JPH01100442A - Evaluation of cleaning effect - Google Patents
Evaluation of cleaning effectInfo
- Publication number
- JPH01100442A JPH01100442A JP25717987A JP25717987A JPH01100442A JP H01100442 A JPH01100442 A JP H01100442A JP 25717987 A JP25717987 A JP 25717987A JP 25717987 A JP25717987 A JP 25717987A JP H01100442 A JPH01100442 A JP H01100442A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- carriers
- ultraviolet rays
- cleaned
- spherical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 25
- 230000000694 effects Effects 0.000 title claims abstract description 9
- 238000011156 evaluation Methods 0.000 title claims abstract description 7
- 239000000969 carrier Substances 0.000 claims abstract description 14
- 239000003795 chemical substances by application Substances 0.000 claims abstract 4
- 239000000356 contaminant Substances 0.000 claims description 8
- 239000003344 environmental pollutant Substances 0.000 abstract 3
- 231100000719 pollutant Toxicity 0.000 abstract 3
- 238000000034 method Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- CHRJZRDFSQHIFI-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;styrene Chemical compound C=CC1=CC=CC=C1.C=CC1=CC=CC=C1C=C CHRJZRDFSQHIFI-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000021 stimulant Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は洗浄効果の評価方法に係り、特に洗浄で落しき
れなかった異物と異物計数作業中に伺らかの原因で汚染
する異物と区別するのに好適な洗浄効果の評価方法に関
する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for evaluating cleaning effectiveness, and in particular, to distinguish foreign matter that cannot be completely removed by cleaning from foreign matter that is contaminated due to a specific cause during the foreign matter counting operation. This invention relates to a cleaning effect evaluation method suitable for cleaning.
従来、洗浄効果の評価方法については実務表面技術、第
３２巻、第８号（１９８５年）第１６項から第２０項に
おいて論じられている。Conventionally, methods for evaluating cleaning effectiveness have been discussed in Jitsugyo Surface Technology, Vol. 32, No. 8 (1985), Paragraphs 16 to 20.
上記従来の評価方法は、洗浄で落しきれなかった異物と
異物針側作業中に何らかの原因で汚染する異物と区別す
ることができず、正しい評価ができなかった。The conventional evaluation method described above cannot distinguish between foreign matter that cannot be completely removed by cleaning and foreign matter that is contaminated for some reason during work on the needle side, and cannot perform accurate evaluation.
本発明の目的は、洗浄効果の評価に使う異物と作業中に
汚染する異物とを区別することにある。An object of the present invention is to distinguish between foreign matter used for evaluating cleaning effectiveness and foreign matter that contaminates during work.
上記目−的は、多孔質の球状担体に叶い党則を吸着させ
た球状担体な汚染物として被洗浄体に汚染させ、紫外線
で発光する球状担体の数を洗浄前後において計数するこ
とにより、達成される。The above objective can be achieved by contaminating the object to be cleaned as a spherical contaminant with particles adsorbed onto a porous spherical carrier, and counting the number of spherical carriers that emit light with ultraviolet light before and after cleaning. be done.
多孔質の担体は、表面に有機物が吸着しやすくけい党則
を吸着した担体は紫外線照射することにより叶い光を発
光する。このため、この担体な汚染物として被洗浄体を
汚染させ洗浄前後の異物数を紫外線を照射しながら計数
することにより、計数作業中に何らかの原因で被洗浄体
に汚染された異物と区別することができる。また、多孔
質の担体な球状にすることにより、計数時に誤認するこ
とかない。Porous carriers tend to absorb organic substances on their surfaces, and carriers that have adsorbed phosphorus particles emit light when irradiated with ultraviolet rays. Therefore, by contaminating the object to be cleaned as carrier contaminants and counting the number of foreign objects before and after cleaning while irradiating ultraviolet rays, it is possible to distinguish them from foreign objects that have contaminated the object to be cleaned for some reason during the counting process. Can be done. In addition, by making the carrier spherical and porous, there will be no misidentification during counting.
以下、本発明の一実施例を図面を用いて説明する。第１
図は洗浄効果の評価を行う方法を示す。An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure shows how to evaluate cleaning effectiveness.
