JP7489404B2 - 光学被覆材料としての四ホウ酸ストロンチウム - Google Patents
光学被覆材料としての四ホウ酸ストロンチウム Download PDFInfo
- Publication number
- JP7489404B2 JP7489404B2 JP2021566306A JP2021566306A JP7489404B2 JP 7489404 B2 JP7489404 B2 JP 7489404B2 JP 2021566306 A JP2021566306 A JP 2021566306A JP 2021566306 A JP2021566306 A JP 2021566306A JP 7489404 B2 JP7489404 B2 JP 7489404B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- optical material
- substrate
- layer
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims description 258
- 239000000463 material Substances 0.000 title claims description 131
- 238000000576 coating method Methods 0.000 title claims description 97
- 239000011248 coating agent Substances 0.000 title claims description 65
- QZRNTVPRGQDWRA-UHFFFAOYSA-N strontium;boron;oxygen(2-) Chemical compound [B].[O-2].[Sr+2] QZRNTVPRGQDWRA-UHFFFAOYSA-N 0.000 title claims description 22
- 239000000758 substrate Substances 0.000 claims description 79
- 238000007689 inspection Methods 0.000 claims description 47
- 239000013078 crystal Substances 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 24
- 238000002310 reflectometry Methods 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 15
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 235000012239 silicon dioxide Nutrition 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 6
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 claims description 4
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 claims description 4
- 238000005538 encapsulation Methods 0.000 claims description 4
- NNAZVIPNYDXXPF-UHFFFAOYSA-N [Li+].[Cs+].OB([O-])[O-] Chemical compound [Li+].[Cs+].OB([O-])[O-] NNAZVIPNYDXXPF-UHFFFAOYSA-N 0.000 claims description 2
- JDLDTRXYGQMDRV-UHFFFAOYSA-N tricesium;borate Chemical compound [Cs+].[Cs+].[Cs+].[O-]B([O-])[O-] JDLDTRXYGQMDRV-UHFFFAOYSA-N 0.000 claims description 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 3
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 3
- 238000001459 lithography Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 141
- 238000005286 illumination Methods 0.000 description 32
- 239000011247 coating layer Substances 0.000 description 23
- 238000005259 measurement Methods 0.000 description 23
- 235000012431 wafers Nutrition 0.000 description 21
- 210000001747 pupil Anatomy 0.000 description 16
- 239000002356 single layer Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 230000005855 radiation Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 230000007547 defect Effects 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000001066 destructive effect Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910000449 hafnium oxide Inorganic materials 0.000 description 4
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000012827 research and development Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 239000006117 anti-reflective coating Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 210000000887 face Anatomy 0.000 description 3
- VCZFPTGOQQOZGI-UHFFFAOYSA-N lithium bis(oxoboranyloxy)borinate Chemical compound [Li+].[O-]B(OB=O)OB=O VCZFPTGOQQOZGI-UHFFFAOYSA-N 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000001017 electron-beam sputter deposition Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000013024 troubleshooting Methods 0.000 description 2
