JP7454147B2 - Ultrasonic vibrator and horn - Google Patents

Description

Application of Article 30, Paragraph 2 of the Patent Act September 2, 2019 Presented in the Proceedings of the 2019 Annual Conference of the Japan Society of Mechanical Engineers

Application of Article 30, Paragraph 2 of the Patent Act September 11, 2019 Presented at the 2019 Annual Conference of the Japan Society of Mechanical Engineers held at Akita University

Embodiments of the present invention relate to an ultrasonic vibrator and a horn used in the ultrasonic vibrator.

Ultrasonic vibration devices are incorporated into various devices that apply ultrasonic waves, such as cleaning machines, ultrasonic diagnostic devices, fish finders, flaw detectors, microscopes, atomizers, and ultrasonic processing machines. As ultrasonic vibrating devices, devices using Langevin type vibrators or magnetostrictive vibrators are often used. Generally, the amplitude of ultrasonic vibrations generated from a vibrator is minute, so a vertical horn is placed at the output end of the vibrator to amplify the vibration displacement in the vibration amplitude direction of the vibrator. A variety of shapes have been proposed for the vertical horn to be combined, including a stepped shape where the cross-sectional area decreases from the vibrator to the output end, and a shape with a continuous curve like a cone. ing.

The main vibration modes of the horn are a longitudinal vibration mode that vibrates in the length direction of the horn, a transverse vibration mode that vibrates perpendicular to the length direction of the horn, and a torsional vibration mode that rotates around the longitudinal axis. There are vibrational modes. Among these, it is desirable that the vertical horn that amplifies the vibration displacement of the vibrator in the vibration amplitude direction has a structure in which the longitudinal vibration mode is excellent.
In a horn that is combined with a Langevin type vibrator or a magnetostrictive type vibrator, it is necessary to avoid as much as possible the mixing of modes other than modes that extend on the center line of the horn, such as modes that rotate or swing the tip from side to side, into the main resonance. . Therefore, the cross section of the horn is based on a circle, and the longitudinal section of the horn that includes the central axis is generally axially symmetrical.

Japanese Patent Application Publication No. 2017-196606 Japanese Patent Application Publication No. 2001-322173

Currently, efforts are being made to optimize the shape of the horn, including the vibrator, by simulating the shape and dimensions using methods such as the finite element method. However, it has become difficult to significantly improve the characteristics of horns using the design guidelines proposed in the past.
An object of the present invention is to provide an ultrasonic vibration device capable of increasing vibration amplitude while suppressing unnecessary vibration modes.

According to an embodiment, an ultrasonic vibration device includes: a vibrator having an output end and generating ultrasonic vibration in a predetermined direction; and a columnar horn connected to the output end and having a central axis extending in the predetermined direction. , wherein at least a portion of the horn has a cross-sectional shape that is asymmetric with respect to the central axis.

