CN116348799A - 光学中继系统以及使用和制造方法 - Google Patents

光学中继系统以及使用和制造方法 Download PDF

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Publication number
CN116348799A
CN116348799A CN202180072040.5A CN202180072040A CN116348799A CN 116348799 A CN116348799 A CN 116348799A CN 202180072040 A CN202180072040 A CN 202180072040A CN 116348799 A CN116348799 A CN 116348799A
Authority
CN
China
Prior art keywords
lens
positioner
optical
optical relay
relay system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180072040.5A
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English (en)
Chinese (zh)
Inventor
詹姆斯·布鲁克伊塞
杰恩·克雷能特
杰瑞德·瑞智特尔
马克·昂瑞斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Irecto Science Industry Co ltd
Original Assignee
Irecto Science Industry Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irecto Science Industry Co ltd filed Critical Irecto Science Industry Co ltd
Publication of CN116348799A publication Critical patent/CN116348799A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/12—Reflex reflectors
    • G02B5/122—Reflex reflectors cube corner, trihedral or triple reflector type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/023—Catoptric systems, e.g. image erecting and reversing system for extending or folding an optical path, e.g. delay lines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lenses (AREA)
CN202180072040.5A 2020-12-08 2021-11-23 光学中继系统以及使用和制造方法 Pending CN116348799A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063122573P 2020-12-08 2020-12-08
US63/122,573 2020-12-08
PCT/US2021/060478 WO2022125305A1 (en) 2020-12-08 2021-11-23 Optical relay system and methods of use and manufacture

Publications (1)

Publication Number Publication Date
CN116348799A true CN116348799A (zh) 2023-06-27

Family

ID=81973931

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180072040.5A Pending CN116348799A (zh) 2020-12-08 2021-11-23 光学中继系统以及使用和制造方法

Country Status (7)

Country Link
US (1) US20230390866A1 (https=)
EP (1) EP4260131A4 (https=)
JP (1) JP7832944B2 (https=)
KR (1) KR20230113530A (https=)
CN (1) CN116348799A (https=)
TW (1) TW202227873A (https=)
WO (1) WO2022125305A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250370247A1 (en) * 2022-09-28 2025-12-04 Asml Netherlands B.V. Systems for path compensation with a moving objective
CN115972570B (zh) * 2022-12-19 2025-10-28 深圳市易造三维科技有限公司 一种直线扫描的光固化3d打印机
KR20260041686A (ko) * 2023-07-28 2026-03-27 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 이미지 위치 제어를 위한 배율-보상 릴레이
CN117031695B (zh) * 2023-08-21 2024-02-09 东莞锐视光电科技有限公司 光刻镜头装置
US12497899B1 (en) * 2024-06-14 2025-12-16 General Electric Company Preventing abnormal fan blade deflection or fan flutter with retroreflectors

Citations (6)

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CN1384720A (zh) * 1999-10-21 2002-12-11 罗切斯特大学 带有离轴照明的波前传感器
CN1486080A (zh) * 2002-08-23 2004-03-31 �ձ�������ʽ���� 扫描模块
JP2010099667A (ja) * 2008-10-21 2010-05-06 Disco Abrasive Syst Ltd 光学系、レーザ加工装置およびスキャン装置
CN102449863A (zh) * 2009-05-28 2012-05-09 伊雷克托科学工业股份有限公司 使用具有靶特征的激光射束的透过透镜校准的激光处理系统
US20150230705A1 (en) * 2014-02-20 2015-08-20 Tomey Corporation Ophthalmologic apparatus
JP2018055113A (ja) * 2017-11-06 2018-04-05 大学共同利用機関法人自然科学研究機構 補償光学系及び光学装置

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US5837962A (en) * 1996-07-15 1998-11-17 Overbeck; James W. Faster laser marker employing acousto-optic deflection
TWI348408B (en) * 2004-04-28 2011-09-11 Olympus Corp Laser processing device
US20080241425A1 (en) * 2007-03-30 2008-10-02 Matsushita Electric Industrial Co., Ltd. System and method to reduce redeposition of ablated material
JP5692969B2 (ja) * 2008-09-01 2015-04-01 浜松ホトニクス株式会社 収差補正方法、この収差補正方法を用いたレーザ加工方法、この収差補正方法を用いたレーザ照射方法、収差補正装置、及び、収差補正プログラム
US8680430B2 (en) * 2008-12-08 2014-03-25 Electro Scientific Industries, Inc. Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features
US9429742B1 (en) * 2011-01-04 2016-08-30 Nlight, Inc. High power laser imaging systems
EP2772922B1 (en) * 2011-10-25 2017-10-11 Eisuke Minehara Laser decontamination device
EP2906985B1 (en) * 2012-10-12 2022-03-09 Thorlabs, Inc. Compact, low dispersion, and low aberration adaptive optics scanning system
JP6203022B2 (ja) * 2013-12-04 2017-09-27 オリンパス株式会社 走査型顕微鏡
DE102014200633B3 (de) 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
JP5743123B1 (ja) * 2014-03-14 2015-07-01 株式会社東京精密 レーザーダイシング装置及びダイシング方法
JP6340923B2 (ja) * 2014-06-02 2018-06-13 コニカミノルタ株式会社 ズームレンズ，撮像光学装置及びデジタル機器
US10620447B2 (en) * 2017-01-19 2020-04-14 Cognex Corporation System and method for reduced-speckle laser line generation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1384720A (zh) * 1999-10-21 2002-12-11 罗切斯特大学 带有离轴照明的波前传感器
CN1486080A (zh) * 2002-08-23 2004-03-31 �ձ�������ʽ���� 扫描模块
JP2010099667A (ja) * 2008-10-21 2010-05-06 Disco Abrasive Syst Ltd 光学系、レーザ加工装置およびスキャン装置
CN102449863A (zh) * 2009-05-28 2012-05-09 伊雷克托科学工业股份有限公司 使用具有靶特征的激光射束的透过透镜校准的激光处理系统
US20150230705A1 (en) * 2014-02-20 2015-08-20 Tomey Corporation Ophthalmologic apparatus
JP2018055113A (ja) * 2017-11-06 2018-04-05 大学共同利用機関法人自然科学研究機構 補償光学系及び光学装置

Also Published As

Publication number Publication date
JP2023553891A (ja) 2023-12-26
US20230390866A1 (en) 2023-12-07
EP4260131A4 (en) 2024-11-20
TW202227873A (zh) 2022-07-16
JP7832944B2 (ja) 2026-03-18
KR20230113530A (ko) 2023-07-31
WO2022125305A1 (en) 2022-06-16
EP4260131A1 (en) 2023-10-18

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