonic vibrator U of the workpiece 1 are arranged in the same direction.

この場合の砥石19も前記第1および第2の実施例と同
様に回動運動のみさせられるから、軸15とともにその
形状9寸法を任意に選定することができ、それに伴い加
工する穴の径および深さの範囲を拡大することができる
。本実施例においても使用する砥石19および両装置の
組み合わせの配置のほかは前記第1および第2の実施例
の場合と構成9作用、効果等において同様である。
Since the grinding wheel 19 in this case is also made to rotate only as in the first and second embodiments, the shape and dimensions of the shaft 15 can be arbitrarily selected, and the diameter and diameter of the hole to be machined can be selected accordingly. The depth range can be expanded. This embodiment also has the same structure 9 as in the first and second embodiments, except for the arrangement of the grindstone 19 used and the combination of both devices.

前記各実施例における説明のように、加工の種類および
範囲に応じて使用する砥石および砥石の回動装置Rと被
加工物の超音波振動装置Uとの組み合わせの配置を選択
することにより、加工の能率だけでなく精度をも向上さ
せることができる効果を有する。
As explained in each of the above embodiments, processing can be carried out by selecting the arrangement of the grindstone to be used and the combination of the grindstone rotation device R and the ultrasonic vibration device U for the workpiece depending on the type and range of processing. This has the effect of improving not only the efficiency but also the accuracy.

〔発明の効果〕〔Effect of the invention〕

以上説明した如(、本発明に係わる超音波加工装置は、
砥石を取り付けた軸および該軸を回動させるモータ等を
一体に組み立てた砥石の回動装置と、ホーン、テーブル
、振動子および超音波発振器とにより構成される超音波
振動装置とを分離して各独立に設け、被加工物の加工に
際して両装置を組み合わせて使用可能に構成したから、
硬脆材料の被加工物に対する高能率加工の種類および範
囲を拡大できるとともにメンテナンスも容昌になる実用
上の顕著な効果を有する。
As explained above, the ultrasonic processing apparatus according to the present invention is
A grindstone rotation device, which is an integral assembly of a shaft to which a grindstone is attached and a motor that rotates the shaft, and an ultrasonic vibration device, which is composed of a horn, a table, a vibrator, and an ultrasonic oscillator, are separated. Because each device is installed independently and can be used in combination when processing workpieces,
This has a significant practical effect in that it is possible to expand the types and scope of high-efficiency machining of workpieces made of hard and brittle materials, and it also makes maintenance easier.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係わる超音波加工装置の第1の実施例
の全体図、第2図は同じ(第2の実施例の全体図、第3
図は同じく第3の実施例の全体図である。 第4図は従来の超音波加工装置の一例を示す図である。 特許出願人  日立建機株式会社 代理人 弁理士  秋 本  正 実 (外1名) 第 プ ?0 s2V!J L′i 3   j、、− 惇 4 図
FIG. 1 is an overall view of the first embodiment of the ultrasonic processing apparatus according to the present invention, and FIG. 2 is the same (overall view of the second embodiment, third embodiment is the same).
The figure is also an overall view of the third embodiment. FIG. 4 is a diagram showing an example of a conventional ultrasonic processing device. Patent applicant Hitachi Construction Machinery Co., Ltd. Agent Patent attorney Masami Akimoto (1 other person) No. 1? 0 s2V! J L'i 3 j,, - Atun 4 Fig.

Claims (1)

【特許請求の範囲】[Claims] 1、被加工物を砥石の回動と超音波振動との複合作用に
より加工する超音波加工装置において、砥石を回動する
軸に取付け該軸をモータにより駆動する砥石の回動装置
と、先端側に被加工物を止着するテーブルを固設し基端
側に超音波発振器に接続された振動子を装着したホーン
からなる超音波振動装置とを、被加工物を加工する際組
み合わせて使用可能に分離して各独立に設けたことを特
徴とする超音波加工装置。
1. In an ultrasonic processing device that processes a workpiece through the combined action of rotation of a grindstone and ultrasonic vibration, a rotation device for the grindstone that attaches the grindstone to a rotating shaft and drives the shaft by a motor, and a tip. When processing a workpiece, it is used in combination with an ultrasonic vibration device consisting of a horn with a table fixed to the side to which the workpiece is fixed and a vibrator connected to an ultrasonic oscillator attached to the proximal end. An ultrasonic processing device characterized in that each device can be separated and provided independently.
JP11582487A 1987-05-14 1987-05-14 Supersonic wave working device Pending JPS63283848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11582487A JPS63283848A (en) 1987-05-14 1987-05-14 Supersonic wave working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11582487A JPS63283848A (en) 1987-05-14 1987-05-14 Supersonic wave working device

Publications (1)

Publication Number Publication Date
JPS63283848A true JPS63283848A (en) 1988-11-21

Family

ID=14672017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11582487A Pending JPS63283848A (en) 1987-05-14 1987-05-14 Supersonic wave working device

Country Status (1)

Country Link
JP (1) JPS63283848A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174180A (en) * 2014-03-14 2015-10-05 株式会社東京精密 ultrasonic chamfering machine
JP2016209998A (en) * 2016-09-16 2016-12-15 株式会社東京精密 Dicing device and dicing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015174180A (en) * 2014-03-14 2015-10-05 株式会社東京精密 ultrasonic chamfering machine
JP2016209998A (en) * 2016-09-16 2016-12-15 株式会社東京精密 Dicing device and dicing method

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