JP7480145B2 - 電極改質のための自己集合単分子層およびそのような自己集合単分子層を含むデバイス - Google Patents
電極改質のための自己集合単分子層およびそのような自己集合単分子層を含むデバイス Download PDFInfo
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- JP7480145B2 JP7480145B2 JP2021532031A JP2021532031A JP7480145B2 JP 7480145 B2 JP7480145 B2 JP 7480145B2 JP 2021532031 A JP2021532031 A JP 2021532031A JP 2021532031 A JP2021532031 A JP 2021532031A JP 7480145 B2 JP7480145 B2 JP 7480145B2
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- 125000001196 nonadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- 229940078552 o-xylene Drugs 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000007530 organic bases Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000001190 organyl group Chemical group 0.000 description 1
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical compound C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 1
- 125000005740 oxycarbonyl group Chemical group [*:1]OC([*:2])=O 0.000 description 1
- GPRIERYVMZVKTC-UHFFFAOYSA-N p-quaterphenyl Chemical group C1=CC=CC=C1C1=CC=C(C=2C=CC(=CC=2)C=2C=CC=CC=2)C=C1 GPRIERYVMZVKTC-UHFFFAOYSA-N 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 125000001148 pentyloxycarbonyl group Chemical group 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical class C1(=C(C=CC=C1)*)* 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000323 polyazulene Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920000414 polyfuran Polymers 0.000 description 1
- 229920001470 polyketone Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 125000004742 propyloxycarbonyl group Chemical group 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000003219 pyrazolines Chemical class 0.000 description 1
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical compound C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- JWVCLYRUEFBMGU-UHFFFAOYSA-N quinazoline Chemical compound N1=CN=CC2=CC=CC=C21 JWVCLYRUEFBMGU-UHFFFAOYSA-N 0.000 description 1
- 229920005604 random copolymer Polymers 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 125000006413 ring segment Chemical group 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- FPDOSPSUXAVNKK-UHFFFAOYSA-N selenopheno[3,2-b]thiophene Chemical compound [se]1C=CC2=C1C=CS2 FPDOSPSUXAVNKK-UHFFFAOYSA-N 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
