JP7438630B2 - transport vehicle - Google Patents

Description

The present invention relates to a transport vehicle used for transporting workpieces.

2. Description of the Related Art In the manufacturing process of device chips that are incorporated into electronic devices, plate-shaped workpieces, such as semiconductor wafers and resin package substrates, are processed using various processing apparatuses. For example, a cassette configured to accommodate a plurality of workpieces is used to transport the workpieces to each processing device. When the processing device receives a cassette containing a plurality of workpieces, the processing device sequentially takes out the workpieces from the cassette and processes them.

In recent years, in order to improve the efficiency of processing and transporting workpieces, a transport system that can automatically transport workpieces to a plurality of processing devices has been proposed (for example, see Patent Document 1). This conveyance system is equipped with a conveyance path above each processing device that connects multiple processing devices, and by running a conveyance vehicle that accommodates the workpiece on the conveyance path, the timing suitable for each processing device can be adjusted. transport the workpiece.

JP2019-201145A

By the way, the above-mentioned transport vehicle may include, for example, a container that accommodates the workpiece and a lifting unit that raises and lowers the container so that the workpiece can be transported from the upper transport path to the lower processing device. There is. By lowering the container from the transport path using the lifting unit and placing it on a predetermined area inside the processing device, the container can be accessed by the transport mechanism provided inside the processing device.

For example, an opening is formed in the side surface of the container to allow passage of the workpiece, and the workpiece is carried into or out of the container through this opening. However, when a transport vehicle equipped with such a container is run on a transport path or when the container is moved up and down, there is a possibility that foreign matter (particles) may enter the container through the opening and adhere to the workpiece.

The present invention has been made in view of such problems, and an object of the present invention is to provide a conveyance vehicle that can suppress adhesion of foreign matter to a workpiece during conveyance.

According to one aspect of the present invention, there is provided a transport vehicle that transports a workpiece by traveling on a transport path installed above a processing device, and the transport vehicle includes a frame on which wheels for traveling are mounted, and the workpiece. A container that has an opening on the side surface that allows passage of the workpiece and that houses the workpiece, and a container that is provided in the container and is moved between a closed position where the opening is closed and an open position where the opening is opened. a cover having a closing part that can be closed; a lifting unit provided on the frame for lifting and lowering the container; and a control unit for controlling driving of the wheels and operation of the lifting unit; When the container is lowered by the lifting unit and approaches a predetermined distance to a predetermined area on which the container is placed, a force that moves the closing part toward the open position is applied to the predetermined area. Provided is a transport vehicle configured such that the closing portion is positioned at the closing position by the weight of the cover with no force acting from the predetermined region.

In one aspect of the present invention, the cover may further include an actuated recess to which the force is applied from the acting protrusion included in the predetermined region and protruding upward.

In one aspect of the present invention, the cover may further include an actuated convex portion that protrudes below the lower surface of the container and on which the force is applied from the predetermined region.

A transport vehicle according to one aspect of the present invention includes a cover having a closing portion that can be moved between a closing position where the opening of the container is closed and an open position where the opening is opened, and the cover has a cover that is movable between a closing position where the opening of the container is closed and an open position where the opening is opened. The closing portion of the cover is configured to be positioned at the closing position by the cover's own weight when the container is a certain distance away from the area (when no force is applied from the predetermined area).

Therefore, when the transport vehicle travels along the transport path or when the container is moved up and down, the opening of the container is closed by the closing portion of the cover. In other words, the possibility that foreign matter will enter the container through the opening during transportation of the workpiece can be suppressed to a sufficiently low level. Therefore, adhesion of foreign matter to the workpiece during transportation can be suppressed.

Further, in the transport vehicle according to one aspect of the present invention, when the container approaches a predetermined distance to a predetermined region, a force is applied from the predetermined region to move the closed portion of the cover toward the open position. It is configured. Therefore, there is no need to provide the carrier with an actuator or the like for moving the closed portion between the closed position and the open position. Therefore, it is possible to realize weight reduction and power saving of the transport vehicle.

FIG. 1 is a plan view showing the conveyance system. FIG. 2 is a block diagram showing the transport system. FIG. 3(A) is a perspective view showing the top side of the carrier, and FIG. 3(B) is a perspective view showing the bottom side of the carrier. FIG. 4(A) is a perspective view of the container, and FIG. 4(B) is a front view of the container. FIG. 5 is a perspective view showing the conveyance vehicle in a state in which containers are placed on a predetermined area (placing area). FIG. 6 is a partially enlarged perspective view of FIG. FIG. 7(A) is a plan view showing the elevating unit, and FIG. 7(B) is a side view showing the elevating unit. FIG. 8(A) is a side view showing the carrier when the container is placed on a predetermined area, and FIG. 8(B) is a graph showing the current value of the motor when lowering the container. FIG. 9(A) is a side view showing the carrier when the container is stored in the storage area, and FIG. 9(B) is a graph showing the current value of the motor when lifting the container. 10(A), FIG. 10(B), and FIG. 10(C) are side views showing the state of the container and the cover when the container is placed on a predetermined area. 11(A), FIG. 11(B), and FIG. 11(C) are side views showing the state of the container and the cover when the container is placed on a predetermined area.

Embodiments according to one aspect of the present invention will be described below with reference to the accompanying drawings. First, a configuration example of a transport system using the transport vehicle according to this embodiment will be described. FIG. 1 is a plan view showing the transport system 2. As shown in FIG.

The transport system 2 is a system for transporting the workpiece 11 above a plurality of processing devices 4 that process the workpiece 11. Although only one processing device 4 is shown in FIG. 1, the number of processing devices 4 can be set arbitrarily.

