JP7800707B2 - 弾性波装置 - Google Patents

弾性波装置

Info

Publication number
JP7800707B2
JP7800707B2 JP2024540485A JP2024540485A JP7800707B2 JP 7800707 B2 JP7800707 B2 JP 7800707B2 JP 2024540485 A JP2024540485 A JP 2024540485A JP 2024540485 A JP2024540485 A JP 2024540485A JP 7800707 B2 JP7800707 B2 JP 7800707B2
Authority
JP
Japan
Prior art keywords
electrode
electrode fingers
fingers
wave device
piezoelectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024540485A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024034603A5 (https=
JPWO2024034603A1 (https=
Inventor
克也 大門
翔 永友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2024034603A1 publication Critical patent/JPWO2024034603A1/ja
Publication of JPWO2024034603A5 publication Critical patent/JPWO2024034603A5/ja
Application granted granted Critical
Publication of JP7800707B2 publication Critical patent/JP7800707B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/589—Acoustic mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2024540485A 2022-08-09 2023-08-08 弾性波装置 Active JP7800707B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263396270P 2022-08-09 2022-08-09
US63/396,270 2022-08-09
PCT/JP2023/028910 WO2024034603A1 (ja) 2022-08-09 2023-08-08 弾性波装置

Publications (3)

Publication Number Publication Date
JPWO2024034603A1 JPWO2024034603A1 (https=) 2024-02-15
JPWO2024034603A5 JPWO2024034603A5 (https=) 2025-02-06
JP7800707B2 true JP7800707B2 (ja) 2026-01-16

Family

ID=89851841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024540485A Active JP7800707B2 (ja) 2022-08-09 2023-08-08 弾性波装置

Country Status (5)

Country Link
US (1) US20250119114A1 (https=)
JP (1) JP7800707B2 (https=)
KR (1) KR20250016295A (https=)
CN (1) CN119605083A (https=)
WO (1) WO2024034603A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025204159A1 (ja) * 2024-03-25 2025-10-02 株式会社村田製作所 弾性波装置及びフィルタ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022067077A (ja) 2020-10-19 2022-05-02 コミサリヤ・ア・レネルジ・アトミク・エ・オ・エネルジ・アルテルナテイブ 調整可能共振周波数を有する電気機械デバイス

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3208936B2 (ja) * 1992-09-09 2001-09-17 株式会社日立製作所 弾性表面波装置およびそれに接続された回路およびその測定方法および通信装置
JPH09167935A (ja) * 1995-12-15 1997-06-24 Mitsui Mining & Smelting Co Ltd 弾性表面波変換器
US10491192B1 (en) 2018-06-15 2019-11-26 Resonant Inc. Transversely-excited film bulk acoustic resonator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022067077A (ja) 2020-10-19 2022-05-02 コミサリヤ・ア・レネルジ・アトミク・エ・オ・エネルジ・アルテルナテイブ 調整可能共振周波数を有する電気機械デバイス

Also Published As

Publication number Publication date
CN119605083A (zh) 2025-03-11
WO2024034603A1 (ja) 2024-02-15
JPWO2024034603A1 (https=) 2024-02-15
US20250119114A1 (en) 2025-04-10
KR20250016295A (ko) 2025-02-03

Similar Documents

Publication Publication Date Title
WO2023002858A1 (ja) 弾性波装置及びフィルタ装置
US20250183868A1 (en) Acoustic wave device
WO2022239630A1 (ja) 圧電バルク波装置
WO2023002823A1 (ja) 弾性波装置
WO2024043343A1 (ja) 弾性波装置
US20250167760A1 (en) Acoustic wave device
US20250119114A1 (en) Acoustic wave device
WO2023048144A1 (ja) 弾性波装置
WO2023002790A1 (ja) 弾性波装置
WO2024085127A1 (ja) 弾性波装置
WO2023204272A1 (ja) 弾性波装置
WO2023136293A1 (ja) 弾性波装置
WO2023140354A1 (ja) 弾性波装置及びフィルタ装置
WO2023136291A1 (ja) 弾性波装置
WO2022244635A1 (ja) 圧電バルク波装置
WO2023048140A1 (ja) 弾性波装置
JP7700959B2 (ja) 弾性波装置
US20250112622A1 (en) Acoustic wave device
US20250158591A1 (en) Acoustic wave device
US20250158592A1 (en) Acoustic wave device
US20250183876A1 (en) Acoustic wave device
US20240297634A1 (en) Acoustic wave device
WO2024043299A1 (ja) 弾性波装置
WO2024043345A1 (ja) 弾性波装置
WO2024043347A1 (ja) 弾性波装置及びフィルタ装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241127

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20241127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250902

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251021

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20251202

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20251215

R150 Certificate of patent or registration of utility model

Ref document number: 7800707

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150