JP3272293B2 - Non-contact surface contamination inspection apparatus and method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact type for detecting a surface contamination site and a surface contamination density of a test object which is an object to be measured in a non-contact manner and regenerating a collecting member for collecting the contaminants. The present invention relates to a surface contamination inspection apparatus and method.

[0002]

2. Description of the Related Art In industries and research institutes dealing with radioactive or toxic substances, such as the nuclear industry, radiological medicine, radiation handling facilities, chemical or medical industry, and research institutions, detection of the presence or absence of radioactivity on the surface of an object to be measured. In particular, the problem is how to identify a surface contamination site by radioactivity and measure the amount of surface contamination with high reliability and efficiency.

Conventionally, there are a smear method and a direct survey method as methods for inspecting the state of an object surface contaminated by radioactivity.

The smear method is a method of indirectly evaluating the radioactive contamination density on the surface of an object by wiping the surface of the object to be measured with filter paper and measuring the radioactivity attached to the filter paper.

[0005] The direct survey method is a method for directly measuring the state of contamination on the surface of an object to be measured.
This is a method for directly measuring the contamination state of the object surface by measuring the amount of radiation emitted from the object surface by a radiation detector using a GM tube or a scintillator such as NaI (Tl).

[0006]

In the conventional smear method using filter paper, the filter paper is pressed against the surface of the object to be measured, and the surface contaminated area is rubbed. If the contaminant does not transfer to the filter paper, the surface contamination is measured. Can not. In addition, when the surface of the object is rubbed with filter paper, the surface contaminated site is enlarged, and even when surface contamination is confirmed, it is difficult to identify the surface contaminated site.

Further, it is necessary to install a filter paper to which contaminants are transferred on the front of the radiation detector, and to discharge or remove the filter paper from the front of the radiation detector after the radiation measurement is completed, which is troublesome. At the same time, used filter paper as secondary waste is generated. If the series of operations for handling the filter paper is mechanized, the cost of the apparatus increases.

[0008] Furthermore, the state of adhesion of contaminants to the surface of the object to be measured varies depending on the state and shape of the object surface of the non-measurement object, but also depends on how the filter paper is pressed against the object surface and the magnitude of the pressing pressure. The method of wiping the contaminants is different, and the transfer amount of the contaminants to the filter paper varies. In particular, when there is unevenness on the surface of the object to be measured and contaminants enter and adhere to the concave portions, it is difficult to transfer the contaminants to the filter paper. Therefore, the smear method may not be able to carry out the contamination inspection of the uneven surface.

[0009] On the other hand, the direct survey method can solve the problem caused by the smear method because the surface of the object to be measured can be inspected in a non-contact manner, but when the object to be measured itself emits radiation. For example, in a container such as a drum in which radioactive waste is stored, it is not possible to measure the state of contamination only on the surface of the container. The direct survey method has a problem that it is susceptible to the influence of the surrounding radiation environment level, particularly the radiation level emitted from the measured object.

[0010] The contaminants adhering to the surface of the object to be measured are
A decontamination technique using a laser (Japanese Patent Publication No. 1-45039) is disclosed as a surface treatment technique for decontamination treatment by a non-contact and dry method.

This decontamination technique scans a laser beam having a sufficient energy density to achieve heat transmission with a width substantially larger than the thickness of the oxide layer to be decontaminated on the oxide layer to be decontaminated. It is.

However, this laser decontamination technique removes not only contaminants adhering to the surface of the object, but also an oxide layer that does not take in radioactive nuclides. After the decontamination treatment, it is necessary to separately perform an oxide film forming treatment for preventing corrosion with an oxidizing agent or the like.

Further, the system is not a system for collecting the decontaminated contaminants and measuring the radiation of the contaminated contaminants. When performing a contamination inspection, the contaminants must be collected on a filter or the like. Then, the filter is measured for radiation, and a filter holding contaminants is installed on the front of the radiation detector, and after the radiation measurement, the filter must be discharged or eliminated from the front of the radiation detector. This is troublesome, and a used filter as secondary waste is generated.

Furthermore, focusing on the necessity of forming an oxide film with an oxidizing agent after the decontamination treatment of the object surface, laser decontamination capable of performing the decontamination of the object surface and the formation of the modified layer of the object to be measured at once. As a method, there is a technique disclosed in the specification and drawings of Japanese Patent Application No. 6-246054.

According to this decontamination method, after an oxide layer to be decontaminated is irradiated with a first laser beam to remove a radioactive oxide, a second laser beam is applied to the surface of the object from which the radioactive oxide has been removed. Irradiation and supply of a modifying material such as an oxidizing agent are performed to form a surface modified layer.

However, in this laser decontamination method,
It is difficult to identify a contaminated site on the object surface of the measured object, and it is not possible to detect where the object surface is locally contaminated. For this reason, even if the surface contamination of the object is local, decontamination treatment is performed on unnecessary parts other than the surface contamination part, and then oxide film formation processing is performed, and efficient and effective surface treatment is I couldn't say it. further,
For contamination inspection alone, it is not efficient to remove contaminants together with the base material by decontamination and then perform surface treatment. When collecting the decontaminated contaminants and conducting a contamination test, the time and labor involved in collecting the above-mentioned filters and the like and radiation measurement are required.
There are problems such as the generation of secondary waste.

In general, in a laser decontamination method, a surface layer of an object to be measured is peeled off by using ablation,
Alternatively, since the surface layer is removed, even a non-contaminated surface layer (a useful oxide film or coating film or a metal base material itself) is damaged, which is not preferable as a surface contamination inspection apparatus.

The present invention has been made in consideration of the above-described circumstances, and has as its object the non-contact method without damaging the base material of the inspection object or the coating film coated on the surface of the inspection object. A non-contact type surface contamination inspection apparatus and method for performing a surface contamination inspection to reduce secondary waste such as filter paper and filters to which contaminants are attached as seen in a conventional contamination inspection and to prevent the expansion of a contaminated site. Is to provide.

[0019]

The invention of claim 1 is a laser beam irradiation means for irradiating a contaminant adhering to the surface of an inspection object with a laser beam to atomize the contaminant and desorb it.
Collecting means for collecting contaminants detached from the inspection object, and radiation measuring means for measuring radiation emitted from the contaminants collected by the collection means; A non-contact type surface contamination inspection apparatus for inspecting a surface contamination site and a surface contamination density in a non-contact manner, wherein the collecting means directly deposits fine particles of the contaminant detached from the inspection object on its surface. A solid collecting member to be adhered, an adsorption mechanism for adsorbing contaminant fine particles desorbed from the inspection object to the collecting member, and a contaminant adhering to the collecting member desorbed by laser light irradiation And collecting means for regenerating the collecting member.

According to the present invention, irradiation of laser light
It is possible to inspect contaminants attached to the inspection object in a non-contact manner. In addition, since the contaminant is collected directly on the solid collecting member, the collecting member is different from the conventional filter type for radiation measurement and subsequent processing. Operation is easy without the need for a filtration device. In addition, using a solid collecting member, the contaminants adhering to the collecting member can be easily removed and regenerated by using in combination with the collecting member regenerating means. Secondary waste can be reduced as compared with the conventional one that generates a large amount of paper and the like.

According to a second aspect of the present invention, in the non-contact type surface contamination inspection apparatus according to the first aspect, the laser light irradiating means sets the cross-sectional shape of the laser light applied to the surface of the inspection object to a circle,
An optical system for shaping the laser beam into an ellipse or a rectangle and for making the energy density distribution of the laser beam uniform is provided.

According to the present invention, since the cross-sectional shape of the laser beam is shaped according to the shape of the contaminated site, contaminants can be collected efficiently.

According to a third aspect of the present invention, in the non-contact type surface contamination inspection apparatus according to the first aspect, a suction means for sucking and collecting the contaminant detached from the surface of the inspection object together with surrounding air, A guide for guiding contaminants is provided at a suction port of the suction means, a collection means is provided in a suction path of the suction means, a light transmitting portion is provided in the suction path, and a trap provided in the suction path is provided. The collecting member is provided so as to face the contaminant in the axial direction and to be inclined with respect to the laser beam from the light transmitting portion.

