JP7447990B2 - 誘電分光測定装置および方法 - Google Patents
誘電分光測定装置および方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title description 11
- 238000004611 spectroscopical analysis Methods 0.000 title description 2
- 239000000523 sample Substances 0.000 claims description 130
- 238000005259 measurement Methods 0.000 claims description 82
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- 238000012545 processing Methods 0.000 claims description 30
- 238000001566 impedance spectroscopy Methods 0.000 claims description 23
- 230000035515 penetration Effects 0.000 claims description 19
- 238000000691 measurement method Methods 0.000 claims description 18
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- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/026—Dielectric impedance spectroscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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Description
Claims (6)
- 同軸線路から構成され、開放端とされた一端を検出端とする第1プローブと、
同軸線路から構成され、開放端とされた一端を検出端とし、前記第1プローブより侵入長が長い第2プローブと、
前記第1プローブを用いた測定対象物の測定結果、および前記第2プローブを用いた前記測定対象物の測定結果により、前記第1プローブの侵入長より薄い表層側の第1媒質と、前記第1媒質より深層側の第2媒質とが積層されている前記測定対象物の前記第2媒質の誘電率を求める測定器と
を備え、
前記測定器は、
前記第1プローブの侵入長より薄い表層側の前記第1媒質と、前記第1媒質より深層側の前記第2媒質とが積層されている前記測定対象物の、前記第1プローブを用いた測定により前記第1媒質の誘電率実測値を求め、前記第2プローブを用いた前記測定対象物の測定により前記第2プローブの検出端におけるアドミタンスの実測値Y measured を求める第1処理部と、
前記第1媒質の誘電率ε 1 、前記第2媒質の誘電率ε s を用いた前記第2プローブの検出端におけるアドミタンスのモデルを用い、前記誘電率ε 1 を前記誘電率実測値とし、前記誘電率ε s を変数として、前記第2プローブの検出端におけるアドミタンスのモデル値Y model を求める第2処理部と、
前記実測値Y measured と前記モデル値Y model とが等しくなる誘電率ε s を求める第3処理部と
を備える誘電分光測定装置。 - 請求項1記載の誘電分光測定装置において、
前記第1プローブおよび前記第2プローブの各々は、検出端にフリンジが形成されていることを特徴とする誘電分光測定装置。 - 請求項2記載の誘電分光測定装置において、
前記フリンジの前記同軸線路の導波方向に垂直な方向の面は、検出端からの漏洩電界の電界強度が、最大値の1%以下となる領域より広くされている
ことを特徴とする誘電分光測定装置。 - 請求項1~3のいずれか1項に記載の誘電分光測定装置において、
前記第2処理部は、式(A)で示されるアドミタンスモデルを用いることを特徴とする誘電分光測定装置。
- 同軸線路から構成され、開放端とされた一端を検出端とする第1プローブと、同軸線路から構成され、開放端とされた一端を検出端とし、前記第1プローブより侵入長が長い第2プローブとを用いた誘電分光法により、前記第1プローブの侵入長より薄い表層側の第1媒質と、前記第1媒質より深層側の第2媒質とが積層されている測定対象物の前記第2媒質の誘電率εsを求める誘電分光測定方法であって、
前記第1プローブを用いた前記測定対象物の測定により前記第1媒質の誘電率実測値を求め、前記第2プローブを用いた前記測定対象物の測定により前記第2プローブの検出端におけるアドミタンスの実測値Ymeasuredを求める第1ステップと、
前記第1媒質の誘電率ε1、前記誘電率εsを用いた前記第2プローブの検出端におけるアドミタンスのモデルを用い、前記誘電率ε1を前記誘電率実測値とし、前記誘電率εsを変数として、前記第2プローブの検出端におけるアドミタンスのモデル値Ymodelを求める第2ステップと、
前記実測値Ymeasuredと前記モデル値Ymodelとが等しくなる誘電率εsを求める第3ステップと
を備えることを特徴とする誘電分光測定方法。 - 請求項5記載の誘電分光測定方法において、
前記第2ステップは、式(A)で示されるアドミタンスモデルを用いることを特徴とする誘電分光測定方法。
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WO2023132026A1 (ja) * | 2022-01-06 | 2023-07-13 | 日本電信電話株式会社 | 誘電率測定方法及び短絡標準体 |
WO2023157188A1 (ja) * | 2022-02-17 | 2023-08-24 | 日本電信電話株式会社 | 誘電率測定方法、誘電率測定システム、及び誘電率測定プログラム |
WO2024070653A1 (ja) * | 2022-09-30 | 2024-04-04 | ソニーセミコンダクタソリューションズ株式会社 | 測定装置、及び、測定方法 |
WO2024127573A1 (ja) * | 2022-12-15 | 2024-06-20 | 日本電信電話株式会社 | 誘電分光センサ、誘電分光測定システム及び誘電分光測定手法 |
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JP2002228600A (ja) | 2001-01-30 | 2002-08-14 | Kyocera Corp | 誘電定数測定法 |
JP2005514996A (ja) | 2002-01-04 | 2005-05-26 | デューン メディカル デヴァイシズ リミテッド | 組織をその誘電特性に基づいて検査する方法とシステム |
US20090204346A1 (en) | 2008-02-11 | 2009-08-13 | Schlumberger Technology Corporation | System and method for measuring properties of liquid in multiphase mixtures |
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JP3367279B2 (ja) * | 1995-05-24 | 2003-01-14 | 花王株式会社 | 水の濃度分布測定方法 |
JPH10137193A (ja) * | 1996-11-07 | 1998-05-26 | Kao Corp | むくみ評価方法 |
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JP2002228600A (ja) | 2001-01-30 | 2002-08-14 | Kyocera Corp | 誘電定数測定法 |
JP2005514996A (ja) | 2002-01-04 | 2005-05-26 | デューン メディカル デヴァイシズ リミテッド | 組織をその誘電特性に基づいて検査する方法とシステム |
US20090204346A1 (en) | 2008-02-11 | 2009-08-13 | Schlumberger Technology Corporation | System and method for measuring properties of liquid in multiphase mixtures |
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