JP2022037621A - Ultrasonic coupling oscillation device - Google Patents

Abstract

To facilitate external fixing, in an ultrasonic coupling oscillation device for generating coupling oscillation by a single oscillator unit.SOLUTION: A horn 3 includes a pair of oscillation pieces 3b that assume a symmetrical shape where a plane including a shaft core L is a symmetry plane and that are arranged in an opposed manner with a slit S in between without being fastened to each other, and a base 3a in which the side of one end in a direction along the shaft core L is connected to an oscillator unit 2 and in which the oscillation pieces 3b are connected to the side of the other end in the direction along the shaft core L.SELECTED DRAWING: Figure 2

Description

The present invention relates to an ultrasonic compound vibration device.

For example, Patent Document 1 and Patent Document 2 disclose ultrasonic application processing using ultrasonic compound vibration and a vibration source (ultrasonic compound vibration device) for generating ultrasonic compound vibration. The ultrasonic composite vibration device disclosed in Patent Document 1 is provided with an oblique slit in the horn, and a part of the longitudinal vibration is converted into torsional vibration by the oblique slit to generate the composite vibration. The ultrasonic composite vibration device disclosed in Patent Document 2 includes two oscillator units, a longitudinal oscillator unit that generates longitudinal vibration and a torsion oscillator unit that generates torsional vibration.

Japanese Unexamined Patent Publication No. 2005-288351 Japanese Unexamined Patent Publication No. 63-44970

According to the ultrasonic composite vibration device disclosed in Patent Document 1, longitudinal vibration and torsional vibration can be easily obtained at a single drive frequency by using an oblique slit which is a vibration converter. However, since it has a single drive frequency, longitudinal vibrations and torsional vibrations having different wavelengths propagate throughout the ultrasonic composite vibration device. Therefore, the node position of the longitudinal vibration and the node position of the torsional vibration do not match, and it is difficult to fix the ultrasonic compound vibration device.

On the other hand, in the ultrasonic composite vibration device disclosed in Patent Document 2, since each oscillator unit can be driven at a frequency at which the wavelengths of the vibrations match, the node positions of the vibration displacements can be matched. It can be fixed and is easy to fix. However, in the ultrasonic composite vibration device disclosed in Patent Document 2, it is necessary to use two oscillator units, which leads to an increase in size of the device.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to facilitate fixing to the outside in an ultrasonic compound vibration device that generates compound vibration by a single oscillator unit.

The present invention adopts the following configuration as a means for solving the above problems.

The first invention is a vibrator unit including a vibration element that generates longitudinal vibration, and is connected to the vibrator unit and is stretched along an axis along the propagation direction of the longitudinal vibration and is subjected to the longitudinal vibration. An ultrasonic composite vibration device including a columnar horn that resonates with the horn. The horn has a symmetric shape with a plane including the axis of axis as a plane of symmetry, and a slit is sandwiched between the horns without being fastened to each other. A base in which the pair of vibrating pieces arranged to face each other and one end side in the direction along the shaft core are connected to the vibrator unit and the vibrating piece is connected to the other end side in the direction along the shaft core. The configuration of having and is adopted.

In the second invention, in the first invention, the vibrating piece has a rectangular shape having a long side whose cross-sectional shape orthogonal to the axis is parallel to the symmetric plane and a short side orthogonal to the symmetric plane. Adopt a configuration that is made into a plate shape.

The third invention adopts the configuration in the second invention that the thickness dimension of the vibrating piece in the direction orthogonal to the plane of symmetry is smaller than the dimension from the plane of symmetry to the outer wall surface of the base. ..

In the fourth invention, in the second or third invention, the width dimension of the vibrating piece seen from the direction along the shaft core matches the width dimension of the base portion.

The fifth invention adopts the configuration in which the fillet is provided at the connection point between the vibrating piece and the base portion in any one of the first to fourth inventions.

In the sixth invention, in any one of the first to fifth inventions, the configuration in which the tip opposite to the base of the vibrating piece is a free end is adopted.

