JP2024508915A5 - - Google Patents
Info
- Publication number
- JP2024508915A5 JP2024508915A5 JP2023553604A JP2023553604A JP2024508915A5 JP 2024508915 A5 JP2024508915 A5 JP 2024508915A5 JP 2023553604 A JP2023553604 A JP 2023553604A JP 2023553604 A JP2023553604 A JP 2023553604A JP 2024508915 A5 JP2024508915 A5 JP 2024508915A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cap
- volume
- recess
- sensor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP21161060.5A EP4053540B1 (en) | 2021-03-05 | 2021-03-05 | Photoacoustic gas sensor device |
| EP21161060.5 | 2021-03-05 | ||
| PCT/EP2022/054716 WO2022184553A1 (en) | 2021-03-05 | 2022-02-24 | Photoacoustic gas sensor device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2024508915A JP2024508915A (ja) | 2024-02-28 |
| JP2024508915A5 true JP2024508915A5 (https=) | 2025-04-03 |
| JP7792427B2 JP7792427B2 (ja) | 2025-12-25 |
Family
ID=74859360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023553604A Active JP7792427B2 (ja) | 2021-03-05 | 2022-02-24 | 光音響ガスセンサ装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240230519A9 (https=) |
| EP (2) | EP4053540B1 (https=) |
| JP (1) | JP7792427B2 (https=) |
| KR (1) | KR20230152135A (https=) |
| CN (1) | CN117280195A (https=) |
| WO (1) | WO2022184553A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024093662A1 (zh) * | 2022-11-03 | 2024-05-10 | 杭州三花研究院有限公司 | 气体检测装置 |
| CN116165146B (zh) * | 2023-02-28 | 2026-04-21 | 西安交通大学 | 一种光声光谱式多气体mems微型气体传感器 |
| CN118465056B (zh) * | 2024-07-12 | 2024-11-08 | 上海先普气体技术有限公司 | 气体浓度测量装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8695402B2 (en) | 2010-06-03 | 2014-04-15 | Honeywell International Inc. | Integrated IR source and acoustic detector for photoacoustic gas sensor |
| DE202015002315U1 (de) * | 2015-03-27 | 2015-05-06 | Infineon Technologies Ag | Gassensor |
| DE102015106373B4 (de) * | 2015-04-24 | 2023-03-02 | Infineon Technologies Ag | Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit |
| US10302554B2 (en) * | 2016-06-03 | 2019-05-28 | Ingineon Technologies Ag | Acoustic wave detector |
| US11105738B2 (en) | 2016-11-28 | 2021-08-31 | Kyocera Corporation | Sensor wiring substrate, sensor package, and sensor device |
| EP3614126A1 (en) * | 2019-05-17 | 2020-02-26 | Sensirion AG | Photoacoustic gas sensor device |
| JP7365812B2 (ja) | 2019-08-07 | 2023-10-20 | 日清紡マイクロデバイス株式会社 | センサ装置およびその製造方法 |
| EP3798607B1 (en) | 2019-08-09 | 2023-01-25 | Sensirion AG | Photoacoustic gas sensor devices |
| DE102019134267A1 (de) * | 2019-12-13 | 2021-06-17 | Infineon Technologies Ag | Photoakustische Detektoreinheit, photoakustischer Sensor und zugehörige Herstellungsverfahren |
-
2021
- 2021-03-05 EP EP21161060.5A patent/EP4053540B1/en active Active
-
2022
- 2022-02-24 KR KR1020237033613A patent/KR20230152135A/ko active Pending
- 2022-02-24 WO PCT/EP2022/054716 patent/WO2022184553A1/en not_active Ceased
- 2022-02-24 CN CN202280019167.5A patent/CN117280195A/zh active Pending
- 2022-02-24 US US18/279,062 patent/US20240230519A9/en active Pending
- 2022-02-24 EP EP22707745.0A patent/EP4302072A1/en active Pending
- 2022-02-24 JP JP2023553604A patent/JP7792427B2/ja active Active
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