FIG. 1 is a perspective view showing an ultrasonic vibration device according to a first embodiment. FIG. 2 is a longitudinal sectional view of the ultrasonic vibration device. FIG. 3(a) is a plan view showing the horn of the ultrasonic vibration device, FIG. 3(b) is a cross-sectional view of the horn taken along line A1-A1 in FIG. 3(a), and FIG. ) is a longitudinal sectional view of the horn taken along line B1-B1 in FIG. 3(a). FIG. 4 is a diagram showing the vibration characteristics (relationship between frequency and displacement amount) of the horn. FIG. 5 is a diagram showing vibration characteristics (relationship between frequency and displacement amount) of a horn according to a comparative example. FIG. 6 is a diagram showing temporal changes in vibration amplitude of the horn according to the present embodiment. FIG. 7 is a diagram showing temporal changes in vibration amplitude of the horn according to the comparative example. FIG. 8 is a diagram showing the relationship between the frequency, phase, and gain of the horn according to this embodiment. FIG. 9 is a diagram showing the relationship between the frequency, phase, and gain of the horn according to the comparative example. FIG. 10(a) is a plan view showing the horn of the ultrasonic vibration device according to the second embodiment, and FIG. 10(b) is a cross-sectional view of the horn taken along line A2-A2 in FIG. 10(a). , FIG. 10(c) is a longitudinal sectional view of the horn taken along line B2-B2 in FIG. 10(a). FIG. 11(a) is a plan view showing a horn of an ultrasonic vibration device according to a third embodiment, and FIG. 11(b) is a cross-sectional view of the horn taken along line A3-A3 in FIG. 11(a). , FIG. 11(c) is a longitudinal sectional view of the horn taken along line B3-B3 in FIG. 11(a). FIG. 12(a) is a plan view showing a horn of an ultrasonic vibration device according to a fourth embodiment, and FIG. 12(b) is a cross-sectional view of the horn taken along line A4-A4 in FIG. 12(a). , FIG. 12(c) is a longitudinal sectional view of the horn taken along line B4-B4 in FIG. 12(a). FIG. 13(a) is a plan view showing the horn of the ultrasonic vibration device according to the fifth embodiment, and FIG. 13(b) is a cross-sectional view of the horn taken along line A4-A4 in FIG. 13(a). , FIG. 13(c) is a longitudinal sectional view of the horn taken along line B4-B4 in FIG. 13(a). FIG. 14 is a perspective view of an ultrasonic vibration device according to a sixth embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrasonic vibration device according to an embodiment of the present invention will be described in detail below with reference to the drawings.
The disclosure is merely an example, and any modifications that can be easily made by those skilled in the art while maintaining the spirit of the invention are naturally included within the scope of the present invention. In addition, in order to make the explanation clearer, the drawings may schematically represent the size, shape, etc. of each part compared to the actual aspect, but this is only an example and does not limit the interpretation of the present invention. It's not a thing. In addition, in this specification and each figure, the same elements as those described above with respect to the previously shown figures are denoted by the same reference numerals, and detailed explanations may be omitted as appropriate.

(First embodiment)
FIG. 1 is a perspective view showing an ultrasonic vibrator according to a first embodiment, and FIG. 2 is a sectional view of the ultrasonic vibrator.
As shown in FIGS. 1 and 2, according to the present embodiment, the ultrasonic vibrator 10 includes a Langevin-type vibrator 12 and a vertical horn 40 provided at the output end of the vibrator 12. We are prepared. The vibrator 12 includes a plurality of ring-shaped piezoelectric elements 14a, 14b, a set of electrodes 16a, 16b, 16c, and a pair of piezoelectric elements 14a, 14b and electrodes 16a, 16b, 16c. It has a back mass 18 and a cone 20 sandwiched between them. The electrode 16a is sandwiched between the piezoelectric element 14a and the back mass 18, the electrode 16b is sandwiched between the two piezoelectric elements 14a and 14b, and the electrode 16c is sandwiched between the piezoelectric element 14b and the cone 20. It's caught in between.

A back mass 18 formed of a metal block is arranged to overlap the electrode 16a. The cone 20, which is formed into a substantially truncated cone shape, is placed over the electrode 16c. The cone 20 is integrally formed with a coaxially provided bolt 21. Piezoelectric elements 14a, 14b, electrodes 16a, 16b, 16c, back mass 18, and cone 20 are arranged coaxially with each other. The bolt 21 is inserted through the two piezoelectric elements 14a, 14b, a set of electrodes 16a, 16b, 16c, and the back mass 18, and protrudes from the back mass 18. A nut 22 is screwed onto the protruding end of the bolt 21. By tightening the nut 22, the piezoelectric elements 14a, 14b and the electrodes 16a, 16b16c are sandwiched between the back mass 18 and the cone 20, and a compressive load is applied to the piezoelectric elements 14a, 14b.
An AC power source 30 is connected to a set of electrodes 16a, 16b, and 16c. The two piezoelectric elements 14a and 14b are arranged so that their polarization directions are opposite to each other. By applying an alternating current voltage to the set of electrodes 16a, 16b, 16c, the piezoelectric elements 14a, 14b repeatedly expand and contract, generating ultrasonic vibrations. This ultrasonic vibration is amplified by the horn 40.