According to the present invention, since the contaminants scattered in the air from the surface of the inspection object are sucked together with the surrounding air using the suction means and the guide, the expansion of the desorbed contaminants is prevented. it can. Furthermore, the collection efficiency is increased because the collection means is provided in the suction path of the suction means. Further, since the collection of the contaminant and the regeneration of the collection member are performed in the same place, the configuration of the apparatus can be simplified.

According to a fourth aspect of the present invention, in the non-contact surface contamination inspection apparatus according to the first aspect, the collecting means includes an electric field generating means for generating an electric field between the inspection object and the collecting member. It is characterized by having.

According to the present invention, the contaminants held by the ions can be electrostatically collected by the electric field generated by the electric field generating means, and the contaminant collection efficiency is further improved.

According to a fifth aspect of the present invention, the contaminants attached to the surface of the inspection object are atomized by laser beam irradiation and desorbed, and the desorbed contaminants are collected from the inspection object.
A non-contact type surface contamination inspection method for measuring radiation emitted from contaminated contaminants and performing non-contact determination of a surface contamination site and a surface contamination density of the inspection object. The separated contaminants are directly collected on a solid collecting member, and the surface contamination of the inspection object is inspected based on the collected contaminants.After the radiation measurement, the contaminants adhering to the collecting member are removed. The collection member is regenerated by detachment.

According to the present invention, by irradiating a laser beam, a contaminant adhering to an inspection object can be inspected in a non-contact manner. In addition, since the contaminant is collected directly on the solid collecting member, unlike the conventional filter-type collecting method, a filtering device is required for radiation measurement and subsequent processing. Operation becomes easy. In addition, since the collecting member is regenerated, the collecting member can be reused, and secondary waste such as a filter and paper to which contaminants have been generated can be reduced.

According to a sixth aspect of the present invention, in the non-contact surface contamination inspection method according to the fifth aspect, in the step of regenerating the collecting member, an optically transparent collecting member is used, and the contaminant adheres. The laser light is irradiated from at least one of a direction toward the collecting surface of the collecting member and a direction toward the collecting surface of the collecting member to which no contaminant is attached.

According to the present invention, since the optically transparent collecting member is used, the irradiation position of the laser beam is not limited.

[0031]

[0032]

[0033]

[0034]

[0035]

[0036]

[0037]

[0038]

[0039]

[0040]

[0041]

[0042]

[0043]

[0044]

[0045]

[0046]

[0047]

[0048]

[0049]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a non-contact type surface contamination inspection apparatus and method according to the present invention will be described below with reference to the drawings.

First Embodiment (FIGS. 1 to 5) A non-contact type surface contamination inspection apparatus according to the present invention is an apparatus for detecting a surface contamination site and a surface contamination density of an inspection object in a non-contact manner. . The non-contact type surface contamination inspection device is a device capable of directly transferring and collecting contaminants on a solid collecting member, and regenerating the collecting member after radiation measurement.

FIG. 1 is an overall system configuration diagram showing a first embodiment of a non-contact type surface contamination inspection apparatus according to the present invention.

This non-contact type surface contamination inspection apparatus 1 is shown in FIG.
As shown in FIG. 1, a laser beam irradiating means 4 for irradiating the inspection object 2 with the laser beam L and desorbing the contaminants 3 attached to the inspection object 2 is provided. The relative movement between the inspection object 2 and the surface contamination inspection apparatus 1 is such that the inspection object 2 is moved by a rotating / elevating mechanism 5 on which the inspection object 2 is installed. When the inspection object 2 is a part of a building such as a wall surface or a ceiling surface, the laser light irradiation means 4 is loaded on a moving device and moved, or the surface contamination inspection device 1 is moved to a self-propelled robot. It may be loaded and moved. In any case, the inspection object 2 and the laser beam irradiation means 4 are supported so as to be relatively movable. In this relative movement, the contamination site on the surface of the inspection object 2 can be specified by the timing of the irradiation of the laser beam L and the collection of the contaminant 3.

The laser beam irradiating means 4 is connected via a flexible connecting means 6 to a solid-state laser oscillator 8 which oscillates a laser beam L built in the instrumentation control panel 7. An optical system 9 for shaping and adjusting the laser light L from the solid-state laser oscillator 8 is built in the laser light irradiation means 4.

In addition to the solid-state laser oscillator 8, the instrumentation control panel 7 includes a power supply 10 for applying voltage to various devices, an exhaust unit 11 for exhausting air, and a contaminant collecting unit 12 for collecting contaminants. , A signal processing means 13 for processing signals, and a control means 14 for controlling various devices.

A guide 15 which is disposed at a predetermined interval near the laser beam irradiation position on the surface of the inspection object 2 and efficiently sucks the contaminants 3 detached from the inspection object 2.
The guide is connected to a flexible suction pipe 16. Further, collecting means 17 for collecting contaminants is provided in a suction path of the suction pipe 16.
The collecting means 17 has a solid collecting member 18 therein. Further, the suction pipe 16 is provided with the exhaust means 1 for sucking air.
1, the suction pipe 16 and the exhaust means 11 constitute a suction means 19.

In the vicinity of the collecting means 17, there is provided a radiation measuring means 20 for measuring α-rays or β (γ) -rays of the contaminants 3 attached to the collecting member 18. The identification of the surface contamination site of the inspection object 2 and the measurement of the surface contamination are performed by processing the measured radiation detection signal and calculating a count of α-rays or β (γ) -rays; An analysis control computer 21 for converting the surface contamination site of the inspection object into contamination radioactivity; an input device 22 for inputting necessary measurement parameters; and the obtained radiation count and contamination radioactivity of the surface site of the inspection object. And an output device 23 that outputs the evaluation value of

After the end of the radiation measurement, the contaminants 2 adhering to the collecting member 18 are removed near the collecting means 17.
A collecting member regenerating means 24 for regenerating the collecting member is provided.

FIG. 2 is an enlarged view showing the vicinity of the flexible connecting means 6 used in the present embodiment. In the present embodiment, the articulated mirror type light guide tube 2 is used as the flexible connection means 6.
5 is used.

As shown in FIG. 2, the light guide tube 25 is connected to a solid-state laser oscillator 8 that oscillates a laser beam L at a base end, and irradiates the inspection object 2 with the laser light L at a tip end. It is connected to the light irradiation means 4. Further, the light guide tube 25 is provided with two joints 26 that are rotatable in a predetermined axial direction as bent portions. The light guide tube 25 can be freely moved three-dimensionally by the joint 26, so that the light guide tube 25 serves as the flexible connection means 6. In addition, this joint 2
6 has a built-in reflection mirror 27 for guiding the laser light L from the solid-state laser oscillator 8 to the laser light irradiation means 4.

The laser beam irradiation means 4 has a built-in optical system 9 for shaping and adjusting the beam sectional shape and energy density of the laser beam L. The laser light L oscillated from the solid-state laser oscillator 8 is shaped by the optical system 9 and has a beam cross-sectional shape of an ellipse. The optical system 9 is configured so that the beam cross-sectional shape can be shaped into a circle or a rectangle (square or rectangle). Further, the optical system 9 makes the energy density distribution of the laser light L uniform.

With the optical system 9, the energy density of the laser beam L is such that the base material and the coating film on the surface of the inspection object 2 are not damaged and the contaminants 3 attached to the surface of the inspection object 2 are removed. Adjusted to separate. Such an appropriate range of the energy density will be described with reference to FIG.

FIG. 3 is a graph showing the relationship between the energy density of the laser beam, the amount of desorbed iron oxide particles, and the discolored area on the surface of the base material.

In the curve a shown in FIG.
d: The YAG pulse laser (wavelength 1064 nanometers, pulse width several μsec) is used, and iron oxide fine particles are used as a simulated contaminant 3, and the energy density of the laser beam L is changed to irradiate the inspection object 2. The relationship between the energy density of the laser beam and the amount of iron oxide fine particles that have adhered to the surface of the inspection object 2 is shown. The iron oxide (magnetite) fine particles (particle diameter: 1 μm) are sprayed onto the surface of the test object 2 without applying an adhesive such as a binder, and are bonded to the base material surface of the test object 2 by almost only an intermolecular force. It has been done. If the surface of the test object 2 to which the iron oxide fine particles are adhered is rubbed with filter paper, a part of the iron oxide fine particles can be wiped off. However, by rubbing with filter paper, the iron oxide fine particles migrate to the portion where the iron oxide fine particles are not attached. Further, the surface of the inspection object 2 may be charged by rubbing with the filter paper, and it may be difficult to wipe out the iron oxide fine particles only by rubbing with the filter paper.