第２図は叶い覚剤を表面の多孔質に吸着させた担体な示
し、第３図は全多孔１に吸着させた担体を示す・
先ず、第１図において、けい覚剤を吸着させた球状担体
１を汚染物として被洗浄体２に汚染させ。Figure 2 shows a carrier with a stimulant adsorbed to its porous surface, and Figure 3 shows a carrier with all pores adsorbed. The carrier 1 is used as a contaminant to contaminate the object 2 to be cleaned.
紫外線を被洗浄体２に照射する。被洗浄体２上の球状担
体１は紫外線を吸収してけい光を発光する。The object to be cleaned 2 is irradiated with ultraviolet light. The spherical carrier 1 on the object 2 to be cleaned absorbs ultraviolet rays and emits fluorescent light.
球状担体１から発大したけい光は検出器３で検出し計数
装％４で計数する。次に′、たとへば超音波洗浄を行い
洗浄後の被洗浄体２上の担体１を前記と同様に紫外線を
照射し洗浄でとりきれなかった担体１を計数する。この
様に、叶い覚剤を吸着させた球状担体を汚染物として洗
浄前後の数を計数することにより洗浄評価が行える。The fluorescent light emitted from the spherical carrier 1 is detected by a detector 3 and counted by a counting device %4. Next, for example, ultrasonic cleaning is performed, and the carriers 1 on the cleaned object 2 are irradiated with ultraviolet rays in the same manner as described above, and the carriers 1 that cannot be removed by the cleaning are counted. In this way, cleaning evaluation can be performed by counting the number of spherical carriers adsorbed with stimulants as contaminants before and after cleaning.
汚染物は第２図の様にガラスピース表面に数１０ＯＡの
シリカ系の多孔貫層を付けたものや第６図の様な全多孔
質の担体にげい覚剤を吸着したものを用いる。全多孔質
の担体としてはシリカゲル系やポーラスポリマー、Ｎ；
ｚ−ｋｆ：、スチレンジビニルベンゼン共重合させた立
体網目構造のものなどが適している。As the contaminant, a glass piece with several tens of OA of silica-based porous layers attached to the surface as shown in FIG. 2, or a completely porous carrier with a stimulant adsorbed as shown in FIG. 6 are used. As a completely porous carrier, silica gel type, porous polymer, N;
Suitable are z-kf: and those having a three-dimensional network structure obtained by copolymerizing styrene divinylbenzene.
以上、叶い覚剤を多孔質の球状担体に吸着させたもの汚
染物として上記方法で洗浄効果の評価を行うことにより
異物計数作業中に汚染する異物と区別できる効果がある
。As mentioned above, by evaluating the cleaning effect using the above method as a contaminant by adsorbing the stimulant on a porous spherical carrier, it is possible to distinguish it from foreign matter that contaminates during the foreign matter counting operation.
本発明によれば、異物計数中に何らかの原因で外部から
汚染した異物と洗浄で落しきれなかった異物と区別でき
るので正確な洗浄効果の評価ができる。According to the present invention, since it is possible to distinguish between foreign matter that has been contaminated from the outside for some reason and foreign matter that cannot be completely removed by cleaning during foreign matter counting, it is possible to accurately evaluate the cleaning effect.
に吸着させた模擬汚染物を示す。
１・・・球状担体、２・・・被洗浄体、３・・・検出器
、４・・・計数装置。Shows simulated contaminants adsorbed on DESCRIPTION OF SYMBOLS 1... Spherical carrier, 2... Body to be cleaned, 3... Detector, 4... Counting device.