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The workpiece 11 is divided into a plurality of regions by a plurality of dividing lines (street) arranged in a grid pattern, and an IC (Integrated Circuit) and an LED are provided on the surface (upper surface) side of each region. (Light Emitting Diode), MEMS (Micro Electro Mechanical Systems), and other devices are formed. When the workpiece 11 is divided by a predetermined processing device 4 (such as a cutting device) along a planned dividing line, a plurality of device chips each including a device are obtained.

However, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, ceramics, resin, metal, or the like. Further, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of devices formed on the workpiece 11, and the workpiece 11 may not have any devices formed thereon. Further, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate.

A circular tape 13 having a larger diameter than the workpiece 11 is attached to the back (lower) side of the workpiece 11 . As the tape 13, for example, a sheet having a circular film-like base material and an adhesive layer (glue layer) provided on the base material is used. The base material is made of, for example, a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer is made of, for example, an epoxy-based, acrylic-based, or rubber-based adhesive. For the adhesive layer, an ultraviolet curable resin that is cured by irradiation with ultraviolet rays may be used.

The outer circumference of the tape 13 is attached to an annular frame 15 made of metal or the like. The frame 15 has a circular opening in the center. The diameter of the opening of the frame 15 is larger than the diameter of the workpiece 11, and the workpiece 11 is attached to the center of the tape 13 so as to be placed inside the opening of the frame 15. As a result, the workpiece 11 is supported by the frame 15 via the tape 13, and a workpiece unit (frame unit) 17 including the workpiece 11, the tape 13, and the frame 15 is configured. The workpiece 11 is then transported while being supported by the frame 15.

The processing device 4 is, for example, a cutting device that includes a cutting unit that cuts the workpiece 11. The cutting unit includes a spindle, and an annular cutting blade is attached to the tip of the spindle. The workpiece 11 is cut by cutting into the workpiece 11 while rotating the cutting blade.

However, the type of processing device 4 is not limited. The processing device 4 may be, for example, a grinding device including a grinding unit for grinding the workpiece 11 or a polishing device including a polishing unit for polishing the workpiece 11.

The grinding unit of the grinding device includes a spindle, and an annular grinding wheel to which a plurality of grinding wheels are fixed is attached to the tip of the spindle. The workpiece 11 is ground by bringing the grinding wheel into contact with the workpiece 11 while rotating the grinding wheel. Further, the polishing unit of the polishing apparatus includes a spindle, and a disc-shaped polishing pad is attached to the tip of the spindle. The workpiece 11 is polished by bringing the polishing pad into contact with the workpiece 11 while rotating.

Furthermore, the processing device 4 may be a laser processing device that processes the workpiece 11 by irradiating a laser beam. The laser processing apparatus includes a laser irradiation unit that irradiates a laser beam for processing the workpiece 11. For example, the laser irradiation unit includes a laser oscillator that pulses a laser beam of a predetermined wavelength, and a condenser that focuses the laser beam emitted from the laser oscillator. Laser processing is performed on the workpiece 11 by focusing a laser beam irradiated from a laser irradiation unit on the surface or inside of the workpiece.

A plurality of pipes 6 are connected to the side surface of the processing device 4 . The piping 6 is, for example, a supply duct for supplying liquid or gas to the processing device 4, a discharge duct for discharging liquid or gas inside the processing device 4, or the like.

A storage device (loader/unloader) 8 that accommodates a plurality of workpieces 11 is installed adjacent to the processing device 4 . The storage device 8 stores the workpiece 11 before processing and the workpiece 11 processed by the processing device 4 .

The conveyance system 2 includes a conveyance path 10 installed above a plurality of processing devices 4 and a storage device 8 . The conveyance path 10 is installed so as to straddle the space between the processing devices 4 and the processing devices 4 and between the processing device 4 and the storage device 8, and the plurality of processing devices 4 and storage devices 8 are connected via. On the conveyance path 10, a plurality of conveyance vehicles (automated guided vehicles) 12 that accommodate and convey the workpieces 11 are arranged. Although two conveyance vehicles 12 are shown in FIG. 1, there is no limit to the number of conveyance vehicles 12 arranged on the conveyance path 10.

For example, when the unprocessed workpiece 11 stored in the storage device 8 is carried into the transport vehicle 12, the transport vehicle 12 moves along the transport path 10 with the workpiece 11 received from the storage device 8 stored therein. The workpiece 11 is transported to a predetermined processing device 4. Further, the conveyance vehicle 12 runs on the conveyance path 10 in a state where the processed workpiece 11 received from the processing device 4 is accommodated, and conveys the workpiece 11 to another processing device 4 or the storage device 8. do.

In addition, in the transport path 10, an opening 10a that vertically penetrates the transport path 10 is provided in a region located directly above the processing device 4 or a region located directly above the storage device 8. The workpiece 11 is transferred between the transport vehicle 12 and the processing device 4 and between the transport vehicle 12 and the storage device 8 through this opening 10a.

In the transport system 2 , the workpiece 11 is transported by a transport vehicle 12 running on a transport path 10 installed above the processing device 4 and the storage device 8 . Therefore, the piping 6 and the like connected to the side surface of the processing device 4 do not become an obstacle to the conveyance of the workpiece 11, and smooth conveyance of the workpiece 11 is realized.

FIG. 2 is a block diagram showing the transport system 2. As shown in FIG. The transport system 2 includes a control unit 14 that controls operations of a plurality of components of the transport system 2 (processing device 4, storage device 8, transport vehicle 12, etc.). The control unit 14 is connected, for example, to each component of the transport system 2 wirelessly or by wire, and outputs a control signal to each component of the transport system 2.

As a result, the transfer of the workpiece 11 between the processing device 4 and the transport vehicle 12, the transfer of the workpiece 11 between the storage device 8 and the transport vehicle 12, the running of the transport vehicle 12, etc. are controlled. Ru. Further, various signals transmitted from each component of the transport system 2 are input to the control unit 14.

The control unit 14 is configured by, for example, a computer, and includes a processor such as a CPU (Central Processing Unit), and various types of memories that constitute a main storage device and an auxiliary storage device. Control unit 14 executes a program stored in memory to generate control signals for operating transport system 2 .

Next, details of the transport vehicle 12 that travels on the transport path 10 and transports the workpiece 11 will be described. 3(A) is a perspective view showing the top side of the transport vehicle 12, and FIG. 3(B) is a perspective view showing the bottom surface side of the transport vehicle 12. Note that some components of the transport vehicle 12 are omitted in FIGS. 3(A) and 3(B).

The transport vehicle 12 includes a plate-shaped frame 20 on which various components included in the transport vehicle 12 are mounted. A pair of axles 22 are provided at both ends of the front side of the frame 20 . The axle 22 is arranged on the lower surface side of the frame 20 so that one end protrudes from the side surface of the frame 20, and a wheel (front wheel) 24 is attached to one end of the axle 22, respectively.

A pair of wheels (rear wheels) 26 are arranged at the rear end of the frame 20 so as to be spaced apart from each other in the width direction of the frame 20 (vehicle width direction). The wheels 26 are, for example, casters that can be rotated 360° around a rotation axis that is generally parallel to the vehicle height direction of the transport vehicle 12, and are mounted on the lower surface side of the frame 20. The wheels 24 and the wheels 26 are wheels for traveling when the transport vehicle 12 travels on the transport path 10 (see FIG. 1).

A drive unit 28 that drives a pair of wheels 24 is mounted on the front end of the frame 20. Drive unit 28 includes a pair of motors 30 coupled to wheels 24 via axle 22 . The motor 30 includes a rotating shaft (output shaft) 30a, and generates power to rotate the wheels 24.

As shown in FIG. 3(B), a pulley 32 is fixed to the other end of the axle 22. An endless connecting member (not shown) such as a belt or chain is wound around the rotating shaft 30a of the motor 30 and the pulley 32. This constitutes a power transmission mechanism that connects the axle 22 and the motor 30. The power (rotational force) generated by the motor 30 is transmitted to the wheels 24, and the wheels 24 rotate.

The drive unit 28 independently controls the rotation direction of the pair of wheels 24 using a pair of motors 30 . When the pair of wheels 24 are rotated in the same direction, the carrier 12 moves forward or backward. Furthermore, when the pair of wheels 24 are rotated in opposite directions, the transport vehicle 12 rotates around a rotation axis that is generally parallel to the vehicle height direction, and the traveling direction of the transport vehicle 12 is controlled.

A battery (secondary battery) 34 that supplies power to the motor 30 and the like is connected to the drive unit 28 via power supply wiring (not shown). The battery 34 is attached to the front end of the frame 20, for example, and supplies the motor 30 with electric power for rotating the wheels 24. As this battery 34, a lithium ion battery or the like is used.

As shown in FIG. 3B, a pair of power receiving terminals 36 connected to the battery 34 are provided on the lower surface side of the front end of the frame 20. The pair of terminals 36 are connected, for example, to a power supply terminal installed outside the transport vehicle 12. The battery 34 is charged by the power supplied from the power supply terminal to the pair of terminals 36 .

A storage area 38 is provided below the frame 20 in which a container (cassette) 40 containing the workpiece 11 is stored. The storage area 38 is surrounded by the pair of wheels 24 and the pair of wheels 26, and is located above the lower ends of the wheels 24 and 26. A container 40 that can accommodate one or more workpieces 11 is arranged in the storage area 38 .

FIG. 4(A) is a perspective view showing the container 40, and FIG. 4(B) is a front view showing the container 40. Note that some components associated with the container 40 are omitted in FIG. 4(B). The container 40 is formed, for example, into a generally hexagonal shape in a plan view, and the container 40 includes a housing section (accommodation space) 40a that can accommodate the workpiece unit 17 (the workpiece 11 supported by the frame 15). is provided.

The accommodating portion 40a is connected to a space outside the container 40 via a slit-shaped opening 40b that opens on one side of the container 40 (the front side of the container 40). The workpiece unit 17 is carried into the accommodating part 40a through the opening 40b, and is carried out from the accommodating part 40a through the opening 40b.

The container 40 is configured to be able to accommodate, for example, two types of workpiece units 17 (workpiece unit 17a and workpiece unit 17b) having different sizes. Specifically, the accommodating portion 40a of the container 40 is provided with a pair of first guide rails 42 that hold the workpiece unit 17a and a pair of second guide rails 44 that hold the workpiece unit 17b. It is being

Each first guide rail 42 includes a side wall 42a fixed to the upper wall 40c of the accommodating portion 40a, and a protruding portion 42b protruding laterally from the lower end of the side wall 42a. The pair of first guide rails 42 are fixed to the upper wall 40c such that each protrusion 42b is arranged inside the side wall 42a and the side walls 42a are separated from each other by approximately the same width as the workpiece unit 17a. The upper surface of the protrusion 42b constitutes a holding surface 42c that holds the lower surface side of the workpiece unit 17a.

Further, the pair of second guide rails 44 are fixed to the bottom wall 40d of the housing section 40a so as to be spaced apart from each other, and the upper surface of the second guide rails 44 is a holder that holds the lower surface side of the workpiece unit 17b. This constitutes a surface 44a. The interval between the pair of second guide rails 44 is wider than the interval between the pair of first guide rails 42.

Therefore, the pair of second guide rails 44 can hold the workpiece unit 17b that is larger than the workpiece unit 17a held by the pair of first guide rails 42. For example, a workpiece 11 with a diameter of approximately 200 mm (8 inches) is held by a pair of first guide rails 42, and a workpiece 11 with a diameter of approximately 300 mm (12 inches) is held by a pair of second guide rails 44. be done.

However, there is no limit to the structure of the container 40. The container 40 may be configured such that, for example, one or more workpiece units 17 can be accommodated in the accommodation portion 40a. Further, the container 40 may be configured to accommodate a plurality of workpiece units 17 of the same size.

A cover 46 is provided on the opening 40b side (front side) of the container 40. This cover 46 includes, for example, a first closing portion 46a configured to close the opening 40b from the front side. The first closing portion 46a has a flat plate shape with a rectangular front and back surface, and is arranged so that the longitudinal direction of the front surface (back surface) and the width direction (horizontal direction) of the opening 40b are approximately parallel. Ru.

The length in the longitudinal direction of the front surface (back surface) of the first closing portion 46a is, for example, longer than the width (horizontal length) of the opening 40b. Further, the length (height) in the direction perpendicular to the longitudinal direction of the front surface (back surface) of the first closing portion 46a is longer than the height (vertical length) of the opening 40b, for example. .

A second closing portion 46b configured to close the opening 40b from above is connected to the upper edge of the first closing portion 46a. The second closing portion 46b is also configured in a flat plate shape with a rectangular front and back surface, and is arranged so that the longitudinal direction of the front surface (back surface) and the width direction (horizontal direction) of the opening 40b are approximately parallel. Ru.

The length in the longitudinal direction of the front surface (back surface) of the second closing portion 46b is, for example, longer than the width (horizontal length) of the opening 40b. Further, the second closing portion 46b is connected to the first closing portion 46a such that the front surface (back surface) of the second closing portion 46b is approximately perpendicular to the front surface (back surface) of the first closing portion 46a. ing.

At positions corresponding to both ends of the front surface (back surface) in the longitudinal direction of the first closing section 46a, there are flat side plate portions each having a front surface and a back surface that are substantially perpendicular to the front surface (back surface) of the first closing section 46a. A part of one end side (the front side of the container 40) of 46c is connected. Another part of the side plate portion 46c on one end side is also connected to positions corresponding to both longitudinal ends of the front surface (back surface) of the second closing portion 46b. Furthermore, the front and back surfaces of the side plate portion 46c are generally perpendicular to the front surface (back surface) of the second closing portion 46b.

A hole passing through the side plate 46c from the front surface to the back surface is formed in a part of the other end (back side of the container 40) opposite to the one end of each side plate 46c. A connecting pin 46d serving as a rotating shaft is inserted into the hole of each side plate portion 46c. The base end side of the connecting pin 46d is fixed to the side wall of the container 40. That is, each side plate portion 46c is connected to the container 40 in such a manner that it can rotate relative to the container 40 about the connecting pin 46d inserted at the other end as a rotation axis.

In the cover 46 configured in this way, the weight of the portion corresponding to one end side of the side plate portion 46c (the portion on the front side from the connecting pin 46d, the portion including the first closing portion 46a and the second closing portion 46b) is greater than the weight of the side plate portion 46c. The weight is sufficiently larger than the weight of the portion corresponding to the other end side of the portion 46c (the portion on the back side of the connecting pin 46d). Therefore, in a situation where no force other than gravity is applied to the cover 46, the first closing part 46a and the second closing part 46b are moved to the closed position shown in FIG. It is positioned in

The second closing portion 46b of the cover 46 has an edge opposite to the first closing portion 46a (edge on the back side) that is wider than an edge on the front side of the upper wall 40c of the accommodating portion 40a (container 40). It is configured to be placed on the back side. Therefore, the first closing portion 46a and the second closing portion 46b of the cover 46 do not move below the closing position where the back surface of the second closing portion 46b contacts the upper wall 40c. In this way, the closed position where the opening 40b is closed by the first closing part 46a and the second closing part 46b is defined by the upper wall 40c and the back surface of the second closing part 46b.

Further, on the back side of the first closing portion 46a and the second closing portion 46b, a sealing member (packing material) is formed using a material having a high elastic limit such as rubber (urethane rubber, silicone rubber, etc.). ) are placed. Therefore, when the first closing portion 46a and the second closing portion 46b are positioned at the closing position, the opening 40b of the container 40 is sealed by this sealing member. However, if the opening 40b of the container 40 is sufficiently sealed by the first closing part 46a and the second closing part 46b, the sealing member may be omitted.

An actuated recess 46e that receives force from the processing device 4 or the storage device 8 when the container 40 is lowered is formed at the lower end of the side plate portion 46c. The upward force acting on the actuated recess 46e causes the first closing portion 46a and the second closing portion 46b of the cover 46 to move to the open position located above the above-mentioned closed position.

Note that the front edge of the upper wall 40c of the accommodating portion 40a (container 40) is located closer to the back side than the front edge of the bottom wall 40d. Therefore, when the cover 46 rotates and the first closing part 46a and the second closing part 46b move between the closed position and the open position, the container 40 and the cover 46 do not interfere with each other.

When the first closing portion 46a and the second closing portion 46b are positioned at the open position, the opening 40b is opened. In other words, a state in which the opening 40b is not covered by the first closing part 46a and the second closing part 46b is realized. Thereby, the workpiece unit 17 can be carried into the housing part 40a through the opening 40b, and the workpiece unit 17 can be carried out from the housing part 40a through the opening 40b.