As the inspection object 2 to which the iron oxide fine particles were adhered, a so-called yellow drum can surface simulated by baking a yellow paint on carbon steel, and mechanical polishing of stainless steel (equivalent to No. 500 emery number) What was used is used. The curves b and c in FIG. 3 also show the relationship between the area of the area where the surface of the inspection object 2 changes color and the energy density of the laser beam L.

As shown by the curves a to c in FIG. 3, when the energy density of the laser beam L is around 0.4 J / cm ² , the iron oxide fine particles adhered to the inspection object 2 desorb with a high probability. , Yellow baked painted surfaces and polished stainless steel surfaces do not discolor. Therefore, when the inspection object 2 to which the contaminant 3 is attached is irradiated with the laser beam L having an energy density of 0.4 J / cm ² , the base material of the inspection object 2 (the coating film if the inspection object is a painted object) ) Can be desorbed with high efficiency without damaging the contaminants 3, and the decontamination effect can be enhanced. When performing a surface contamination inspection, the desorption efficiency of the contaminants 3 does not need to be high.
The laser beam L having an energy density of 0.4 J / cm ² or less may be applied.

That is, at the time of surface contamination inspection, 0.4
By irradiating a laser beam L having an energy density of J / cm ² or less, and re-irradiating a laser beam L of about 0.4 J / cm ² to a site where a large contamination is identified as a result of the surface contamination inspection, the inspection is performed. Decontamination can be performed without damaging the surface of the object 2.

On the painted surface using a pigment containing lead chromate as the inspection object 2, a laser beam L in an infrared region such as a fundamental wavelength of 1064 nm of a Nd: YAG laser is suitable. For example, the second harmonic 5 of an Nd: YAG laser
When a laser beam L of 32 nm or a third harmonic of 355 nm of a Nd: YAG laser is irradiated on a painted surface using a pigment containing lead chromate, a curve c shown in FIG.
It approaches the curve a. In the case where the inspection object 2 is stainless steel without coating, the wavelength of the laser beam hardly affects the degree of discoloration of the surface of the inspection object 2.

Further, when the coating agent contains an organic polymer resin, the coated surface may be coated with a transparent resin, and the surface of the inspection object 2 is irradiated with the laser beam L. Must take into account the thermal effect of the laser light L. For example, the laser light L having a short pulse width on the order of several μsec has little heat influence. However, even the laser light L having a long pulse width can be used in consideration of the pulse repetition time.

FIG. 4 is an enlarged view showing the vicinity of the collecting means used in this embodiment. As shown in FIG. 4, near the irradiation position of the laser beam L on the surface of the inspection object 2, a guide guide 15 for efficiently sucking the contaminants 3 which have been atomized and desorbed from the inspection object 2 is expanded. The guide 15 is connected to a flexible suction pipe 16.
Further, the suction pipe 16 is connected to the exhaust unit 11, and the intake of the exhaust unit 11 sucks the contaminants 3 which have been atomized and desorbed from the inspection object 2 together with the surrounding air.

In the vicinity of the inspection object 2 in the suction pipe 16,
A flat solid collecting member 18 is provided. An electric field generating means 28 is provided as a suction mechanism at a position opposite to a surface of the collecting member 18 for collecting contaminants, and the electric field generating means 28 is connected to the power supply 10 for applying a high voltage. . Further, the collection member 18 and the electric field generating means 28 are insulated by an insulator 29. And the collecting member 18
Are adapted to cause electric polarization by the high voltage applied to the electric field generating means 28. That is, the collection surface of the collection member 18 facing the inspection target 2 is charged. In this embodiment, since a positive voltage is applied to the electric field generating means 28, the collecting surface of the collecting member 18 is positively charged. The inspection object 2 is grounded 30, and an electric field is generated between the inspection object 2 and the collection member 18.

The contaminants 3 which have been atomized and desorbed from the inspection object 2 by the irradiation of the laser beam L are retained by ions in the air and ions ionized by the irradiation of the laser beam L, and are collected with the inspection object 2. The trapping member 1 is generated by an electric field between the
8 is collected on the collection surface. In addition, the contaminants 3 which have been atomized are sucked together with the surrounding air by the suction of the exhaust means 11, and inertial collision with a collecting member 18 provided at a position blocking the suction path of the contaminants 3, and are collected on the collecting surface. To be gathered.

It is to be noted that the power source 10 may be directly connected to the collection member 18 using the collection member 18 as a conductor. In this case, the collecting member 18 also serves as the electric field generating means 28. In addition, the shape of the collecting member 18 may be an arc-shaped plate or a cylindrical shape in addition to the flat plate shape, and effectively blocks a suction path of the contaminant 3 which has been atomized and desorbed from the inspection object 2. Any shape is acceptable.

The collecting surface of the collecting member 18 is provided with a not-shown fine groove or grating to increase the contact area with the contaminant 3 and increase the collection efficiency of the contaminant 3. I have. In addition, if the collection efficiency of the contaminant 3 is sufficiently obtained, it is not necessary to provide a groove or a grating.

Further, the collecting member 18 is provided with several small holes (not shown) in the order of millimeters, and the air passes through the small holes to reduce the load on the exhaust means 11. . In addition, if the intake by the exhaust means 11 can be performed sufficiently, it is not necessary to form a fine hole.

FIG. 5 is an enlarged view showing the collecting member and the collecting member regenerating means used in this embodiment. The collection member 18 used in the present embodiment has an optically transparent property. In addition, the collecting member reproducing means 24 is provided with a beam splitter 31 for splitting the laser light L as an optical system as shown in FIG. Further, two piezo mirror scanners 32 and 33 using piezo elements which are piezoelectric elements are provided as a collecting member reproducing apparatus.
The piezo mirror scanners 32 and 33 scan the laser beam L split by the beam splitter 31 on the collection member 18. A piezo-mirror scanner 32 is provided on the collection surface side of the solid collection member 18 for collecting the contaminants 3, and a piezo-mirror scanner 33 is provided on the back side of the collection surface.
Is provided.

The laser beam L is split by the beam splitter 31, the laser beam L is scanned on the collecting surface by the piezo mirror scanner 32 from the collecting surface side, and the laser beam is scanned by the piezo mirror scanner 33 from the back side of the collecting surface. The light L is scanned, irradiates the contaminant 3 adhering to the collection surface through the optically transparent collection member 18, and the contaminant 3 is desorbed.

As the collecting member reproducing device, in addition to the piezo mirror scanners 32 and 33, a galvanometer scanner, a polygon meter scanner, or an acousto-optic modulator using an acousto-optic element, which is a reflector drivable by controlling the amount of current. A vessel may be used.

Next, a non-contact type surface contamination inspection method using the apparatus of this embodiment will be described.

As shown in FIG. 1, the relative movement between the inspection object 2 and the surface contamination inspection apparatus 1 is performed by moving the inspection object 2 by the rotary elevating mechanism 5 on which the inspection object 2 is installed. Further, when the inspection object 2 is a part of a building such as a wall surface or a ceiling surface, the surface contamination inspection device 1 may be mounted on a self-propelled robot and moved. In any case, the inspection object 2 and the laser light irradiating means 4 are relatively movable, and the timing of the irradiation of the laser light L and the collection of the contaminants 2 allows the detection of the contaminated site on the surface of the inspection object 2. Perform identification.

In this embodiment, as shown in FIG. 2, laser light L is oscillated from the solid-state laser oscillator 8. The laser light L is incident on a multi-joint type light guide tube 25 which is a flexible connecting means, and passes through the light guide tube 25 while being guided by a reflection mirror 27 built in a joint 26 of the light guide tube 25. Incident on the laser beam irradiation means 4.