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- MXCPYJZDGPQDRA-UHFFFAOYSA-N dialuminum;2-acetyloxybenzoic acid;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3].CC(=O)OC1=CC=CC=C1C(O)=O MXCPYJZDGPQDRA-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/004—Reflecting paints; Signal paints
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/283—Interference filters designed for the ultraviolet
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3551—Crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95676—Masks, reticles, shadow masks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/068—Optics, miscellaneous
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Wood Science & Technology (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Toxicology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
- Optical Filters (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
本出願は、2019年5月9日に出願された、「STRONTIUM TETRABORATE AS OPTICAL COATING MATERIAL」という名称の米国仮特許出願第62/845,496号の優先権を主張し、参照によって本明細書に組み込まれる。本出願は、また、2019年10月10日に出願された、「STRONTIUM TETRABORATE AS OPTICAL COATING MATERIAL」という名称の米国仮特許出願第62/913,643号の優先権を主張し、参照によって本明細書に組み込まれる。
(すなわち、T-202は、
Claims (25)
- システムであって、
サンプルを支持するように構成されたステージと、
100nmから300nmまでの間の範囲内の波長を有する入射光を発生するように構成された光源と、
センサと、
前記入射光を前記サンプル上まで誘導し、反射光を前記サンプルから前記センサまで誘導するように構成された光学システムと、
を含み、
前記光源及び前記光学システムのうちの少なくとも1つが、少なくとも1つの光学構成要素を含み、該光学構成要素は、
光部分を受け取るように配置された基体であって、それにより、前記受け取られた光部分は、前記基体の最上面に向かって誘導され、前記受け取られた光部分は、前記入射光及び前記反射光のうちの一方を含む、基体と、
前記最上面にわたって前記基体上に配設された第1光学材料層であって、前記受け取られた光部分の一部分が前記第1光学材料層を通して前記基体の前記最上面まで通過するように構成された第1光学材料層と、
を含み、
前記第1光学材料層が少なくとも99%の四ホウ酸ストロンチウム(SrB4O7)から構成されている、システム。 - 前記少なくとも1つの光学構成要素は、周波数変換結晶、レンズ、ビームスプリッタ、ミラー、窓、プリズム、及び偏光子のうちの1つを含む、請求項1に記載のシステム。
- 前記第1光学材料層は、前記光学構成要素の反射率を最小化するように構成され、それによって前記基体の前記最上面から離れる方に誘導される前記受け取られた光部分の量を最小化する、請求項1に記載のシステム。
- 前記第1光学材料層は、前記光学構成要素の反射率を最大化するように構成され、それによって前記基体の前記最上面から離れる方に誘導される前記受け取られた光部分の量を最大化する、請求項1に記載のシステム。
- 前記第1光学材料層は、30nmから200nmまでの間の範囲内の厚さを有する、請求項1に記載のシステム。
- 前記少なくとも1つの光学構成要素は、前記第1光学材料層と前記基体の前記最上面との間に配設された少なくとも1つの第2光学材料層を更に含む、請求項1に記載のシステム。
- 前記少なくとも1つの第2光学材料層は、フッ化マグネシウム、フッ化カルシウム、及び二酸化ケイ素のうちの少なくとも1つを含む、請求項6に記載のシステム。
- 前記光学構成要素は、前記第1光学材料層にわたって配設された少なくとも1つの第3光学材料層を更に含む、請求項6に記載のシステム。
- 前記第1光学材料層は、前記基体の前記最上面上に形成され、前記光学構成要素は、前記第1光学材料層にわたって配設された少なくとも1つの第2光学材料層を更に含む、請求項1に記載のシステム。
- 前記少なくとも1つの第2光学材料層は、フッ化マグネシウム、フッ化カルシウム、フッ化アルミニウム、及び二酸化ケイ素のうちの少なくとも1つを含む、請求項9に記載のシステム。
- 前記基体は、前記最上面と、前記最上面の反対側に配設された底面と、を含む外周面を有し、
前記第1光学材料層は、前記最上面にわたって配設された第1部分と、前記底面にわたって配設された第1部分と、を含む、請求項1に記載のシステム。 - 前記光学構成要素は、周波数変換結晶を含み、前記基体は、吸湿性非線形光学材料を含み、
前記第1光学材料層は、前記基体の前記外周面を完全に囲む連続封止構造を形成する、請求項11に記載のシステム。 - 前記吸湿性非線形光学材料は、セシウムホウ酸リチウム(CLBO)及びセシウムホウ酸(CBO)のうちの1つを含み、前記第1光学材料層は、前記吸湿性非線形光学材料の前記外周面上に直接配設されている、請求項12に記載のシステム。
- 前記周波数変換結晶は、前記第1光学材料層の外周面上に配設された第2光学材料層を更に含む、請求項13に記載のシステム。
- 前記周波数変換結晶は、前記第1光学材料層と前記吸湿性非線形光学材料の前記外周面との間に配設された第2光学材料層を更に含む、請求項12に記載のシステム。
- システムであって、
100nmから700nmまでの間の範囲内の波長を有する入射光を発生するように構成された光源と、
前記入射光をサンプル上まで誘導するように構成された光学システムと、
を含み、
前記光源及び前記光学システムのうちの少なくとも1つは、少なくとも1つの光学構成要素を含み、該光学構成要素は、
光部分を受け取るように配置された基体であって、それにより、前記受け取られた光部分は、前記基体の最上面に向かって誘導され、前記受け取られた光部分は、前記入射光及び反射光のうちの1つを含む、基体と、
前記基体の前記最上面上に配設された第1光学材料層と、
前記第1光学材料層の最上面上に配設された第2光学材料層と、
を含み、
前記第1及び第2光学材料層は、前記受け取られた光部分の一部分が前記第1及び第2光学材料層の両方を通して前記基体の前記最上面まで通過するように構成され、
