JPH01102160U - - Google Patents

Info

Publication number
JPH01102160U
JPH01102160U JP19892387U JP19892387U JPH01102160U JP H01102160 U JPH01102160 U JP H01102160U JP 19892387 U JP19892387 U JP 19892387U JP 19892387 U JP19892387 U JP 19892387U JP H01102160 U JPH01102160 U JP H01102160U
Authority
JP
Japan
Prior art keywords
dopant
charging
charging chamber
crucible
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19892387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19892387U priority Critical patent/JPH0532540Y2/ja
Publication of JPH01102160U publication Critical patent/JPH01102160U/ja
Application granted granted Critical
Publication of JPH0532540Y2 publication Critical patent/JPH0532540Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP19892387U 1987-12-28 1987-12-28 Expired - Lifetime JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19892387U JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19892387U JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-28 1987-12-28

Publications (2)

Publication Number Publication Date
JPH01102160U true JPH01102160U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-07-10
JPH0532540Y2 JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-19

Family

ID=31489402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19892387U Expired - Lifetime JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010163322A (ja) * 2009-01-16 2010-07-29 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 シリコン単結晶の製造方法
JP2012171822A (ja) * 2011-02-21 2012-09-10 Shin Etsu Handotai Co Ltd 炭素ドープシリコン単結晶の製造方法
US8535439B2 (en) 2009-01-14 2013-09-17 Sumco Techxiv Corporation Manufacturing method for silicon single crystal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8535439B2 (en) 2009-01-14 2013-09-17 Sumco Techxiv Corporation Manufacturing method for silicon single crystal
JP2010163322A (ja) * 2009-01-16 2010-07-29 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 シリコン単結晶の製造方法
JP2012171822A (ja) * 2011-02-21 2012-09-10 Shin Etsu Handotai Co Ltd 炭素ドープシリコン単結晶の製造方法

Also Published As

Publication number Publication date
JPH0532540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-19

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