Claims (1)
けい光剤を吸着させた核球状担体を汚染物として被染浄
体に汚染させ、紫外線で発光する核球状担体の数を洗浄
前後において計数することを特徴とする洗浄効果の評価
方法。1. A nuclear spherical carrier made of a porous spherical carrier adsorbed with a fluorescent agent that emits fluorescence when exposed to ultraviolet rays is used as a contaminant to contaminate a purified body, and the number of nuclear spherical carriers that emit light under ultraviolet rays is determined before and after cleaning. A cleaning effect evaluation method characterized by counting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25717987A JPH01100442A (en) | 1987-10-14 | 1987-10-14 | Evaluation of cleaning effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25717987A JPH01100442A (en) | 1987-10-14 | 1987-10-14 | Evaluation of cleaning effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100442A true JPH01100442A (en) | 1989-04-18 |
Family
ID=17302780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25717987A Pending JPH01100442A (en) | 1987-10-14 | 1987-10-14 | Evaluation of cleaning effect |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100442A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH054468U (en) * | 1991-07-02 | 1993-01-22 | 山形日本電気株式会社 | Semiconductor wafer dehydrator |
| ES2110906A1 (en) * | 1995-08-09 | 1998-02-16 | Univ Pais Vasco | Procedure for determining efficiency in the application of anti-caking coatings. |
| US8246696B2 (en) | 2010-09-17 | 2012-08-21 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US8314057B2 (en) | 2010-09-17 | 2012-11-20 | Ecolab Usa Inc. | Laundry composition for treatment of sunscreen stains based on extended chain nonionic surfactants |
| US8580727B2 (en) | 2010-09-17 | 2013-11-12 | Ecolab Usa Inc. | Reduced caustic laundry detergents based on extended chain surfactants |
| US8697622B2 (en) | 2010-09-17 | 2014-04-15 | Ecolab Usa Inc. | Cleaning compositions and emulsions or microemulsions employing extended chain nonionic surfactants |
| US10273433B2 (en) | 2017-01-20 | 2019-04-30 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| CN113203719A (en) * | 2021-06-04 | 2021-08-03 | 河南柴油机重工有限责任公司 | Method for rapidly detecting surface cleanliness of crankshaft |
| ES2922644A1 (en) * | 2022-01-12 | 2022-09-19 | Univ Valencia Politecnica | SANITIZING COMPOSITION AND USE OF THE SAME (Machine-translation by Google Translate, not legally binding) |
| US11591546B2 (en) | 2017-01-20 | 2023-02-28 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US11873465B2 (en) | 2019-08-14 | 2024-01-16 | Ecolab Usa Inc. | Methods of cleaning and soil release of highly oil absorbing substrates employing optimized extended chain nonionic surfactants |
-
1987
- 1987-10-14 JP JP25717987A patent/JPH01100442A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH054468U (en) * | 1991-07-02 | 1993-01-22 | 山形日本電気株式会社 | Semiconductor wafer dehydrator |
| ES2110906A1 (en) * | 1995-08-09 | 1998-02-16 | Univ Pais Vasco | Procedure for determining efficiency in the application of anti-caking coatings. |
| US8697622B2 (en) | 2010-09-17 | 2014-04-15 | Ecolab Usa Inc. | Cleaning compositions and emulsions or microemulsions employing extended chain nonionic surfactants |
| US8314057B2 (en) | 2010-09-17 | 2012-11-20 | Ecolab Usa Inc. | Laundry composition for treatment of sunscreen stains based on extended chain nonionic surfactants |
| US8454709B2 (en) | 2010-09-17 | 2013-06-04 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US8580727B2 (en) | 2010-09-17 | 2013-11-12 | Ecolab Usa Inc. | Reduced caustic laundry detergents based on extended chain surfactants |
| US8246696B2 (en) | 2010-09-17 | 2012-08-21 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US8785363B2 (en) | 2010-09-17 | 2014-07-22 | Ecolab Usa Inc. | Reduced caustic laundry detergents based on extended chain surfactants |
| US10273433B2 (en) | 2017-01-20 | 2019-04-30 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US11591546B2 (en) | 2017-01-20 | 2023-02-28 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US11814604B2 (en) | 2017-01-20 | 2023-11-14 | Ecolab Usa Inc. | Cleaning compositions employing extended chain anionic surfactants |
| US11873465B2 (en) | 2019-08-14 | 2024-01-16 | Ecolab Usa Inc. | Methods of cleaning and soil release of highly oil absorbing substrates employing optimized extended chain nonionic surfactants |
| CN113203719A (en) * | 2021-06-04 | 2021-08-03 | 河南柴油机重工有限责任公司 | Method for rapidly detecting surface cleanliness of crankshaft |
| ES2922644A1 (en) * | 2022-01-12 | 2022-09-19 | Univ Valencia Politecnica | SANITIZING COMPOSITION AND USE OF THE SAME (Machine-translation by Google Translate, not legally binding) |
| WO2023135352A1 (en) * | 2022-01-12 | 2023-07-20 | Universitat Politècnica De València | Sanitising composition and use of same |
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