JPH01102736U

JPH01102736U -

Info

Publication number: JPH01102736U
Application number: JP19840687U
Authority: JP
Priority date: 1987-12-25
Filing date: 1987-12-25
Publication date: 1989-07-11

Description

[Brief explanation of the drawing]

第１図は本考案のセンサ部を示す斜視構造図、
第２図及び第３図は従来より用いられている圧力
センサを示す図、第４図は圧力が加わつた際のダ
イヤフラム及び振動子の状態を示す図、第５図は
本考案の圧力センサを示す図、第６図乃至第８図
は本考案の圧力センサの実施例を示す図である。９……圧電材或はそれに用いられる圧電共振子
と線膨張係数のほぼ等しい材料を用いたダイヤフ
ラム、１０……双音叉型圧電共振子。 FIG. 1 is a perspective structural diagram showing the sensor section of the present invention;
Figures 2 and 3 are diagrams showing a conventionally used pressure sensor, Figure 4 is a diagram showing the state of the diaphragm and vibrator when pressure is applied, and Figure 5 is a diagram showing the pressure sensor of the present invention. The figures shown in FIGS. 6 to 8 are views showing embodiments of the pressure sensor of the present invention. 9...A diaphragm using a piezoelectric material or a material having a coefficient of linear expansion substantially equal to that of the piezoelectric resonator used therein; 10...A double tuning fork type piezoelectric resonator.

Claims

[Scope of utility model registration request]

In a pressure sensor that detects the pressure applied to the diaphragm by converting the strain of the diaphragm into the strain of a piezoelectric resonator fixed to the surface of the diaphragm, the diaphragm may be made of the same material as the piezoelectric resonator used therein. A pressure sensor characterized in that the diaphragm is made of a material having substantially the same coefficient of linear expansion as the piezoelectric resonator, and a twin tuning fork piezoelectric resonator is fixed to the surface of the diaphragm.