JP7746861B2 - 欠陥検出装置及び欠陥検出方法 - Google Patents

欠陥検出装置及び欠陥検出方法

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Publication number
JP7746861B2
JP7746861B2 JP2022009720A JP2022009720A JP7746861B2 JP 7746861 B2 JP7746861 B2 JP 7746861B2 JP 2022009720 A JP2022009720 A JP 2022009720A JP 2022009720 A JP2022009720 A JP 2022009720A JP 7746861 B2 JP7746861 B2 JP 7746861B2
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JP
Japan
Prior art keywords
frequency
inspected
unit
defect
size
Prior art date
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Active
Application number
JP2022009720A
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English (en)
Japanese (ja)
Other versions
JP2023108546A5 (https=
JP2023108546A (ja
Inventor
貴秀 畠堀
健二 田窪
知貴 永島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2022009720A priority Critical patent/JP7746861B2/ja
Priority to CN202211481788.3A priority patent/CN116500034B/zh
Priority to US18/077,213 priority patent/US12099000B2/en
Publication of JP2023108546A publication Critical patent/JP2023108546A/ja
Publication of JP2023108546A5 publication Critical patent/JP2023108546A5/ja
Application granted granted Critical
Publication of JP7746861B2 publication Critical patent/JP7746861B2/ja
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G01N19/08—Detecting presence of flaws or irregularities
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/005—Electromagnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/0055—Generation of the force using mechanical waves, e.g. acoustic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/006—Crack, flaws, fracture or rupture
    • G01N2203/0062—Crack or flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
    • G01N2203/0647—Image analysis

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2022009720A 2022-01-25 2022-01-25 欠陥検出装置及び欠陥検出方法 Active JP7746861B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022009720A JP7746861B2 (ja) 2022-01-25 2022-01-25 欠陥検出装置及び欠陥検出方法
CN202211481788.3A CN116500034B (zh) 2022-01-25 2022-11-24 缺陷检测装置及缺陷检测方法
US18/077,213 US12099000B2 (en) 2022-01-25 2022-12-07 Defect detection device and defect detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022009720A JP7746861B2 (ja) 2022-01-25 2022-01-25 欠陥検出装置及び欠陥検出方法

Publications (3)

Publication Number Publication Date
JP2023108546A JP2023108546A (ja) 2023-08-04
JP2023108546A5 JP2023108546A5 (https=) 2024-11-13
JP7746861B2 true JP7746861B2 (ja) 2025-10-01

Family

ID=87313683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022009720A Active JP7746861B2 (ja) 2022-01-25 2022-01-25 欠陥検出装置及び欠陥検出方法

Country Status (3)

Country Link
US (1) US12099000B2 (https=)
JP (1) JP7746861B2 (https=)
CN (1) CN116500034B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240192125A1 (en) * 2022-12-12 2024-06-13 Xarion Laser Acoustics Gmbh Method and Apparatus for Testing Material Joints or Material Compounds

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069301A (ja) 2002-08-01 2004-03-04 Kazuya Mori 音響式検査方法および音響式検査装置
JP2012068209A (ja) 2010-09-27 2012-04-05 Choonpa Zairyo Shindan Kenkyusho:Kk 超音波材料診断方法及び装置
JP2016024186A (ja) 2014-07-17 2016-02-08 ザ・ボーイング・カンパニーＴｈｅＢｏｅｉｎｇ Ｃｏｍｐａｎｙ ハイパーサウンドを使用した非破壊検査
WO2021145034A1 (ja) 2020-01-17 2021-07-22 株式会社島津製作所 欠陥検査装置および欠陥検査方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102292627B (zh) * 2009-06-08 2014-04-30 奥林巴斯医疗株式会社 生物体观测装置
JP6451695B2 (ja) 2016-06-02 2019-01-16 株式会社島津製作所 欠陥検査方法及び欠陥検査装置
EP3474009B1 (en) * 2016-06-21 2023-01-18 Shimadzu Corporation Sound-wave-propagation visualization device and method
JP6791029B2 (ja) * 2017-06-12 2020-11-25 株式会社島津製作所 欠陥検出方法及び欠陥検出装置
EP3819633A4 (en) * 2018-07-04 2021-08-11 Shimadzu Corporation Defect detection device
WO2020110197A1 (ja) * 2018-11-27 2020-06-04 株式会社島津製作所 欠陥検査装置および欠陥検査方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004069301A (ja) 2002-08-01 2004-03-04 Kazuya Mori 音響式検査方法および音響式検査装置
JP2012068209A (ja) 2010-09-27 2012-04-05 Choonpa Zairyo Shindan Kenkyusho:Kk 超音波材料診断方法及び装置
JP2016024186A (ja) 2014-07-17 2016-02-08 ザ・ボーイング・カンパニーＴｈｅＢｏｅｉｎｇ Ｃｏｍｐａｎｙ ハイパーサウンドを使用した非破壊検査
WO2021145034A1 (ja) 2020-01-17 2021-07-22 株式会社島津製作所 欠陥検査装置および欠陥検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240192125A1 (en) * 2022-12-12 2024-06-13 Xarion Laser Acoustics Gmbh Method and Apparatus for Testing Material Joints or Material Compounds

Also Published As

Publication number Publication date
CN116500034A (zh) 2023-07-28
JP2023108546A (ja) 2023-08-04
CN116500034B (zh) 2026-03-20
US12099000B2 (en) 2024-09-24
US20230236111A1 (en) 2023-07-27

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