Further, the laser beam L is shaped by the optical system 9 incorporated in the laser beam irradiating means 4 so that the beam cross-sectional area of the laser beam L is adjusted, and the energy density is adjusted. In the optical system 9, the energy density of the laser light L is set to 0.4 J / cm.
² or less, for example, at an energy density of 0.2 J / cm ² , and the surface
Irradiation. The laser beam L having an energy density of 0.4 J / cm ² or less does not damage the base material of the inspection object 2 (a coating film if it is a painted surface) and does not damage the contaminants 3 attached to the inspection object 2.
Can be desorbed at least in part.

For example, 0.4 J /
Using a solid-state laser oscillator 8 that oscillates a laser beam L having an energy density of not less than ² cm ^2, the beam cross-sectional area of the laser beam L is widened by the optical system 9, the energy density is reduced, and the parallel laser beam L is applied to the inspection object 2. Irradiation may be performed. In this case, since the beam cross-sectional area of the laser light L increases, the processing efficiency of the surface contamination inspection is improved in each step. The beam shape of the laser light L is also appropriately selected by the optical system 9 into a circle, an ellipse, or a rectangle (square or rectangle) according to the shape of the surface of the inspection object 2. Further, when the surface of the inspection object 2 is coated with a paint containing lead chromate, the laser light L having a wavelength in the infrared region is irradiated.

Then, as shown in FIG. 4, the inspection object 2 is irradiated with the laser light L from the laser light irradiation means 4. The laser light L causes at least a part of the contaminants (dust, dust, particulate matter, radioactive material, etc.) 3 attached to the surface of the inspection object 2 to be removed as fine particles. The detached fine particles of the contaminants 3 scatter toward the outside of the inspection target 2. The fine particles of the contaminants 3 are connected to the exhaust unit 11 via the suction pipe 16 by the intake of the exhaust unit 11, and the guide guide 15 is disposed at a predetermined distance from the inspection object 2 at the laser beam irradiation position. Sucked in the direction. Then, it is sucked in the direction of the collecting member 18 installed in the suction pipe 16.

Further, the particulate contaminants 3 detached from the inspection object 2 are held as ions in the air or ions ionized by irradiation with the laser beam L. On the other hand, an electric field is generated between the electric field generating means 28 connected to the power supply 10 and the inspection object 2 grounded 30. Therefore, the ionized particulate contaminants 3 are directed toward the electric field generating means 28,
That is, it is sucked in the direction of the collecting member 18.

Thus, the suction by the exhaust means 11 by the intake air and the suction by the electric field generating means 28 by the electric field provide
The ionized fine particles of the contaminant 3 are sucked toward the collection member 18. The collecting surface of the collecting member 18 is
8 is charged. In this embodiment, the electric field generating means 2
Since the case where a positive voltage is applied to 8 is illustrated, the collection surface facing the inspection object 2 is positively charged. Therefore, the fine particles of the negatively charged contaminant 3 are collected by the collection member 18.
Is selectively adsorbed on the trapping surface of. Further, a part of the contaminant 3 fine particles sucked in the direction of the collecting member 18 is collected on the collecting surface by inertial collision.

The contaminants collected by the collecting member 18 are shown in FIG.
The measurement of α rays or β (γ) rays is performed by the radiation measuring means 20 shown in FIG. The radiation detection signal measured by the radiation measuring means 20 is signal-processed by the signal processing means 13 to obtain a count of α rays or β (γ) rays, and the obtained radiation count is recorded by the analysis control computer 21. Is done. Necessary parameters and the like are directly input by the operator from the input device 22. The parameter values may be input from the input device 22 in a file format. Then, the optimum calibration constant is made to act on the analysis control computer 21 to convert it into radioactive contamination on the surface of the inspection object 2. Then, the obtained counting and the evaluation of the contamination radioactivity at the surface of the inspection object 2 are performed by the output device 2.
3 is output.

After the radiation measurement by the radiation measuring means 20 is completed, most of the contaminants 3 attached to the collecting member 18 are removed by the collecting member reproducing means 24 shown in FIG. The regeneration of the collecting member 18 is performed by collecting member regenerating means 24.
The scanning is performed by the laser beam L of the piezo mirror scanners 32 and 33 which are the collecting member reproducing devices incorporated in the camera.

The contaminants detached from the collecting member by the collecting member regenerating means are collected by the contaminant collecting means shown in FIG.

Therefore, according to the present embodiment, the surface contamination site and the surface contamination density of the inspection object 2 can be easily measured without contact using a relatively simple device. Further, the contaminants 3 can be collected directly on the surface of the solid collecting member 18 and the collecting member 18 can be regenerated, so that the collecting member 18 can be used repeatedly.

Second Embodiment (FIGS. 6 and 7) In this embodiment, a multi-bundle optical fiber is used as a flexible connecting means. In the present embodiment,
The cylindrical collecting member is configured to rotate intermittently by a rotating mechanism, and at a position facing the collecting surface of the collecting member,
A radiation measuring unit and a collecting unit regenerating unit that are driven at the same time as the contaminant collecting operation are arranged.

FIG. 6 is an enlarged view showing the vicinity of the flexible connection means used in the second embodiment of the non-contact type contamination inspection apparatus according to the present invention. In the present embodiment, as shown in FIG. 6, an optical system 34 is connected to the solid-state laser oscillator 8 that oscillates the laser light L. The optical system 34 includes a plurality of beam splitters 35 for dividing the laser beam L and a multi-lens 36 including a plurality of lenses. The optical system 34 is connected to a multi-bundle optical fiber 37, which is a flexible connecting means, and a laser light monitoring means 38 for detecting the laser light L. The multi-lens 36 is used to make the laser light L incident on the multi-bundle optical fiber 37 efficiently. In the present embodiment, the multi-lenses 36 are arranged vertically, but the cross-sectional shape of the multi-bundle optical fiber 37 is formed by bundling the fiber elements on the incident side, and the multi-lens 36 in which the lenses are arranged along the circle is used. You may. In this case, a number of beam splitters 35 corresponding to the number of fibers are used.
Is no longer needed.

The laser beam L oscillated from the solid-state laser oscillator 8 enters an optical system 34, is divided into a plurality of beams by a beam splitter 35 in the optical system 34, and a part of the laser beam L enters a laser beam monitoring means 38, Is incident on a multi-bundle optical fiber 37 via a multi-lens 36. In the laser light monitoring means 38, the laser light L
Of the laser beam L is constantly monitored to confirm that the energy density of the laser beam L is within an appropriate range.

The multi-bundle optical fiber 37 has a structure in which a large number of fiber elements are bundled, and the energy passing through each fiber is reduced to prevent damage to the fiber.

The emission side of the multi-bundle optical fiber 37 is connected to the laser beam irradiation means 4. The laser light irradiating means 4 has a built-in multi-lens of a cylindrical lens arrayed vertically as an optical system 9, and shapes the beam cross-sectional shape of the laser light L from the multi-bundle optical fiber 37 to reduce the energy density. It is designed to be uniform. In the present embodiment, the fiber elements on the output side are arranged vertically, but the cross-sectional shape of the fiber elements may be changed so as to be a circle or an ellipse. Further, a homogenizer in which a prism is combined with a mirror may be used for the optical system 9.

The laser light L from the multi-bundle optical fiber 37 is incident on the laser light irradiating means 4, and the beam system of the laser light L is shaped by an optical system 9 built in the laser light irradiating means 4, and the energy is reduced. Irradiation is performed with uniform density.

FIG. 7 is an enlarged view showing the vicinity of the collecting means used in the second embodiment of the non-contact type surface contamination inspection apparatus according to the present invention.

In this embodiment, as shown in FIG. 7, the collecting member 18a is cylindrical, and the collecting member 18a is divided into four parts. A required space is maintained between the four divided collection members 18a so that air can flow in.
The lower end of the collection member 18a is connected to a rotation mechanism 40 that rotates intermittently via a support rod 39 at the axial center position. further,
The upper end of the collection member 18a is connected to the suction pipe 16 via a rotatable coupling 41.

A three-way valve 42 is provided in the suction line of the suction pipe 16. The three-way valve 42 includes three valves 42a, 42b, 42c. Valve 42
a is connected to the suction pipe 16, the valve 42b is connected to the exhaust means 11 for sucking air, and the valve 42c is connected to the blower means 43 for blowing air. The exhaust means 11 is connected to a contaminant collecting means 12 for collecting the contaminants 3.