When the workpiece unit 17 is transported by the transport vehicle 12, the container 40 is stored in the storage area 38, as shown in FIG. 3(A). At this time, the lower surface of the container 40 is positioned above the lower ends of the wheels 24 and 26. Therefore, the container 40 does not come into contact with the conveyance path 10 (see FIG. 1) while the conveyance vehicle 12 is traveling.

An elevating unit (elevating mechanism) 48 for elevating and lowering the container 40 is provided in an area on the upper surface side of the frame 20 that overlaps with the storage area 38 . The lifting unit 48 lowers the containers 40 stored in the storage area 38 and places them on a predetermined area (placing area), and also raises the containers 40 placed on this area and stores them in the storage area 38.

FIG. 5 is a perspective view showing the carrier 12 with the container 40 placed on a predetermined area (placing area) 16, and FIG. 6 is a partially enlarged perspective view of FIG. The elevating unit 48 includes a plurality of hanging members 50 whose one end side is connected to the container 40, and a drive mechanism 52 that pays out and winds up the hanging members 50. Note that the region 16 is, for example, the upper surface of a table or the like provided inside the processing device 4 or the storage device 8 and located directly below the opening 10a.

As the hanging member 50, a belt, wire rope, or the like that is easy to let out and wind up is used. In FIG. 5, the hanging member 50 is a belt having a predetermined width, and the tips (lower ends) of the four hanging members 50 are each connected to four positions on the upper surface side of the container 40. It shows. However, there is no limit to the number of hanging members 50.

When the hanging member 50 is paid out by the drive mechanism 52 while the container 40 is stored in the storage area 38, the container 40 is lowered and placed on the area 16. As shown in FIGS. 5 and 6, the region 16 includes a working convex portion 16a that projects upward. Therefore, when the container 40 is lowered with the position of the actuated recess 46e aligned with the position above the action protrusion 16a, when the container 40 approaches the area 16 sufficiently, the actuated recess 46e is moved. The working convex portion 16a makes contact.

Thereafter, when the container 40 is further lowered, the first closing portion 46a and the second closing portion 46b of the cover 46 move upward to the open position due to the upward force acting from the acting convex portion 16a to the acted recess 46e. . Then, when the lower surface of the container 40 contacts the region 16, the first closing portion 46a and the second closing portion 46b are positioned at the open position shown in FIGS. 5 and 6. Note that a guide groove 40e is formed on the side surface of the container 40, into which a part of the working convex portion 16a is inserted.

On the other hand, when the hanging member 50 is wound up by the drive mechanism 52 with the container 40 placed on the area 16, the container 40 rises and is stored in the storage area 38. As described above, gravity (moment of gravity) acts on the cover 46 to move the first closing portion 46a and the second closing portion 46b downward.

Therefore, when the container 40 is raised and the working convex portion 16a moves relatively downward, the first closing portion 46a and the second closing portion 46b move downward toward the closing position. When the working convex portion 16a is completely separated from the acted recess 46e, the first closing portion 46a and the second closing portion 46b are positioned at the closing position.

Note that when a belt is used as the hanging member 50, the container 40 is difficult to swing in the width direction of the belt. Therefore, the width direction of the belt is aligned with the movement direction of the workpiece unit 17 when the workpiece unit 17 passes through the opening 40b of the container 40 (in FIG. 5, the direction perpendicular to the opening 40b). , it is preferable to adjust the orientation of the belt relative to the container 40. This makes it difficult for the workpiece unit 17 to pop out from the opening 40b while the container 40 is being moved up and down.

As shown in FIG. 3(B), a plurality of contact members (contact pins) 54 that come into contact with the upper surface of the container 40 are provided on the lower surface side of the frame 20. The plurality of contact members 54 are formed in a columnar shape with approximately the same height, and are fixed to the frame 20 so as to protrude downward from the lower surface of the frame 20. When the container 40 is stored in the storage area 38 , the upper surface side of the container 40 comes into contact with the lower ends of the plurality of contact members 54 .

The contact member 54 is, for example, a columnar member made of a material (soft elastic body) with a high elastic limit and a low elastic modulus, and causes elastic deformation when the container 40 is pressed against it. When such a material is used for the contact member 54, the impact when the container 40 contacts the contact member 54 is alleviated, and the container 40 and the workpiece unit 17 housed in the container 40 are less likely to be damaged. Further, when the transport vehicle 12 travels on the transport path 10, the contact member 54 functions as a buffer material, making it difficult for vibrations of the frame 20 to be transmitted to the container 40 and the workpiece unit 17.

The material used for the contact member 54 is, for example, rubber (urethane rubber, silicone rubber, etc.), sponge, or the like. In particular, if rubber, which has a large frictional force acting with the container 40, is used for the contact member 54, the container 40 is less likely to shift its position during transportation. Note that the entire contact member 54 does not necessarily need to be made of an elastic body, and it is sufficient that at least the region (lower end portion) of the contact member 54 that contacts the container 40 is made of an elastic body.

Further, it is preferable that the contact member 54 is configured to contact the upper surface side of the container 40 at three or more positions. For example, as shown in FIG. 3(B), three columnar contact members 54 are provided on the frame 20. In this case, since the upper surface of the container 40 is supported along a plane including the lower ends of the three contact members 54, the container 40 is less likely to tilt. However, conditions such as the shape, number, and arrangement of the contact members 54 may be changed arbitrarily. For example, the frame 20 may be provided with a pair of linear (band-shaped) contact members 54 arranged generally parallel to each other.

A pair of first sensors 56 are provided at the front and rear ends of the frame 20. Furthermore, a pair of second sensors 58 are provided at both end portions of the frame 20. The first sensor 56 and the second sensor 58 are each mounted so as to face the conveyance path 10 along which the conveyance vehicle 12 travels, and detect marks placed on the conveyance path 10 . Based on the mark detection results by the first sensor 56 and the second sensor 58, the operations (running, turning, stopping, etc.) of the transport vehicle 12 are controlled.

