JP7703791B2 - 荷電粒子線システム、およびその制御方法 - Google Patents

荷電粒子線システム、およびその制御方法 Download PDF

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Publication number
JP7703791B2
JP7703791B2 JP2024534821A JP2024534821A JP7703791B2 JP 7703791 B2 JP7703791 B2 JP 7703791B2 JP 2024534821 A JP2024534821 A JP 2024534821A JP 2024534821 A JP2024534821 A JP 2024534821A JP 7703791 B2 JP7703791 B2 JP 7703791B2
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sample
push
observation
chamber
holder
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Japanese (ja)
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JPWO2024018544A1 (https=
Inventor
杏乃 谷津
真也 北山
直樹 坂本
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2024534821A 2022-07-19 2022-07-19 荷電粒子線システム、およびその制御方法 Active JP7703791B2 (ja)

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PCT/JP2022/028118 WO2024018544A1 (ja) 2022-07-19 2022-07-19 荷電粒子線システム、およびその制御方法

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JPWO2024018544A1 JPWO2024018544A1 (https=) 2024-01-25
JP7703791B2 true JP7703791B2 (ja) 2025-07-07

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WO (1) WO2024018544A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019044648A1 (ja) 2017-09-01 2019-03-07 株式会社日立ハイテクノロジーズ 接続モジュール及び干渉回避方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114427B2 (https=) * 1971-09-03 1976-05-10
JPH04264340A (ja) * 1991-02-19 1992-09-21 Hitachi Ltd 走査電子顕微鏡

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019044648A1 (ja) 2017-09-01 2019-03-07 株式会社日立ハイテクノロジーズ 接続モジュール及び干渉回避方法

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JPWO2024018544A1 (https=) 2024-01-25
WO2024018544A1 (ja) 2024-01-25

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