JP7416958B2 - 圧電結晶秤量結晶成長装置および動作方法 - Google Patents

圧電結晶秤量結晶成長装置および動作方法 Download PDF

Info

Publication number
JP7416958B2
JP7416958B2 JP2022539735A JP2022539735A JP7416958B2 JP 7416958 B2 JP7416958 B2 JP 7416958B2 JP 2022539735 A JP2022539735 A JP 2022539735A JP 2022539735 A JP2022539735 A JP 2022539735A JP 7416958 B2 JP7416958 B2 JP 7416958B2
Authority
JP
Japan
Prior art keywords
crystal
crystal growth
weighing
balance lever
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022539735A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023514801A (ja
Inventor
ウェイミン ヂャン
ウェイ ヂョウ
チィウフォン シュイ
ユィフォン ホン
チャオ ユェン
ハオ シェン
ワンドゥン ワン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDG Holding Co Ltd
Original Assignee
TDG Holding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDG Holding Co Ltd filed Critical TDG Holding Co Ltd
Publication of JP2023514801A publication Critical patent/JP2023514801A/ja
Application granted granted Critical
Publication of JP7416958B2 publication Critical patent/JP7416958B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2022539735A 2021-01-28 2021-02-02 圧電結晶秤量結晶成長装置および動作方法 Active JP7416958B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN202110114721.5A CN112430844B (zh) 2021-01-28 2021-01-28 一种压电晶体称重长晶装置及工作方法
CN202110114721.5 2021-01-28
PCT/CN2021/074827 WO2022160361A1 (fr) 2021-01-28 2021-02-02 Dispositif de croissance de cristal piézoélectrique en fonction de la pesée et procédé de travail

Publications (2)

Publication Number Publication Date
JP2023514801A JP2023514801A (ja) 2023-04-11
JP7416958B2 true JP7416958B2 (ja) 2024-01-17

Family

ID=74697359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022539735A Active JP7416958B2 (ja) 2021-01-28 2021-02-02 圧電結晶秤量結晶成長装置および動作方法

Country Status (3)

Country Link
JP (1) JP7416958B2 (fr)
CN (1) CN112430844B (fr)
WO (1) WO2022160361A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113897672A (zh) * 2021-10-12 2022-01-07 江西匀晶光电技术有限公司 一种适用提拉法的单晶生长直径控制装置
CN114150373A (zh) * 2021-10-30 2022-03-08 江西师范大学 一种基于力矩平衡的铌酸锂晶棒定量生长控制装置
CN114150370B (zh) * 2021-10-30 2022-10-11 江西师范大学 一种基于力矩平衡的晶棒生长控制装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000153441A (ja) 1998-11-17 2000-06-06 Tdk Corp 天秤型トリミング装置
US20150114283A1 (en) 2013-10-29 2015-04-30 Siemens Medical Solutions Usa, Inc. Cantilever Device For Extending Capacity Of A Scale Used In A Crystal Growth Apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3109564B2 (ja) * 1995-03-27 2000-11-20 大倉電気株式会社 成長結晶体の重量測定装置
CN200992593Y (zh) * 2006-12-16 2007-12-19 杭州慧翔电液技术开发有限公司 传感器外置式晶体提升装置
CN201506849U (zh) * 2009-04-15 2010-06-16 北京嘉东科技有限公司 一种自称重系统提拉生长装置
CN103454156B (zh) * 2012-05-28 2018-01-26 富泰华工业(深圳)有限公司 拉拔力测试机构及拉拔力测试方法
CN203411656U (zh) * 2013-07-30 2014-01-29 元亮科技有限公司 晶体炉用下称重装置
CN204385327U (zh) * 2015-01-03 2015-06-10 杭州晶一智能科技有限公司 泡生法蓝宝石自动长晶设备的精确称重系统
CN105821477B (zh) * 2015-01-10 2017-12-08 杭州晶一智能科技有限公司 泡生法蓝宝石长晶设备的高精度全量程称重系统
CN105239153B (zh) * 2015-09-10 2020-01-07 上海超硅半导体有限公司 含辅助加料结构的单晶炉及其应用
CN105177704B (zh) * 2015-10-23 2017-10-27 苏州晶特晶体科技有限公司 一种稳定性高的长晶炉用晶体称重装置
CN205483242U (zh) * 2016-03-06 2016-08-17 辽宁旭亚衡器有限公司 一种电子计价秤的校准装置
CN208818329U (zh) * 2018-10-07 2019-05-03 佛山市顺德区顺鹰衡器有限公司 一种带有水平调节机构的机械称
CN109338468B (zh) * 2018-11-21 2021-04-06 南京晶升能源设备有限公司 一种晶体称重装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000153441A (ja) 1998-11-17 2000-06-06 Tdk Corp 天秤型トリミング装置
US20150114283A1 (en) 2013-10-29 2015-04-30 Siemens Medical Solutions Usa, Inc. Cantilever Device For Extending Capacity Of A Scale Used In A Crystal Growth Apparatus

Also Published As

Publication number Publication date
WO2022160361A1 (fr) 2022-08-04
JP2023514801A (ja) 2023-04-11
CN112430844B (zh) 2021-04-30
CN112430844A (zh) 2021-03-02

Similar Documents

Publication Publication Date Title
JP7416958B2 (ja) 圧電結晶秤量結晶成長装置および動作方法
WO2010048790A1 (fr) Procédé de contrôle de la méthode de czochralski
CN101591802A (zh) 提拉法晶体生长的等径控制方法
CN203798412U (zh) 一种多晶硅铸锭炉固液界面测量装置
CN104267752A (zh) 高温溶液液位探测与控制方法
CN101824649A (zh) 自动化光电晶体炉的生长前阶段控制方法
KR950004788B1 (ko) 관상결정체 성장장치의 제어시스템
CN106048713A (zh) 一种碳化硅溶液法中实时监测并调整固液界面高度的方法
CN109440186A (zh) 一种单晶炉提拉头动态动平衡机构
TWI438313B (zh) 用於監控晶體生長狀態的方法及探測系統與可以監控晶體生長狀態的設備
CN106544723B (zh) 晶体生长界面扰动的原位探测方法、控制方法及控制系统
CN202255536U (zh) 晶硅铸锭炉用固液界面测量装置
CN212335018U (zh) 一种vad沉积的光纤预制棒疏松体密度在线检测装置
CN206467327U (zh) 多晶硅铸锭炉固液界面测量机构
CN105780111B (zh) 多晶硅铸锭炉长晶速度自动测量装置
CN106757315A (zh) 一种单晶炉的称重装置
CN105648521B (zh) 一种晶体生长方法和设备
CN202793517U (zh) 一种自馈式探测熔融晶体固液界面位置的装置
EP0653382B1 (fr) Procédé et dispositif pour la fabrication d'une préforme pour fibres optiques
CN111982958A (zh) 籽晶熔化厚度检测装置
CN206607337U (zh) 一种单晶炉的称重装置
CN219279734U (zh) 气炼石英砣控制系统
CN214782259U (zh) 一种用于晶体生长的电子秤恒温装置
CN205653538U (zh) 多晶硅铸锭炉长晶速度自动测量装置
CN207976222U (zh) 红外测温流口流量自动控制装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220627

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230725

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230914

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231219

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240104

R150 Certificate of patent or registration of utility model

Ref document number: 7416958

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150