In the seventh invention, in any one of the first to sixth inventions, a flange is provided so as to project from the outer wall surface of the base portion in accordance with the position of the longitudinal vibration node in the base portion. do.

According to the present invention, when the longitudinal vibration generated by the oscillator unit is transmitted to the vibrating piece, the vibrating piece bends to generate bending vibration. That is, in the present invention, a part of the longitudinal vibration is converted into a bending vibration by the vibration piece. Therefore, according to the present invention, it is possible to generate compound vibration by a single vibrating element.

Further, in the present invention, a pair of vibrating pieces arranged to face each other so as to sandwich a slit between them is provided, and these vibrating pieces have a symmetrical shape with a plane including the axis of the horn as a symmetrical plane. .. Therefore, at the base to which the pair of vibrating pieces are connected, the bending vibration generated by one vibrating piece and the bending vibration generated by the other vibrating piece cancel each other out to prevent vibration due to the bending vibration. can. As a result, the base is vibrated only by the longitudinal vibration generated by the vibrating element, and the displacement due to the vibration does not occur at the node position of the longitudinal vibration.

As described above, according to the present invention, it is possible to generate combined vibration by a single oscillator unit and to provide a portion at the base of the horn that does not vibrate. Therefore, according to the present invention, in an ultrasonic compound vibration device that generates compound vibration by a single oscillator unit, it is possible to easily fix it to the outside.

It is a perspective view of the ultrasonic compound vibration apparatus in one Embodiment of this invention. It is a side view of the ultrasonic compound vibration apparatus in one Embodiment of this invention. FIG. 2 is a cross-sectional view taken along the line AA of FIG. This is the result of the vibration distribution of the ultrasonic compound vibration device when the frequency of the longitudinal vibration is 60.60 kHz. It is the figure which superposed the ultrasonic compound vibration apparatus on the result of the vibration distribution shown in FIG.

Hereinafter, an embodiment of the ultrasonic compound vibration device according to the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of an ultrasonic compound vibration device 1 according to an embodiment of the present invention. Further, FIG. 2 is a side view of the ultrasonic compound vibration device 1 according to the embodiment of the present invention. The ultrasonic combined vibration device 1 of the present embodiment generates ultrasonic vibration in which two vibration modes (longitudinal vibration and deflection vibration) are combined. As shown in these figures, the ultrasonic combined vibration device 1 of the present embodiment includes a vibrator unit 2 and a horn 3.

As shown in FIG. 1, the ultrasonic compound vibration device 1 of the present embodiment has a substantially rod-like shape extending along the axis L. Hereinafter, the direction along the axis L is referred to as the axis direction. The oscillator unit 2 and the horn 3 are arranged in the axial center direction and are fixed by bolts (not shown).

The vibrator unit 2 includes a piezoelectric element 2a (vibration element) that generates vertical vibration when power is supplied, and a block 2b that sandwiches the piezoelectric element 2a. Two blocks 2b are arranged so as to sandwich the piezoelectric element 2a in between. These two blocks 2b and the piezoelectric element 2a are fastened by bolts (not shown). The oscillator unit 2 has a columnar shape centered on the axis L, and has a piezoelectric element 2a and two blocks 2b arranged along the axis direction. Such a vibrator unit 2 generates longitudinal vibration propagated along the axis direction by the piezoelectric element 2a.

In the present embodiment, such a vibrator unit 2 is a Langevin type vibration element in which the piezoelectric element 2a is sandwiched by the block 2b. It is also possible to use a magnetostrictive element, an electrostrictive element, or the like instead of the piezoelectric element 2a.

The horn 3 is a columnar member that is connected to the oscillator unit 2 and is stretched along the axis L along the propagation direction of the longitudinal vibration and resonates with the longitudinal vibration. The horn 3 is a member that resonates with respect to the longitudinal vibration transmitted from the vibrator unit 2, and is formed of, for example, duralumin. The horn 3 includes a base portion 3a, a pair of vibrating pieces 3b, a fillet 3c, and a flange 3d.

