JP7899525B2 - 超音波センサー - Google Patents

超音波センサー

Info

Publication number
JP7899525B2
JP7899525B2 JP2021175683A JP2021175683A JP7899525B2 JP 7899525 B2 JP7899525 B2 JP 7899525B2 JP 2021175683 A JP2021175683 A JP 2021175683A JP 2021175683 A JP2021175683 A JP 2021175683A JP 7899525 B2 JP7899525 B2 JP 7899525B2
Authority
JP
Japan
Prior art keywords
ultrasonic
less
khz
ultrasonic waves
waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021175683A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023065084A5 (enExample
JP2023065084A (ja
Inventor
誠治 泉尾
栄治 大澤
満 宮坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2021175683A priority Critical patent/JP7899525B2/ja
Priority to CN202211303636.4A priority patent/CN116027310A/zh
Priority to US17/973,592 priority patent/US12661690B2/en
Publication of JP2023065084A publication Critical patent/JP2023065084A/ja
Publication of JP2023065084A5 publication Critical patent/JP2023065084A5/ja
Application granted granted Critical
Publication of JP7899525B2 publication Critical patent/JP7899525B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
    • G01S15/06—Systems determining the position data of a target
    • G01S15/08—Systems for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521—Constructional features
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • G10K9/125—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2021175683A 2021-10-27 2021-10-27 超音波センサー Active JP7899525B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021175683A JP7899525B2 (ja) 2021-10-27 2021-10-27 超音波センサー
CN202211303636.4A CN116027310A (zh) 2021-10-27 2022-10-24 超声波传感器
US17/973,592 US12661690B2 (en) 2021-10-27 2022-10-26 Ultrasonic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021175683A JP7899525B2 (ja) 2021-10-27 2021-10-27 超音波センサー

Publications (3)

Publication Number Publication Date
JP2023065084A JP2023065084A (ja) 2023-05-12
JP2023065084A5 JP2023065084A5 (enExample) 2024-10-18
JP7899525B2 true JP7899525B2 (ja) 2026-08-04

Family

ID=86055599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021175683A Active JP7899525B2 (ja) 2021-10-27 2021-10-27 超音波センサー

Country Status (3)

Country Link
US (1) US12661690B2 (enExample)
JP (1) JP7899525B2 (enExample)
CN (1) CN116027310A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI877754B (zh) * 2023-08-29 2025-03-21 大陸商茂丞(鄭州)超聲科技有限公司 近距超聲波感測裝置及應用其之近距超聲波感測系統
CN122387341A (zh) * 2026-06-12 2026-07-14 山东大学 自激发声场式非接触传感器的传感方法及非接触触控设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005167820A (ja) 2003-12-04 2005-06-23 Osaka Industrial Promotion Organization 超音波センサ素子及び超音波アレイセンサ装置の共振周波数の調整方法及び調整装置
JP2017067753A (ja) 2015-09-29 2017-04-06 株式会社東京精密 ワーク識別装置及び識別方法
JP2020150476A (ja) 2019-03-15 2020-09-17 セイコーエプソン株式会社 超音波デバイス、超音波装置
JP2021057752A (ja) 2019-09-30 2021-04-08 セイコーエプソン株式会社 超音波デバイス、及び電子機器
JP2021144987A (ja) 2020-03-10 2021-09-24 地方独立行政法人大阪産業技術研究所 超音波センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4192672B2 (ja) 2003-05-16 2008-12-10 株式会社日本自動車部品総合研究所 超音波センサ
US9772314B2 (en) * 2013-12-18 2017-09-26 Seiko Epson Corporation Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor
JP7024549B2 (ja) * 2018-03-28 2022-02-24 セイコーエプソン株式会社 超音波センサー、及び超音波装置
JP2021085814A (ja) * 2019-11-29 2021-06-03 セイコーエプソン株式会社 超音波装置、検出装置、及び印刷装置
US11526018B2 (en) * 2021-03-09 2022-12-13 Meta Platforms Technologies, Llc Phased array of ultrasound transducers for depth sensing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005167820A (ja) 2003-12-04 2005-06-23 Osaka Industrial Promotion Organization 超音波センサ素子及び超音波アレイセンサ装置の共振周波数の調整方法及び調整装置
JP2017067753A (ja) 2015-09-29 2017-04-06 株式会社東京精密 ワーク識別装置及び識別方法
JP2020150476A (ja) 2019-03-15 2020-09-17 セイコーエプソン株式会社 超音波デバイス、超音波装置
JP2021057752A (ja) 2019-09-30 2021-04-08 セイコーエプソン株式会社 超音波デバイス、及び電子機器
JP2021144987A (ja) 2020-03-10 2021-09-24 地方独立行政法人大阪産業技術研究所 超音波センサ

Also Published As

Publication number Publication date
US20230129454A1 (en) 2023-04-27
CN116027310A (zh) 2023-04-28
US12661690B2 (en) 2026-06-23
JP2023065084A (ja) 2023-05-12

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241009

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20241009

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20250716

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250826

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251016

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20260203

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260407

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260623

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260706

R150 Certificate of patent or registration of utility model

Ref document number: 7899525

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150