JP7792427B2 - 光音響ガスセンサ装置 - Google Patents

光音響ガスセンサ装置

Info

Publication number
JP7792427B2
JP7792427B2 JP2023553604A JP2023553604A JP7792427B2 JP 7792427 B2 JP7792427 B2 JP 7792427B2 JP 2023553604 A JP2023553604 A JP 2023553604A JP 2023553604 A JP2023553604 A JP 2023553604A JP 7792427 B2 JP7792427 B2 JP 7792427B2
Authority
JP
Japan
Prior art keywords
cap
substrate
volume
recess
sensor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023553604A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024508915A (ja
JP2024508915A5 (https=
JPWO2022184553A5 (https=
Inventor
トーマス ユーリンガー，
クリストフ ザルツマン，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensirion AG
Original Assignee
Sensirion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensirion AG filed Critical Sensirion AG
Publication of JP2024508915A publication Critical patent/JP2024508915A/ja
Publication of JP2024508915A5 publication Critical patent/JP2024508915A5/ja
Publication of JPWO2022184553A5 publication Critical patent/JPWO2022184553A5/ja
Application granted granted Critical
Publication of JP7792427B2 publication Critical patent/JP7792427B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G01N29/2425—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics optoacoustic fluid cells therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0221—Portable; cableless; compact; hand-held
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/101—Number of transducers one transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/004—CO or CO2

Landscapes

  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2023553604A 2021-03-05 2022-02-24 光音響ガスセンサ装置 Active JP7792427B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP21161060.5 2021-03-05
EP21161060.5A EP4053540B1 (en) 2021-03-05 2021-03-05 Photoacoustic gas sensor device
PCT/EP2022/054716 WO2022184553A1 (en) 2021-03-05 2022-02-24 Photoacoustic gas sensor device

Publications (4)

Publication Number Publication Date
JP2024508915A JP2024508915A (ja) 2024-02-28
JP2024508915A5 JP2024508915A5 (https=) 2025-04-03
JPWO2022184553A5 JPWO2022184553A5 (https=) 2025-04-03
JP7792427B2 true JP7792427B2 (ja) 2025-12-25

Family

ID=74859360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023553604A Active JP7792427B2 (ja) 2021-03-05 2022-02-24 光音響ガスセンサ装置

Country Status (6)

Country Link
US (1) US20240230519A9 (https=)
EP (2) EP4053540B1 (https=)
JP (1) JP7792427B2 (https=)
KR (1) KR20230152135A (https=)
CN (1) CN117280195A (https=)
WO (1) WO2022184553A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4614134A4 (en) * 2022-11-03 2026-01-28 Hangzhou Sanhua Res Inst Co Ltd GAS DETECTION DEVICE
CN116165146B (zh) * 2023-02-28 2026-04-21 西安交通大学 一种光声光谱式多气体mems微型气体传感器
CN118465056B (zh) * 2024-07-12 2024-11-08 上海先普气体技术有限公司 气体浓度测量装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011252906A (ja) 2010-06-03 2011-12-15 Honeywell Internatl Inc 光音響ガスセンサ用の集積化されたｉｒ源および音響検出器
US20160313288A1 (en) 2015-04-24 2016-10-27 Infineon Technologies Ag Photo-Acoustic Gas Sensor Module Having Light Emitter and Detector Units
WO2018097071A1 (ja) 2016-11-28 2018-05-31 京セラ株式会社 センサ用配線基板、センサ用パッケージおよびセンサ装置
US10302554B2 (en) 2016-06-03 2019-05-28 Ingineon Technologies Ag Acoustic wave detector
WO2021028231A1 (en) 2019-08-09 2021-02-18 Sensirion Ag Photoacoustic gas sensor device
JP2021025923A (ja) 2019-08-07 2021-02-22 新日本無線株式会社 センサ装置およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015002315U1 (de) * 2015-03-27 2015-05-06 Infineon Technologies Ag Gassensor
EP3614126A1 (en) * 2019-05-17 2020-02-26 Sensirion AG Photoacoustic gas sensor device
DE102019134267A1 (de) * 2019-12-13 2021-06-17 Infineon Technologies Ag Photoakustische Detektoreinheit, photoakustischer Sensor und zugehörige Herstellungsverfahren

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011252906A (ja) 2010-06-03 2011-12-15 Honeywell Internatl Inc 光音響ガスセンサ用の集積化されたｉｒ源および音響検出器
US20160313288A1 (en) 2015-04-24 2016-10-27 Infineon Technologies Ag Photo-Acoustic Gas Sensor Module Having Light Emitter and Detector Units
US10302554B2 (en) 2016-06-03 2019-05-28 Ingineon Technologies Ag Acoustic wave detector
WO2018097071A1 (ja) 2016-11-28 2018-05-31 京セラ株式会社 センサ用配線基板、センサ用パッケージおよびセンサ装置
JP2021025923A (ja) 2019-08-07 2021-02-22 新日本無線株式会社 センサ装置およびその製造方法
WO2021028231A1 (en) 2019-08-09 2021-02-18 Sensirion Ag Photoacoustic gas sensor device

Also Published As

Publication number Publication date
EP4053540A1 (en) 2022-09-07
JP2024508915A (ja) 2024-02-28
US20240230519A9 (en) 2024-07-11
KR20230152135A (ko) 2023-11-02
WO2022184553A1 (en) 2022-09-09
EP4302072A1 (en) 2024-01-10
EP4053540B1 (en) 2024-10-16
CN117280195A (zh) 2023-12-22
US20240133801A1 (en) 2024-04-25
EP4053540C0 (en) 2024-10-16

Similar Documents

Publication Publication Date Title
JP7516418B2 (ja) 光音響ガスセンサデバイス
JP7792427B2 (ja) 光音響ガスセンサ装置
US11105776B2 (en) Detector module for a photo-acoustic gas sensor
KR101837073B1 (ko) 광음향 기체 센서를 위한 통합된 ｉｒ 소스 및 음향 검출기
EP4007908B1 (en) Photoacoustic gas sensor device
EP3376778B1 (en) Microphone and method of testing a microphone
US20220236230A1 (en) Photoacoustic gas sensor device
CN112938891B (zh) 用于光声传感器的发射器封装件
JP5451957B2 (ja) 赤外線検出器
JP4925258B2 (ja) 赤外線検出器
WO2024179755A1 (en) Optical transducer package and method for producing an optical transducer package
JPWO2022184553A5 (https=)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250225

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250225

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250325

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20250723

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250805

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251105

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20251118

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20251215

R150 Certificate of patent or registration of utility model

Ref document number: 7792427

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150