For example, as shown in FIG. 1, the base portion 3a has a quadrangular prism shape having a square cross section, and the shaft core of the base portion 3a is arranged so as to overlap the shaft core L of the ultrasonic compound vibration device 1. The base portion 3a does not necessarily have to have a quadrangular prism shape, and may have a cylindrical shape having a circular cross section or a prismatic shape having a polygonal cross section other than a square cross section. One end side of the base portion 3a in the axial core direction is connected to the oscillator unit 2, and the vibrating piece 3b is connected to the other end side in the axial core direction.

The pair of vibrating pieces 3b are connected to the tip of the base portion 3a whose root end is connected to the oscillator unit 2. FIG. 3 is a sectional view taken along the line AA of FIG. As shown in FIGS. 2 and 3, in the present embodiment, each of the vibrating pieces 3b has a plate shape with the front and back surfaces flat, and is arranged so as to face each other with the slit S in between. Each vibrating piece 3b is arranged so that the front and back surfaces of one vibrating piece 3b and the front and back surfaces of the other vibrating piece 3b are parallel to each other.

Further, the length dimension D1 (length dimension in the axial core direction) of one vibrating piece 3b and the length dimension D1 of the other vibrating piece 3b are the same. Further, the width dimension D2 of one vibrating piece 3b (the length dimension in the direction orthogonal to the axis center direction and parallel to the front and back surfaces) and the width dimension D2 of the other vibrating piece 3b are the same. Further, the thickness dimension D3 of one vibrating piece 3b (the length dimension in the direction orthogonal to the front and back surfaces (the direction orthogonal to the symmetry plane M described later)) and the thickness dimension D3 of the other vibrating piece 3b match. Has been done.

As described above, in the ultrasonic composite vibration device 1 of the present embodiment, when one plane including the axis L is a symmetry plane M, one vibration piece 3b and the other vibration with respect to the symmetry plane M. The shape is symmetrical with the piece 3b. That is, one vibrating piece 3b and the other vibrating piece 3b have a symmetrical shape having a plane including the axis L as a symmetrical plane.

In such an ultrasonic composite vibration device 1 of the present embodiment, each vibration piece 3b has a plate shape, and as shown in FIG. 3, the cross-sectional shape orthogonal to the axis L is parallel to the plane of symmetry M. It has a rectangular shape having a long side and a short side orthogonal to the plane of symmetry M.

Further, as shown in FIG. 3, the width dimension D2 of each vibrating piece 3b coincides with the width dimension D5 of the base portion 3a. That is, the width dimension D2 of the vibrating piece seen from the axis direction coincides with the width dimension D5 of the base portion 3a.

Further, the thickness dimension D3 in the direction orthogonal to the plane of symmetry M is smaller than the dimension D4 from the plane of symmetry M to the outer wall surface of the base portion 3a when viewed from the axis direction. Further, the outer surface of each vibrating piece 3b (the surface opposite to the plane of symmetry M) is arranged on the axis L side with respect to the outer wall surface of the base portion 3a. Therefore, the tip portion of the horn 3 is provided with a recess recessed from the radial outside of the horn 3 toward the plane of symmetry M.

Further, in the present embodiment, as shown in FIG. 2, the tip of the vibrating piece 3b on the opposite side to the base portion 3a is a free end. By setting the tip of the vibrating piece 3b on the opposite side to the base portion 3a as a free end, the vibrating piece 3b can be largely displaced in the direction orthogonal to the plane of symmetry M.

Such vibration pieces 3b are not fastened to each other, and when longitudinal vibration is applied from the vibrator unit 2, they vibrate so as to be displaced in a direction orthogonal to the plane of symmetry M. As a result, each vibration piece 3b converts a part of the longitudinal vibration into a deflection vibration. Such a vibrating piece 3b is displaced in the axial center direction by the longitudinal vibration propagated from the vibrator unit 2, and is also displaced in the direction orthogonal to the plane of symmetry M by the bending vibration. As a result, the vibrating piece 3b vibrates by ultrasonic vibration in which vertical vibration and flexural vibration are combined.