前記第1及び前記第2光学材料層のうちの一方が、少なくとも99%の四ホウ酸ストロンチウムから構成され、前記第1及び前記第2光学材料層のうちの他方が、四ホウ酸ストロンチウムの屈折率よりも低い屈折率を有する第2光学材料を含む、システム。 - 前記システムは、半導体検査システム及び半導体測定システムのうちの1つであり、
前記システムは、センサを更に含み、前記光学システムは、前記サンプルから反射又は散乱された光を前記センサまで誘導するように更に構成されている、請求項16に記載のシステム。 - 前記システムは、リソグラフィシステムであり、前記システムは、前記サンプル上のパターンを露光するように構成されている、請求項16に記載のシステム。
- 基体を有する光学構成要素を作製する方法であって、
100nmから300nmまでの間の範囲内の波長を有する入射光を発生するように構成された光源と、前記入射光をサンプル上まで誘導し、反射光を前記サンプルからセンサまで誘導するように構成された光学システムのうちの少なくとも1つが、前記基体を有する光学構成要素を含むものであり、前記方法は、
前記基体を用意するステップと、
四ホウ酸ストロンチウム源に向いている被覆されるべき前記基体を被覆チャンバ内に設置するステップと、
前記基体を前記被覆チャンバ内部で回転させるステップと、
前記四ホウ酸ストロンチウム源に電子銃からの電子によって衝撃を付与するステップと、
前記四ホウ酸ストロンチウム源と前記電子銃とが、四ホウ酸ストロンチウムが前記源から放出されて、前記基体に向かって誘導されるように構成されるステップと、
四ホウ酸ストロンチウムの層を前記基体上に形成するステップと、
四ホウ酸ストロンチウムの所望の厚さが前記基体上に堆積されたときに、前記電子衝撃付与を停止するステップと、
を含む、方法。 - 前記厚さは、ある波長での前記基体の反射率を低減させるように選ばれる、請求項19に記載の方法。
- 前記厚さは、ある波長での前記基体の反射率を増加させるように選ばれる、請求項19に記載の方法。
- 前記波長は、130nmから400nmまでの間にある、請求項20に記載の方法。
- 前記厚さは、30nmから200nmまでの範囲内にある、請求項22に記載の方法。
- 前記方法は、前記四ホウ酸ストロンチウムの層上に第2層を形成するステップを更に含む、請求項19に記載の方法。
- 前記第2層は、フッ化マグネシウム、フッ化カルシウム、フッ化アルミニウム、及び二酸化ケイ素のうちの1つを含む、請求項24に記載の方法。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962845496P | 2019-05-09 | 2019-05-09 | |
US62/845,496 | 2019-05-09 | ||
US201962913643P | 2019-10-10 | 2019-10-10 | |
US62/913,643 | 2019-10-10 | ||
US16/819,991 US10921261B2 (en) | 2019-05-09 | 2020-03-16 | Strontium tetraborate as optical coating material |
US16/819,991 | 2020-03-16 | ||
PCT/US2020/031550 WO2020227332A1 (en) | 2019-05-09 | 2020-05-06 | Strontium tetraborate as optical coating material |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022532324A JP2022532324A (ja) | 2022-07-14 |
JP7489404B2 true JP7489404B2 (ja) | 2024-05-23 |
Family
ID=73047643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021566306A Active JP7489404B2 (ja) | 2019-05-09 | 2020-05-06 | 光学被覆材料としての四ホウ酸ストロンチウム |
Country Status (8)
Country | Link |
---|---|
US (2) | US10921261B2 (ja) |
EP (1) | EP3938766A4 (ja) |
JP (1) | JP7489404B2 (ja) |
KR (1) | KR20210153735A (ja) |
CN (1) | CN113785082A (ja) |
IL (2) | IL311422A (ja) |
TW (1) | TWI833005B (ja) |
WO (1) | WO2020227332A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11255797B2 (en) * | 2019-07-09 | 2022-02-22 | Kla Corporation | Strontium tetraborate as optical glass material |
US11237455B2 (en) | 2020-06-12 | 2022-02-01 | Kla Corporation | Frequency conversion using stacked strontium tetraborate plates |
IL304070A (en) * | 2020-12-30 | 2023-08-01 | Asml Netherlands Bv | Apparatus and method for cleaning a test system |
US20230034635A1 (en) | 2021-07-30 | 2023-02-02 | Kla Corporation | Protective coating for nonlinear optical crystal |
US11567391B1 (en) | 2021-11-24 | 2023-01-31 | Kla Corporation | Frequency conversion using interdigitated nonlinear crystal gratings |
US11899338B2 (en) | 2021-12-11 | 2024-02-13 | Kla Corporation | Deep ultraviolet laser using strontium tetraborate for frequency conversion |
WO2023208350A1 (en) * | 2022-04-28 | 2023-11-02 | Applied Materials, Inc. | Method for testing a packaging substrate, and apparatus for testing a packaging substrate |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011099941A (ja) | 2009-11-05 | 2011-05-19 | Nikon Corp | 波長変換素子、波長変換光学系、波長変換方法、光源装置、露光装置、マスク検査装置及び高分子結晶の加工装置 |
US20130265572A1 (en) | 2012-04-04 | 2013-10-10 | Kla-Tencor Corporation | Protective Fluorine-Doped Silicon Oxide Film For Optical Components |
