JP7700959B2 - 弾性波装置 - Google Patents

弾性波装置 Download PDF

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Publication number
JP7700959B2
JP7700959B2 JP2024512655A JP2024512655A JP7700959B2 JP 7700959 B2 JP7700959 B2 JP 7700959B2 JP 2024512655 A JP2024512655 A JP 2024512655A JP 2024512655 A JP2024512655 A JP 2024512655A JP 7700959 B2 JP7700959 B2 JP 7700959B2
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JP
Japan
Prior art keywords
electrode
electrode finger
piezoelectric layer
wave device
elastic wave
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Active
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JP2024512655A
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English (en)
Japanese (ja)
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JPWO2023190656A1 (https=
JPWO2023190656A5 (https=
Inventor
翔 永友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Publication date
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Publication of JPWO2023190656A1 publication Critical patent/JPWO2023190656A1/ja
Publication of JPWO2023190656A5 publication Critical patent/JPWO2023190656A5/ja
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2024512655A 2022-03-29 2023-03-29 弾性波装置 Active JP7700959B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263324849P 2022-03-29 2022-03-29
US63/324,849 2022-03-29
PCT/JP2023/012754 WO2023190656A1 (ja) 2022-03-29 2023-03-29 弾性波装置

Publications (3)

Publication Number Publication Date
JPWO2023190656A1 JPWO2023190656A1 (https=) 2023-10-05
JPWO2023190656A5 JPWO2023190656A5 (https=) 2024-09-27
JP7700959B2 true JP7700959B2 (ja) 2025-07-01

Family

ID=88201995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024512655A Active JP7700959B2 (ja) 2022-03-29 2023-03-29 弾性波装置

Country Status (4)

Country Link
US (1) US20250007493A1 (https=)
JP (1) JP7700959B2 (https=)
CN (1) CN119013894A (https=)
WO (1) WO2023190656A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020088860A (ja) 2018-11-16 2020-06-04 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. マルチモード弾性表面波フィルタ
JP2021044835A (ja) 2014-12-17 2021-03-18 コルボ ユーエス インコーポレイテッド 波閉じ込め構造を有する板波デバイス及び作製方法
WO2021060513A1 (ja) 2019-09-27 2021-04-01 株式会社村田製作所 弾性波装置
JP6984800B1 (ja) 2020-03-16 2021-12-22 株式会社村田製作所 弾性波装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691409B2 (ja) * 1986-04-23 1994-11-14 株式会社日立製作所 弾性表面波装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021044835A (ja) 2014-12-17 2021-03-18 コルボ ユーエス インコーポレイテッド 波閉じ込め構造を有する板波デバイス及び作製方法
JP2020088860A (ja) 2018-11-16 2020-06-04 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. マルチモード弾性表面波フィルタ
WO2021060513A1 (ja) 2019-09-27 2021-04-01 株式会社村田製作所 弾性波装置
JP6984800B1 (ja) 2020-03-16 2021-12-22 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
JPWO2023190656A1 (https=) 2023-10-05
US20250007493A1 (en) 2025-01-02
CN119013894A (zh) 2024-11-22
WO2023190656A1 (ja) 2023-10-05

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