As shown in FIG. 2, the vertical horn 40 is connected to the output end of the vibrator 12, here the cone 20, and is arranged coaxially with the vibrator 12.
The horn 40 is formed in an elongated column shape, for example, a cylindrical shape, with a central axis C1. One end of the horn 40 in the axial direction constitutes a fixed end 44 having a large diameter. The horn 40 is integrally provided with a threaded portion 46 that protrudes in the axial direction from one end in the axial direction, that is, a fixed end portion 44 . By screwing the screw portion 46 into the screw hole of the cone 20, the fixed end portion 44 of the horn 40 is fixed to the cone 20, and is provided coaxially with the vibrator 12. In this embodiment, the horn 40 has a through hole 42 formed coaxially with the central axis C1 from one end to the other end in the axial direction. The central axis C1 of the horn 40 extends in the direction of ultrasonic vibration of the vibrator 12.

FIG. 3(a) is a plan view of the horn of the ultrasonic vibration device, FIG. 3(b) is a cross-sectional view of the horn taken along line A1-A1 in FIG. 3(a), and FIG. 3(c) is a FIG. 4 is a longitudinal cross-sectional view of the horn taken along line B1-B1 in FIG. 3(a).
As shown in FIGS. 1 and 3(a), the horn 40 has a notch 50 or a recess formed by cutting a part of the outer peripheral surface of the horn. In this embodiment, the notch 50 is provided approximately at the center of the horn 40 in the longitudinal direction, and has a predetermined length in the longitudinal direction of the horn 40 . The notch 50 is formed to have a substantially constant depth and has a bottom surface 50a facing parallel to the central axis C1.

As shown in FIG. 3(b), by providing the notch 50, a cross section of at least a portion of the horn 40, here, a cross section of the horn 40 at the position of the notch 50 (a cross section perpendicular to the central axis C1). ) has a non-circular shape with one side of the central axis C1 cut flat, that is, a notch 50, and has a cross-sectional shape asymmetrical with respect to the central axis C1.
Similarly, by providing the notch 50, at least a portion of the longitudinal section of the horn 40, here, the longitudinal section at the position of the notch 50, as shown in FIG. It has an asymmetrical cross-sectional shape.
Note that the depth, length, width, and formation position of the notch 50 are not limited to the illustrated example, and can be variously selected depending on the vibration characteristics of the horn 40.

In the ultrasonic vibrator 10 configured as described above, the amplitude of the ultrasonic vibrations oscillated from the vibrator 12 is amplified by the horn 40, and the maximum vibration amplitude occurs at the extending end of the horn 40. For example, if ultrasonic vibrations are generated with the tip of the horn 40 covered with a liquid through the through hole 42, the liquid can be atomized by the action of surface waves (capillaries). Alternatively, if a tool is attached to the tip of the horn 40 and ultrasonic vibrations are generated in the horn 40, polishing work, drilling, etc. can be performed using this tool.

FIG. 4 is a diagram showing the analysis results of the vibration characteristics (relationship between frequency and displacement amount) of the horn according to the present embodiment, and FIG. 5 is a diagram showing the analysis results of the vibration characteristics (relationship between frequency and displacement amount) of the horn according to the comparative example. It is a figure showing an analysis result. As a comparative example, a cylindrical horn without a notch, that is, a horn whose cross section and longitudinal section are symmetrical with respect to the central axis C1 is used.
As shown in FIGS. 4 and 5, in both horns, the main resonance frequency appears near 40 (kHz), and ultrasonic vibrations are generated by driving the vibrator at this frequency. The vibration amplitude of the tip of the horn 40 of this embodiment at the main resonance frequency is about twice the vibration amplitude of the tip of the horn according to the comparative example, which is a significant increase. I understand that.

