JP7473774B2 - 圧電アクチュエータ、光走査装置 - Google Patents
圧電アクチュエータ、光走査装置 Download PDFInfo
- Publication number
- JP7473774B2 JP7473774B2 JP2019165949A JP2019165949A JP7473774B2 JP 7473774 B2 JP7473774 B2 JP 7473774B2 JP 2019165949 A JP2019165949 A JP 2019165949A JP 2019165949 A JP2019165949 A JP 2019165949A JP 7473774 B2 JP7473774 B2 JP 7473774B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- piezoelectric
- grain size
- piezoelectric thin
- average grain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims description 26
- 239000010409 thin film Substances 0.000 claims description 105
- 239000010408 film Substances 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 23
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 8
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 229910052746 lanthanum Inorganic materials 0.000 claims description 6
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052788 barium Inorganic materials 0.000 claims description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 2
- LBSANEJBGMCTBH-UHFFFAOYSA-N manganate Chemical compound [O-][Mn]([O-])(=O)=O LBSANEJBGMCTBH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 82
- 239000013078 crystal Substances 0.000 description 15
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 241000132092 Aster Species 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910016062 BaRuO Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000877463 Lanio Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
-
- H10N30/704—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead based oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead based oxides
- H10N30/8554—Lead zirconium titanate based
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
- H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
Description
図1は、第1実施形態に係る圧電アクチュエータを例示する断面図である。図1を参照すると、圧電アクチュエータ300は、基板310と、基板310上に形成された駆動源320とを有する。
第2実施形態では、第1実施形態に係る圧電アクチュエータを用いた光走査装置の例を示す。なお、第2実施形態において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
Claims (9)
- 基板と、
前記基板上に形成された駆動源と、を有し、
前記駆動源は、平均粒径が1μm以下の圧電薄膜を有し、
前記圧電薄膜は、ペロブスカイト構造の導電性酸化膜上に形成され、
前記導電性酸化膜の平均粒径は35nm以下である圧電アクチュエータ。 - 基板と、
前記基板上に形成された、平均粒径が1μm以下の圧電薄膜と、を有し、
前記圧電薄膜は、ペロブスカイト構造の導電性酸化膜上に形成され、
前記導電性酸化膜の平均粒径は35nm以下である圧電アクチュエータ。 - 基板と、
前記基板上に形成された駆動源と、を有し、
前記駆動源は、平均粒径が1μm以下の圧電薄膜を複数層有し、
各々の前記圧電薄膜は、ペロブスカイト構造の導電性酸化膜上に形成され、
前記導電性酸化膜の平均粒径は35nm以下である圧電アクチュエータ。 - 前記導電性酸化膜は、ニッケル酸ランタン薄膜、ルテニウム酸ストロンチウム薄膜、又はルテニウム酸バリウム薄膜である請求項1乃至3の何れか一項に記載の圧電アクチュエータ。
- 前記圧電薄膜は、平均粒径が600nm以下である請求項1乃至4の何れか一項に記載の圧電アクチュエータ。
- 前記圧電薄膜は、平均粒径が450nm以下である請求項1乃至5の何れか一項に記載の圧電アクチュエータ。
- 前記圧電薄膜は、ペロブスカイト構造である請求項1乃至6の何れか一項に記載の圧電アクチュエータ。
- 前記圧電薄膜を構成する圧電材料は、チタン酸ジルコン酸鉛、チタン酸ジルコン酸ニオブ酸鉛、チタン酸ジルコン酸ランタン鉛、チタン酸ランタン鉛、マグネシウム酸ニオブ酸鉛、又はマンガン酸ニオブ酸鉛である請求項1乃至7の何れか一項に記載の圧電アクチュエータ。
- 請求項1乃至8の何れか一項に記載の圧電アクチュエータにより駆動されるミラー部を有する光走査装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019165949A JP7473774B2 (ja) | 2019-09-12 | 2019-09-12 | 圧電アクチュエータ、光走査装置 |
US17/004,273 US20210083599A1 (en) | 2019-09-12 | 2020-08-27 | Piezoelectric actuator and optical scanning apparatus |
CN202010949903.XA CN112490348A (zh) | 2019-09-12 | 2020-09-10 | 压电致动器和光扫描装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019165949A JP7473774B2 (ja) | 2019-09-12 | 2019-09-12 | 圧電アクチュエータ、光走査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021044418A JP2021044418A (ja) | 2021-03-18 |
JP7473774B2 true JP7473774B2 (ja) | 2024-04-24 |
Family
ID=74864262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019165949A Active JP7473774B2 (ja) | 2019-09-12 | 2019-09-12 | 圧電アクチュエータ、光走査装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20210083599A1 (ja) |
