JPH01102736U - - Google Patents
Info
- Publication number
- JPH01102736U JPH01102736U JP19840687U JP19840687U JPH01102736U JP H01102736 U JPH01102736 U JP H01102736U JP 19840687 U JP19840687 U JP 19840687U JP 19840687 U JP19840687 U JP 19840687U JP H01102736 U JPH01102736 U JP H01102736U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- piezoelectric resonator
- pressure sensor
- strain
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19840687U JPH01102736U ( ) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19840687U JPH01102736U ( ) | 1987-12-25 | 1987-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01102736U true JPH01102736U ( ) | 1989-07-11 |
Family
ID=31488918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19840687U Pending JPH01102736U ( ) | 1987-12-25 | 1987-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01102736U ( ) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327922A (ja) * | 2006-06-09 | 2007-12-20 | Epson Toyocom Corp | 圧力センサ用ダイヤフラム、及び圧力センサ |
JP2008070241A (ja) * | 2006-09-14 | 2008-03-27 | Epson Toyocom Corp | 圧力センサ、及びその製造方法 |
JP2010019826A (ja) * | 2008-03-25 | 2010-01-28 | Epson Toyocom Corp | 圧力センサ |
CN101819079A (zh) * | 2009-02-26 | 2010-09-01 | 爱普生拓优科梦株式会社 | 压力传感器元件以及压力传感器 |
WO2012063477A1 (ja) * | 2010-11-10 | 2012-05-18 | パナソニック株式会社 | 圧力センサ |
-
1987
- 1987-12-25 JP JP19840687U patent/JPH01102736U/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327922A (ja) * | 2006-06-09 | 2007-12-20 | Epson Toyocom Corp | 圧力センサ用ダイヤフラム、及び圧力センサ |
JP2008070241A (ja) * | 2006-09-14 | 2008-03-27 | Epson Toyocom Corp | 圧力センサ、及びその製造方法 |
JP2010019826A (ja) * | 2008-03-25 | 2010-01-28 | Epson Toyocom Corp | 圧力センサ |
CN101819079A (zh) * | 2009-02-26 | 2010-09-01 | 爱普生拓优科梦株式会社 | 压力传感器元件以及压力传感器 |
JP2010197298A (ja) * | 2009-02-26 | 2010-09-09 | Epson Toyocom Corp | 圧力センサー素子、圧力センサー |
WO2012063477A1 (ja) * | 2010-11-10 | 2012-05-18 | パナソニック株式会社 | 圧力センサ |