JP7420752B2 - パルスプラズマ堆積エッチングのステップカバレッジ改善 - Google Patents
パルスプラズマ堆積エッチングのステップカバレッジ改善 Download PDFInfo
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- JP7420752B2 JP7420752B2 JP2020570099A JP2020570099A JP7420752B2 JP 7420752 B2 JP7420752 B2 JP 7420752B2 JP 2020570099 A JP2020570099 A JP 2020570099A JP 2020570099 A JP2020570099 A JP 2020570099A JP 7420752 B2 JP7420752 B2 JP 7420752B2
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- plasma
- dielectric layer
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- nitrogen
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- 238000005530 etching Methods 0.000 title claims description 18
- 230000008021 deposition Effects 0.000 title description 15
- 238000000034 method Methods 0.000 claims description 202
- 239000007789 gas Substances 0.000 claims description 77
- 239000002243 precursor Substances 0.000 claims description 52
- 239000000758 substrate Substances 0.000 claims description 51
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 34
- 238000012545 processing Methods 0.000 claims description 33
- 239000010703 silicon Substances 0.000 claims description 33
- 229910052710 silicon Inorganic materials 0.000 claims description 33
- 239000012159 carrier gas Substances 0.000 claims description 31
- 239000000203 mixture Substances 0.000 claims description 28
- 229910052731 fluorine Inorganic materials 0.000 claims description 26
- 239000011737 fluorine Substances 0.000 claims description 26
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 24
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 24
- 229910052734 helium Inorganic materials 0.000 claims description 24
- 239000001307 helium Substances 0.000 claims description 24
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 238000002161 passivation Methods 0.000 claims description 16
- 238000010926 purge Methods 0.000 claims description 15
- 238000001020 plasma etching Methods 0.000 claims description 13
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 12
- 229910052786 argon Inorganic materials 0.000 claims description 12
- 238000005137 deposition process Methods 0.000 claims description 12
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 11
- 238000009832 plasma treatment Methods 0.000 claims description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- VOSJXMPCFODQAR-UHFFFAOYSA-N ac1l3fa4 Chemical compound [SiH3]N([SiH3])[SiH3] VOSJXMPCFODQAR-UHFFFAOYSA-N 0.000 claims description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 5
- 239000001272 nitrous oxide Substances 0.000 claims description 5
- 229910000077 silane Inorganic materials 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 238000000280 densification Methods 0.000 claims 2
- 238000011065 in-situ storage Methods 0.000 description 17
- 238000000151 deposition Methods 0.000 description 15
- 238000009826 distribution Methods 0.000 description 13
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 7
- -1 siloxane compounds Chemical class 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 5
- 150000004756 silanes Chemical class 0.000 description 5
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 150000003254 radicals Chemical class 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- GAURFLBIDLSLQU-UHFFFAOYSA-N diethoxy(methyl)silicon Chemical compound CCO[Si](C)OCC GAURFLBIDLSLQU-UHFFFAOYSA-N 0.000 description 2
- 238000011534 incubation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VYIRVGYSUZPNLF-UHFFFAOYSA-N n-(tert-butylamino)silyl-2-methylpropan-2-amine Chemical compound CC(C)(C)N[SiH2]NC(C)(C)C VYIRVGYSUZPNLF-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical group 0.000 description 2
