JP7552503B2 - 半導体装置 - Google Patents

半導体装置 Download PDF

Info

Publication number
JP7552503B2
JP7552503B2 JP2021088993A JP2021088993A JP7552503B2 JP 7552503 B2 JP7552503 B2 JP 7552503B2 JP 2021088993 A JP2021088993 A JP 2021088993A JP 2021088993 A JP2021088993 A JP 2021088993A JP 7552503 B2 JP7552503 B2 JP 7552503B2
Authority
JP
Japan
Prior art keywords
substrate
metal body
wiring
semiconductor element
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021088993A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022181822A (ja
JP2022181822A5 (https=
Inventor
翔一朗 大前
知巳 奥村
崇功 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2021088993A priority Critical patent/JP7552503B2/ja
Priority to CN202280028950.8A priority patent/CN117157759A/zh
Priority to PCT/JP2022/018373 priority patent/WO2022249813A1/ja
Publication of JP2022181822A publication Critical patent/JP2022181822A/ja
Publication of JP2022181822A5 publication Critical patent/JP2022181822A5/ja
Priority to US18/504,307 priority patent/US20240079372A1/en
Priority to JP2024150726A priority patent/JP7711822B2/ja
Application granted granted Critical
Publication of JP7552503B2 publication Critical patent/JP7552503B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W44/00Electrical arrangements for controlling or matching impedance
    • H10W44/501Inductive arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/10Containers or parts thereof
    • H10W76/12Containers or parts thereof characterised by their shape
    • H10W76/13Containers comprising a conductive base serving as an interconnection
    • H10W76/138Containers comprising a conductive base serving as an interconnection having another interconnection being formed by a cover plate parallel to the conductive base, e.g. sandwich type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Inverter Devices (AREA)
JP2021088993A 2021-05-27 2021-05-27 半導体装置 Active JP7552503B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021088993A JP7552503B2 (ja) 2021-05-27 2021-05-27 半導体装置
CN202280028950.8A CN117157759A (zh) 2021-05-27 2022-04-21 半导体装置
PCT/JP2022/018373 WO2022249813A1 (ja) 2021-05-27 2022-04-21 半導体装置
US18/504,307 US20240079372A1 (en) 2021-05-27 2023-11-08 Semiconductor device
JP2024150726A JP7711822B2 (ja) 2021-05-27 2024-09-02 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021088993A JP7552503B2 (ja) 2021-05-27 2021-05-27 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024150726A Division JP7711822B2 (ja) 2021-05-27 2024-09-02 半導体装置

Publications (3)

Publication Number Publication Date
JP2022181822A JP2022181822A (ja) 2022-12-08
JP2022181822A5 JP2022181822A5 (https=) 2023-06-13
JP7552503B2 true JP7552503B2 (ja) 2024-09-18

Family

ID=84228690

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021088993A Active JP7552503B2 (ja) 2021-05-27 2021-05-27 半導体装置
JP2024150726A Active JP7711822B2 (ja) 2021-05-27 2024-09-02 半導体装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024150726A Active JP7711822B2 (ja) 2021-05-27 2024-09-02 半導体装置

Country Status (4)

Country Link
US (1) US20240079372A1 (https=)
JP (2) JP7552503B2 (https=)
CN (1) CN117157759A (https=)
WO (1) WO2022249813A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7167907B2 (ja) * 2019-12-12 2022-11-09 株式会社デンソー 半導体装置
EP4136673A1 (en) * 2021-05-28 2023-02-22 Dynex Semiconductor Limited Semiconductor device
KR20240028223A (ko) * 2022-08-24 2024-03-05 현대자동차주식회사 차량용 파워 모듈
US12122251B2 (en) * 2022-09-28 2024-10-22 BorgWarner US Technologies LLC Systems and methods for bidirectional message architecture for inverter for electric vehicle

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011114176A (ja) 2009-11-27 2011-06-09 Mitsubishi Electric Corp パワー半導体装置
JP2019067951A (ja) 2017-10-02 2019-04-25 トヨタ自動車株式会社 半導体装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013021254A (ja) 2011-07-14 2013-01-31 Mitsubishi Electric Corp 半導体装置および半導体装置の製造方法
JP5661052B2 (ja) 2012-01-18 2015-01-28 三菱電機株式会社 パワー半導体モジュールおよびその製造方法
JP6252293B2 (ja) 2014-03-26 2017-12-27 株式会社デンソー 半導体装置
JP7040032B2 (ja) 2018-01-17 2022-03-23 株式会社デンソー 半導体装置
CN114365279B (zh) 2019-09-13 2025-09-19 株式会社电装 半导体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011114176A (ja) 2009-11-27 2011-06-09 Mitsubishi Electric Corp パワー半導体装置
JP2019067951A (ja) 2017-10-02 2019-04-25 トヨタ自動車株式会社 半導体装置

Also Published As

Publication number Publication date
CN117157759A (zh) 2023-12-01
JP2022181822A (ja) 2022-12-08
WO2022249813A1 (ja) 2022-12-01
US20240079372A1 (en) 2024-03-07
JP7711822B2 (ja) 2025-07-23
JP2024163192A (ja) 2024-11-21

Similar Documents

Publication Publication Date Title
JP7509084B2 (ja) 半導体装置
JP7711822B2 (ja) 半導体装置
JP7689653B2 (ja) 半導体装置
JP2025169996A (ja) 半導体装置
JP7424347B2 (ja) 半導体装置
JP7528865B2 (ja) 半導体装置
JP7512954B2 (ja) 半導体装置
JP7400773B2 (ja) 半導体装置
JP7400774B2 (ja) 半導体装置
JP7772161B2 (ja) 半導体装置
JP7472852B2 (ja) 半導体装置
JP7563295B2 (ja) 半導体装置
JP7512953B2 (ja) 半導体装置
JP7585969B2 (ja) 半導体装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230602

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230602

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240319

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240806

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240819

R150 Certificate of patent or registration of utility model

Ref document number: 7552503

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150