The fillet 3c is provided at the connection point between the vibrating piece 3b and the base portion 3a, and reinforces the connection point between the vibrating piece 3b and the base portion 3a. Such a fillet 3c is arranged in a recess recessed from the radial outside of the horn 3 toward the plane of symmetry M. With such a fillet 3c, it is possible to relieve the stress generated at the connection point between the vibrating piece 3b and the base portion 3a due to the vibration piece 3b flexing and vibrating.

The flange 3d is provided so as to project from the outer wall surface of the base portion 3a. In the ultrasonic composite vibration device 1 of the present embodiment, two flanges 3d are provided. These flanges 3d are installed at positions that serve as nodes of longitudinal vibration in the base portion 3a.

As described above, the horn 3 has a symmetrical shape having a plane including the shaft core L as a symmetrical plane, and has a pair of vibrating pieces 3b arranged opposite to each other with the slit S sandwiched between them without being fastened to each other, and the shaft core L. One end side in the direction along the axis L is connected to the oscillator unit 2, and the other end side in the direction along the axis L has a base portion 3a to which the vibration piece 3b is connected.

When the piezoelectric element 2a of the vibrator unit 2 is fed with the ultrasonic composite vibration device 1 of the present embodiment, the piezoelectric element 2a vibrates to generate longitudinal vibration propagated in the axial direction. .. When the longitudinal vibration generated by the piezoelectric element 2a is transmitted to the vibrating piece 3b, the vibrating piece 3b bends to generate a bending vibration. That is, in the ultrasonic composite vibration device 1 of the present embodiment, a part of the longitudinal vibration is converted into a deflection vibration by the vibration piece 3b. Therefore, it is possible to generate compound vibration by a single oscillator unit 2.

Further, the ultrasonic composite vibration device 1 of the present embodiment includes a pair of vibration pieces 3b arranged to face each other so as to sandwich the slit S in between, and these vibration pieces 3b are the axis of the horn 3 (that is, that is). The shape is symmetric with the plane including the axis L) of the ultrasonic compound vibration device 1 as the plane of symmetry. In the ultrasonic composite vibration device 1 of the present embodiment as described above, the phase of the deflection vibration is reversed between the one vibration piece 3b and the other vibration piece 3b. The deflection vibration generated by the vibrating piece 3b is also propagated to the base 3a. However, since the phase of the deflection vibration is reversed between the one vibration piece 3b and the other vibration piece 3b, the deflection vibration is canceled at the base portion 3a.

In this way, in the base portion 3a to which the pair of vibrating pieces 3b are connected, the bending vibration generated by one vibrating piece 3b and the bending vibration generated by the other vibrating piece 3b cancel each other out, and the bending vibration causes the bending vibration. It can prevent vibration. As a result, the base portion 3a is vibrated only by the longitudinal vibration generated by the vibrator unit 2, and the displacement due to the vibration does not occur at the node position of the longitudinal vibration.

As described above, according to the ultrasonic composite vibration device 1 of the present embodiment, the composite vibration can be generated by the single oscillator unit 2 and the base portion 3a of the horn 3 is provided with a portion that does not vibrate. It will be possible. Therefore, according to the ultrasonic compound vibration device 1 of the present embodiment, it is possible to easily fix the ultrasonic wave to the outside.

Further, in the ultrasonic composite vibration device 1 of the present embodiment, the vibrating piece 3b has a long side whose cross-sectional shape orthogonal to the axis L is parallel to the symmetric plane M and a short side orthogonal to the symmetric plane M. It is a plate shape that has been shaped. Therefore, the shape of the vibrating piece 3b becomes simple, and the forming of the vibrating piece 3b becomes easy.

