JP7721260B2 - 光電変換装置、光電変換システム - Google Patents

光電変換装置、光電変換システム

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Publication number
JP7721260B2
JP7721260B2 JP2020176599A JP2020176599A JP7721260B2 JP 7721260 B2 JP7721260 B2 JP 7721260B2 JP 2020176599 A JP2020176599 A JP 2020176599A JP 2020176599 A JP2020176599 A JP 2020176599A JP 7721260 B2 JP7721260 B2 JP 7721260B2
Authority
JP
Japan
Prior art keywords
exposure period
photoelectric conversion
period
exposure
conversion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020176599A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022067801A (ja
JP2022067801A5 (enExample
Inventor
和浩 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2020176599A priority Critical patent/JP7721260B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to EP21882696.4A priority patent/EP4236298B1/en
Priority to CN202180072028.4A priority patent/CN116349238B/zh
Priority to KR1020237016128A priority patent/KR102910946B1/ko
Priority to PCT/JP2021/038032 priority patent/WO2022085555A1/ja
Publication of JP2022067801A publication Critical patent/JP2022067801A/ja
Priority to US18/303,480 priority patent/US12044802B2/en
Publication of JP2022067801A5 publication Critical patent/JP2022067801A5/ja
Priority to US18/747,766 priority patent/US12422526B2/en
Application granted granted Critical
Publication of JP7721260B2 publication Critical patent/JP7721260B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G01S17/894—Three-dimensional [3D] imaging with simultaneous measurement of time-of-flight at a two-dimensional [2D] array of receiver pixels, e.g. time-of-flight cameras or flash lidar
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4861—Circuits for detection, sampling, integration or read-out
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4861—Circuits for detection, sampling, integration or read-out
    • G01S7/4863—Detector arrays, e.g. charge-transfer gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4865—Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4913—Circuits for detection, sampling, integration or read-out
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/50—Control of the SSIS exposure
    • H04N25/53—Control of the integration time
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/771—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising storage means other than floating diffusion
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/772—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters
    • H04N25/773—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters comprising photon counting circuits, e.g. single photon detection [SPD] or single photon avalanche diodes [SPAD]
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/79—Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/959—Circuit arrangements for devices having potential barriers for devices working in avalanche mode

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2020176599A 2020-10-21 2020-10-21 光電変換装置、光電変換システム Active JP7721260B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2020176599A JP7721260B2 (ja) 2020-10-21 2020-10-21 光電変換装置、光電変換システム
CN202180072028.4A CN116349238B (zh) 2020-10-21 2021-10-14 光电转换设备及光电转换系统
KR1020237016128A KR102910946B1 (ko) 2020-10-21 2021-10-14 광전변환장치, 광전변환 시스템
PCT/JP2021/038032 WO2022085555A1 (ja) 2020-10-21 2021-10-14 光電変換装置、光電変換システム
EP21882696.4A EP4236298B1 (en) 2020-10-21 2021-10-14 Photoelectric conversion device and photoelectric conversion system
US18/303,480 US12044802B2 (en) 2020-10-21 2023-04-19 Photoelectric conversion device and photoelectric conversion system comprising a control unit to set a third exposure period and a.fourth exposure period on a basis of light value comparison based on signal charge during first and second exposure periods
US18/747,766 US12422526B2 (en) 2020-10-21 2024-06-19 Photoelectric conversion device and photoelectric conversion system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020176599A JP7721260B2 (ja) 2020-10-21 2020-10-21 光電変換装置、光電変換システム

Publications (3)

Publication Number Publication Date
JP2022067801A JP2022067801A (ja) 2022-05-09
JP2022067801A5 JP2022067801A5 (enExample) 2023-10-27
JP7721260B2 true JP7721260B2 (ja) 2025-08-12

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JP2020176599A Active JP7721260B2 (ja) 2020-10-21 2020-10-21 光電変換装置、光電変換システム

Country Status (6)

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US (2) US12044802B2 (enExample)
EP (1) EP4236298B1 (enExample)
JP (1) JP7721260B2 (enExample)
KR (1) KR102910946B1 (enExample)
CN (1) CN116349238B (enExample)
WO (1) WO2022085555A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7721260B2 (ja) * 2020-10-21 2025-08-12 キヤノン株式会社 光電変換装置、光電変換システム
JP2023183169A (ja) * 2022-06-15 2023-12-27 ソニーセミコンダクタソリューションズ株式会社 光検出素子
JP7880753B2 (ja) * 2022-06-28 2026-06-26 キヤノン株式会社 光電変換装置
JP7894282B2 (ja) * 2022-09-08 2026-07-23 キヤノン株式会社 光電変換装置
CN119375897A (zh) * 2023-07-25 2025-01-28 爱思开海力士有限公司 用于感测距离的图像感测装置
JP7858613B2 (ja) * 2023-12-07 2026-05-14 キヤノン株式会社 信号生成装置、信号生成システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017085916A1 (ja) 2015-11-16 2017-05-26 パナソニックＩｐマネジメント株式会社 撮像装置、及びそれに用いられる固体撮像素子
WO2019188348A1 (ja) 2018-03-29 2019-10-03 パナソニックＩｐマネジメント株式会社 距離情報取得装置、マルチパス検出装置およびマルチパス検出方法
WO2020027221A1 (ja) 2018-08-02 2020-02-06 パナソニックＩｐマネジメント株式会社 撮像装置、及びそれに用いられる固体撮像素子

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6539990B2 (ja) * 2014-11-14 2019-07-10 株式会社デンソー 光飛行型測距装置
DE102015110748A1 (de) 2015-07-03 2017-01-05 Schuler Pressen Gmbh Verfahren zur Einstellung eines Phasenversatzes einer mehrfach wirkenden mechanischen Querwellenpresse sowie eine Presse nach diesem Verfahren
EP3334151B1 (en) * 2015-08-04 2021-04-07 Panasonic Semiconductor Solutions Co., Ltd. Method for driving solid-state imaging device
US10620300B2 (en) 2015-08-20 2020-04-14 Apple Inc. SPAD array with gated histogram construction
KR102404260B1 (ko) 2015-11-03 2022-05-30 삼성중공업 주식회사 밸러스트수 여과 필터 설치 장치 및 방법
EP3418772A4 (en) * 2016-02-17 2019-03-13 Panasonic Intellectual Property Management Co., Ltd. DISTANCE MEASURING DEVICE
JPWO2017150246A1 (ja) * 2016-02-29 2018-12-27 パナソニックＩｐマネジメント株式会社 撮像装置、及びそれに用いられる固体撮像素子
KR102673812B1 (ko) * 2016-07-26 2024-06-10 삼성전자주식회사 라이다 장치 및 거리 측정 방법
WO2018066348A1 (ja) * 2016-10-03 2018-04-12 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置および撮像方法、並びに電子機器
JP7157529B2 (ja) * 2017-12-25 2022-10-20 キヤノン株式会社 撮像装置、撮像システム、および撮像装置の駆動方法
US10598936B1 (en) * 2018-04-23 2020-03-24 Facebook Technologies, Llc Multi-mode active pixel sensor
JP7129264B2 (ja) * 2018-08-03 2022-09-01 キヤノン株式会社 撮像装置
JP7218191B2 (ja) * 2019-01-30 2023-02-06 キヤノン株式会社 光電変換装置、撮像システム、移動体
JP7260384B2 (ja) 2019-04-22 2023-04-18 ダイハツ工業株式会社 内燃機関
EP3879291A1 (fr) 2020-03-13 2021-09-15 Hervé Sallin Dispositif de contrôle d'installations électriques
JP7721260B2 (ja) * 2020-10-21 2025-08-12 キヤノン株式会社 光電変換装置、光電変換システム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017085916A1 (ja) 2015-11-16 2017-05-26 パナソニックＩｐマネジメント株式会社 撮像装置、及びそれに用いられる固体撮像素子
WO2019188348A1 (ja) 2018-03-29 2019-10-03 パナソニックＩｐマネジメント株式会社 距離情報取得装置、マルチパス検出装置およびマルチパス検出方法
WO2020027221A1 (ja) 2018-08-02 2020-02-06 パナソニックＩｐマネジメント株式会社 撮像装置、及びそれに用いられる固体撮像素子

Also Published As

Publication number Publication date
WO2022085555A1 (ja) 2022-04-28
US12044802B2 (en) 2024-07-23
EP4236298A4 (en) 2024-09-25
KR102910946B1 (ko) 2026-01-12
JP2022067801A (ja) 2022-05-09
CN116349238B (zh) 2025-08-01
KR20230088423A (ko) 2023-06-19
EP4236298B1 (en) 2026-06-17
EP4236298A1 (en) 2023-08-30
US20230258776A1 (en) 2023-08-17
CN116349238A (zh) 2023-06-27
US12422526B2 (en) 2025-09-23
US20240337731A1 (en) 2024-10-10

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