JP (1) | JP7473774B2 (ja) |
CN (1) | CN112490348A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230246062A1 (en) * | 2022-01-31 | 2023-08-03 | Kepler Computing Inc. | Rapid thermal annealing (rta) methodologies for integration of perovskite-material based memory devices |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005340428A (ja) | 2004-05-26 | 2005-12-08 | Seiko Epson Corp | 圧電体素子及びその製造方法 |
JP2014082464A (ja) | 2012-09-27 | 2014-05-08 | Mitsumi Electric Co Ltd | 圧電アクチュエータ及び光走査装置 |
JP2016046335A (ja) | 2014-08-21 | 2016-04-04 | 株式会社リコー | 電気機械変換部材、液滴吐出装置、画像形成装置及び電気機械変換部材の形成方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7083869B2 (en) * | 2004-03-23 | 2006-08-01 | Fujitsu Limited | Methods of forming LaNiO3 conductive layers, ferro-electric devices with LaNiO3 layers, and precursor formation solutions |
EP2926382B1 (en) * | 2012-11-30 | 2018-07-25 | Universiteit Gent | Preferentially oriented perovskite-related thin film |
-
2019
- 2019-09-12 JP JP2019165949A patent/JP7473774B2/ja active Active
-
2020
- 2020-08-27 US US17/004,273 patent/US20210083599A1/en active Pending
- 2020-09-10 CN CN202010949903.XA patent/CN112490348A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005340428A (ja) | 2004-05-26 | 2005-12-08 | Seiko Epson Corp | 圧電体素子及びその製造方法 |
JP2014082464A (ja) | 2012-09-27 | 2014-05-08 | Mitsumi Electric Co Ltd | 圧電アクチュエータ及び光走査装置 |
JP2016046335A (ja) | 2014-08-21 | 2016-04-04 | 株式会社リコー | 電気機械変換部材、液滴吐出装置、画像形成装置及び電気機械変換部材の形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2021044418A (ja) | 2021-03-18 |
US20210083599A1 (en) | 2021-03-18 |
CN112490348A (zh) | 2021-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9025228B1 (en) | Optical reflecting device | |
CN101630063B (zh) | 振动镜元件 | |
JP5264954B2 (ja) | ミラー駆動装置及び方法 | |
US10281716B2 (en) | Mirror driving device and driving method thereof | |
US9291815B2 (en) | Optical reflection element | |
US10371940B2 (en) | Mirror driving device and driving method thereof | |
US20130128328A1 (en) | Optical scanning device and image display device | |
US9523849B2 (en) | Optical reflection element | |
JP2013057819A (ja) | ミラー駆動装置及びその駆動方法並びに製造方法 | |
US8928963B2 (en) | Light scanning device and display apparatus | |
CN112912784A (zh) | 微镜器件及微镜器件的驱动方法 | |
US9335543B2 (en) | Optical scanner, image display device, head mount display, and heads-up display | |
US20120320440A1 (en) | Vibrating Mirror Element and Method for Manufacturing Vibrating mirror Element | |
JP7237146B2 (ja) | マイクロミラーデバイスおよびマイクロミラーデバイスの駆動方法 | |
US10866408B2 (en) | Optical scanning device and method for producing optical scanning device | |
WO2017051681A1 (ja) | 圧電素子及びその製造方法、圧電アクチュエータ | |
JP7473774B2 (ja) | 圧電アクチュエータ、光走査装置 | |
JP2018054908A (ja) | 光走査装置及び光走査装置の製造方法 | |
JP2014137456A (ja) | 振動ミラー素子およびプロジェクタ機能を有する電子機器 | |
JP7457249B2 (ja) | 圧電アクチュエータ、光走査装置 | |
US20220043257A1 (en) | Micromirror device | |
JP2017102412A (ja) | 光偏向器 | |
US20230309409A1 (en) | Piezoelectric element and mems mirror | |
WO2021229689A1 (ja) | 光走査装置及び距離測定装置 | |
JP6350057B2 (ja) | 光走査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220805 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230608 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230620 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230817 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240312 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240325 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7473774 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |