JP7458935B2 - 計測装置、及び、計測方法 - Google Patents
計測装置、及び、計測方法 Download PDFInfo
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- JP7458935B2 JP7458935B2 JP2020142878A JP2020142878A JP7458935B2 JP 7458935 B2 JP7458935 B2 JP 7458935B2 JP 2020142878 A JP2020142878 A JP 2020142878A JP 2020142878 A JP2020142878 A JP 2020142878A JP 7458935 B2 JP7458935 B2 JP 7458935B2
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Description
(第1実施形態)
図1は、第1実施形態にかかる計測装置を有する計測システムの構成例を示すブロック図である。本実施形態の計測システム1は、T-SAXS計測装置2と、多波長光計測装置3と、ホストコンピュータ4と、データベース5とを備える。実施形態の計測システム1は、被検体の表面に形成された周期パターンの3次元形状を計測するために用いられる。より具体的には、実施形態の計測システム1は、被検体に形成された孔の深さや膜の厚さを含む、3次元形状プロファイルを計測するために用いられる。計測システム1は、T―SAXS計測装置2と多波長光計測装置3との間で被検体を搬送する搬送装置6を備えてもよい。また、計測システム1は、計測中に取得したデータ等を表示させる表示装置を更に備えてもよい。
示せず)に接続されている。半導体基板71上には、配線層領域WRを介してNANDメモリのメモリセルアレイが配置されている。なお、配線層領域WRに、入出力回路などの周辺回路も形成される。
アレイ下に設けられた周辺回路とを接続するための配線に対応する。導電体656と65
7の間は、図示しない柱状のコンタクトで接続されてもよい。ここでは、導電体655が設けられた層のことを、配線層M0と称し、導電体656が設けられた層のことを、配線層M1と称し、導電体657が設けられた層のことを、配線層M2と称する。
(第2実施形態)
次に、第2実施形態について説明する。本実施形態の計測装置は、T-SAXS計測装置2の解析部24における形状プロファイルの解析方法が、上述した第1実施形態と異なる。計測システム1の構成や、計測対象となる被検体7の構造については、上述した第1実施形態と同様であるので説明を省略し、以下、第1実施形態と異なる点についてのみ説明する。
(第3実施形態)
次に、第3実施形態について説明する。本実施形態の計測システムは、形状プロファイルの解析方法が、上述した第1実施形態と異なる。計測システム1の構成や、計測対象となる被検体7の構造については、上述した第1実施形態と同様であるので説明を省略し、以下、第1実施形態と異なる点についてのみ説明する。
(第4実施形態)
次に、第4実施形態について説明する。本実施形態の計測システム1´は、図20に示すように、多波長光計測装置3にかえてレーザー超音波計測装置9を用いる点が、上述した第1実施形態の計測システム1と異なる。図20は、第4実施形態にかかる計測システムの構成例を示すブロック図である。計測システム1´の他の構成や、計測対象となる被検体7の構造については、上述した第1実施形態の計測システム1と同様であるので説明を省略し、以下、第1実施形態と異なる点についてのみ説明する。
(第5実施形態)
次に、第5施形態について説明する。本実施形態の計測装置は、T-SAXS計測装置2の解析部24における形状プロファイルの解析方法が、上述した第4実施形態と異なる。計測システム1´の構成や、計測対象となる被検体7の構造については、上述した第4実施形態と同様であるので説明を省略し、以下、第4実施形態と異なる点についてのみ説明する。
(第6実施形態)
次に、第6実施形態について説明する。本実施形態の計測システム1´は、形状プロファイルの解析方法が、上述した第4実施形態と異なる。計測システム1´の構成や、計測対象となる被検体7の構造については、上述した第4実施形態と同様であるので説明を省略し、以下、第4実施形態と異なる点についてのみ説明する。
Claims (6)
- 被検体が載置されるステージと、
前記ステージにX線を照射するX線照射部と、
前記X線の照射により前記被検体から発せられる散乱X線を検出するX線検出部と、
前記散乱X線を光電変換して得られる回折像を解析して前記被検体における前記X線が照射される計測領域の表面輪郭形状を推定する解析部と、
を備える計測装置において、
前記被検体の前記計測領域には、第1の膜と、前記第1の膜と異なる材料で形成された第2の膜が積層されており、かつ、前記計測領域の一部に前記第2の膜を貫通する孔部が形成されており、
前記ステージは、前記被検体が載置される面に平行な軸に対し回動可能になされており、
前記解析部は、前記ステージを前記軸に対し回動角を変えながら取得した複数の前記回折像と、多波長光計測またはレーザー超音波計測の少なくともいずれか一方の計測手法を用いて前記被検体を計測して得られる計測データとに基づき、前記被検体の前記計測領域における、前記第1の膜と前記第2の膜との界面を含む前記表面輪郭形状を推定することを特徴とする、計測装置。 - 前記計測データは、前記第2の膜の膜厚であることを特徴とする、請求項1に記載の計測装置。
- 前記計測データは、多波長光スペクトルであることを特徴とする、請求項1に記載の計測装置。
- 前記計測データは、レーザー超音波計測波形であることを特徴とする、請求項1に記載の計測装置。
- 前記多波長光スペクトルにおける最長波長が2μm以上であることを特徴とする、請求項3に記載の計測装置。
- 被検体に対してX線を照射し、
前記X線の照射により前記被検体から発せられる散乱X線を検出し、
前記散乱X線を光電変換して得られる回折像を解析して前記被検体における前記X線が照射される計測領域の表面輪郭形状を推定する計測方法において、
前記被検体の前記計測領域には、第1の膜と、前記第1の膜と異なる材料で形成された第2の膜が順に積層されており、かつ、前記計測領域の一部に前記第2の膜を貫通する孔部が形成されており、
前記被検体に対する前記X線の照射角を変えながら取得した複数の前記回折像と、多波長光計測またはレーザー超音波計測の少なくともいずれか一方の計測手法を用いて前記被検体を計測して得られる計測データとに基づき、前記被検体の前記計測領域における、前記第1の膜と前記第2の膜との界面を含む前記表面輪郭形状を推定することを特徴とする、計測方法。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001201470A (ja) | 2000-01-18 | 2001-07-27 | Shimadzu Corp | X線光電子分析装置 |
JP2007285923A (ja) | 2006-04-18 | 2007-11-01 | Jordan Valley Semiconductors Ltd | 反射モードのx線回折を用いた限界寸法の測定 |
WO2019036512A1 (en) | 2017-08-14 | 2019-02-21 | Kla-Tencor Corporation | DEVICE-BASED METROLOGY USING TARGET DECOMPOSITION |
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US7481579B2 (en) * | 2006-03-27 | 2009-01-27 | Jordan Valley Applied Radiation Ltd. | Overlay metrology using X-rays |
WO2010051108A2 (en) * | 2008-09-11 | 2010-05-06 | Lawrence Livermore National Security, Llc | Model-based tomographic reconstruction |
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US10352695B2 (en) | 2015-12-11 | 2019-07-16 | Kla-Tencor Corporation | X-ray scatterometry metrology for high aspect ratio structures |
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US11562289B2 (en) * | 2018-12-06 | 2023-01-24 | Kla Corporation | Loosely-coupled inspection and metrology system for high-volume production process monitoring |
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US11460418B2 (en) * | 2019-08-26 | 2022-10-04 | Kla Corporation | Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometry |
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---|---|---|---|---|
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