In order to confirm the analytically obtained phenomena as described above, vibration amplitude measurements were carried out using an actual machine. FIG. 6 is a diagram showing the measurement results of the vibration amplitude of the horn according to the present embodiment, and FIG. 7 is a diagram showing the measurement results of the vibration amplitude of the horn according to the comparative example.
6 and 7, the waveform of the two-dot chain line indicates the output signal from the function generator, the waveform of the one-dot chain line indicates the voltage applied to the piezoelectric element, the waveform of the broken line indicates the current waveform of the ultrasonic vibrator, and the waveform of the solid line indicates the voltage applied to the piezoelectric element. The waveform shows a vibration amplitude waveform. As shown in the figure, it can be seen that the vibration amplitude of the horn 40 according to the present embodiment is increased by about 20% compared to the horn according to the comparative example. It can be seen that in the horn 40 according to the present embodiment, the vibration amplitude when a voltage of 80 Vpp is applied, for example, is significantly increased compared to the comparative example.

FIG. 8 is a diagram showing the experimentally derived relationship between the frequency, phase, and gain of the horn according to the present embodiment, and FIG. 9 is a diagram showing the experimentally derived relationship between the frequency and phase of the horn according to the comparative example, and FIG. 3 is a diagram showing the relationship with gain.
As shown in FIGS. 4 and 5 described above, both the horn according to the present embodiment and the horn according to the comparative example have resonance peaks at similar frequencies in the frequency band of 0-100 (kHz). . Moreover, as shown in FIGS. 9 and 10, it can be seen that the horn according to the present embodiment has a frequency profile similar to that of the horn according to the comparative example.
For these reasons, the horn according to the present embodiment can simultaneously excite the longitudinal vibration mode and the transverse vibration mode without producing unnecessary vibration modes, and has a lower vibration amplitude in the resonant frequency band than the comparative example. It can be seen that there is a significant increase in

According to the ultrasonic vibration device 10 configured as described above, at least a portion of the transverse cross section orthogonal to the central axis C1 in the amplitude direction of the horn 40 or at least a portion of the vertical cross section including the central axis C1 is asymmetrical. By adopting this shape, it is possible to dramatically improve the amplification factor of the longitudinal amplitude, which could not be improved with conventional horns with a cross-sectional shape based on axis symmetry. Further, by using the horn having the above configuration, it is possible to create a mixed mode in which longitudinal vibration mode and transverse vibration mode coexist, and to obtain a horn and an ultrasonic vibrator that generate larger vibration displacement.

Next, a horn of an ultrasonic vibrator according to another embodiment will be described. In other embodiments described below, the same reference numerals are given to the same parts as in the first embodiment described above, and the explanation thereof will be simplified or omitted, and the parts different from the first embodiment will be mainly explained. explain.
(Second embodiment)
FIG. 10(a) is a plan view showing the horn of the ultrasonic vibration device according to the second embodiment, and FIG. 10(b) is a cross-sectional view of the horn taken along line A2-A2 in FIG. 10(a). , FIG. 10(c) is a longitudinal sectional view of the horn taken along line B2-B2 in FIG. 10(a).
As illustrated, according to the second embodiment, the horn 40 is formed in a solid cylindrical shape without a through hole. The horn 40 has a rectangular long groove 52 or a recess formed by cutting a part of the outer peripheral surface of the horn. The long groove 52 is provided approximately at the center of the horn 40 in the longitudinal direction, and extends a predetermined length in a direction parallel to the central axis C1. The long groove 52 is formed to have a substantially constant depth and has a flat rectangular bottom surface 52a facing parallel to the central axis C1. The depth of the long groove 52 is smaller than the radius of the horn 40.

As shown in FIG. 10(b), by providing the long groove 52, the cross section of at least a portion of the horn 40, here, the cross section of the horn 40 at the position of the long groove 52 (the cross section perpendicular to the central axis C1) is , one side of the central axis C1 is partially shaved off, resulting in a cross-sectional shape that is asymmetrical with respect to the central axis C1.
Similarly, by providing the long groove 52, as shown in FIG. It has a cross-sectional shape.
Note that the depth, length, width, and formation position of the long groove 52 are not limited to the illustrated example, and can be variously selected depending on the vibration characteristics of the horn 40. Further, the depth and width of the long groove 52 are not limited to being constant over the entire length, and may be a long groove whose depth or width varies depending on the location.

