JP7541194B2 - 同心楕円の弦長比に基づく単結晶シリコン直径検出方法及び装置 - Google Patents

同心楕円の弦長比に基づく単結晶シリコン直径検出方法及び装置 Download PDF

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JP7541194B2
JP7541194B2 JP2023542843A JP2023542843A JP7541194B2 JP 7541194 B2 JP7541194 B2 JP 7541194B2 JP 2023542843 A JP2023542843 A JP 2023542843A JP 2023542843 A JP2023542843 A JP 2023542843A JP 7541194 B2 JP7541194 B2 JP 7541194B2
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single crystal
diameter
crystal silicon
ellipse
length ratio
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森▲偉▼ ▲項▼
易人 胡
敏翔 叶
▲芸▼菲 ▲張▼
▲ティン▼ 汪
▲沢▼▲華▼ ▲門▼
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之江実験室
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    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/13—Edge detection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/20—Image preprocessing
    • G06V10/25—Determination of region of interest [ROI] or a volume of interest [VOI]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10004—Still image; Photographic image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20024—Filtering details
    • G06T2207/20032—Median filtering
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Geometry (AREA)
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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2023542843A 2022-05-26 2023-02-16 同心楕円の弦長比に基づく単結晶シリコン直径検出方法及び装置 Active JP7541194B2 (ja)

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CN202210577992.9 2022-05-26
CN202210577992.9A CN114926440A (zh) 2022-05-26 2022-05-26 一种基于同心椭圆弦长比的单晶硅直径检测方法及装置
PCT/CN2023/076311 WO2023226481A1 (zh) 2022-05-26 2023-02-16 一种基于同心椭圆弦长比的单晶硅直径检测方法及装置

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CN114926440A (zh) * 2022-05-26 2022-08-19 之江实验室 一种基于同心椭圆弦长比的单晶硅直径检测方法及装置
CN115187599B (zh) 2022-09-09 2022-12-13 之江实验室 基于几何性质的轻量化的单晶硅椭圆参数辨识方法和系统
CN115265391B (zh) * 2022-09-30 2023-02-17 杭州利珀科技有限公司 一种单晶硅棒制备过程中硅料液距检测方法
CN117187942B (zh) * 2023-09-11 2024-03-26 保定景欣电气有限公司 一种拉晶过程中坩埚位置控制方法及装置
CN117385459B (zh) * 2023-10-23 2024-06-18 保定景欣电气有限公司 一种晶体生长过程中结晶检测方法及装置

Citations (5)

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CN102061517A (zh) 2010-12-13 2011-05-18 浙江长兴众成电子有限公司 直拉单晶硅直径测量方法
CN102914270A (zh) 2012-10-12 2013-02-06 西安理工大学 基于支持向量机回归的晶体直径测量方法
JP2018100195A (ja) 2016-12-20 2018-06-28 株式会社Sumco 単結晶の製造方法
CN112381807A (zh) 2020-11-18 2021-02-19 北京图知天下科技有限责任公司 一种直拉单晶生产中晶体直径检测方法、系统及计算机
CN114399489A (zh) 2022-01-12 2022-04-26 苏州天准科技股份有限公司 拉晶过程中光圈直径的监测方法、存储介质和终端

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JP5371685B2 (ja) * 2009-10-20 2013-12-18 キヤノン株式会社 情報処理装置及び制御方法、プログラム
JP7125499B2 (ja) * 2018-09-21 2022-08-24 富士フイルム株式会社 画像処理装置及び画像処理方法
CN112116667B (zh) * 2020-09-22 2023-11-24 扬州大学 一种发动机表面加工孔直径测量方法
CN113888572A (zh) * 2021-09-22 2022-01-04 西北工业大学 一种视觉的平面孔测量方法
CN114370828B (zh) * 2021-12-28 2023-06-20 中国铁路设计集团有限公司 基于激光扫描的盾构隧道直径收敛和径向错台检测方法
CN114926440A (zh) * 2022-05-26 2022-08-19 之江实验室 一种基于同心椭圆弦长比的单晶硅直径检测方法及装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102061517A (zh) 2010-12-13 2011-05-18 浙江长兴众成电子有限公司 直拉单晶硅直径测量方法
CN102914270A (zh) 2012-10-12 2013-02-06 西安理工大学 基于支持向量机回归的晶体直径测量方法
JP2018100195A (ja) 2016-12-20 2018-06-28 株式会社Sumco 単結晶の製造方法
CN112381807A (zh) 2020-11-18 2021-02-19 北京图知天下科技有限责任公司 一种直拉单晶生产中晶体直径检测方法、系统及计算机
CN114399489A (zh) 2022-01-12 2022-04-26 苏州天准科技股份有限公司 拉晶过程中光圈直径的监测方法、存储介质和终端

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