JP7807091B2 - 磁気抵抗効果素子、磁気メモリ及び人工知能システム - Google Patents

磁気抵抗効果素子、磁気メモリ及び人工知能システム

Info

Publication number
JP7807091B2
JP7807091B2 JP2023507164A JP2023507164A JP7807091B2 JP 7807091 B2 JP7807091 B2 JP 7807091B2 JP 2023507164 A JP2023507164 A JP 2023507164A JP 2023507164 A JP2023507164 A JP 2023507164A JP 7807091 B2 JP7807091 B2 JP 7807091B2
Authority
JP
Japan
Prior art keywords
layer
heavy metal
ferromagnetic
metal layer
magnetization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023507164A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022196741A5 (https=
JPWO2022196741A1 (https=
Inventor
好昭 齋藤
正二 池田
哲郎 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku University NUC
Original Assignee
Tohoku University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku University NUC filed Critical Tohoku University NUC
Publication of JPWO2022196741A1 publication Critical patent/JPWO2022196741A1/ja
Publication of JPWO2022196741A5 publication Critical patent/JPWO2022196741A5/ja
Application granted granted Critical
Publication of JP7807091B2 publication Critical patent/JP7807091B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/06Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/063Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
    • G06N3/065Analogue means
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/26Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/32Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/3213Exchange coupling of magnetic semiconductor multilayers, e.g. MnSe/ZnSe superlattices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H10B61/20Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
    • H10B61/22Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/40Devices controlled by magnetic fields
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details
    • H10N50/85Materials of the active region

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biomedical Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Artificial Intelligence (AREA)
  • Molecular Biology (AREA)
  • Software Systems (AREA)
  • Computational Linguistics (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • General Health & Medical Sciences (AREA)
  • Neurology (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)
JP2023507164A 2021-03-17 2022-03-16 磁気抵抗効果素子、磁気メモリ及び人工知能システム Active JP7807091B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021044188 2021-03-17
JP2021044188 2021-03-17
PCT/JP2022/012083 WO2022196741A1 (ja) 2021-03-17 2022-03-16 磁気抵抗効果素子、磁気メモリ及び人工知能システム

Publications (3)

Publication Number Publication Date
JPWO2022196741A1 JPWO2022196741A1 (https=) 2022-09-22
JPWO2022196741A5 JPWO2022196741A5 (https=) 2025-02-06
JP7807091B2 true JP7807091B2 (ja) 2026-01-27

Family

ID=83321089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023507164A Active JP7807091B2 (ja) 2021-03-17 2022-03-16 磁気抵抗効果素子、磁気メモリ及び人工知能システム

Country Status (5)

Country Link
US (1) US20240244983A1 (https=)
JP (1) JP7807091B2 (https=)
KR (1) KR102944053B1 (https=)
CN (1) CN116998021A (https=)
WO (1) WO2022196741A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12185639B2 (en) * 2021-12-23 2024-12-31 Northwestern University Antiferromagnetic memory device featuring tunneling magnetoresistance readout and current-induced writing of information
CN119156121B (zh) * 2024-11-11 2025-04-18 青岛海存微电子有限公司 半导体器件及其制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016021468A1 (ja) 2014-08-08 2016-02-11 国立大学法人東北大学 磁気抵抗効果素子、及び磁気メモリ装置
JP2017059634A (ja) 2015-09-15 2017-03-23 株式会社東芝 磁気メモリ
US20170229160A1 (en) 2016-01-20 2017-08-10 The Johns Hopkins University Heavy metal multilayers for switching of magnetic unit via electrical current without magnetic field, method and applications
US20170330070A1 (en) 2016-02-28 2017-11-16 Purdue Research Foundation Spin orbit torque based electronic neuron
WO2019203132A1 (ja) 2018-04-18 2019-10-24 国立大学法人東北大学 磁気抵抗効果素子、磁気メモリ装置並びに磁気メモリ装置の書き込み及び読み出し方法
JP2020155488A (ja) 2019-03-18 2020-09-24 キオクシア株式会社 磁気記憶装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016159017A1 (ja) 2015-03-31 2016-10-06 国立大学法人東北大学 磁気抵抗効果素子、磁気メモリ装置、製造方法、動作方法、及び集積回路
JP7267623B2 (ja) 2018-02-13 2023-05-02 国立大学法人東北大学 磁気抵抗効果素子及び磁気メモリ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016021468A1 (ja) 2014-08-08 2016-02-11 国立大学法人東北大学 磁気抵抗効果素子、及び磁気メモリ装置
JP2017059634A (ja) 2015-09-15 2017-03-23 株式会社東芝 磁気メモリ
US20170229160A1 (en) 2016-01-20 2017-08-10 The Johns Hopkins University Heavy metal multilayers for switching of magnetic unit via electrical current without magnetic field, method and applications
US20170330070A1 (en) 2016-02-28 2017-11-16 Purdue Research Foundation Spin orbit torque based electronic neuron
WO2019203132A1 (ja) 2018-04-18 2019-10-24 国立大学法人東北大学 磁気抵抗効果素子、磁気メモリ装置並びに磁気メモリ装置の書き込み及び読み出し方法
JP2020155488A (ja) 2019-03-18 2020-09-24 キオクシア株式会社 磁気記憶装置