Further, in the ultrasonic composite vibration device 1 of the present embodiment, the thickness dimension of the vibrating piece 3b in the direction orthogonal to the plane of symmetry M is smaller than the dimension from the plane of symmetry M to the outer wall surface of the base portion 3a. Therefore, the vibrating piece 3b becomes a thin plate, and it is possible to efficiently generate the bending vibration.

Further, in the ultrasonic composite vibration device 1 of the present embodiment, the width dimension D2 of the vibration piece 3b seen from the direction along the axis L coincides with the width dimension D5 of the base portion 3a. Therefore, for example, when the base portion 3a and the vibrating piece 3b are formed by cutting out from a block body having a width dimension that matches the width dimension D5 of the base portion 3a and the width dimension D2 of the vibrating piece 3b, the portion to be cut by the block body is formed. It can be made smaller.

Further, in the ultrasonic composite vibration device 1 of the present embodiment, a fillet 3c is provided at a connection point between the vibration piece 3b and the base portion 3a. Therefore, the stress generated at the connection point between the vibrating piece 3b and the base portion 3a can be relaxed.

Further, in the ultrasonic composite vibration device 1 of the present embodiment, the tip of the vibration piece 3b on the opposite side to the base portion 3a is a free end. Therefore, it is possible to increase the amplitude of the deflection vibration of the vibration piece 3b.

Further, in the ultrasonic composite vibration device 1 of the present embodiment, a flange 3d protruding from the outer wall surface of the base portion 3a is provided according to a position of the base portion 3a as a node of longitudinal vibration. Therefore, by fixing the external member to the flange 3d, it is possible to reliably and easily connect the external member to the vibration node position of the base portion 3a.

Hereinafter, an embodiment of the ultrasonic composite vibration device 1 of the above embodiment will be described with reference to FIGS. 4 and 5.

In this embodiment, a 60 kHz bolt-tightened Langevin type vertical oscillator (HEC-1560P4B, manufactured by Honda Electronics) having a diameter of 15 mm was used as the oscillator unit 2. Further, the horn 3 was formed of A2017 (duralumin) and was screwed to the oscillator unit 2. The horn 3 is provided with a 0.2 mm slit S at a position 20 mm from the tip in the axial center direction. Further, in the horn 3, the base portion 3a has a cross section of 15 mm on one side. That is, in this embodiment, the width dimension D2 of the vibration piece 3b and the width dimension D5 of the base portion 3a in the above embodiment are set to 15 mm. The thickness dimension D3 of the vibrating piece 3b was set to 3.7 mm. By setting the vibration piece 3b having a shape symmetrical with respect to the slit S to the above dimensions, it is easy to induce bending vibration.

Further, the flange 3d of the horn 3 has a thickness dimension (length dimension in the axis direction) of 1.0 mm, a protrusion dimension from the base 3a of 5.0 mm, and is displaced by 19.5 mm in the axis direction from the root of the horn 3. It was installed at the position. Further, the total length of the ultrasonic compound vibration device 1 in the axial core direction was set to 119 mm. The total length of the oscillator unit 2 in the axis direction was 39 mm, and the total length of the horn 3 in the axis direction was 80 mm. Further, as shown in FIG. 2, the axial core direction (displacement direction of longitudinal vibration) is defined as the z direction, the displacement direction of the deflection vibration is defined as the x direction, and the directions orthogonal to the z direction and the x direction are defined as the y direction.

In this embodiment, a study by a finite element method using COMSOL Multiphysics 5.5 is performed, and a combined vibration of vertical vibration and deflection vibration is obtained with the vibration piece 3b, and the pair of vibration pieces 3b have a plane-symmetrical shape. It was examined whether the propagation of the deflection vibration could be canceled. The examination was carried out by eigenvalue analysis. The piezoelectric element 2a was formed of PZT, and the screws and the like connecting the oscillator unit 2 and the horn 3 were made of iron alloy. Further, the flange 3d is a fixed constraint in which the displacement in each direction of x, y, and z is 0 in the range from both sides to 3 mm.

FIG. 4 shows the result of the vibration distribution in the x, y, and z directions of the ultrasonic composite vibration device 1 when the applied longitudinal vibration frequency is 60.60 kHz. Further, FIG. 5 is a diagram in which the ultrasonic compound vibration device 1 is superimposed on the result of the vibration distribution shown in FIG. The horizontal axis of FIGS. 4 and 5 indicates a position in the axis direction (position in the axis direction), and indicates the position of the end portion of the vibrator unit 2 of the ultrasonic compound vibration device 1 on the opposite side to the horn 3. It is set to 0. Further, the vertical axis of FIGS. 4 and 5 shows the value of each vibration displacement standardized by the maximum value of longitudinal vibration. The vibration distribution results shown in FIGS. 4 and 5 are based on the vibration results of the portion near the axis L, avoiding the slit S.

Focusing on the longitudinal vibration (displacement in the z direction), it was confirmed that the parts (node positions) where the displacement due to the longitudinal vibration did not occur at three points in the axial core direction of the ultrasonic compound vibration device 1. Considering that the wavelength of the longitudinal vibration of 60 kHz in the horn 3 formed by A2017 is about 80 mm, the vibration mode in the embodiment is a mode in which the total length of the ultrasonic compound vibration device 1 includes 1.5 wavelengths of longitudinal vibration. it is conceivable that. The total length of the ultrasonic compound vibration device 1 may be a length including one wavelength of longitudinal vibration. The maximum value of the vibration displacement of the longitudinal vibration is obtained at the tip portion (that is, the vibration piece 3b) of the ultrasonic composite vibration device 1, which is based on the thickness dimension D3 of the vibration piece 3b and the dimension of the base portion 3a (that is, the vibration piece 3b). This is because the vertical vibration is expanded because the size is smaller than the dimension D4) shown in FIG.

Further, although not shown in FIGS. 4 and 5, as a result of the eigenvalue analysis, in the portion where the slit S is located near the axial center direction position 110 mm, the displacement in the x direction on the upper side of the slit S (one vibrating piece 3b). , It was found that the displacement in the −x direction occurred on the lower side of the slit S (the other vibrating piece 3b). From this, it was found that the phase of the deflection vibration generated by forming the slit S to have a plane-symmetrical structure can be inverted. That is, it was found that the phase of the deflection vibration can be inverted between one vibrating piece 3b and the other vibrating piece 3b.

Further, as shown in FIGS. 4 and 5, it was found that the vibration displacement in the z direction, which is a longitudinal vibration, has the maximum value at the tip portion. Next, the vibration displacement in the x direction, which is the deflection vibration, is distributed only in the range of the axial position in the range of 99 to 119 mm, and is almost 0 in the range of the axial position in the range of 0 to 99 mm. I understood. From this, it was found that by making the horn 3 a plane-symmetrical structure, the deflection vibration is generated only at the tip portion, that is, the vibration piece 3b, and the deflection vibration is canceled at the other portions. The vibration displacement in the y direction orthogonal to the x direction was almost 0 in the entire range.

As described above, according to the ultrasonic composite vibration device 1 of the present embodiment, vertical-deflection vibration (composite vibration) can be obtained by the vibration piece 3b which is the tip portion, and the deflection vibration is canceled by other than the tip portion. I understood. Therefore, as shown in FIG. 5, it is possible to prevent the flange 3d from vibrating by providing the flange 3d in accordance with the node position of the longitudinal vibration of the base portion 3a. Therefore, according to the ultrasonic composite vibration device 1, it becomes an ultrasonic composite vibration source by a single oscillator unit 2 that is easy to fix and is small in size.

As can be seen from the fact that the deflection vibration is canceled by the base portion 3a, the deflection vibration is canceled at the portion connected to both the one vibration piece 3b and the other vibration piece 3b. Therefore, when a tool such as a blade is attached to the ultrasonic compound vibration device 1 and used as an ultrasonic vibration tool, the tool is connected to only one of the one vibration piece 3b and the other vibration piece 3b. To. As a result, the tool vibrates in a vibration mode in which longitudinal vibration and deflection vibration are combined.