(Third embodiment)
FIG. 11(a) is a plan view showing a horn of an ultrasonic vibration device according to a third embodiment, and FIG. 11(b) is a cross-sectional view of the horn taken along line A3-A3 in FIG. 11(a). , FIG. 11(c) is a longitudinal cross-sectional view of the horn taken along line B3-B3 in FIG. 11(a).
As shown in the figure, according to the third embodiment, the horn 40 has a rectangular long groove 54 or a recess formed by cutting a part of the outer peripheral surface of the horn. The long groove 54 is provided over the entire length of the horn 40 in the longitudinal direction, and extends parallel to the central axis C1. The long groove 54 is formed to have a substantially constant depth and has a flat rectangular bottom surface 54a facing parallel to the central axis C1. The depth of the long groove 54 is smaller than the radius of the horn 40.

As shown in FIG. 11(b), by providing the long groove 54, the cross section of the horn 40 (the cross section perpendicular to the central axis C1) is partially shaved off on one side of the central axis C1, and with respect to the central axis C1. It has an asymmetrical cross-sectional shape.
As shown in FIG. 11(c), by providing the long groove 54, the entire longitudinal section of the horn 40 has a cross-sectional shape that is asymmetrical with respect to the central axis C1.
Note that the depth, width, and formation position of the long groove 54 are not limited to the illustrated example, and can be variously selected depending on the vibration characteristics of the horn 40. Further, the depth and width of the long groove 54 are not limited to being constant over the entire length of the horn 40, and may be a long groove whose depth or width varies depending on the location.

(Fourth embodiment)
FIG. 12(a) is a plan view showing a horn of an ultrasonic vibration device according to a fourth embodiment, and FIG. 12(b) is a cross-sectional view of the horn taken along line A4-A4 in FIG. 12(a). , FIG. 12(c) is a longitudinal cross-sectional view of the horn taken along line B4-B4 in FIG. 12(a).
As shown in the figure, according to the fourth embodiment, the horn 40 integrally has a rectangular convex portion 56 or rib formed on a part of the outer peripheral surface of the horn. The convex portion 56 is provided approximately at the center in the longitudinal direction of the horn 40 and extends for a predetermined length in parallel to the central axis C1. The convex portion 56 is formed to have a substantially constant protrusion height, and has a flat tip face facing parallel to the central axis C1. The protruding height of the convex portion 56 is formed to be smaller than the radius of the horn 40.

As shown in FIG. 12(b), by providing the convex portion 56, a cross section of at least a portion of the horn 40 (a cross section perpendicular to the central axis C1), here, a cross section of the horn 40 at the position of the convex portion 56. The surface is partially convex on one side of the central axis C1, and has a cross-sectional shape that is asymmetrical with respect to the central axis C1.
As shown in FIG. 12(c), at least a portion of the longitudinal section of the horn 40, here the longitudinal section at the position of the convex portion 56, has a cross-sectional shape that is asymmetrical with respect to the central axis C1.
Note that the height, length, width, shape, and formation position of the convex portion 56 are not limited to the illustrated example, and can be variously selected depending on the vibration characteristics of the horn 40. The tip end surface of the convex portion 56 is not limited to being flat, and may be a curved surface. That is, the height of the convex portion 56 is not limited to a constant height, and may be formed to have a different protrusion height depending on the portion.

