CN117280195A - 光声气体传感器装置 - Google Patents

光声气体传感器装置 Download PDF

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Publication number
CN117280195A
CN117280195A CN202280019167.5A CN202280019167A CN117280195A CN 117280195 A CN117280195 A CN 117280195A CN 202280019167 A CN202280019167 A CN 202280019167A CN 117280195 A CN117280195 A CN 117280195A
Authority
CN
China
Prior art keywords
cap
substrate
volume
gas sensor
sensor apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280019167.5A
Other languages
English (en)
Chinese (zh)
Inventor
T·优林格
克里斯托夫·萨尔茨曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensirion AG
Original Assignee
Sensirion AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensirion AG filed Critical Sensirion AG
Publication of CN117280195A publication Critical patent/CN117280195A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G01N29/2425—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics optoacoustic fluid cells therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/022—Casings
    • G01N2201/0221—Portable; cableless; compact; hand-held
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/101—Number of transducers one transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/004—CO or CO2

Landscapes

  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN202280019167.5A 2021-03-05 2022-02-24 光声气体传感器装置 Pending CN117280195A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP21161060.5 2021-03-05
EP21161060.5A EP4053540B1 (en) 2021-03-05 2021-03-05 Photoacoustic gas sensor device
PCT/EP2022/054716 WO2022184553A1 (en) 2021-03-05 2022-02-24 Photoacoustic gas sensor device

Publications (1)

Publication Number Publication Date
CN117280195A true CN117280195A (zh) 2023-12-22

Family

ID=74859360

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280019167.5A Pending CN117280195A (zh) 2021-03-05 2022-02-24 光声气体传感器装置

Country Status (6)

Country Link
US (1) US20240230519A9 (https=)
EP (2) EP4053540B1 (https=)
JP (1) JP7792427B2 (https=)
KR (1) KR20230152135A (https=)
CN (1) CN117280195A (https=)
WO (1) WO2022184553A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118465056A (zh) * 2024-07-12 2024-08-09 上海先普气体技术有限公司 气体浓度测量装置
TWI923161B (zh) 2024-11-25 2026-04-21 鈺太科技股份有限公司 氣體感測裝置與光聲光譜氣體感測器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4614134A4 (en) * 2022-11-03 2026-01-28 Hangzhou Sanhua Res Inst Co Ltd GAS DETECTION DEVICE
CN116165146B (zh) * 2023-02-28 2026-04-21 西安交通大学 一种光声光谱式多气体mems微型气体传感器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
DE202015002315U1 (de) * 2015-03-27 2015-05-06 Infineon Technologies Ag Gassensor
DE102015106373B4 (de) * 2015-04-24 2023-03-02 Infineon Technologies Ag Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit
US10302554B2 (en) * 2016-06-03 2019-05-28 Ingineon Technologies Ag Acoustic wave detector
JP6751156B2 (ja) * 2016-11-28 2020-09-02 京セラ株式会社 センサ用配線基板、センサ用パッケージおよびセンサ装置
EP3614126A1 (en) * 2019-05-17 2020-02-26 Sensirion AG Photoacoustic gas sensor device
JP7365812B2 (ja) * 2019-08-07 2023-10-20 日清紡マイクロデバイス株式会社 センサ装置およびその製造方法
EP3798607B1 (en) * 2019-08-09 2023-01-25 Sensirion AG Photoacoustic gas sensor devices
DE102019134267A1 (de) * 2019-12-13 2021-06-17 Infineon Technologies Ag Photoakustische Detektoreinheit, photoakustischer Sensor und zugehörige Herstellungsverfahren

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118465056A (zh) * 2024-07-12 2024-08-09 上海先普气体技术有限公司 气体浓度测量装置
TWI923161B (zh) 2024-11-25 2026-04-21 鈺太科技股份有限公司 氣體感測裝置與光聲光譜氣體感測器

Also Published As

Publication number Publication date
EP4053540A1 (en) 2022-09-07
JP2024508915A (ja) 2024-02-28
JP7792427B2 (ja) 2025-12-25
US20240230519A9 (en) 2024-07-11
KR20230152135A (ko) 2023-11-02
WO2022184553A1 (en) 2022-09-09
EP4302072A1 (en) 2024-01-10
EP4053540B1 (en) 2024-10-16
US20240133801A1 (en) 2024-04-25
EP4053540C0 (en) 2024-10-16

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