JP2017525144A (ja) | 2014-06-20 | 2017-08-31 | ケーエルエー−テンカー コーポレイション | ミラーおよび/またはプリズムを用いたレーザ繰返し周波数逓倍器およびフラットトップビームプロファイル生成器 |
JP2018517902A5 (ja) | 2016-05-13 | 2019-06-13 |
Family Cites Families (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK480477A (da) * | 1976-11-02 | 1978-05-03 | Philips Nv | Lavtrykskviksoelvdampudladningslampe |
NL8300115A (nl) * | 1983-01-13 | 1984-08-01 | Philips Nv | Bestralingsinrichting. |
US5068055A (en) * | 1986-08-28 | 1991-11-26 | Gte Products Corporation | Europium activated strontium tetraborate UV phosphors |
US5216323A (en) | 1990-03-21 | 1993-06-01 | U.S. Philips Corporation | Low-pressure mercury vapor discharge lamp for suntanning purposes |
US5608526A (en) | 1995-01-19 | 1997-03-04 | Tencor Instruments | Focused beam spectroscopic ellipsometry method and system |
US5999310A (en) | 1996-07-22 | 1999-12-07 | Shafer; David Ross | Ultra-broadband UV microscope imaging system with wide range zoom capability |
JPH10284793A (ja) | 1997-04-04 | 1998-10-23 | Mitsubishi Materials Corp | 短波長領域のレーザ光用光学材 |
US6278519B1 (en) | 1998-01-29 | 2001-08-21 | Therma-Wave, Inc. | Apparatus for analyzing multi-layer thin film stacks on semiconductors |
US7006222B2 (en) * | 2003-01-08 | 2006-02-28 | Kla-Tencor Technologies Corporation | Concurrent measurement and cleaning of thin films on silicon-on-insulator (SOI) |
US7957066B2 (en) | 2003-02-21 | 2011-06-07 | Kla-Tencor Corporation | Split field inspection system using small catadioptric objectives |
US20060114946A1 (en) * | 2004-11-30 | 2006-06-01 | Yunlong Sun | Nonlinear crystal modifications for durable high-power laser wavelength conversion |
US7309454B2 (en) * | 2005-04-25 | 2007-12-18 | Osram Sylvania Inc. | UV-emitting strontium borate phosphor with improved holdover stability |
US7245438B2 (en) | 2005-05-23 | 2007-07-17 | Kla-Tencor Technologies Corporation | Broad band objective having improved lateral color performance |
US7345825B2 (en) | 2005-06-30 | 2008-03-18 | Kla-Tencor Technologies Corporation | Beam delivery system for laser dark-field illumination in a catadioptric optical system |
WO2007005728A2 (en) | 2005-07-01 | 2007-01-11 | L & P Property Management Company | Adjustable shelving system |
KR100709253B1 (ko) | 2005-07-29 | 2007-04-19 | 삼성에스디아이 주식회사 | 복합 형광막과 이를 구비한 표시장치 |
US20080211378A1 (en) | 2005-09-29 | 2008-09-04 | Arunava Dutta | Enhanced UV-Emitting Fluorescent Lamp |
US7955531B1 (en) * | 2006-04-26 | 2011-06-07 | Rohm And Haas Electronic Materials Llc | Patterned light extraction sheet and method of making same |
US7521727B2 (en) * | 2006-04-26 | 2009-04-21 | Rohm And Haas Company | Light emitting device having improved light extraction efficiency and method of making same |
US7705331B1 (en) | 2006-06-29 | 2010-04-27 | Kla-Tencor Technologies Corp. | Methods and systems for providing illumination of a specimen for a process performed on the specimen |
US7525649B1 (en) | 2007-10-19 | 2009-04-28 | Kla-Tencor Technologies Corporation | Surface inspection system using laser line illumination with two dimensional imaging |
NL1036886A1 (nl) * | 2008-05-12 | 2009-11-16 | Asml Netherlands Bv | A method of measuring a target, an inspection apparatus, a scatterometer, a lithographic apparatus and a data processor. |