Further, as shown in FIG. 3(A), a pair of third sensors 60 are provided on the front end side of the frame 20 to detect when the transport vehicle 12 collides with an obstacle. When the front end of the guided vehicle 12 collides with an obstacle, the third sensor 60 is activated, the collision of the guided vehicle 12 is detected, and the guided vehicle 12 is brought to an emergency stop. As the third sensor 60, for example, a push-button switch is used. However, there is no restriction on the structure or type of the third sensor 60 as long as it can detect a collision of the transport vehicle 12.

A plate-shaped support base 62 fixed to the frame 20 is arranged above the elevating unit 48. A control section (control unit) 64 that controls the operation of the transport vehicle 12 is fixed to the upper surface of the support base 62 . The control unit 64 is connected to a plurality of components of the transport vehicle 12 (drive unit 28, battery 34, lifting unit 48, first sensor 56, second sensor 58, third sensor 60, etc.), and controls the operation of each component. control.

The control unit 64 is configured by, for example, a computer, and includes a processor such as a CPU, and various types of memories that constitute a main storage device and an auxiliary storage device. The control unit 64 executes a program stored in the memory and generates a control signal for controlling the operation of the transport vehicle 12.

Further, on the upper surface of the support base 62, there is a receiver 66 that receives signals (information) from the outside and transmits them to the control unit 64, and a receiver 66 that receives signals (information) from the control unit 64 and transmits them to the outside. A machine 68 is provided. The receiver 66 and transmitter 68 are each connected to the control section 64.

For example, the receiver 66 receives a signal transmitted from the control unit 14 (see FIG. 2) of the transport system 2 and transmits it to the control unit 64. The control unit 64 then controls the operation of the guided vehicle 12 based on the signal received from the receiver 66. Further, the control unit 64 generates a signal including information regarding the guided vehicle 12 and transmits it to the transmitter 68 . The transmitter 68 then transmits the signal received from the control section 64 to the control unit 14 of the transport system 2.

Note that the lifting unit 48, the first sensor 56, the second sensor 58, the third sensor 60, the control unit 64, the receiver 66, and the transmitter 68 are connected to the battery 34 through power supply wiring (not shown). may be connected to. In this case, the lifting unit 48, the first sensor 56, the second sensor 58, the third sensor 60, the control unit 64, the receiver 66, and the transmitter 68 may be operated by power directly supplied from the battery 34. can.

Next, a configuration example of the elevating unit 48 will be described. 7(A) is a plan view showing the elevating unit 48, and FIG. 7(B) is a side view showing the elevating unit 48. As described above, the elevating unit 48 includes the drive mechanism 52 that winds up and sends out the plurality of hanging members 50. The drive mechanism 52 includes a motor 72 having a rotating shaft (output shaft) 72a.

The motor 72 generates power used for winding up and feeding out the hanging member 50 by rotating the rotating shaft 72a. A first rotating shaft (first shaft) 74a and a second rotating shaft (second shaft) 74b are provided at two positions with the motor 72 in between, which are arranged generally parallel to each other.

A pulley 76 is provided on one end side of the first rotating shaft 74a. An endless connecting member 78 such as a belt or chain is connected between the rotating shaft 72a of the motor 72 and the pulley 76. The rotating shaft 72a of the motor 72, the pulley 76, and the connecting member 78 constitute a power transmission mechanism, and the motor 72 and the first rotating shaft 74a are connected. On the other hand, a pulley or the like for realizing connection with the motor 72 is not provided on one end side of the second rotating shaft 74b.

A pulley 80a is provided on the other end side of the first rotating shaft 74a, and a pulley 80b having the same diameter as the pulley 80a is provided on the other end side of the second rotating shaft 74b. An endless connecting member 82 such as a belt or chain is stretched between the pulley 80a and the pulley 80b. The pulley 80a, the pulley 80b, and the connecting member 82 constitute a power transmission mechanism, and the first rotating shaft 74a and the second rotating shaft 74b are connected.

A cylindrical reel 84a around which the hanging member 50 is wound is fixed to each end of the first rotation shaft 74a. Furthermore, cylindrical rollers 86a that support the hanging members 50 are rotatably arranged at two positions outside each reel 84a (on the opposite side from the motor 72) and below each reel 84a. There is. The rotation axis of each roller 86a is generally parallel to the first rotation axis 74a.

On the other hand, a cylindrical reel 84b around which the hanging member 50 is wound is fixed to both ends of the second rotating shaft 74b. Furthermore, cylindrical rollers 86b that support the hanging members 50 are rotatably arranged at two positions outside each reel 84b (on the opposite side from the motor 72) and below each reel 84b. There is. The rotation axis of each roller 86b is generally parallel to the second rotation axis 74b.

The base end side of the hanging member 50 is fixed to the reel 84a and the reel 84b, respectively. The hanging member 50 fixed to the reel 84a hangs down while contacting the outer portion of the roller 86a. Further, the hanging member 50 fixed to the reel 84b hangs down while contacting the outer portion of the roller 86b.

Note that the hanging member 50 fixed to the reel 84a passes above the reel 84a and is supported by the roller 86a, as shown in FIG. 7(B). On the other hand, the hanging member 50 fixed to the reel 84b passes under the reel 84b and is supported by the roller 86b.

When the rotating shaft 72a of the motor 72 is rotated in the first direction (the direction indicated by arrow _C1 in FIG. 7(B) in the direction shown by arrow _C2 ). Thereby, the hanging member 50 is sent out from the reel 84a via the roller 86a.

