JP7744403B2 - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JP7744403B2
JP7744403B2 JP2023210071A JP2023210071A JP7744403B2 JP 7744403 B2 JP7744403 B2 JP 7744403B2 JP 2023210071 A JP2023210071 A JP 2023210071A JP 2023210071 A JP2023210071 A JP 2023210071A JP 7744403 B2 JP7744403 B2 JP 7744403B2
Authority
JP
Japan
Prior art keywords
vacuum pump
rotor
axial
intake opening
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023210071A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024173613A (ja
Inventor
フロリアン・バーダー
トビアス・シュトル
ミヒャエル・シュヴァイクヘーファー
ヤン・ホフマン
マルティン・ローゼ
マクシミリアン・ビルケンフェルト
Original Assignee
プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト filed Critical プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
Publication of JP2024173613A publication Critical patent/JP2024173613A/ja
Application granted granted Critical
Publication of JP7744403B2 publication Critical patent/JP7744403B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/20—Three-dimensional
    • F05D2250/29—Three-dimensional machined; miscellaneous
    • F05D2250/292—Three-dimensional machined; miscellaneous tapered
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2023210071A 2023-05-30 2023-12-13 真空ポンプ Active JP7744403B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP23176149.5A EP4227538B1 (de) 2023-05-30 2023-05-30 Vakuumpumpe mit einer sich axial über ein pumpenelement erstreckenden einlassöffnung
EP23176149 2023-05-30

Publications (2)

Publication Number Publication Date
JP2024173613A JP2024173613A (ja) 2024-12-12
JP7744403B2 true JP7744403B2 (ja) 2025-09-25

Family

ID=86609596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023210071A Active JP7744403B2 (ja) 2023-05-30 2023-12-13 真空ポンプ

Country Status (2)

Country Link
EP (1) EP4227538B1 (de)
JP (1) JP7744403B2 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004036389A (ja) 2001-03-15 2004-02-05 Varian Spa スペーサリングと一体化されたステータ段を有するタービンポンプ
US20070031263A1 (en) 2003-09-30 2007-02-08 Stones Ian D Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07189984A (ja) * 1993-12-27 1995-07-28 Hitachi Ltd 多段円周流真空ポンプ
DE60101898T2 (de) * 2001-03-15 2004-11-18 Varian S.P.A., Leini Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
DE102008013142A1 (de) * 2008-03-07 2009-09-10 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004036389A (ja) 2001-03-15 2004-02-05 Varian Spa スペーサリングと一体化されたステータ段を有するタービンポンプ
US20070031263A1 (en) 2003-09-30 2007-02-08 Stones Ian D Vacuum pump

Also Published As

Publication number Publication date
EP4227538A1 (de) 2023-08-16
JP2024173613A (ja) 2024-12-12
EP4227538B1 (de) 2025-03-26

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