US8441639B2 (en) | 2009-09-03 | 2013-05-14 | Kla-Tencor Corp. | Metrology systems and methods |
US9279774B2 (en) | 2011-07-12 | 2016-03-08 | Kla-Tencor Corp. | Wafer inspection |
US9228943B2 (en) | 2011-10-27 | 2016-01-05 | Kla-Tencor Corporation | Dynamically adjustable semiconductor metrology system |
US9645287B2 (en) | 2012-12-17 | 2017-05-09 | Kla-Tencor Corporation | Flexible optical aperture mechanisms |
US9726617B2 (en) | 2013-06-04 | 2017-08-08 | Kla-Tencor Corporation | Apparatus and methods for finding a best aperture and mode to enhance defect detection |
US9255887B2 (en) | 2013-06-19 | 2016-02-09 | Kla-Tencor Corporation | 2D programmable aperture mechanism |
KR101830850B1 (ko) * | 2013-07-03 | 2018-02-21 | 에이에스엠엘 네델란즈 비.브이. | 검사 장치 및 방법, 리소그래피 장치, 리소그래피 처리 셀 및 디바이스 제조 방법 |
US9804101B2 (en) * | 2014-03-20 | 2017-10-31 | Kla-Tencor Corporation | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser |
US9723703B2 (en) | 2014-04-01 | 2017-08-01 | Kla-Tencor Corporation | System and method for transverse pumping of laser-sustained plasma |
US9709510B2 (en) | 2014-06-26 | 2017-07-18 | Kla-Tencor Corp. | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection |
WO2016005167A1 (en) * | 2014-07-09 | 2016-01-14 | Asml Netherlands B.V. | Inspection apparatus, inspection method and device manufacturing method |
US9891177B2 (en) | 2014-10-03 | 2018-02-13 | Kla-Tencor Corporation | TDI sensor in a darkfield system |
US9470639B1 (en) | 2015-02-03 | 2016-10-18 | Kla-Tencor Corporation | Optical metrology with reduced sensitivity to grating anomalies |
EP3062075B1 (en) * | 2015-02-06 | 2024-01-10 | Universitat Politècnica De Catalunya | Optical system and method for ultrashort laser pulse characterization |
WO2016139057A1 (en) * | 2015-03-05 | 2016-09-09 | Asml Netherlands B.V. | Method and apparatus for inspection and metrology |
CN107408149B (zh) * | 2015-03-06 | 2020-09-15 | 心脏起搏器股份公司 | 用于显示医疗数据的系统和方法 |
US9860466B2 (en) | 2015-05-14 | 2018-01-02 | Kla-Tencor Corporation | Sensor with electrically controllable aperture for inspection and metrology systems |
CN107850856B (zh) * | 2015-07-17 | 2020-06-26 | Asml荷兰有限公司 | 用于检查和量测的方法及设备 |
US10394136B2 (en) * | 2015-09-30 | 2019-08-27 | Asml Netherlands B.V. | Metrology method for process window definition |
NL2017933A (en) * | 2015-12-18 | 2017-06-26 | Asml Netherlands Bv | Focus monitoring arrangement and inspection apparatus including such an arrangement |
US9865447B2 (en) | 2016-03-28 | 2018-01-09 | Kla-Tencor Corporation | High brightness laser-sustained plasma broadband source |
WO2018015283A1 (en) * | 2016-07-18 | 2018-01-25 | Az Electronic Materials (Luxembourg) S.A.R.L. | Formulation for led encapsulation material |
US10822459B2 (en) * | 2016-07-18 | 2020-11-03 | Az Electronic Materials (Luxembourg) S.A.R.L. | Formulation for an LED encapsulation material |
US11662646B2 (en) * | 2017-02-05 | 2023-05-30 | Kla Corporation | Inspection and metrology using broadband infrared radiation |
CN107254667A (zh) * | 2017-06-06 | 2017-10-17 | 中国科学院半导体研究所 | 光学介质薄膜、Al2O3、含硅薄膜、激光器腔面膜的制备方法 |
WO2019038054A1 (en) * | 2017-08-23 | 2019-02-28 | Asml Netherlands B.V. | METHOD FOR DETERMINING A PARAMETER OF A PATTERN TRANSFER PROCESS, DEVICE MANUFACTURING METHOD |
-
2020
- 2020-03-16 US US16/819,991 patent/US10921261B2/en active Active
