JP7832944B2 - 光リレーシステム及びその使用方法及びその製造方法 - Google Patents

光リレーシステム及びその使用方法及びその製造方法

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Publication number
JP7832944B2
JP7832944B2 JP2023534662A JP2023534662A JP7832944B2 JP 7832944 B2 JP7832944 B2 JP 7832944B2 JP 2023534662 A JP2023534662 A JP 2023534662A JP 2023534662 A JP2023534662 A JP 2023534662A JP 7832944 B2 JP7832944 B2 JP 7832944B2
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Japan
Prior art keywords
positioner
lens
optical
laser energy
energy beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023534662A
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English (en)
Japanese (ja)
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JP2023553891A (ja
JP2023553891A5 (https=
Inventor
ブルックハイザー，ジェームス
クライネルト，ヤン
リヒター，ジェレッド
ウンラート，マーク
Original Assignee
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
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Publication of JP2023553891A5 publication Critical patent/JP2023553891A5/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/023—Catoptric systems, e.g. image erecting and reversing system for extending or folding an optical path, e.g. delay lines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/12—Reflex reflectors
    • G02B5/122—Reflex reflectors cube corner, trihedral or triple reflector type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lenses (AREA)
JP2023534662A 2020-12-08 2021-11-23 光リレーシステム及びその使用方法及びその製造方法 Active JP7832944B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063122573P 2020-12-08 2020-12-08
US63/122,573 2020-12-08
PCT/US2021/060478 WO2022125305A1 (en) 2020-12-08 2021-11-23 Optical relay system and methods of use and manufacture

Publications (3)

Publication Number Publication Date
JP2023553891A JP2023553891A (ja) 2023-12-26
JP2023553891A5 JP2023553891A5 (https=) 2024-10-18
JP7832944B2 true JP7832944B2 (ja) 2026-03-18

Family

ID=81973931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023534662A Active JP7832944B2 (ja) 2020-12-08 2021-11-23 光リレーシステム及びその使用方法及びその製造方法

Country Status (7)

Country Link
US (1) US20230390866A1 (https=)
EP (1) EP4260131A4 (https=)
JP (1) JP7832944B2 (https=)
KR (1) KR20230113530A (https=)
CN (1) CN116348799A (https=)
TW (1) TW202227873A (https=)
WO (1) WO2022125305A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250370247A1 (en) * 2022-09-28 2025-12-04 Asml Netherlands B.V. Systems for path compensation with a moving objective
CN115972570B (zh) * 2022-12-19 2025-10-28 深圳市易造三维科技有限公司 一种直线扫描的光固化3d打印机
KR20260041686A (ko) * 2023-07-28 2026-03-27 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 이미지 위치 제어를 위한 배율-보상 릴레이
CN117031695B (zh) * 2023-08-21 2024-02-09 东莞锐视光电科技有限公司 光刻镜头装置
US12497899B1 (en) * 2024-06-14 2025-12-16 General Electric Company Preventing abnormal fan blade deflection or fan flutter with retroreflectors

Citations (3)

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JP2010099667A (ja) 2008-10-21 2010-05-06 Disco Abrasive Syst Ltd 光学系、レーザ加工装置およびスキャン装置
CN102481664A (zh) 2009-05-28 2012-05-30 伊雷克托科学工业股份有限公司 应用于介电质或其它材料的激光处理中的声光偏转器
JP2017504483A (ja) 2014-01-15 2017-02-09 フラウンホーファー−ゲゼルシャフト ツゥア フェアデルング デア アンゲヴァンドテン フォァシュング エー．ファウ． 表面のレーザ加工のための機械加工装置及び方法

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US6264328B1 (en) * 1999-10-21 2001-07-24 University Of Rochester Wavefront sensor with off-axis illumination
JP3751920B2 (ja) * 2002-08-23 2006-03-08 Ｎｅｃアクセステクニカ株式会社 読取モジュール
TWI348408B (en) * 2004-04-28 2011-09-11 Olympus Corp Laser processing device
US20080241425A1 (en) * 2007-03-30 2008-10-02 Matsushita Electric Industrial Co., Ltd. System and method to reduce redeposition of ablated material
JP5692969B2 (ja) * 2008-09-01 2015-04-01 浜松ホトニクス株式会社 収差補正方法、この収差補正方法を用いたレーザ加工方法、この収差補正方法を用いたレーザ照射方法、収差補正装置、及び、収差補正プログラム
US8680430B2 (en) * 2008-12-08 2014-03-25 Electro Scientific Industries, Inc. Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features
US9429742B1 (en) * 2011-01-04 2016-08-30 Nlight, Inc. High power laser imaging systems
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JP6203022B2 (ja) * 2013-12-04 2017-09-27 オリンパス株式会社 走査型顕微鏡
JP6465551B2 (ja) * 2014-02-20 2019-02-06 株式会社トーメーコーポレーション 光干渉眼寸法測定装置
JP5743123B1 (ja) * 2014-03-14 2015-07-01 株式会社東京精密 レーザーダイシング装置及びダイシング方法
JP6340923B2 (ja) * 2014-06-02 2018-06-13 コニカミノルタ株式会社 ズームレンズ，撮像光学装置及びデジタル機器
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Publication number Priority date Publication date Assignee Title
JP2010099667A (ja) 2008-10-21 2010-05-06 Disco Abrasive Syst Ltd 光学系、レーザ加工装置およびスキャン装置
CN102481664A (zh) 2009-05-28 2012-05-30 伊雷克托科学工业股份有限公司 应用于介电质或其它材料的激光处理中的声光偏转器
JP2012528011A (ja) 2009-05-28 2012-11-12 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 誘電体又は他の材料のレーザ加工における音響光学偏向器の適用
JP2017504483A (ja) 2014-01-15 2017-02-09 フラウンホーファー−ゲゼルシャフト ツゥア フェアデルング デア アンゲヴァンドテン フォァシュング エー．ファウ． 表面のレーザ加工のための機械加工装置及び方法

Also Published As

Publication number Publication date
CN116348799A (zh) 2023-06-27
JP2023553891A (ja) 2023-12-26
US20230390866A1 (en) 2023-12-07
EP4260131A4 (en) 2024-11-20
TW202227873A (zh) 2022-07-16
KR20230113530A (ko) 2023-07-31
WO2022125305A1 (en) 2022-06-16
EP4260131A1 (en) 2023-10-18

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