Fifth Embodiment
Figure 13(a) is a plan view showing the horn of an ultrasonic vibration device according to the fifth embodiment, Figure 13(b) is a cross-sectional view of the horn taken along line A5-A5 in Figure 13(a), and Figure 13(c) is a longitudinal cross-sectional view of the horn taken along line B5-B5 in Figure 13(a).
The horn 40 is not limited to a cylindrical shape, and may be in another shape, such as a rectangular prism. As shown in the drawings, according to the fifth embodiment, the horn 40 is formed in a polygonal shape, such as a pentagonal prism.
As shown in FIG. 13B, the cross section (cross section perpendicular to the central axis C1) of each portion of the horn 40 is a pentagon, and the cross-sectional shape is asymmetric with respect to the central axis C1.
As shown in FIG. 13C, by forming the horn 40 into a pentagonal prism shape, the vertical cross section of the horn 40 has an asymmetric cross section with respect to the central axis C1 over the entire length of the horn 40.
The prism shape is not limited to a pentagonal prism, but may be a triangular prism, a heptagonal prism, or any other odd-numbered prism shape. In addition, the outer surface of the horn 40 may be provided with the above-mentioned recesses, grooves, or protrusions.

In the second to fifth embodiments described above, the other configurations of the horn 40 are the same as the horn 40 according to the first embodiment described above. In any of the second to fifth embodiments, the same effects as in the first embodiment described above can be obtained, that is, the horn can increase the vibration amplitude while suppressing unnecessary vibration modes. and an ultrasonic vibration device.

(Sixth embodiment)
FIG. 14 is a perspective view showing an ultrasonic vibration device according to a sixth embodiment.
As illustrated, in this embodiment, a magnetostrictive type vibrator 12 is used as the vibrator. The vibrator 12 has a frame 60 made of a magnetostrictive material such as nickel or ferrite. The frame 60 integrally includes a prismatic base frame 60a and a pair of prismatic support frames 60b extending substantially perpendicularly from the base frame 60a. A prismatic permanent magnet 62 is arranged between the extending ends of the pair of support frames 60b, and faces the base frame 60a substantially parallel to the base frame 60a with a gap therebetween. A first coil CA and a second coil CB having different winding directions are wound around the pair of support frames 60b, respectively. The first coil CA and the second coil CB are connected to an AC power source 30.

The base frame 60a constitutes the output end of the vibrator 12, and the vertical horn 40 is connected to the base frame 60a. As the horn 40, for example, a horn configured similarly to the horn 40 in the first embodiment described above is used. The horn 40 is connected to approximately the center of the base frame 60a, and the central axis C1 of the horn 40 coincides with the vibration direction of the vibrator 12.
When an alternating current voltage is applied to the first coil CA and the second coil CB, ultrasonic vibrations are generated on the vibration surface of the base frame 60a (the side surface to which the horn 40 is attached). This ultrasonic vibration is amplified by the horn 40 and output from the tip of the horn 40.

As described above, in the sixth embodiment using the magnetostrictive vibrator 12 as the vibrator, it is possible to increase the vibration amplitude while suppressing unnecessary vibration modes, as in the first embodiment described above. Possible horns and ultrasonic vibration devices can be provided.

The present invention is not limited to the above-described embodiments as they are, but can be implemented by modifying the constituent elements within the scope of the invention at the implementation stage. Moreover, various inventions can be formed by appropriately combining the plurality of components disclosed in the above embodiments. For example, some components may be deleted from all the components shown in the embodiments. Furthermore, components of different embodiments may be combined as appropriate.
For example, the horn 40 is not limited to a cylindrical shape, and may be a horn having another columnar shape, for example, a prismatic shape. The notch, groove, or recess of the horn 40 is not limited to a rectangular shape, and can be selected from various shapes such as a circular shape, an elliptical shape, and others. Furthermore, the bottom surface of the notch, groove, or recess is not limited to being flat, and may be curved.