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 2
- 150000003961 organosilicon compounds Chemical class 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XBRVPWBNRAPVCC-UHFFFAOYSA-N 4,6,11-trioxa-1-aza-5$l^{3}-silabicyclo[3.3.3]undecane Chemical compound C1CO[Si]2OCCN1CCO2 XBRVPWBNRAPVCC-UHFFFAOYSA-N 0.000 description 1
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- DZLQWMNVOBAZGC-UHFFFAOYSA-N 5-methyl-4,6,11-trioxa-1-aza-5-silabicyclo[3.3.3]undecane Chemical compound O1CCN2CCO[Si]1(C)OCC2 DZLQWMNVOBAZGC-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 230000007175 bidirectional communication Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- VJIYRPVGAZXYBD-UHFFFAOYSA-N dibromosilane Chemical compound Br[SiH2]Br VJIYRPVGAZXYBD-UHFFFAOYSA-N 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 150000002367 halogens Chemical group 0.000 description 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- OWKFQWAGPHVFRF-UHFFFAOYSA-N n-(diethylaminosilyl)-n-ethylethanamine Chemical compound CCN(CC)[SiH2]N(CC)CC OWKFQWAGPHVFRF-UHFFFAOYSA-N 0.000 description 1
- YLZCZVGQEADVNK-UHFFFAOYSA-N n-[chloro-bis(dimethylamino)silyl]-n-methylmethanamine Chemical compound CN(C)[Si](Cl)(N(C)C)N(C)C YLZCZVGQEADVNK-UHFFFAOYSA-N 0.000 description 1
- SSCVMVQLICADPI-UHFFFAOYSA-N n-methyl-n-[tris(dimethylamino)silyl]methanamine Chemical compound CN(C)[Si](N(C)C)(N(C)C)N(C)C SSCVMVQLICADPI-UHFFFAOYSA-N 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- AIFMYMZGQVTROK-UHFFFAOYSA-N silicon tetrabromide Chemical compound Br[Si](Br)(Br)Br AIFMYMZGQVTROK-UHFFFAOYSA-N 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- QHAHOIWVGZZELU-UHFFFAOYSA-N trichloro(trichlorosilyloxy)silane Chemical compound Cl[Si](Cl)(Cl)O[Si](Cl)(Cl)Cl QHAHOIWVGZZELU-UHFFFAOYSA-N 0.000 description 1
- CLXMTJZPFVPWAX-UHFFFAOYSA-N trichloro-[dichloro(trichlorosilyloxy)silyl]oxysilane Chemical compound Cl[Si](Cl)(Cl)O[Si](Cl)(Cl)O[Si](Cl)(Cl)Cl CLXMTJZPFVPWAX-UHFFFAOYSA-N 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45536—Use of plasma, radiation or electromagnetic fields
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- H01J37/32—Gas-filled discharge tubes
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Description
Claims (18)
- 基板を処理するための方法であって、
第1のパルスRF電力によって形成されたプラズマが、同時にプロセスチャンバ内に存在しながら、第1の前駆体と第2の前駆体とのガス混合物に前記基板を曝露することにより、前記基板の1つ以上のトレンチの露出面上に、窒化ケイ素を含む誘電体層を形成することと、
前記プロセスチャンバ内で窒素とヘリウムとのガス混合物を使用したプラズマ緻密化処理に前記誘電体層を曝露して、処理された誘電体層を形成することと、
前記プロセスチャンバ内で前記処理された誘電体層上にパッシベーション層を形成することと、
フッ素含有前駆体とキャリアガスとのガス混合物から形成されたプラズマであって、5kHzから30kHzの周波数を有する第2のパルスRF電力によって前記プロセスチャンバ内で形成されたプラズマに、前記処理された誘電体層および前記パッシベーション層を曝露することによって、プラズマエッチングプロセスを実行することであって、前記1つ以上のトレンチの底面よりも速い速度で前記1つ以上のトレンチの上部をエッチングするプラズマエッチングプロセスを実行することと、
を含む方法。 - 前記パッシベーション層を形成することは、前記処理された誘電体層をケイ素含有前駆体に曝露することを、さらに含む、請求項1に記載の方法。
- 前記ケイ素含有前駆体が、シランを含む、請求項2に記載の方法。
- 前記処理された誘電体層が、ケイ素含有前駆体に曝露されている間、窒素含有ガスに曝露されている、請求項2に記載の方法。
- 前記プラズマ緻密化処理の前および/または後に前記プロセスチャンバをパージすることを、さらに含む、請求項1に記載の方法。
- 前記トレンチが、3:1から10:1のアスペクト比を有する、請求項1に記載の方法。
- 基板を処理するための方法であって、
第1のプラズマがプロセスチャンバ内で第1のパルスRF電力によって形成されるプラズマ堆積プロセスによって、前記基板の1つ以上のトレンチの露出面上に、窒化ケイ素を含む誘電体層を形成することと、
窒素とヘリウムとのガス混合物を使用したプラズマ処理によって前記誘電体層を緻密化して、処理された誘電体層を形成することと、
前記処理された誘電体層上で且つ前記1つ以上のトレンチ内にパッシベーション層を形成することと、
第2のプラズマが、フッ素含有ガスとキャリアガスとのガス混合物から形成され、前記第2のプラズマが、第2のパルスRF電力によって前記プロセスチャンバ内で形成される、プラズマエッチングプロセスによって、前記パッシベーション層および前記処理された誘電体層の一部をエッチングすることであって、前記1つ以上のトレンチの上部を、前記1つ以上のトレンチの底面よりも速い速度でエッチングすることと、
を含む方法。 - 前記第1および第2のパルスRF電力が、5%から30%までの範囲のデューティサイクルおよび10kHzから20kHzまでの範囲の周波数を有する、請求項7に記載の方法。