Also Published As

Publication number Publication date
US20240244983A1 (en) 2024-07-18
WO2022196741A1 (ja) 2022-09-22
JPWO2022196741A1 (https=) 2022-09-22
KR20230158535A (ko) 2023-11-20
KR102944053B1 (ko) 2026-03-25
CN116998021A (zh) 2023-11-03

Similar Documents

Publication Publication Date Title
US10622550B2 (en) Magnetoresistance effect element including a recording layer with perpendicular anisotropy and a bias layer comprised of an antiferromagnetic material, magnetic memory device, manufacturing method, operation method, and integrated circuit
US8804414B2 (en) Spin torque transfer memory cell structures and methods
US11610614B2 (en) Magnetoresistive element, magnetic memory device, and writing and reading method for magnetic memory device
JP4398127B2 (ja) 記憶機能を有する3層構造磁気スピン極性化装置と当該装置を使用した記憶素子
US11532667B2 (en) Magnetic laminated film, magnetic memory element, and magnetic memory
JP4682585B2 (ja) 記憶素子及びメモリ
US7860351B2 (en) Spin-injection magnetoresistance effect element
CN101923889B (zh) 存储装置和存储器
US20100102369A1 (en) Ferroelectric memory with magnetoelectric element
CN103003883A (zh) 用于场复位自旋力矩mram的结构和方法
US12236988B2 (en) Magnetic laminated film, magnetic memory element, magnetic memory, and artificial intelligence system
US11152048B1 (en) Tunneling metamagnetic resistance memory device and methods of operating the same
US11200934B2 (en) Tunneling metamagnetic resistance memory device and methods of operating the same
JP7807091B2 (ja) 磁気抵抗効果素子、磁気メモリ及び人工知能システム
WO2019216099A1 (ja) 磁気抵抗効果素子、磁気メモリアレイ、磁気メモリ装置及び磁気抵抗効果素子の書き込み方法
Jaiswal et al. Energy-efficient memory using magneto-electric switching of ferromagnets
CN113056826B (zh) 垂直sot mram
WO2025205890A1 (ja) 磁気抵抗効果素子及び集積回路
JP2005260175A (ja) 磁気メモリ及びその記録方法

Legal Events

Date Code Title Description
A80 Written request to apply exceptions to lack of novelty of invention

Free format text: JAPANESE INTERMEDIATE CODE: A801

Effective date: 20230915

A80 Written request to apply exceptions to lack of novelty of invention

Free format text: JAPANESE INTERMEDIATE CODE: A80

Effective date: 20230915

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231030

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250128

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250128

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260107

R150 Certificate of patent or registration of utility model

Ref document number: 7807091

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150