The collecting surface of the four-divided collecting member 18a has a surface facing the surface for collecting the contaminant 3, a surface facing the radiation measuring means 20 for measuring radiation, and a collecting member 1a.
There is a surface facing the collecting member regeneration means 24 for regenerating 8a.

The radiation measuring means 20 is connected to a signal processing means 13 for processing a signal from the radiation measuring means 20. An optical piezo-mirror 44 for scanning the collecting surface to which the contaminant 3 adheres with the laser light L is used as a collecting member reproducing device. This optical system piezo mirror 4
A suction pipe 16 is provided for sucking contaminants detached from the collection member 18a by the scanning of the laser beam L by the laser beam L. This suction pipe 16 is connected to the suction pipe 16 provided in the suction path.
It is connected to the exhaust means 11 via the direction valve 45.

When performing a surface contamination inspection using the apparatus of this embodiment configured as described above, as shown in FIG.
Laser light L is oscillated from the solid-state laser oscillator 8 and enters the optical system 34. The laser beam L is split by a beam splitter 35 built in the optical system 34, shaped by a multi-lens 36, and formed into a multi-bundle optical fiber 37.
Incident on. The laser light L is a multi-bundle optical fiber 3
7, impinges on the laser beam irradiating means 4, and is shaped and adjusted by an optical system 9 incorporated in the laser beam irradiating means 4 to contaminate the surface of the inspection object 2 with a uniform energy density. The object 3 is irradiated. Due to the irradiation of the laser beam L, the contaminants 3 are atomized and fly out of the inspection object 2.

For collecting the contaminants 3 detached from the inspection object 2, the valves 42a and 42b shown in FIG.
This is performed by driving the exhaust means 11 with the valve 42c closed. The contaminant 3 is sucked in the direction of the collecting member 18a together with the surrounding air from between the collecting members 18a divided into four parts by the suction of the exhaust means 11, and the finely divided contaminants 3 are collected on the surface of the collecting member 18a. To be collected. Contaminant 3
Are collected most on the surface of the collecting member 18a divided into four sections facing the inspection object.

After the first collection operation of the contaminants 3, the collection member 18a is rotated by 90 degrees by the rotating mechanism 40. Due to the rotation of the collection member 18a by the rotation mechanism 40, the collection surface to which the contaminant 3 has adhered is moved to a position facing the radiation measurement means 20, and the first measurement of radiation is performed.
At the same time as performing this first radiation measurement,
A second collection operation of the contaminants 3 is performed.

When the collecting operation of the contaminant 3 and the radiation measuring operation are repeated and the fourth collecting operation is performed,
The surface on which the contaminants 3 are collected for the first time comes to a position facing the optical piezo mirror 44 which is a collecting member reproducing device. Then, by the scanning of the laser beam L by the optical system piezo mirror 44, the contaminants 3 attached to the collecting member 18a are atomized and separated, and the collecting member 18a is regenerated. When the collecting member 18a is regenerated, the two-way valve 45 provided in the suction path of the suction pipe 16 is opened, and the contaminants 3 detached from the collecting member 18a by the suction of the exhaust means 11 are removed by the suction pipe 16
Is sucked from.

When the collecting section 18a is reproduced, 3
The valve 42a and the valve 42c of the one-way valve 42 are opened, and the blower unit 43 is driven in a state where the valve 42b is closed.
This effectively removes the contaminants 3 attached to a and aspirates the contaminants 3 released from the collection member 18a. The collecting member 18a from which the contaminants 3 have been detached is used again for collecting the contaminants 3.

According to the present embodiment, in addition to the same effects as in the first embodiment, the multi-bundle optical fiber 37 is used as the flexible connection means. The beam cross-sectional shape is easily formed, and the radiation measuring means 20 and the optical system piezo mirror scanner 44 are connected to the cylindrical collecting member 18.
Since the collecting member 18a is installed at a position facing the collecting surface of a, and the collecting member 18a is rotated by the rotating mechanism 40, the collecting operation of the contaminants 3, the measuring operation of the radiation, and the reproducing operation of the collecting member 18a are efficiently performed. Can be obtained.

Third Embodiment (FIG. 8) In the present embodiment, a configuration is provided in which the contaminants detached from the inspection object can be collected and the collecting member on which the contaminants adhere can be regenerated at the same position. Has become.

FIG. 8 is a schematic view showing a third embodiment of the non-contact type surface contamination inspection apparatus according to the present invention. In the present embodiment, as shown in FIG. 8, the laser light L oscillated from the solid-state laser oscillator 8 is incident on the laser light irradiation means 4 via a flexible connection means (not shown). The laser beam irradiating means 4 has a built-in optical system 9. The optical system 9 includes a λ / 2 plate 46 for polarizing the laser beam L and a plurality of lenses 47 for deforming and adjusting the laser beam.
A polarizing beam splitter 48 for transmitting or reflecting polarized laser light, a beam splitter 49 for splitting laser light, and a laser light monitoring means 5 for monitoring laser light.
0. Further, the signal processing means 13 is connected to the laser light monitoring means 50.

The laser beam irradiation means 4 is provided with a window 51 which is an optically transparent light transmitting portion. When irradiating the inspection object 2 with the laser beam L, the λ / 2 plate 46 is used.
Is adjusted to transmit through the polarizing beam splitter 48. Therefore, the laser light L is polarized by the λ / 2 plate 46, then deformed and adjusted by the lens 47, passes through the polarization beam splitter 48, is deformed and adjusted again by the lens 47, and becomes a light transmitting portion of the window 51. The inspection target 2 is irradiated with light.

A suction pipe 16 for sucking the contaminants 3 detached from the inspection object 2 together with the surrounding air is provided at predetermined intervals near the laser beam irradiation position on the surface of the inspection object 2. . The suction pipe 16 is connected to an exhaust unit 11 that draws in air through a two-way valve 52.

A collection member 18b is provided in the suction pipe 16. In the vicinity of the contaminant collecting position of the collecting member 18b, a radiation measuring means 20 is provided. The collection member 18b is connected to a moving rail 54 that moves the collection member 18b to a radiation measurement position via a support expansion and contraction mechanism 53 that supports the collection member 18b so as to extend and contract as a collection member moving mechanism. The collecting member 18b may have a detachable cassette type structure.

The collecting member 18b has a certain inclination angle with respect to the suction direction of the contaminant 3 in order to reduce the load on the exhaust means 11, and has an inclination in the irradiation direction of the collecting member reproducing laser beam L. Again, the laser beam L is applied to the collecting member 18b.
Opposing each other with a certain inclination angle so that the irradiation of light can be performed.

Further, the suction pipe 16 is provided with a window 55 which is a light transmitting portion transparent to the reproducing laser beam L. When the collecting member is regenerated, the λ / 2 plate 46
It is adjusted so that it is reflected by the polarization beam splitter 48. Therefore, the laser beam L is polarized by the λ / 2 plate 46, deformed and adjusted by the lens 47, reflected by the polarization beam splitter 48, split by the beam splitter 49, and partially transmitted to the laser beam monitor 50. The laser beam L is radiated and signal-processed by the signal processing means 13 to confirm the energy density of the laser beam L. The rest is radiated to the surface of the collecting member 18b to which the contaminant 3 adheres via the window 51 which is a light transmitting portion. It has become.

Further, the suction pipe 16 is provided with a bypass pipe 56 near the collecting member regeneration position for sucking the contaminants 3 detached from the collecting member 18b.
Is connected to the exhaust means 11 via a two-way valve 57, and the intake of the exhaust means 11 sucks the contaminants 3 detached from the collecting member 18b.

When irradiating the inspection object 2 with the laser beam L using the apparatus of this embodiment having the above-described configuration, the λ / 2 plate 46 is transmitted through the polarization beam splitter 48.
Rotate to adjust. Then, the laser light L incident on the laser light irradiation means 4 is incident on the optical system 9, is polarized by the λ / 2 plate 46 built in the optical system 9,
After having been deformed and adjusted in step (a), the light passes through the polarizing beam splitter 48, is deformed and adjusted again by the lens 47, and is irradiated on the inspection object 2 from the window 51 which is a light transmitting portion.