- 2020-04-10 TW TW109112100A patent/TWI833005B/zh active
- 2020-05-06 KR KR1020217039424A patent/KR20210153735A/ko unknown
- 2020-05-06 IL IL311422A patent/IL311422A/en unknown
- 2020-05-06 CN CN202080032685.1A patent/CN113785082A/zh active Pending
- 2020-05-06 JP JP2021566306A patent/JP7489404B2/ja active Active
- 2020-05-06 IL IL287324A patent/IL287324B1/en unknown
- 2020-05-06 EP EP20801978.6A patent/EP3938766A4/en active Pending
- 2020-05-06 WO PCT/US2020/031550 patent/WO2020227332A1/en unknown
-
2021
- 2021-01-08 US US17/144,475 patent/US11360032B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011099941A (ja) | 2009-11-05 | 2011-05-19 | Nikon Corp | 波長変換素子、波長変換光学系、波長変換方法、光源装置、露光装置、マスク検査装置及び高分子結晶の加工装置 |
US20130265572A1 (en) | 2012-04-04 | 2013-10-10 | Kla-Tencor Corporation | Protective Fluorine-Doped Silicon Oxide Film For Optical Components |
JP2017525144A (ja) | 2014-06-20 | 2017-08-31 | ケーエルエー−テンカー コーポレイション | ミラーおよび/またはプリズムを用いたレーザ繰返し周波数逓倍器およびフラットトップビームプロファイル生成器 |
JP2018517902A5 (ja) | 2016-05-13 | 2019-06-13 |
Also Published As
Publication number | Publication date |
---|---|
EP3938766A1 (en) | 2022-01-19 |
US20200355621A1 (en) | 2020-11-12 |
IL287324B1 (en) | 2024-05-01 |
US11360032B2 (en) | 2022-06-14 |
US20210131978A1 (en) | 2021-05-06 |
KR20210153735A (ko) | 2021-12-17 |
WO2020227332A1 (en) | 2020-11-12 |
JP2022532324A (ja) | 2022-07-14 |
TWI833005B (zh) | 2024-02-21 |
IL311422A (en) | 2024-05-01 |
EP3938766A4 (en) | 2022-12-28 |
TW202106399A (zh) | 2021-02-16 |
CN113785082A (zh) | 2021-12-10 |
US10921261B2 (en) | 2021-02-16 |
IL287324A (en) | 2021-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7489404B2 (ja) | 光学被覆材料としての四ホウ酸ストロンチウム | |
TWI337255B (en) | Inspection apparatus, lithographic system provided with the inspection apparatus and a method for inspecting a sample | |
CN109690235B (zh) | 用于测量高纵横比结构的红外光谱反射计 | |
JP7116753B2 (ja) | 堆積用監視システム及びその操作方法 | |
CN113366300B (zh) | 用于高深宽比结构的测量的中红外光谱法 | |
US11255797B2 (en) | Strontium tetraborate as optical glass material | |
CN111183509B (zh) | 在高反射膜堆叠上的高吸收膜层的光学测量系统与方法 | |
JP6952033B2 (ja) | Vuv光学素子の非接触サーマル測定 | |
US20160225610A1 (en) | System And Method For Photomask Particle Detection | |
TW201107735A (en) | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | |
Hamamoto et al. | Phase defect observation using extreme ultraviolet microscope | |
JP6053084B1 (ja) | マスク検査装置及びマスク検査方法 | |
US20230034635A1 (en) | Protective coating for nonlinear optical crystal | |
JP2005302963A (ja) | 露光装置 | |
JP2006308722A (ja) | 低反射パターン膜及び高さ測定装置 | |
Piel et al. | A new purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm | |
Bayer et al. | Imaging properties of different optics for EUV radiation | |
JPWO2004068566A1 (ja) | 真空紫外用光学系及び投影露光装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230314 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230927 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231003 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231106 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240116 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240409 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240507 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240513 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7489404 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |