KR20230113530A - 광학 릴레이 시스템과 사용 및 제조 방법 - Google Patents

광학 릴레이 시스템과 사용 및 제조 방법 Download PDF

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Publication number
KR20230113530A
KR20230113530A KR1020237012712A KR20237012712A KR20230113530A KR 20230113530 A KR20230113530 A KR 20230113530A KR 1020237012712 A KR1020237012712 A KR 1020237012712A KR 20237012712 A KR20237012712 A KR 20237012712A KR 20230113530 A KR20230113530 A KR 20230113530A
Authority
KR
South Korea
Prior art keywords
lens
positioner
optical
relay system
optical relay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237012712A
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English (en)
Korean (ko)
Inventor
제임스 브룩카이저
잔 클라이너트
제러드 리히터
마크 언라쓰
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20230113530A publication Critical patent/KR20230113530A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/023—Catoptric systems, e.g. image erecting and reversing system for extending or folding an optical path, e.g. delay lines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/12—Reflex reflectors
    • G02B5/122—Reflex reflectors cube corner, trihedral or triple reflector type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lenses (AREA)
KR1020237012712A 2020-12-08 2021-11-23 광학 릴레이 시스템과 사용 및 제조 방법 Pending KR20230113530A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063122573P 2020-12-08 2020-12-08
US63/122,573 2020-12-08
PCT/US2021/060478 WO2022125305A1 (en) 2020-12-08 2021-11-23 Optical relay system and methods of use and manufacture

Publications (1)

Publication Number Publication Date
KR20230113530A true KR20230113530A (ko) 2023-07-31

Family

ID=81973931

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237012712A Pending KR20230113530A (ko) 2020-12-08 2021-11-23 광학 릴레이 시스템과 사용 및 제조 방법

Country Status (7)

Country Link
US (1) US20230390866A1 (https=)
EP (1) EP4260131A4 (https=)
JP (1) JP7832944B2 (https=)
KR (1) KR20230113530A (https=)
CN (1) CN116348799A (https=)
TW (1) TW202227873A (https=)
WO (1) WO2022125305A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250370247A1 (en) * 2022-09-28 2025-12-04 Asml Netherlands B.V. Systems for path compensation with a moving objective
CN115972570B (zh) * 2022-12-19 2025-10-28 深圳市易造三维科技有限公司 一种直线扫描的光固化3d打印机
KR20260041686A (ko) * 2023-07-28 2026-03-27 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 이미지 위치 제어를 위한 배율-보상 릴레이
CN117031695B (zh) * 2023-08-21 2024-02-09 东莞锐视光电科技有限公司 光刻镜头装置
US12497899B1 (en) * 2024-06-14 2025-12-16 General Electric Company Preventing abnormal fan blade deflection or fan flutter with retroreflectors

Family Cites Families (19)

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US5837962A (en) * 1996-07-15 1998-11-17 Overbeck; James W. Faster laser marker employing acousto-optic deflection
US6264328B1 (en) * 1999-10-21 2001-07-24 University Of Rochester Wavefront sensor with off-axis illumination
JP3751920B2 (ja) * 2002-08-23 2006-03-08 Ｎｅｃアクセステクニカ株式会社 読取モジュール
TWI348408B (en) * 2004-04-28 2011-09-11 Olympus Corp Laser processing device
US20080241425A1 (en) * 2007-03-30 2008-10-02 Matsushita Electric Industrial Co., Ltd. System and method to reduce redeposition of ablated material
JP5692969B2 (ja) * 2008-09-01 2015-04-01 浜松ホトニクス株式会社 収差補正方法、この収差補正方法を用いたレーザ加工方法、この収差補正方法を用いたレーザ照射方法、収差補正装置、及び、収差補正プログラム
JP5222088B2 (ja) 2008-10-21 2013-06-26 株式会社ディスコ 光学系、レーザ加工装置およびスキャン装置
US8680430B2 (en) * 2008-12-08 2014-03-25 Electro Scientific Industries, Inc. Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features
TWI594828B (zh) 2009-05-28 2017-08-11 伊雷克托科學工業股份有限公司 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法
US9429742B1 (en) * 2011-01-04 2016-08-30 Nlight, Inc. High power laser imaging systems
EP2772922B1 (en) * 2011-10-25 2017-10-11 Eisuke Minehara Laser decontamination device
EP2906985B1 (en) * 2012-10-12 2022-03-09 Thorlabs, Inc. Compact, low dispersion, and low aberration adaptive optics scanning system
JP6203022B2 (ja) * 2013-12-04 2017-09-27 オリンパス株式会社 走査型顕微鏡
DE102014200633B3 (de) 2014-01-15 2015-05-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche
JP6465551B2 (ja) * 2014-02-20 2019-02-06 株式会社トーメーコーポレーション 光干渉眼寸法測定装置
JP5743123B1 (ja) * 2014-03-14 2015-07-01 株式会社東京精密 レーザーダイシング装置及びダイシング方法
JP6340923B2 (ja) * 2014-06-02 2018-06-13 コニカミノルタ株式会社 ズームレンズ，撮像光学装置及びデジタル機器
US10620447B2 (en) * 2017-01-19 2020-04-14 Cognex Corporation System and method for reduced-speckle laser line generation
JP6693030B2 (ja) * 2017-11-06 2020-05-13 大学共同利用機関法人自然科学研究機構 補償光学系及び光学装置

Also Published As

Publication number Publication date
CN116348799A (zh) 2023-06-27
JP2023553891A (ja) 2023-12-26
US20230390866A1 (en) 2023-12-07
EP4260131A4 (en) 2024-11-20
TW202227873A (zh) 2022-07-16
JP7832944B2 (ja) 2026-03-18
WO2022125305A1 (en) 2022-06-16
EP4260131A1 (en) 2023-10-18

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