At least a part of the contaminants 3 attached to the inspection object 2 is separated into fine particles and desorbed by the laser beam L applied to the surface of the inspection object 2. This detached contaminant 3
Opens the two-way valve 52 provided in the suction pipe 16, closes the two-way valve 57 provided in the bypass pipe 56, suctions the air by the exhaust means 11, and installs the suction pipe 16 in the middle of the suction path. It is collected by the collected collecting member 18b. After the collection of the contaminants 3 is completed, the collecting member 18b is made horizontal to the suction direction of the contaminants 3 by the support expansion and contraction mechanism 53, and the support expansion and contraction mechanism 53 is shortened. Then, the collection member 18b is moved to the upper part of the radiation measurement position by the moving rail 54, and is moved to the radiation measurement position by extending the support telescopic mechanism 53.
The radiation of the contaminant 3 attached to 8b is measured. Contaminant 3
After the radiation measurement is completed, the collecting member 18b
3 and the moving rail 54 return to the original contaminant collection position.

At the contaminant collecting position, the collecting member 18b is also regenerated. When reproducing the collecting member 18b, the polarization beam splitter 48 reflects the laser beam L so that the laser beam L is reflected.
The two plates 46 are rotated for adjustment. Then, the laser light L incident on the laser light irradiation means 4 is incident on the optical system 9,
The laser beam L is polarized by the λ / 2 plate 46 of the optical system, deformed and adjusted by the lens 47, reflected by the polarization beam splitter 48, split by the beam splitter 49, and partially The light is irradiated on the light monitoring means 50 and signal-processed by the signal processing means 13 to confirm the energy density of the laser light L. The remainder is irradiated to the surface of the collecting member 18b to which the contaminants 3 are attached via the window 55 which is a light transmitting portion. And, the bypass pipe 56 near the collecting member regeneration position
The two-way valve 57 provided on the suction pipe 16 is opened, the two-way valve 52 provided on the suction pipe 16 is closed, and the contaminants 3 detached from the collecting member 18b are sucked by the suction of the exhaust means 11.

According to the present embodiment, in addition to the effects of the first embodiment, collection of contaminants detached from the inspection object,
Since the regeneration of the collecting member 18b is performed in the same place, the effect that the working process is simplified can be obtained.

Fourth Embodiment (FIG. 9) In this embodiment, a potential gradient is generated between two mutually insulated collecting members of a flat conductor to collect contaminants. It has become. Except for the vicinity of the collecting member, the configuration is the same as that of the first embodiment, and the description is omitted.

FIG. 9 is an enlarged view showing the vicinity of a collecting member used in a fourth embodiment of the non-contact contamination inspection apparatus according to the present invention. In the present embodiment, two flat plate-like conductor collecting members 18c and 18d are used. These collecting members 18c and 18d are installed near a contaminant suction port in a suction pipe (not shown). Also, the collecting member 18c,
18d are insulated from each other by an insulating base 58.

The collecting member 18d is installed via the conductor 59.
Connected to 0. The collection member 18c is connected to a power supply 10 for applying a high voltage via a conductor 59. Further, the power supply 10 is connected to control means 14 for controlling an applied voltage. Then, a positive high voltage is applied to the trapping member 18c to generate an electric field between the trapping member 18c and the trapping member 18d so as to trap the particulate contaminants 3 held by the ions. Has become. The contaminants 3 held by the negative ions are collected on the surface of the collecting member 18c on the power supply side, and the contaminants 5 held by the positive ions are collected on the surface of the collecting member 18d on the ground side. It has become.

In the present embodiment, an example in which the applied voltage of the collecting member 18c is made positive is described, but the applied voltage may be negative. In the present embodiment, the collecting member 1
Although 8c and 18d use two flat conductors, the collecting member may be a single flat conductor and a voltage may be applied to the collecting member. Further, three or more flat conductors may be used as the collecting member, and a voltage may be applied to one collecting member. Also, an electric member that is semi-permanently polarized may be used as the material of the collection member.

When the contaminant 3 is collected by using the thus configured apparatus of the present embodiment, the inspection object (not shown) is irradiated with laser light similarly to the first embodiment. Then, the contaminants 3 attached to the inspection object are atomized and desorbed. The contaminants 3 which have been atomized and desorbed are retained by ions existing in the air or ions ionized by laser light irradiation.

The contaminants 3 held by the ions are sucked in the direction of the collecting members 18c and 18d provided in the suction pipe by the suction of the exhaust means (not shown). The contaminants 5 held by the negative ions are collected by the collecting member 1 on the power supply side.
The contaminant 5 collected by the positive ions 8c and held by the positive ions is collected by the collecting member 18d on the ground side.

After the collection of the contaminants 3 is completed, the collection member 18c,
A radiation measurement of the contaminant 5 attached to 18d is performed. After the completion of the radiation measurement, the collection member 18 to which the contaminant 5 has adhered.
c, 18d are irradiated with laser light, and the collecting members 18c, 18
d is reproduced. The control unit 13 does not apply a voltage to the collection member 18c, and the collection member 18c and the collection member 18d
When the laser beam irradiation is performed at this time, the efficiency of desorbing contaminants between the collecting members 18c and 18d increases. Further, when the collecting member 18c is connected to the installation 72, the efficiency of desorbing contaminants between the collecting member 18c and the collecting member 18d is further increased.

According to the present embodiment, in addition to the same effects as those of the first embodiment, the effect that the pollutants 5 can be collected efficiently can be obtained.

Fifth Embodiment (FIG. 10) In this embodiment, an electric field is generated between the inspection object and the collecting member to collect the contaminants detached from the inspection object. It has become. In the present embodiment, the configuration other than the vicinity of the collecting member is not substantially different from that of the first embodiment, and thus the description is omitted.

FIG. 10 is an enlarged view showing the vicinity of a collecting member used in a fifth embodiment of the non-contact type surface contamination inspection apparatus according to the present invention. In the present embodiment, as shown in FIG.
The suction pipes 16 arranged at required intervals are open. In addition, a conductor flat plate is used as the collecting member 18e. The collection member 18 e is installed at a position near the inspection target 2 in the suction path of the suction pipe 16 that suctions the contaminants 3. At the lower end of the collecting member 18, the insulating member 58 is insulated from the suction pipe 16 and supported by the insulating table 58. The collecting member 18 is connected to the power supply 10 for applying a high-voltage power supply and the control means 14 for controlling the voltage of the power supply 10. I have. The inspection object is connected to the installation 60. Therefore, in the present embodiment, the contaminant 3 is collected by applying a positive high voltage to the collection member 18e, and the inspection object 2 and the collection member 18e are applied.
An electric field is generated between them, and the contaminants 3 which are formed into fine particles and held by the ions are collected.

When the power supply 10 is in a voltage range sufficient for corona discharge, corona discharge is generated from the end of the collecting member 18e to ionize the surrounding air, and the fine particles 3 are contaminated by the ionization. Since the ions are retained and ionize the contaminants, the power supply 10 serves as ionization means. Furthermore, if the power supply 10 is in a voltage range sufficient for arc discharge, at least corona discharge occurs, and this power supply 10 serves as ionization means. Further, when the arc flies toward the inspection target 2, the impact causes the contaminants 3 attached to the inspection target 2 to be desorbed, and the same effect as the irradiation of the laser beam L is obtained.

In the present embodiment, a positive voltage is applied to the collecting member 18e, but a voltage applied to the collecting member 18e may be a negative voltage.

When the contaminant 3 is collected by using the apparatus of the present embodiment configured as described above, the inspection object 2 is irradiated with the laser beam L similarly to the first embodiment. The contaminants 3 attached to the inspection target 2 are atomized and desorbed. The contaminant 3 which has been atomized and desorbed is retained by ions existing in the air, ions ionized by the irradiation of the laser beam L, and ions by corona discharge.

