JP7678710B2 - 光源制御装置、リソグラフィ装置、および物品製造方法 - Google Patents

光源制御装置、リソグラフィ装置、および物品製造方法 Download PDF

Info

Publication number
JP7678710B2
JP7678710B2 JP2021093764A JP2021093764A JP7678710B2 JP 7678710 B2 JP7678710 B2 JP 7678710B2 JP 2021093764 A JP2021093764 A JP 2021093764A JP 2021093764 A JP2021093764 A JP 2021093764A JP 7678710 B2 JP7678710 B2 JP 7678710B2
Authority
JP
Japan
Prior art keywords
light source
control device
source control
unit
trend data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021093764A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022185870A (ja
JP2022185870A5 (enExample
Inventor
康平 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021093764A priority Critical patent/JP7678710B2/ja
Publication of JP2022185870A publication Critical patent/JP2022185870A/ja
Publication of JP2022185870A5 publication Critical patent/JP2022185870A5/ja
Application granted granted Critical
Publication of JP7678710B2 publication Critical patent/JP7678710B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Circuit Arrangement For Electric Light Sources In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2021093764A 2021-06-03 2021-06-03 光源制御装置、リソグラフィ装置、および物品製造方法 Active JP7678710B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021093764A JP7678710B2 (ja) 2021-06-03 2021-06-03 光源制御装置、リソグラフィ装置、および物品製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021093764A JP7678710B2 (ja) 2021-06-03 2021-06-03 光源制御装置、リソグラフィ装置、および物品製造方法

Publications (3)

Publication Number Publication Date
JP2022185870A JP2022185870A (ja) 2022-12-15
JP2022185870A5 JP2022185870A5 (enExample) 2024-06-07
JP7678710B2 true JP7678710B2 (ja) 2025-05-16

Family

ID=84441961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021093764A Active JP7678710B2 (ja) 2021-06-03 2021-06-03 光源制御装置、リソグラフィ装置、および物品製造方法

Country Status (1)

Country Link
JP (1) JP7678710B2 (enExample)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000306813A (ja) 1999-04-22 2000-11-02 Nikon Corp 露光方法及び露光装置
JP2001085176A (ja) 1999-08-07 2001-03-30 Koninkl Philips Electronics Nv 気体放電ランプのモニタリング方法及び装置
US20040032225A1 (en) 2002-08-09 2004-02-19 Benq Corporation Method and apparatus for detecting remaining lamp lifetime
JP2008186635A (ja) 2007-01-26 2008-08-14 Matsushita Electric Works Ltd 放電灯器具
JP2012221871A (ja) 2011-04-13 2012-11-12 Panasonic Corp 照明器具

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000306813A (ja) 1999-04-22 2000-11-02 Nikon Corp 露光方法及び露光装置
JP2001085176A (ja) 1999-08-07 2001-03-30 Koninkl Philips Electronics Nv 気体放電ランプのモニタリング方法及び装置
US20040032225A1 (en) 2002-08-09 2004-02-19 Benq Corporation Method and apparatus for detecting remaining lamp lifetime
JP2008186635A (ja) 2007-01-26 2008-08-14 Matsushita Electric Works Ltd 放電灯器具
JP2012221871A (ja) 2011-04-13 2012-11-12 Panasonic Corp 照明器具

Also Published As

Publication number Publication date
JP2022185870A (ja) 2022-12-15

Similar Documents

Publication Publication Date Title
US9195129B2 (en) Substrate holding device, lithography apparatus using same, and device manufacturing method
KR100938636B1 (ko) 제조 장비에서 포스트 에칭 ｃｄ를 반복하기 위한 방법
US20110163669A1 (en) Dc/ac inverter substrate having voltage abnormality detector circuit
JP2022185870A (ja) 光源制御装置、リソグラフィ装置、および物品製造方法
US20150131065A1 (en) Foreign substance detection method, foreign substance detection apparatus, exposure method, and method of manufacturing device
JP2004327823A (ja) 照明装置、露光装置及び露光方法
KR100982976B1 (ko) 위치결정장치, 노광 장치 및 디바이스 제조 방법
JP2001267198A (ja) 投影露光装置及び複数光源の制御方法
CN110581082A (zh) 缺陷检测机台监测晶圆缺陷的方法
JP6681030B2 (ja) 画像形成装置
JP3728796B2 (ja) 照明装置
KR100234544B1 (ko) 포토레지스트스트립(strip)설비의히터상태감시장치
JPH11165867A (ja) 半導体製造設備の真空吸着装置
CN1191503C (zh) 测量光罩布局修正所引起桥接的方法与装置
JP2001307988A (ja) 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法
CN223624510U (zh) 步进式光刻机
US12298737B2 (en) Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method
JP2025030471A (ja) リソグラフィー装置および物品製造方法
KR20000046752A (ko) 웨이퍼 척 히터 제어장치
JP7363230B2 (ja) 画像形成装置
KR20060086107A (ko) 웨이퍼를 베이크하기 위해 사용되는 베이크 유닛의 기압변동 검출장치 및 그 검출방법
KR200280457Y1 (ko) 노광 장비의 전압확인 장치
US6861179B1 (en) Charge effect and electrostatic damage prevention method on photo-mask
JPH05326391A (ja) フォトリソプロセスモニタ方法および装置
KR100987752B1 (ko) 화상 형성 장치의 정착 램프 전원 공급 제어 장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240530

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240530

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20241220

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250127

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250325

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20250404

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20250502

R150 Certificate of patent or registration of utility model

Ref document number: 7678710

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150