- KXCAEQNNTZANTK-UHFFFAOYSA-N stannane Chemical group [SnH4] KXCAEQNNTZANTK-UHFFFAOYSA-N 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical class C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002335 surface treatment layer Substances 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- APBDREXAUGXCCV-UHFFFAOYSA-L tetraethylazanium;carbonate Chemical compound [O-]C([O-])=O.CC[N+](CC)(CC)CC.CC[N+](CC)(CC)CC APBDREXAUGXCCV-UHFFFAOYSA-L 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- VLLMWSRANPNYQX-UHFFFAOYSA-N thiadiazole Chemical compound C1=CSN=N1.C1=CSN=N1 VLLMWSRANPNYQX-UHFFFAOYSA-N 0.000 description 1
- URMVZUQDPPDABD-UHFFFAOYSA-N thieno[2,3-f][1]benzothiole Chemical compound C1=C2SC=CC2=CC2=C1C=CS2 URMVZUQDPPDABD-UHFFFAOYSA-N 0.000 description 1
- ONCNIMLKGZSAJT-UHFFFAOYSA-N thieno[3,2-b]furan Chemical compound S1C=CC2=C1C=CO2 ONCNIMLKGZSAJT-UHFFFAOYSA-N 0.000 description 1
- VJYJJHQEVLEOFL-UHFFFAOYSA-N thieno[3,2-b]thiophene Chemical compound S1C=CC2=C1C=CS2 VJYJJHQEVLEOFL-UHFFFAOYSA-N 0.000 description 1
- 125000004055 thiomethyl group Chemical group [H]SC([H])([H])* 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 1
- 125000005490 tosylate group Chemical group 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- FMYXZXAKZWIOHO-UHFFFAOYSA-N trichloro(2-phenylethyl)silane Chemical compound Cl[Si](Cl)(Cl)CCC1=CC=CC=C1 FMYXZXAKZWIOHO-UHFFFAOYSA-N 0.000 description 1
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical group CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000008648 triflates Chemical class 0.000 description 1
- BWHDROKFUHTORW-UHFFFAOYSA-N tritert-butylphosphane Chemical compound CC(C)(C)P(C(C)(C)C)C(C)(C)C BWHDROKFUHTORW-UHFFFAOYSA-N 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 description 1
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Description
背景
有機電子材料は、広範な電子デバイス、たとえば、いくつか例を挙げるだけでも、有機光検出器(OPD)、有機光起電力セル(OPV)、有機発光ダイオード(OLED)および有機電界効果トランジスタ(OFET)においてその存在感を確立している。有機電子材料は、下にある基板上に溶液処理によって堆積させることができるため、有機材料は、簡易で柔軟性の高い製造を可能にすることが見込まれ、製造コストの削減につながる可能性もある。
概要
本発明者らは今回、驚くべきことに、上記の目的が、ここで開示する有機電子デバイスおよびその製造方法により個別に、または任意の組み合わせの何れかで達成できることを発見した。
R1-SiX3 (I)
の化合物と、式R2-OHのアルコール
(式中、
R1は、それぞれの出現において独立して、1~10個の炭素原子を有し、少なくとも1つの電子求引性基RAで置換されているアルキル、または6~30個の芳香族炭素環原子を有し、少なくとも1つの電子求引性基で置換されているアリールであり;
R2は、1~10個の炭素原子を有するアルキル基であり;
Xは、それぞれの出現において独立してハロゲンまたは1~10個の炭素原子を有するアルコキシである)
との反応生成物を堆積させることにより形成されている、有機電子デバイスを提供する。
(a)電極を、任意に基板上に、設ける工程;
(b)前記電極上に、式(I)
R1-SiX3 (I)
の化合物と、式R2-OHのアルコール
(式中、
