JP7775594B2 - 振動デバイス - Google Patents

振動デバイス

Info

Publication number
JP7775594B2
JP7775594B2 JP2021132598A JP2021132598A JP7775594B2 JP 7775594 B2 JP7775594 B2 JP 7775594B2 JP 2021132598 A JP2021132598 A JP 2021132598A JP 2021132598 A JP2021132598 A JP 2021132598A JP 7775594 B2 JP7775594 B2 JP 7775594B2
Authority
JP
Japan
Prior art keywords
elastic modulus
base
vibration
low elastic
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021132598A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022085834A5 (https=
JP2022085834A (ja
Inventor
淳一 竹内
知之 鎌倉
竜太 西澤
幸弘 橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to US17/456,237 priority Critical patent/US12009801B2/en
Publication of JP2022085834A publication Critical patent/JP2022085834A/ja
Priority to US18/651,849 priority patent/US12273092B2/en
Publication of JP2022085834A5 publication Critical patent/JP2022085834A5/ja
Priority to JP2025154835A priority patent/JP2025172194A/ja
Application granted granted Critical
Publication of JP7775594B2 publication Critical patent/JP7775594B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2021132598A 2020-11-27 2021-08-17 振動デバイス Active JP7775594B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US17/456,237 US12009801B2 (en) 2020-11-27 2021-11-23 Resonator device
US18/651,849 US12273092B2 (en) 2020-11-27 2024-05-01 Resonator device
JP2025154835A JP2025172194A (ja) 2020-11-27 2025-09-18 振動デバイス

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020197300 2020-11-27
JP2020197300 2020-11-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025154835A Division JP2025172194A (ja) 2020-11-27 2025-09-18 振動デバイス

Publications (3)

Publication Number Publication Date
JP2022085834A JP2022085834A (ja) 2022-06-08
JP2022085834A5 JP2022085834A5 (https=) 2024-07-18
JP7775594B2 true JP7775594B2 (ja) 2025-11-26

Family

ID=81892256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021132598A Active JP7775594B2 (ja) 2020-11-27 2021-08-17 振動デバイス

Country Status (1)

Country Link
JP (1) JP7775594B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024108397A (ja) 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス
JP2024108394A (ja) 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002064355A (ja) 2000-06-09 2002-02-28 Murata Mfg Co Ltd 圧電共振部品
JP2011097553A (ja) 2009-09-30 2011-05-12 Seiko Instruments Inc 圧電振動子、発振器及び発振器パッケージ
JP2016208192A (ja) 2015-04-20 2016-12-08 株式会社大真空 圧電振動デバイス
JP2018049933A (ja) 2016-09-21 2018-03-29 セイコーエプソン株式会社 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH118526A (ja) * 1997-04-25 1999-01-12 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002064355A (ja) 2000-06-09 2002-02-28 Murata Mfg Co Ltd 圧電共振部品
JP2011097553A (ja) 2009-09-30 2011-05-12 Seiko Instruments Inc 圧電振動子、発振器及び発振器パッケージ
JP2016208192A (ja) 2015-04-20 2016-12-08 株式会社大真空 圧電振動デバイス
JP2018049933A (ja) 2016-09-21 2018-03-29 セイコーエプソン株式会社 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器

Also Published As

Publication number Publication date
JP2022085834A (ja) 2022-06-08

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