Further, the torque of the first rotating shaft 74a is transmitted to the second rotating shaft 74b by the connecting member 82, and the reel 84b fixed to the second rotating shaft 74b sends out the hanging member 50 (indicated by the arrow in FIG. 7(B)). C ₃ ). Thereby, the hanging member 50 is sent out from the reel 84b via the roller 86b.

On the other hand, when the rotating shaft 72a of the motor 72 is rotated in a second direction opposite to the first direction (direction indicated by arrow _D1 in FIG. 7(B)), the reel fixed to the first rotating shaft 74a rotates. 84a rotates in the direction of winding up the hanging member 50 (the direction shown by arrow _D2 in FIG. 7(B)). Thereby, the hanging member 50 is wound onto the reel 84a via the roller 86a.

Further, the torque of the first rotating shaft 74a is transmitted to the second rotating shaft 74b by the connecting member 82, and the reel 84b fixed to the second rotating shaft 74b moves in the direction in which the hanging member 50 is wound up (FIG. 7(B)). (direction shown by arrow _D3 ). Thereby, the hanging member 50 is wound onto the reel 84b via the roller 86b.

When each hanging member 50 is sent out from the drive mechanism 52, the container 40 connected to the tip side of the hanging member 50 is lowered. Thereby, the container 40 can be placed on the predetermined area (placing area) 16. Moreover, when each hanging member 50 is wound up by the drive mechanism 52, the container 40 connected to the tip side of the hanging member 50 rises. Thereby, the container 40 can be stored in the storage area 38 of the transport vehicle 12.

When the container 40 is raised and lowered, the rotation of the motor 72 and the like of the raising and lowering unit 48 is controlled by the control unit 64. FIG. 8(A) is a side view showing the carrier 12 when the container 40 is placed on the predetermined area 16. When placing the container 40 on the area 16, the rotation direction and rotation speed of the motor 72 are controlled so that the hanging member 50 is sent out from the drive mechanism 52 at an arbitrary speed. For example, the control unit 64 controls the current value of the motor 72 so that the rotation speed of the motor 72 is maintained.

FIG. 8(B) is a graph showing the current value of the motor 72 when lowering the container 40. When the container 40 descends and reaches the region 16, the container 40 is supported from below in the region 16. As a result, the load acting on the rotating shaft 72a of the motor 72 is weakened, and the current value of the motor 72 is reduced.

The control unit 64 stops the rotation of the motor 72 based on the change in the current value of the motor 72 when the container 40 is placed on the area 16. For example, a predetermined threshold value is stored in advance in the control unit 64, and the control unit 64 compares this threshold value with the current value of the motor 72. Then, when the current value of the motor 72 is less than or equal to the threshold value (or less than the threshold value), the control unit 64 stops the rotation of the motor 72. Thereby, the container 40 is placed on the area 16.

FIG. 9(A) is a side view showing the transport vehicle 12 when the container 40 is stored in the storage area 38. When storing the container 40 in the storage area 38, the rotation direction and rotation speed of the motor 72 are controlled so that the hanging member 50 is wound up at an arbitrary speed by the drive mechanism 52. For example, the control unit 64 controls the current value of the motor 72 so that the rotation speed of the motor 72 is maintained.

FIG. 9(B) is a graph showing the current value of the motor 72 when the container 40 is raised. When the container 40 rises and reaches the storage area 38, the container 40 is pressed against a plurality of contact members 54 provided on the lower surface side of the frame 20. As a result, the load acting on the rotating shaft 72a of the motor 72 becomes stronger, and the current value of the motor 72 increases.

The control unit 64 stops the rotation of the motor 72 based on the change in the current value of the motor 72 when the container 40 contacts the contact member 54 . For example, a predetermined threshold value is stored in advance in the control unit 64, and the control unit 64 compares this threshold value with the current value of the motor 72. Then, when the current value of the motor 72 is equal to or greater than the threshold value (or exceeds the threshold value), the control unit 64 stops the rotation of the motor 72. This completes storage of the container 40 in the storage area 38.

As described above, when controlling the operation of the motor 72 when raising and lowering the container 40 based on the current value of the motor 72, it is necessary to provide a sensor for detecting the container 40 in the storage area 38 or the area 16. There is no. This simplifies the structures of the transport vehicle 12, the area 16, and the like. Furthermore, the weight of the transport vehicle 12 is also reduced.

However, there is no limit to the method of controlling the motor 72. For example, a sensor (such as a push button switch) that detects that the container 40 is placed may be provided on the lower surface side of the frame 20 or the upper surface side of the area 16. In this case, when the sensor detects the container 40, the control unit 64 stops the rotation of the motor 72. Note that detection using a sensor and detection based on the current value of the motor 72 can also be used together.

Further, the vertical speed of the container 40 does not necessarily have to be constant. For example, just before the container 40 is placed on the area 16 or stored in the storage area 38, the rotation speed of the motor 72 may be lowered to decelerate the container 40. Thereby, the impact when the container 40 comes into contact with the area 16 or the contact member 54 can be alleviated. In this case, the control unit 64 may monitor the height of the container 40 based on, for example, the amount of rotation of the motor 72.

10(A), FIG. 10(B), FIG. 10(C), FIG. 11(A), FIG. 11(B), and FIG. 4 is a side view showing the state of the container 40 and the cover 46. FIG. When placing the container 40 on the area 16, as shown in FIG. 10(A), the container 40 is lowered while aligning the positions of the guide groove 40e and the operated recess 46e with the upper position of the operating protrusion 16a. let

Thereafter, when the container 40 approaches the area 16 by a predetermined distance, a part of the working convex part 16a is inserted into the guide groove 40e, and the upper end of the working convex part 16a is inserted into the guide groove 40e, as shown in FIG. 10(B). The side edge contacts the actuated recess 46e. If the container 40 is further lowered in this state, a relatively upward force due to the lowering of the container 40 will be applied to the operated concave portion 46e from the acting convex portion 16a.