R1は、それぞれの出現において独立して、1~10個の炭素原子を有し、少なくとも1つの電子求引性基RAで置換されているアルキル、または6~30個の芳香族炭素環原子を有し、少なくとも1つの電子求引性基RAで置換されているアリールであり;
R2は、1~10個の炭素原子を有するアルキル基であり;
Xは、それぞれの出現において独立してハロゲンまたは1~10個の炭素原子を有するアルコキシである)
とを含む調合物を堆積させて自己集合単分子層を得る工程;および
(c)前記自己集合単分子層上に、有機半導体材料を堆積させて有機半導体層を得る工程
を含む、方法も提供する。
R1-SiX3 (I)
の化合物と、式R2-OHのアルコール(式中、R1、R2およびXは、ここで定義する通りである)を含む調合物を堆積させることにより形成されている。
R1-SiX2(OR2) (I-a)
R1-SiX(OR2)2 (I-b)
R1-Si(OR2)3 (I-c)
の化合物を形成すると考えられ、理論によって拘束されることを望むものではないが、この中で、式(I-c)が大部分の化合物、場合によっては唯一の化合物となると考えられる。
bは、それぞれの出現において独立して少なくとも1かつ10以下の整数、好ましくは5以下の整数であり;
cは、それぞれの出現において少なくとも1かつ2b+1以下の整数、好ましくは2b+1であり;
dは、それぞれの出現において少なくとも0かつ2b以下の整数、好ましくは0であり;
ただし、cとdの合計は2b+1、即ち、c+d=2b+1であり;
eは、それぞれの出現において独立して少なくとも1かつ5以下の整数、好ましくは5であり;
RAは、ここで定義する通りの電子求引性基である)
の何れか1つの基である。
からなる群から独立して選択されてもよいポリマーまたはコポリマーであってもよい。
Ra-M-Rb (V-a)
(式中、Mは、ここで定義する通りであり、RaおよびRbは、不活性化学基である)で表されてもよい。そのような不活性化学基RaおよびRbは、水素、フッ素、1~10個の炭素原子を有するアルキル、1~10個の炭素原子を有し、1つ以上、たとえば全ての水素がフッ素で置きかえられていてもよいアルキル、5~30個の炭素原子の芳香族環系、および1個以上の水素原子が、他の何れからも独立してフッ素または1~10個の炭素原子を有するアルキルにより置きかえられていてもよい、5~30個の炭素原子の芳香族環系からなる群から互いに独立して選択されてもよい。
群Aは、セレノフェン-2,5-ジイル、チオフェン-2,5-ジイル、チエノ[3,2-b]チオフェン-2,5-ジイル、チエノ[2,3-b]チオフェン-2,5-ジイル、セレノフェノ[3,2-b]セレノフェン-2,5-ジイル、セレノフェノ[2,3-b]セレノフェン-2,5-ジイル、セレノフェノ[3,2-b]チオフェン-2,5-ジイル、セレノフェノ[2,3-b]チオフェン-2,5-ジイル、ベンゾ[1,2-b:4,5-b’]ジチオフェン-2,6-ジイル、2,2-ジチオフェン、2,2-ジセレノフェン、ジチエノ[3,2-b:2’,3’-d]シロール-5,5-ジイル、4H-シクロペンタ[2,1-b:3,4-b’]ジチオフェン-2,6-ジイル、2,7-ジ-チエン-2-イル-カルバゾール、2,7-ジ-チエン-2-イル-フルオレン、インダセノ[1,2-b:5,6-b’]ジチオフェン-2,7-ジイル、ベンゾ[1’’,2’’:4,5;4’’,5’’:4’,5’]ビス(シロロ[3,2-b:3’,2’-b’]チオフェン)-2,7-ジイル、2,7-ジ-チエン-2-イル-インダセノ[1,2-b:5,6-b’]ジチオフェン、2,7-ジ-チエン-2-イル-ベンゾ[1’’,2’’:4,5;4’’,5’’:4’,5’]ビス(シロロ[3,2-b:3’,2’-b’]チオフェン)-2,7-ジイル、および2,7-ジ-チエン-2-イル-フェナントロ[1,10,9,8-c,d,e,f,g]カルバゾールからなり、これらの全ては、先に定義した通りの1つ以上、好ましくは1または2つの基Rにより任意に置換されていてもよく、
群Bは、ベンゾ[2,1,3]チアジアゾール-4,7-ジイル、5,6-ジアルキル-ベンゾ[2,1,3]チアジアゾール-4,7-ジイル、5,6-ジアルコキシベンゾ[2,1,3]チアジアゾール-4,7-ジイル、ベンゾ[2,1,3]セレナジアゾール-4,7-ジイル、5,6-ジアルコキシ-ベンゾ[2,1,3]セレナジアゾール-4,7-ジイル、ベンゾ[1,2,5]チアジアゾール-4,7,ジイル、ベンゾ[1,2,5]セレナジアゾール-4,7,ジイル、ベンゾ[2,1,3]オキサジアゾール-4,7-ジイル、5,6-ジアルコキシベンゾ[2,1,3]オキサジアゾール-4,7-ジイル、2H-ベンゾトリアゾール-4,7-ジイル、2,3-ジシアノ-1,4-フェニレン、2,5-ジシアノ,1,4-フェニレン、2,3-ジフルオロ-1,4-フェニレン、2,5-ジフルオロ-1,4-フェニレン、2,3,5,6-テトラフルオロ-1,4-フェニレン、3,4-ジフルオロチオフェン-2,5-ジイル、チエノ[3,4-b]ピラジン-2,5-ジイル、キノキサリン-5,8-ジイル、チエノ[3,4-b]チオフェン-4,6-ジイル、チエノ[3,4-b]チオフェン-6,4-ジイル、および3,6-ピロロ[3,4-c]ピロール-1,4-ジオンからなり、これらは全て、先に定義した通りの1つ以上、好ましくは1または2つの基Rにより任意に置換されていてもよい。
Rc-M-Rd (V-b)
(式中、Mは、ここで定義する通りであり、RcおよびRdは、Rcに関して先に定義した通りの反応性化学基である)で表される。そのようなモノマーは一般に、当業者に周知の方法に従い調製されてもよい。
