JP7693306B2 - 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法 - Google Patents

情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法 Download PDF

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JP7693306B2
JP7693306B2 JP2020206835A JP2020206835A JP7693306B2 JP 7693306 B2 JP7693306 B2 JP 7693306B2 JP 2020206835 A JP2020206835 A JP 2020206835A JP 2020206835 A JP2020206835 A JP 2020206835A JP 7693306 B2 JP7693306 B2 JP 7693306B2
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JP2022094041A (ja
JP2022094041A5 (https=
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正浩 木村
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Canon Inc
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Canon Inc
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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JP2020206835A 2020-12-14 2020-12-14 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法 Active JP7693306B2 (ja)

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JP2020206835A JP7693306B2 (ja) 2020-12-14 2020-12-14 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法

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JP2020206835A JP7693306B2 (ja) 2020-12-14 2020-12-14 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法

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JP2022094041A JP2022094041A (ja) 2022-06-24
JP2022094041A5 JP2022094041A5 (https=) 2023-12-11
JP7693306B2 true JP7693306B2 (ja) 2025-06-17

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004294358A (ja) 2003-03-28 2004-10-21 Hitachi High-Technologies Corp 欠陥検査方法および装置
JP2006287061A (ja) 2005-04-01 2006-10-19 Canon Inc 露光装置及びそのパラメータ設定方法
JP2006310551A (ja) 2005-04-28 2006-11-09 Hitachi High-Technologies Corp 検査支援システム、及び方法
JP2008065555A (ja) 2006-09-06 2008-03-21 Hitachi High-Technologies Corp 画像処理装置の機能診断方法及び機能診断システム
JP2011154918A (ja) 2010-01-28 2011-08-11 Hitachi High-Technologies Corp 荷電粒子線装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004294358A (ja) 2003-03-28 2004-10-21 Hitachi High-Technologies Corp 欠陥検査方法および装置
JP2006287061A (ja) 2005-04-01 2006-10-19 Canon Inc 露光装置及びそのパラメータ設定方法
JP2006310551A (ja) 2005-04-28 2006-11-09 Hitachi High-Technologies Corp 検査支援システム、及び方法
JP2008065555A (ja) 2006-09-06 2008-03-21 Hitachi High-Technologies Corp 画像処理装置の機能診断方法及び機能診断システム
JP2011154918A (ja) 2010-01-28 2011-08-11 Hitachi High-Technologies Corp 荷電粒子線装置

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