JP7782317B2 - 感光性樹脂組成物 - Google Patents

感光性樹脂組成物

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Publication number
JP7782317B2
JP7782317B2 JP2022031619A JP2022031619A JP7782317B2 JP 7782317 B2 JP7782317 B2 JP 7782317B2 JP 2022031619 A JP2022031619 A JP 2022031619A JP 2022031619 A JP2022031619 A JP 2022031619A JP 7782317 B2 JP7782317 B2 JP 7782317B2
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Japan
Prior art keywords
group
photosensitive resin
resin composition
carbon atoms
bond
Prior art date
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JP2022031619A
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English (en)
Japanese (ja)
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JP2023127745A (ja
JP2023127745A5 (https=
Inventor
秀則 石井
貴文 遠藤
崇洋 坂口
浩司 荻野
有輝 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Chemical Corp
Original Assignee
Nissan Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Corp filed Critical Nissan Chemical Corp
Priority to JP2022031619A priority Critical patent/JP7782317B2/ja
Publication of JP2023127745A publication Critical patent/JP2023127745A/ja
Publication of JP2023127745A5 publication Critical patent/JP2023127745A5/ja
Application granted granted Critical
Publication of JP7782317B2 publication Critical patent/JP7782317B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2022031619A 2022-03-02 2022-03-02 感光性樹脂組成物 Active JP7782317B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022031619A JP7782317B2 (ja) 2022-03-02 2022-03-02 感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022031619A JP7782317B2 (ja) 2022-03-02 2022-03-02 感光性樹脂組成物

Publications (3)

Publication Number Publication Date
JP2023127745A JP2023127745A (ja) 2023-09-14
JP2023127745A5 JP2023127745A5 (https=) 2025-01-27
JP7782317B2 true JP7782317B2 (ja) 2025-12-09

Family

ID=87973153

Family Applications (1)

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JP2022031619A Active JP7782317B2 (ja) 2022-03-02 2022-03-02 感光性樹脂組成物

Country Status (1)

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JP (1) JP7782317B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025263615A1 (ja) * 2024-06-20 2025-12-26 旭化成株式会社 感光性樹脂組成物、硬化膜、及び硬化膜の製造方法、並びに半導体装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019215452A (ja) 2018-06-13 2019-12-19 日立化成株式会社 感光性樹脂組成物、配線層及び半導体装置
WO2021187355A1 (ja) 2020-03-18 2021-09-23 東レ株式会社 感光性樹脂組成物、感光性シート、硬化膜、硬化膜の製造方法、電子部品、アンテナ素子、半導体パッケージおよび表示装置
WO2023106104A1 (ja) 2021-12-09 2023-06-15 日産化学株式会社 感光性樹脂組成物

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019215452A (ja) 2018-06-13 2019-12-19 日立化成株式会社 感光性樹脂組成物、配線層及び半導体装置
WO2021187355A1 (ja) 2020-03-18 2021-09-23 東レ株式会社 感光性樹脂組成物、感光性シート、硬化膜、硬化膜の製造方法、電子部品、アンテナ素子、半導体パッケージおよび表示装置
WO2023106104A1 (ja) 2021-12-09 2023-06-15 日産化学株式会社 感光性樹脂組成物

Also Published As

Publication number Publication date
JP2023127745A (ja) 2023-09-14

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