(a)ここで定義する通りの電極を、任意にここで定義する通りの基板上に、設ける工程;
(b)前記電極上に、ここで定義する通りの式(I)の化合物と、ここで定義する通りの式R2-OHのアルコールを含む調合物を堆積させて自己集合単分子層を得る工程;および
(c)前記自己集合単分子層上に、有機半導体材料を堆積させて有機半導体層を得る工程
を含む、方法に関する。
(d)ここで定義する通りの誘電材料を、ゲート絶縁体層として有機半導体層上に堆積させる工程;
(e)ゲート電極をゲート絶縁体層上に堆積させる工程;および
(f)任意に、不動態化層をゲート電極上に堆積させる工程
を追加で、好ましくはこのような順序で含んでもよい。
(o)ゲート電極を基板上に堆積させる工程;および
(o’)誘電材料をゲート絶縁体層としてゲート電極上に堆積させる工程
をさらに含んでもよい。
(d)不動態化層を有機半導体層上に堆積させる工程
をさらに含んでもよい。
本願の利点を、下記の非限定例により例示する。
等式(eq.1):
仕事関数は、自己集合単分子層(SAM)がある電極とない電極について、ケルビンプローブを使用して判定し、ここで、自己集合単分子層は、ガラス基板上のそれぞれの電極を、F5C6-SiCl3のイソプロパノール(iPr-OH)溶液に浸漬することによって調製した。したがって、理論によって拘束されることを望むものではないが、そのような溶液は、おそらくは活性種としてF5C6-Si(O-iPr)3を主として含む。それぞれの結果を表1に示す。
ガラス上のインジウムスズ酸化物(ITO)電極をスピンコーターに入れ、F5C6-SiCl3のイソプロパノール(iPr-OH)溶液と1分間接触させた。したがって、理論によって拘束されることを望むものではないが、そのような溶液は、おそらくは活性種としてF5C6-Si(O-iPr)3を主として含み、それにより自己集合単分子層を形成する。過剰な溶液をスピンオフし、続いてイソプロパノールでのすすぎを行った。次いで、結果として得られた自己集合単分子層の上に、インダセノジチオフェンとベンゾチアジアゾールの誘導体を含む有機半導体材料の層を堆積させた。
例2の調製を繰り返したが、自己集合単分子層の調製に、イソプロパノール中のF5C6-SiCl3に代えてイソプロパノール中のパラクロロベンゼンホスファート(下記の式(III)を参照)を使用した点が異なる。
Claims (13)
- 電極、前記電極上の自己集合単分子層、および前記自己集合単分子層上の有機半導体層を含む有機電子デバイスを製造する方法であって、
(a)電極を、任意に基板上に、設ける工程;
(b)前記電極上に、式(I)
R1-SiX3 (I)
の化合物と、式R2-OHのアルコール
(式中、
R 1 は、それぞれの出現において、少なくとも1つのR A で置換されている(II-b)
eは、それぞれの出現において独立して少なくとも1かつ5以下の整数である)
の何れかから独立して選択される基であり;
R2は、1~10個の炭素原子を有するアルキル基であり;
Xは、それぞれの出現において独立してClであり;
R A では、Fである。)
とを含む反応生成物を堆積させて自己集合単分子層を得る工程;および
(c)前記自己集合単分子層上に、有機半導体材料を堆積させて有機半導体層を得る工程を含む、方法。 - 前記自己集合単分子層が、前記電極上に、式(I)の前記化合物と式R2-OHの前記アルコールを含む調合物を堆積させることにより形成されている、請求項1に記載の有機電子デバイスを製造する方法。
- eが5である、請求項1または請求項2に記載の有機電子デバイスを製造する方法。
- 電極は、金属もしくは電気伝導性金属酸化物、またはそれらのブレンドを含む、請求項1から4の何れか1項に記載の有機電子デバイスを製造する方法。
- 電極は、クロム、モリブデン、タングステン、コバルト、ロジウム、イリジウム、ニッケル、パラジウム、白金、金、銀、およびこれらの何れかの任意のブレンドからなる群から選択される、請求項1から5の何れか1項に記載の有機電子デバイスを製造する方法。
- 電極は、クロム、モリブデンおよびタングステンからなる群から選択される金属を含む、請求項1から6の何れか1項に記載の有機電子デバイスを製造する方法。
- 電極は、インジウムスズ酸化物(ITO)、酸化モリブデン、酸化スズ、およびこれらの何れかの任意のブレンドからなる群から選択される電気伝導性金属酸化物を含む、請求項1から7の何れか1項に記載の有機電子デバイスを製造する方法。
- 前記電極がインジウムスズ酸化物電極である、請求項8に記載の有機電子デバイスを製造する方法。
- R2が、1~5個の炭素原子を有するアルキルである、請求項1から9の何れか1項に記載の有機電子デバイスを製造する方法。
- R2が、イソプロピルである、先行する請求項10に記載の有機電子デバイスを製造する方法。
- 前記有機電子デバイスが、有機電界効果トランジスタ(OFET)、有機薄膜トランジスタ(OTFT)、有機発光ダイオード(OLED)、有機発光トランジスタ(OLET)、有機光起電力デバイス(OPV)、有機光検出器(OPD)、有機ソーラーセル、レーザーダイオード、ショットキーダイオード、光伝導体および光検出器からなる群から選択される、請求項1から11の何れか1項に記載の有機電子デバイスを製造する方法。
- 前記有機電子デバイスが、有機電界効果トランジスタ(PFET)または有機薄膜トランジスタ(OTFT)である、請求項12に記載の有機電子デバイスを製造する方法。
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