JP7825812B2 - 水晶振動素子及びそれを備えた水晶振動子 - Google Patents

水晶振動素子及びそれを備えた水晶振動子

Info

Publication number
JP7825812B2
JP7825812B2 JP2025509686A JP2025509686A JP7825812B2 JP 7825812 B2 JP7825812 B2 JP 7825812B2 JP 2025509686 A JP2025509686 A JP 2025509686A JP 2025509686 A JP2025509686 A JP 2025509686A JP 7825812 B2 JP7825812 B2 JP 7825812B2
Authority
JP
Japan
Prior art keywords
axis
main surface
quartz
substrate
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2025509686A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024202186A5 (https=
JPWO2024202186A1 (https=
Inventor
大輝 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2024202186A1 publication Critical patent/JPWO2024202186A1/ja
Publication of JPWO2024202186A5 publication Critical patent/JPWO2024202186A5/ja
Application granted granted Critical
Publication of JP7825812B2 publication Critical patent/JP7825812B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2025509686A 2023-03-31 2023-11-08 水晶振動素子及びそれを備えた水晶振動子 Active JP7825812B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023058608 2023-03-31
JP2023058608 2023-03-31
PCT/JP2023/040261 WO2024202186A1 (ja) 2023-03-31 2023-11-08 水晶振動素子及びそれを備えた水晶振動子

Publications (3)

Publication Number Publication Date
JPWO2024202186A1 JPWO2024202186A1 (https=) 2024-10-03
JPWO2024202186A5 JPWO2024202186A5 (https=) 2025-10-28
JP7825812B2 true JP7825812B2 (ja) 2026-03-09

Family

ID=92903740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025509686A Active JP7825812B2 (ja) 2023-03-31 2023-11-08 水晶振動素子及びそれを備えた水晶振動子

Country Status (4)

Country Link
US (1) US20250357913A1 (https=)
JP (1) JP7825812B2 (https=)
CN (1) CN120858525A (https=)
WO (1) WO2024202186A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013258519A (ja) 2012-06-12 2013-12-26 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
JP2016039401A (ja) 2014-08-05 2016-03-22 日本電波工業株式会社 圧電振動片及び圧電デバイス
WO2020203044A1 (ja) 2019-03-29 2020-10-08 株式会社村田製作所 振動子及び振動子の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013258519A (ja) 2012-06-12 2013-12-26 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
JP2016039401A (ja) 2014-08-05 2016-03-22 日本電波工業株式会社 圧電振動片及び圧電デバイス
WO2020203044A1 (ja) 2019-03-29 2020-10-08 株式会社村田製作所 振動子及び振動子の製造方法

Also Published As

Publication number Publication date
US20250357913A1 (en) 2025-11-20
CN120858525A (zh) 2025-10-28
JPWO2024202186A1 (https=) 2024-10-03
WO2024202186A1 (ja) 2024-10-03

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