JPH01102160U - - Google Patents

Info

Publication number
JPH01102160U
JPH01102160U JP19892387U JP19892387U JPH01102160U JP H01102160 U JPH01102160 U JP H01102160U JP 19892387 U JP19892387 U JP 19892387U JP 19892387 U JP19892387 U JP 19892387U JP H01102160 U JPH01102160 U JP H01102160U
Authority
JP
Japan
Prior art keywords
dopant
charging
charging chamber
crucible
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19892387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532540Y2 (sv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19892387U priority Critical patent/JPH0532540Y2/ja
Publication of JPH01102160U publication Critical patent/JPH01102160U/ja
Application granted granted Critical
Publication of JPH0532540Y2 publication Critical patent/JPH0532540Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP19892387U 1987-12-28 1987-12-28 Expired - Lifetime JPH0532540Y2 (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19892387U JPH0532540Y2 (sv) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19892387U JPH0532540Y2 (sv) 1987-12-28 1987-12-28

Publications (2)

Publication Number Publication Date
JPH01102160U true JPH01102160U (sv) 1989-07-10
JPH0532540Y2 JPH0532540Y2 (sv) 1993-08-19

Family

ID=31489402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19892387U Expired - Lifetime JPH0532540Y2 (sv) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH0532540Y2 (sv)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010163322A (ja) * 2009-01-16 2010-07-29 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 シリコン単結晶の製造方法
JP2012171822A (ja) * 2011-02-21 2012-09-10 Shin Etsu Handotai Co Ltd 炭素ドープシリコン単結晶の製造方法
US8535439B2 (en) 2009-01-14 2013-09-17 Sumco Techxiv Corporation Manufacturing method for silicon single crystal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8535439B2 (en) 2009-01-14 2013-09-17 Sumco Techxiv Corporation Manufacturing method for silicon single crystal
JP2010163322A (ja) * 2009-01-16 2010-07-29 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 シリコン単結晶の製造方法
JP2012171822A (ja) * 2011-02-21 2012-09-10 Shin Etsu Handotai Co Ltd 炭素ドープシリコン単結晶の製造方法

Also Published As

Publication number Publication date
JPH0532540Y2 (sv) 1993-08-19

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