Although the preferred embodiment of the present invention has been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to the above embodiment. The various shapes and combinations of the constituent members shown in the above-described embodiment are examples, and can be variously changed based on design requirements and the like without departing from the spirit of the present invention.

For example, in the above embodiment, the configuration in which the length dimension of the slit S in the axial core direction matches the length dimension of the vibrating piece 3b has been described. However, the present invention is not limited to this. For example, the length dimension of the slit S in the axial core direction can be changed, and the length can be set to reach the inside of the base portion 3a.

Further, in the above embodiment, the configuration in which the vibrating piece 3b and the tip surface of the base portion 3a are bent at a right angle and connected at the bottom of the slit S in the axial core direction has been described. However, the present invention is not limited to this. For example, the bottom of the slit S can be curved.

Further, in the above embodiment, the configuration in which the tip of the vibrating piece 3b is a free end has been described. However, the present invention is not limited to this, and it is also possible to adopt a configuration in which the tips of one vibrating piece 3b and the other vibrating piece 3b are connected to another portion. Even in such a case, it is possible to obtain combined vibration by enabling the two vibrating pieces 3b to flex and vibrate without being fastened to each other.

Further, in the above embodiment, a configuration in which the cross-sectional area of the base portion 3a is constant in the axial core direction (that is, a configuration in which the thickness of the base portion 3a is constant) is adopted. However, the present invention is not limited to this, and it is also possible to adopt a configuration in which the cross-sectional area of the base portion 3a gradually decreases toward the vibrating piece 3b, for example.

Further, in the above embodiment, the configuration in which the vibrating piece 3b has a flat plate shape on the front and back surfaces has been described. However, the present invention is not limited to this. For example, one or the other of the front and back surfaces may be a curved surface or may have a step.

1 ... Ultrasonic compound vibration device, 2 ... Oscillator unit, 2a ... Piezoelectric element (vibration element), 2b ... Block, 3 ... Horn, 3a ... Base, 3b ... Vibration piece, 3c ... Fillet, 3d ... Flange, L ... Shaft core, M ... Symmetrical plane, S ... Slit

Claims (7)

An oscillator unit including a vibrating element that generates longitudinal vibration, and a columnar column that is connected to the oscillator unit and is stretched along the axis along the propagation direction of the longitudinal vibration and resonates with the longitudinal vibration. It is an ultrasonic compound vibration device equipped with a horn.
The horn
A pair of vibrating pieces having a symmetrical shape having a plane including the axis of axis as a symmetrical plane and being arranged facing each other with a slit in between without being fastened to each other.
An ultrasonic composite characterized in that one end side in the direction along the axis is connected to the oscillator unit and the other end side in the direction along the axis has a base to which the vibration piece is connected. Vibration device. The vibrating piece is characterized in that the cross-sectional shape orthogonal to the axis is a plate shape having a rectangular shape having a long side parallel to the symmetry plane and a short side orthogonal to the symmetry plane. The ultrasonic composite vibration device according to claim 1. The ultrasonic composite vibration device according to claim 2, wherein the thickness dimension of the vibrating piece in a direction orthogonal to the symmetrical plane is smaller than the dimension from the symmetrical plane to the outer wall surface of the base portion. The ultrasonic compound vibration device according to claim 2 or 3, wherein the width dimension of the vibration piece seen from the direction along the axis coincides with the width dimension of the base portion. The ultrasonic combined vibration device according to any one of claims 1 to 4, wherein a fillet is provided at a connection point between the vibration piece and the base portion. The ultrasonic combined vibration device according to any one of claims 1 to 5, wherein the tip of the vibrating piece opposite to the base portion is a free end. The ultrasonic combined vibration apparatus according to any one of claims 1 to 6, wherein a flange protruding from the outer wall surface of the base portion is provided in accordance with a position of the base portion to be a node of the longitudinal vibration. ..

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