JP7693305B2 - 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法 - Google Patents

情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法 Download PDF

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JP7693305B2
JP7693305B2 JP2020206834A JP2020206834A JP7693305B2 JP 7693305 B2 JP7693305 B2 JP 7693305B2 JP 2020206834 A JP2020206834 A JP 2020206834A JP 2020206834 A JP2020206834 A JP 2020206834A JP 7693305 B2 JP7693305 B2 JP 7693305B2
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JP2022094040A5 (https=
JP2022094040A (ja
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正浩 木村
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Canon Inc
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Canon Inc
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Priority to JP2020206834A priority Critical patent/JP7693305B2/ja
Priority to EP21210257.8A priority patent/EP4012519B1/en
Priority to US17/544,757 priority patent/US11645796B2/en
Publication of JP2022094040A publication Critical patent/JP2022094040A/ja
Publication of JP2022094040A5 publication Critical patent/JP2022094040A5/ja
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/04—Program control other than numerical control, i.e. in sequence controllers or logic controllers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T11/00—Two-dimensional [2D] image generation
    • G06T11/60—Creating or editing images; Combining images with text
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/20—Information retrieval; Database structures therefor; File system structures therefor of structured data, e.g. relational data
    • G06F16/25—Integrating or interfacing systems involving database management systems
    • G06F16/252—Integrating or interfacing systems involving database management systems between a Database Management System and a front-end application
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T11/00—Two-dimensional [2D] image generation
    • G06T11/10—Texturing; Colouring; Generation of textures or colours
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/10—Plc systems
    • G05B2219/13—Plc programming
    • G05B2219/13144—GUI graphical user interface, icon, function bloc editor, OI operator interface
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23258—GUI graphical user interface, icon, function bloc editor, labview
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32128—Gui graphical user interface
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/24—Indexing scheme for image data processing or generation, in general involving graphical user interfaces [GUIs]

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Databases & Information Systems (AREA)
  • Data Mining & Analysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • General Factory Administration (AREA)
JP2020206834A 2020-12-14 2020-12-14 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法 Active JP7693305B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020206834A JP7693305B2 (ja) 2020-12-14 2020-12-14 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法
EP21210257.8A EP4012519B1 (en) 2020-12-14 2021-11-24 Information processing apparatus, display control method, program, substrate processing apparatus, and manufacturing method of article
US17/544,757 US11645796B2 (en) 2020-12-14 2021-12-07 Information processing apparatus, display control method, storage medium, substrate processing apparatus, and manufacturing method of article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020206834A JP7693305B2 (ja) 2020-12-14 2020-12-14 情報処理装置、表示制御方法、プログラム、基板処理装置、及び物品の製造方法

Publications (3)

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JP2022094040A JP2022094040A (ja) 2022-06-24
JP2022094040A5 JP2022094040A5 (https=) 2023-12-11
JP7693305B2 true JP7693305B2 (ja) 2025-06-17

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US (1) US11645796B2 (https=)
EP (1) EP4012519B1 (https=)
JP (1) JP7693305B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025030730A (ja) * 2023-08-24 2025-03-07 株式会社Kokusai Electric 基板処理装置、基板処理方法、半導体装置の製造方法、プログラム、及び制御装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004294358A (ja) 2003-03-28 2004-10-21 Hitachi High-Technologies Corp 欠陥検査方法および装置
JP2006287061A (ja) 2005-04-01 2006-10-19 Canon Inc 露光装置及びそのパラメータ設定方法
JP2006310551A (ja) 2005-04-28 2006-11-09 Hitachi High-Technologies Corp 検査支援システム、及び方法
JP2008065555A (ja) 2006-09-06 2008-03-21 Hitachi High-Technologies Corp 画像処理装置の機能診断方法及び機能診断システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002373836A (ja) 2001-06-15 2002-12-26 Canon Inc データ編集装置、データ編集方法、半導体製造装置および半導体製造方法
US7343583B2 (en) * 2004-07-09 2008-03-11 Kla-Tencor Technologies Corporation System and method for searching for patterns of semiconductor wafer features in semiconductor wafer data
JP4324207B2 (ja) * 2007-04-20 2009-09-02 キヤノン株式会社 露光装置
JP6877200B2 (ja) * 2017-03-15 2021-05-26 東京エレクトロン株式会社 基板処理装置の制御装置及び基板処理表示方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004294358A (ja) 2003-03-28 2004-10-21 Hitachi High-Technologies Corp 欠陥検査方法および装置
JP2006287061A (ja) 2005-04-01 2006-10-19 Canon Inc 露光装置及びそのパラメータ設定方法
JP2006310551A (ja) 2005-04-28 2006-11-09 Hitachi High-Technologies Corp 検査支援システム、及び方法
JP2008065555A (ja) 2006-09-06 2008-03-21 Hitachi High-Technologies Corp 画像処理装置の機能診断方法及び機能診断システム

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Publication number Publication date
EP4012519A1 (en) 2022-06-15
US20220189089A1 (en) 2022-06-16
EP4012519B1 (en) 2025-09-17
JP2022094040A (ja) 2022-06-24
US11645796B2 (en) 2023-05-09

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