Then, an electric field is generated between the inspection object 2 and the collecting member 18e due to the positive high voltage applied to the collecting member 18e, and the electric field generates fine particulate contaminants held by negative ions. 3 is selectively collected on the surface of the collecting member 18e. After collecting the contaminants 3, the radiation is measured, and after the radiation measurement is completed, the surface of the collecting member 18e to which the contaminants are attached is irradiated with laser light to regenerate the collecting member 18e.

According to the present embodiment, in addition to the same effects as those of the first embodiment, the effect that the efficiency of collecting the contaminants 3 can be improved can be obtained.

Sixth Embodiment (FIG. 11) In this embodiment, the collecting member is a flat plate, and a solid scintillator as radiation measuring means is provided on the surface opposite to the collecting surface of the collecting member. It is configured such that the collecting member and the radiation measuring means are integrated. In the present embodiment, the configuration other than the vicinity of the collecting member and the radiation measuring means is not different from that of the first embodiment, and therefore the description is omitted.

FIG. 11 is an enlarged view showing the vicinity of a collecting member and radiation measuring means used in a sixth embodiment of the non-contact type surface contamination inspection apparatus according to the present invention.

In this embodiment, as shown in FIG. 11, a guide guide connected to the suction pipe 16 at a predetermined interval is provided near the laser beam irradiation position on the surface of the inspection object 2 on which the contaminant 3 has adhered. 15 are provided. This guide 1
5 expands, and the collection efficiency of the pollutant 3 is improved.

In the suction pipe 16, a collecting member 18f, which is a flat conductor, is provided so as to block the suction path of the contaminants 3. The collection member 18f is connected to a power supply 10 for applying a high voltage.

A solid scintillator 62 which is a radiation detecting element which is shielded from light by a thin vapor-deposited film 61 is joined to the surface of the collecting member 18f opposite to the surface on which the contaminants 3 are collected.
The deposition film 61 has a thickness capable of transmitting radiation.
As the solid scintillator 62, a calcium fluoride (europium) scintillator, a glass scintillator, a plastic scintillator, a zinc sulfide scintillator, or a ceramic scintillator is used. In particular, α rays, β
In the discrimination of (γ) rays, a radiation detection element may be formed by combining scintillators with different rise times of scintillation light emission. This solid scintillator 62
Is directly connected to a photomultiplier tube 63 for photoelectrically converting scintillation light, and the solid scintillator 62 and the photomultiplier tube 63 form radiation measuring means 20. Therefore, the configuration is such that the collection member 18f and the radiation measuring means 20 are integrated.

The scintillation light may be directly detected by an image intensifier or a two-dimensional camera instead of the photomultiplier 63. The photomultiplier 63 may be connected to a solid scintillator via an optical fiber, and the photomultiplier may be provided outside the suction pipe to simplify the configuration of the radiation measuring means 20 in the suction pipe 16.

The collecting member 18f, the solid scintillator 62, and the photomultiplier 63 are supported in the suction pipe 16 by the insulating base 64. The photomultiplier 63 is connected to the signal processing means 13 via a connection cable 65, and is covered with a casing 66 except for the joint surface of the photomultiplier 63 with the solid scintillator 62. Further, the casing 66, the deposition film 61 and the collecting member 1
8f is insulated by an insulator.

When the contaminant 3 is collected by using the thus configured apparatus of the present embodiment, the inspection object 2 is irradiated with the laser beam L in the same manner as in the first embodiment. The contaminants 3 attached to the inspection target 2 are atomized and desorbed. The contaminants 3 are held by ions existing in the air or ions ionized by the irradiation of the laser beam L. Then, an electric field is generated between the inspection object 2 and the collecting member 18f by the high voltage applied to the collecting member 18f, and the contaminants 3 held by the ions are removed by the electric field.
Collect on the surface of f.

After the contaminants 3 have been collected, the radiation emitted from the contaminants 3 attached to the surface of the collecting member 18f enters the solid scintillator 62 and generates scintillation light having a wavelength unique to the solid scintillator 62. . The scintillation light is photoelectrically converted by the photomultiplier 64, and the electric signal is processed by the signal processing means 13 to count radiation. After the end of the radiation measurement, the surface of the collecting member 18f to which the contaminant 3 has adhered is irradiated with the laser beam L, and the collecting member 18
The reproduction of f is performed.

According to the present embodiment, in addition to the same effects as those of the first embodiment, since the collecting member 18f and the radiation measuring means 20 are integrated, the structure of the apparatus is simplified. It is possible to obtain the effect that it is not necessary to move the collecting member.

Seventh Embodiment (FIG. 12) In this embodiment, as in the sixth embodiment, the collection member and the radiation measuring means are integrated, and the collection member Is a ferroelectric multilayer film. In the present embodiment, the configuration other than the vicinity of the collecting member and the radiation measuring means is not different from that of the first embodiment, and therefore the description is omitted.

FIG. 12 is an enlarged view showing the vicinity of the collecting member and the radiation measuring means used in the non-contact type surface contamination inspection apparatus according to the present invention.

In the present embodiment, as shown in FIG. 12, a guide 15 connected to a suction pipe 16 at a predetermined interval is provided near a laser beam irradiation position on the surface of an inspection object to which contaminants have adhered. Is provided. The guide 15 is expanded to increase the efficiency of collecting the contaminants 3.

A solid scintillator 68 is provided in the suction pipe 16 as a rectangular parallelepiped radiation measuring means so as to block the suction path. Wavelength shifters 69 are provided on both upper and lower surfaces of the solid scintillator 68, and the wavelength shifters 69 are covered with a light-shielding casing 66.
Further, the wavelength shifter 69 is connected to an optical fiber 70.

The left and right sides of the solid scintillator 68 are covered with a light-shielding thin metal deposited film 71. Further, a glass surface 72 is coated or adhered to the vapor-deposited film 71 on the inspection object side of the solid scintillator 68, and a flat ferroelectric multilayer film 86 as a collecting member is joined to the glass surface 72. I have. Therefore, the configuration is such that the collecting member and the radiation measuring means are integrated. The ferroelectric multilayer film 86 has a high reflection efficiency with respect to a reproduction laser beam. The total thickness of the vapor-deposited film 71, the glass surface 72, and the ferroelectric multilayer film 73 is a thickness that can transmit radiation. The solid scintillator 68, the deposited film 71, the glass surface 72, the ferroelectric multilayer film 7
The wavelength shifter 3 and the wavelength shifter 69 are supported in the suction pipe 16 by an insulating table 74.

A power supply 10 for applying a high voltage is connected to the conductive vapor-deposited film 71 on the opposite side of the inspection object with the solid scintillator 68 interposed therebetween.

When the contaminant 3 is collected by using the thus configured apparatus of the present embodiment, the inspection object 2 is irradiated with the laser beam L similarly to the first embodiment. The contaminants 3 attached to the inspection target 2 are atomized and desorbed.

This contaminant 3 is held by ions existing in the air and ions ionized by the irradiation of the laser beam L. Then, an electric field is generated between the inspection object 2 and the ferroelectric multilayer film 73 as a trapping member due to the high voltage applied to the deposition film 71, and the contaminants held by the ions are ferroelectrically generated by the electric field. It is collected on the surface of the multilayer film 73.

After the contaminants 3 have been collected, the radiation emitted from the contaminants 3 attached to the surface of the ferroelectric multilayer film 73 enters the solid scintillator 68, and this solid scintillator 68
Generates scintillation light of a unique wavelength. This scintillation light is converted by a wavelength shifter 69 into a wavelength suitable for optical fiber transmission. This wavelength-converted light is
The light is transmitted through the optical fiber 70 and is introduced into signal processing means (not shown) provided outside the suction pipe 16. The signal is processed by the signal processing means, and radiation is counted. After the end of the radiation measurement, the surface of the ferroelectric multilayer film 73 to which the contaminant has adhered is irradiated with the laser beam L to reproduce the ferroelectric multilayer film 73 as a trapping member. At this time, since the ferroelectric multilayer film 73 reflects the laser beam L, it is possible to prevent the deposited film 71 from being damaged.

According to the present embodiment, in addition to the same effects as in the sixth embodiment, since the ferroelectric multilayer film 73 reflects the laser beam L, it is possible to prevent the deposition film 71 from being damaged. can get.