As shown in FIG. 10(B) and the like, the upper edge of the working convex portion 16a when viewed from the side is formed in an upwardly convex curved shape (semicircular arc shape). Further, the portion of the edge of the actuated recess 46e on the other end side of the side plate portion 46c (back side of the container 40) when viewed from the side becomes higher as it goes from the other end side to the one end side of the side plate portion 46c. is inclined to.

Therefore, when the upper edge of the working convex portion 16a formed in an upwardly convex curve is in contact with the edge of the actuated recess 46e located on the other end side of the side plate portion 46c, the working convex portion 16a A portion of the upward force acting on the actuated recess 46e is converted into a force that pushes the cover 46 toward the back side of the container 40.

Therefore, the container 40 and the cover 46 move in the direction from the front side to the back side of the container 40, as shown in FIGS. 10(C), 11(A), and 11(B). Further, the cover 46 rotates around the connecting pin 46d so that the first closing portion 46a and the second closing portion 46b move upward to the open position due to the upward force acting from the operating convex portion 16a.

As shown in FIG. 11(C), when the lower surface of the container 40 comes into contact with the predetermined area 16, the container 40 is positioned at an appropriate position in the area 16, and the first closing part 46a and the second closing part 46b are opened. positioned in position. This allows the processing device 4 and the transport mechanism (not shown) of the storage device 8 to access the storage section 40a inside the container 40. In this way, the actuated recess 46e of the cover 46 according to the present embodiment constitutes an adjustment mechanism that adjusts the position of the container 40 and the like with respect to the region 16, together with the actuation protrusion 16a.

Note that when the container 40 is placed on the area 16, the control unit 64 generates a signal to notify that the container 40 has been placed on the area 16, and transmits the signal from the transmitter 68 to the control unit 14 of the transport system 2. do. Furthermore, when the container 40 is stored in the storage area 38 , the control unit 64 generates a signal to notify that the container 40 has been stored in the storage area 38 , and sends the signal from the transmitter 68 to the control unit of the transport system 2 . Send to 14. However, these signals may also be sent to the processing device 4.

Note that the present invention is not limited to the description of the embodiments described above, and can be implemented with various modifications. For example, in the embodiment described above, a structure is adopted in which the cover 46 is provided with an actuated recess 46e and a force is applied to the actuated recess 46e from the acting protrusion 16a of the region 16. A convex portion (acted convex portion) to which force is applied can also be provided on the cover 46 side.

In this case, when the opening 40b of the container 40 is closed (the first closing part 46a and the second closing part 46b are positioned in the closing position), the cover 46 is located at least below the lower surface of the container 40. The convex part (the convex part to be affected) needs to protrude.

In addition, the structures, methods, etc. according to the above-described embodiments and modifications can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

2: Transport system 4: Processing device 6: Piping 8: Accommodating device 10: Transport path 10a: Opening 12: Transport vehicle (automated guided vehicle)
14: Control unit 16: Area (placement area)
16a: Working convex portion 20: Frame 22: Axle 24: Wheel (front wheel)
26: Wheel (rear wheel)
28: Drive unit 30: Motor 30a: Rotating shaft (output shaft)
32: Pulley 34: Battery (secondary battery)
36: Terminal 38: Storage area 40: Container (cassette)
40a: Accommodation section (accommodation space)
40b: Opening 40c: Top wall 40d: Bottom wall 40e: Guide groove 42: First guide rail 42a: Side wall 42b: Projection 42c: Holding surface 44: Second guide rail 44a: Holding surface 46: Cover 46a: First closure Part 46b: Second closing part 46c: Side plate part 46d: Connecting pin 46e: Actuated recess 48: Lifting unit (lifting mechanism)
50: Hanging member 52: Drive mechanism 54: Contact member (contact pin)
56: First sensor 58: Second sensor 60: Third sensor 62: Support stand 64: Control section (control unit)
66: Receiver 68: Transmitter 72: Motor 72a: Rotating shaft (output shaft)
74a: First rotating shaft (first shaft)
74b: Second rotating shaft (second shaft)
76: Pulley 78: Connecting member 80a: Pulley 80b: Pulley 82: Connecting member 84a: Reel 84b: Reel 86a: Roller 86b: Roller 11: Workpiece 13: Tape 15: Frame 17: Workpiece unit (frame unit)
17a: Workpiece unit (frame unit)
17b: Workpiece unit (frame unit)

Claims (3)

A transport vehicle that transports a workpiece by traveling on a transport path installed above a processing device,
A frame to which running wheels are attached,
a container that has an opening on a side surface that allows the passage of the workpiece and houses the workpiece;
a cover provided on the container and having a closing part that can be moved between a closed position where the opening is closed and an open position where the opening is opened;
a lifting unit that is provided on the frame and lifts and lowers the container;
a control unit that controls the drive of the wheels and the operation of the lifting unit;
The cover is configured such that when the container is lowered by the lifting unit and the container approaches a predetermined distance to a predetermined area on which the container is placed, a force that moves the closing portion toward the open position is applied to the predetermined area. A conveyance vehicle characterized in that the force is applied from the predetermined region, and the closed portion is positioned at the closed position by the weight of the cover when the force is not applied from the predetermined region. 2. The conveyance vehicle according to claim 1, wherein the cover further includes an actuated recess on which the force is applied from an upwardly protruding acting protrusion included in the predetermined region. 2. The conveyance vehicle according to claim 1, wherein the cover further includes an actuated convex portion that protrudes below the lower surface of the container and on which the force is applied from the predetermined region.

Images