- 前記第2のパルスRF電力が、1μsから50μsのパルス幅を有する、請求項7に記載の方法。
- 前記プラズマエッチングプロセスの前記フッ素含有ガスが、NF3、F2、C2F6、CF4、C3F8、またはSF6を含む、請求項7に記載の方法。
- 前記フッ素含有ガスと前記キャリアガスの比が、1(フッ素含有ガス):6(キャリアガス)から1(フッ素含有ガス):20(キャリアガス)までの範囲にある、請求項7に記載の方法。
- 基板を処理するための方法であって、
第1のプラズマがプロセスチャンバ内で第1のパルスRF電力によって形成されるプラズマ堆積プロセスによって、前記基板のパターニングされたフィーチャ上に、窒化ケイ素を含む誘電体層を形成することと、
前記プロセスチャンバ内で窒素とヘリウムのガス混合物を使用するプラズマ処理によって前記誘電体層を緻密化して、処理された誘電体層を形成することと、
前記処理された誘電体層上に第1のパッシベーション層を形成することと、
前記パターニングされたフィーチャの底部側壁よりも速い速度で前記パターニングされたフィーチャの上面をエッチングするために5kHzから30kHzの周波数で第2のプラズマが第2のパルスRF電力によって前記プロセスチャンバ内で形成されるプラズマエッチングプロセスによって、前記第1のパッシベーション層および前記処理された誘電体層の一部をエッチングして、エッチングされた誘電体層を形成することと、
前記エッチングされた誘電体層上に第2のパッシベーション層を形成することと、
を含む方法。 - 前記プラズマ処理における窒素とヘリウムの比が、1(窒素):3(ヘリウム)から1(窒素):10(ヘリウム)までの範囲にある、請求項12に記載の方法。
- 前記第1および第2のパッシベーション層が、ケイ素層を含む、請求項12に記載の方法。
- 前記プラズマ堆積プロセスは、第1の前駆体および第2の前駆体を前記プロセスチャンバに流入させることを含む、請求項12に記載の方法。
- 前記第1の前駆体は、アンモニアまたは窒素を含む窒素含有前駆体であり、前記第2の前駆体は、シランおよびトリシリルアミン(TSA)を含むケイ素含有前駆体である、請求項15に記載の方法。
- 前記第2のプラズマは、フッ素含有ガスおよびキャリアガスのガス混合物から形成される、請求項12に記載の方法。
- 前記フッ素含有ガスは、NF 3 、F 2 、C 2 F 6 、CF 4 、C 3 F 8 、またはSF 6 を含み、前記キャリアガスは、アルゴン、ヘリウム、窒素、酸素、または亜酸化窒素を含む、請求項17に記載の方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514212A (ja) | 2005-10-31 | 2009-04-02 | マイクロン テクノロジー, インク. | 溝形チャネルの負性微分抵抗をベースとするメモリセル |
US20100099271A1 (en) | 2008-10-17 | 2010-04-22 | Novellus Systems, Inc. | Method for improving process control and film conformality of pecvd film |
JP2013522913A (ja) | 2010-03-15 | 2013-06-13 | アプライド マテリアルズ インコーポレイテッド | 高アスペクト比の特徴をカバーするための窒化ケイ素パッシベーション層 |
JP2013542581A (ja) | 2010-08-02 | 2013-11-21 | ユ−ジーン テクノロジー カンパニー.リミテッド | サイクリック薄膜の蒸着方法 |
JP2016119344A (ja) | 2014-12-19 | 2016-06-30 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
JP2017017274A (ja) | 2015-07-06 | 2017-01-19 | 株式会社日立国際電気 | 半導体装置の製造方法、プログラム、基板処理システム及び基板処理装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050100682A1 (en) * | 2003-11-06 | 2005-05-12 | Tokyo Electron Limited | Method for depositing materials on a substrate |
US8138104B2 (en) * | 2005-05-26 | 2012-03-20 | Applied Materials, Inc. | Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure |
US7780865B2 (en) * | 2006-03-31 | 2010-08-24 | Applied Materials, Inc. | Method to improve the step coverage and pattern loading for dielectric films |
CN101416293B (zh) * | 2006-03-31 | 2011-04-20 | 应用材料股份有限公司 | 用于介电膜层的阶梯覆盖与图案加载 |
US7517804B2 (en) * | 2006-08-31 | 2009-04-14 | Micron Technologies, Inc. | Selective etch chemistries for forming high aspect ratio features and associated structures |
KR101522251B1 (ko) * | 2008-09-22 | 2015-05-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 고 종횡비 피쳐들을 식각하기에 적합한 식각 반응기 |
US9114666B2 (en) | 2012-02-22 | 2015-08-25 | Lam Research Corporation | Methods and apparatus for controlling plasma in a plasma processing system |
CN105336680B (zh) * | 2014-08-13 | 2020-02-11 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制作方法和电子装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514212A (ja) | 2005-10-31 | 2009-04-02 | マイクロン テクノロジー, インク. | 溝形チャネルの負性微分抵抗をベースとするメモリセル |
US20100099271A1 (en) | 2008-10-17 | 2010-04-22 | Novellus Systems, Inc. | Method for improving process control and film conformality of pecvd film |
JP2013522913A (ja) | 2010-03-15 | 2013-06-13 | アプライド マテリアルズ インコーポレイテッド | 高アスペクト比の特徴をカバーするための窒化ケイ素パッシベーション層 |
JP2013542581A (ja) | 2010-08-02 | 2013-11-21 | ユ−ジーン テクノロジー カンパニー.リミテッド | サイクリック薄膜の蒸着方法 |
JP2016119344A (ja) | 2014-12-19 | 2016-06-30 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
JP2017017274A (ja) | 2015-07-06 | 2017-01-19 | 株式会社日立国際電気 | 半導体装置の製造方法、プログラム、基板処理システム及び基板処理装置 |
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