[0154]

As described above in detail, according to the non-contact type surface contamination inspection apparatus and method according to the present invention, the contaminants are detached from the inspection object by irradiating a laser beam.
The surface contamination site and the surface contamination density of the inspection object can be inspected without contact.

Further, since the energy density of the laser beam is adjusted, the surface contamination site can be specified in a non-contact manner without damaging the base material of the inspection object and the coating film or oxide film on the surface of the inspection object. It does not impair the soundness of the inspection object.

Further, as a result of the surface contamination inspection, only the specified contaminated site can be locally decontaminated without damaging the base material of the inspection object and the coating film or oxide film on the surface of the inspection object.

In addition, since the filter paper is pressed against the surface of the inspection object and the surface contaminated area is not rubbed with the filter paper as in the conventional method, the contaminant is not transferred to the filter paper. it can.

Further, the contaminants are directly collected on the solid collecting member, and after the radiation measurement is completed, the contaminants adhering to the collecting member are removed and the collecting member is regenerated. The generation of secondary waste such as filter paper to which contaminants have adhered can be reduced.

[Brief description of the drawings]

FIG. 1 shows a first example of a non-contact type surface contamination inspection apparatus according to the present invention.
FIG. 1 is an overall system configuration diagram showing an embodiment.

FIG. 2 shows a first example of a non-contact type surface contamination inspection apparatus according to the present invention.
The figure which expands and shows the vicinity of the flexible connection means 6 used in Embodiment of FIG.

FIG. 3 is a graph showing the relationship between the energy density of laser light, the amount of desorbed iron oxide particles, and a discolored region on the surface of a base material.

FIG. 4 shows a first example of a non-contact type surface contamination inspection apparatus according to the present invention.
The figure which expands and shows the vicinity of the collection means used for Embodiment of FIG.

FIG. 5 shows a first example of the non-contact type surface contamination inspection apparatus according to the present invention.
The figure which expands and shows the collection member and collection member reproduction | regeneration means used for embodiment of FIG.

FIG. 6 is an enlarged view showing the vicinity of a flexible connecting means used in a second embodiment of the non-contact type contamination inspection apparatus according to the present invention.

FIG. 7 is an enlarged view showing the vicinity of a collecting means used in a second embodiment of the non-contact type contamination inspection apparatus according to the present invention.

FIG. 8 shows a third example of the non-contact type surface contamination inspection apparatus according to the present invention.
FIG. 1 is a schematic diagram showing an embodiment.

FIG. 9 is an enlarged view showing the vicinity of a collecting member used in a fourth embodiment of the non-contact contamination inspection apparatus according to the present invention.

FIG. 10 is an enlarged view showing the vicinity of a collecting member used in a fifth embodiment of the non-contact type surface contamination inspection apparatus according to the present invention.

FIG. 11 is an enlarged view showing the vicinity of a collecting member and radiation measuring means used in a sixth embodiment of the non-contact type surface contamination inspection apparatus according to the present invention.

FIG. 12 is an enlarged view showing the vicinity of a collecting member and radiation measuring means used in the non-contact type surface contamination inspection apparatus according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Non-contact type surface contamination inspection apparatus 2 Inspection object 3 Contaminated material 4 Laser beam irradiation means 5 Rotation / lift mechanism 6 Flexible connection means 7 Instrumentation control panel 8 Solid-state laser oscillator 9 Optical system 10 Power supply 11 Exhaust means 12 Contamination Object recovery means 13 Signal processing means 14 Control means 15 Guide guide 16 Suction pipe 17 Collection means 18, 18a, 18b, 18c, 18d, 18e, 18
f Collection member 19 Suction means 20 Radiation measurement means 21 Analysis control computer 22 Input device 23 Output device 24 Collection member reproduction means 25 Light guide tube (flexible connection means) 26 Joint 27 Reflection mirror 28 Electric field generation means 29 Insulator Reference Signs List 30 ground 31 beam splitter 32 piezo mirror scanner (collecting member reproducing device) 33 piezo mirror scanner (collecting member reproducing device) 34 optical system 35 beam splitter 36 multi-lens 37 multi-bundle optical fiber 38 laser light monitoring means 39 support rod 40 Rotating mechanism 41 Coupling 42 Three-way valve 42a, 42b, 42c Valve 43 Blower means 44 Optical piezo mirror (collecting member reproducing device) 45 Two-way valve 46 λ / 2 plate 47 Lens 48 Polarizing beam splitter 49 Beam splitter 50 Laser Light monitor hand Reference Signs List 51 window 52 two-way valve 53 support expansion and contraction mechanism 54 moving rail 55 window 56 bypass pipe 57 two-way valve 58 insulating stand 59 conductor 60 ground 61 vapor-deposited film / 62 solid scintillator (radiation measuring means) 63 photomultiplier tube 64 insulating stand 65 connection Cable 66 Casing 67 Insulator 68 Solid scintillator (radiation measuring means) 69 Wavelength shifter 70 Optical fiber 71 Evaporated film 72 Glass surface 73 Ferroelectric multilayer film (collecting member) 74 Insulating table

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-199614 (JP, A) JP-A-63-50736 (JP, A) JP-A-9-211134 (JP, A) JP-A-10-108 288670 (JP, A) JP-A-4-168400 (JP, A) JP-A-4-142488 (JP, A) JP-A-7-209491 (JP, A) JP-A 8-110396 (JP, A) WO 96/6694 (WO, A1) WO 95/35575 (WO, A1) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01T 1/169

Claims (6)

(57) [Claims] 1. A laser light irradiating means for irradiating a contaminant adhered to the surface of an inspection object with a laser beam to atomize the contaminant and desorb the contaminant, and collecting the contaminant desorbed from the inspection object. Collecting means, and radiation measuring means for measuring radiation emitted from contaminants collected by the collecting means, the inspection of the surface contamination site and the surface contamination density of the inspection object in a non-contact manner A non-contact surface contamination inspection device, wherein the collection means comprises: a solid collection member for directly attaching contaminant fine particles desorbed from the inspection target on its surface; An adsorbing mechanism for adsorbing the contaminant fine particles desorbed from the collecting member on the collecting member, and a collecting member regenerating means for regenerating the collecting member by desorbing the contaminant adhering to the collecting member by laser light irradiation Non-contact table characterized by comprising: Surface contamination inspection device. 2. The non-contact type surface contamination inspection apparatus according to claim 1, wherein the laser light irradiation unit shapes the cross-sectional shape of the laser light applied to the surface of the inspection object into a circle, an ellipse, or a rectangle. A non-contact type surface contamination inspection apparatus, comprising: an optical system for making the energy density distribution of the laser beam uniform. 3. The non-contact type surface contamination inspection apparatus according to claim 1, wherein a suction means for sucking and collecting contaminants detached from a surface of the inspection object together with surrounding air, and suction of the suction means. With a guide in the mouth to guide the contaminants,
A collection unit is provided in the suction path of the suction unit, and a light transmitting unit is provided in the suction path. A collection member provided in the suction path faces the contaminant in the axial direction and sucks the light. A non-contact type surface contamination inspection apparatus, wherein the apparatus is installed at an angle with respect to a laser beam from a transmission part. 4. The non-contact type surface contamination inspection apparatus according to claim 1, wherein the collection unit includes an electric field generation unit that generates an electric field between the inspection object and the collection member. Non-contact type surface contamination inspection equipment. 5. A contaminant adhering to the surface of an inspection object is atomized by laser light irradiation to be desorbed, and the contaminant desorbed from the inspection object is collected. A non-contact type surface contamination inspection method for measuring emitted radiation and performing non-contact surface contamination site and surface contamination density of the inspection object, wherein the contaminants detached from the inspection object are solid. The sample is directly collected on the collecting member, the surface contamination of the inspection object is inspected based on the collected contaminant, and after the radiation measurement is completed, the contaminant attached to the collecting member is desorbed. A non-contact type surface contamination inspection method characterized by regenerating a member. 6. The non-contact type surface contamination inspection method according to claim 5, wherein in the step of regenerating the collecting member, an optically transparent collecting member is used. A non-contact type surface contamination inspection method, comprising irradiating a laser beam from at least one of a direction toward a collecting surface and a direction toward a collecting surface of a collecting member to which contaminants are not attached.