10... Ultrasonic vibrator, 12... Vibrator 14a, 14b... Piezoelectric element,
18...back mass, 20...cone, 30...AC power supply, 40...horn,
50...notch, 52, 54...long groove, 56...convex portion, 60...frame body

Claims (7)

a vibrator having an output end and generating ultrasonic vibration in a predetermined direction;
One axial end constitutes a fixed end connected to the output end, and is formed into a cylindrical or polygonal prism shape having a central axis extending in the predetermined direction from the fixed end to the other axial end. and a horn ;
The horn may include a single notch, groove, or groove formed on the outer surface of the cylindrical or prismatic columnar portion and extending in the axial direction over the entire length in the axial direction or over a part of the axial direction. the notch, groove, or recess has a flat bottom surface facing the central axis; and the depth of the notch, groove, or recess is equal to the depth of the columnar portion of the horn. formed smaller than the radius,
In a portion of the horn including the notch, groove, or recess, a cross section perpendicular to the central axis and a longitudinal cross section including the central axis have a cross-sectional shape that is asymmetric with respect to the central axis. Ultrasonic vibration device. a vibrator having an output end and generating ultrasonic vibration in a predetermined direction;
One axial end constitutes a fixed end connected to the output end, and is formed into a cylindrical or polygonal prism shape having a central axis extending in the predetermined direction from the fixed end to the other axial end. and a horn;
The horn has a single convex portion formed on the outer surface of the cylindrical or prismatic columnar portion and extending in the axial direction over the entire length in the axial direction or over a part of the axial direction, The protrusion has a flat tip face facing the central axis, and the protrusion height of the protrusion is smaller than the radius of the horn,
An ultrasonic vibration device, wherein a cross section perpendicular to the central axis and a vertical cross section including the central axis have a cross-sectional shape that is asymmetrical with respect to the central axis at a portion of the horn that includes the convex portion. The ultrasonic vibration device according to claim 1 or 2, wherein the horn has a through hole formed coaxially with the central axis from one end to the other end in the axial direction . The vibrator includes a pair of piezoelectric elements extending in the thickness direction, a pair of electrodes placed over the piezoelectric elements, and a pair of piezoelectric elements and the pair of electrodes sandwiched between them. comprising an end ring and a cone;
The ultrasonic vibration device according to any one of claims 1 to 3 , wherein the horn is connected to the cone. The vibrator has a base frame that constitutes the output end and a pair of support frames extending from the base frame, and there is a space between the frame made of a magnetostrictive material and the extending end of the support frame. A permanent magnet provided, and a first coil and a second coil respectively wound around the pair of support frames,
The ultrasonic vibration device according to any one of claims 1 to 3 , wherein the horn is connected to the base frame. A horn used for an ultrasonic vibration device,
one end in the axial direction constitutes a fixed end connected to an output end of a vibrator that generates ultrasonic vibration in a predetermined direction, and a center extending in the predetermined direction from the fixed end to the other end in the axial direction; It is formed into a cylindrical shape or a polygonal prism shape having an axis ,
A single notch, groove, or recess formed on the outer surface of the cylindrical or polygonal columnar part and extending in the axial direction over the entire length in the axial direction or over a part of the axial direction. and the notch, groove, or recess has a flat bottom surface facing the central axis, and the depth of the notch, groove, or recess is formed to be smaller than the radius of the columnar part. ,
A horn in which a cross section perpendicular to the central axis and a vertical cross section including the central axis have a cross-sectional shape that is asymmetrical with respect to the central axis at a portion including the notch, groove, or recess. A horn used for an ultrasonic vibration device,
one end in the axial direction constitutes a fixed end connected to an output end of a vibrator that generates ultrasonic vibration in a predetermined direction, and a center extending in the predetermined direction from the fixed end to the other end in the axial direction; It is formed into a cylindrical shape or a polygonal prism shape having an axis ,
A single convex portion is formed on the outer surface of the cylindrical or prismatic columnar portion and extends in the axial direction over the entire length in the axial direction or over a part of the axial direction, and the convex portion is , has a flat tip face facing the central axis, and the projecting height of the convex portion is formed to be smaller than the radius of the columnar portion;
A horn in which a cross section perpendicular to the central axis and a vertical cross section including the central axis have an asymmetrical cross-sectional shape with respect to the central axis at a portion including the convex portion.

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