JP7416958B2 - 圧電結晶秤量結晶成長装置および動作方法 - Google Patents
圧電結晶秤量結晶成長装置および動作方法 Download PDFInfo
- Publication number
- JP7416958B2 JP7416958B2 JP2022539735A JP2022539735A JP7416958B2 JP 7416958 B2 JP7416958 B2 JP 7416958B2 JP 2022539735 A JP2022539735 A JP 2022539735A JP 2022539735 A JP2022539735 A JP 2022539735A JP 7416958 B2 JP7416958 B2 JP 7416958B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- crystal growth
- weighing
- balance lever
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 title claims description 225
- 238000005303 weighing Methods 0.000 title claims description 69
- 238000011017 operating method Methods 0.000 title description 5
- 238000000034 method Methods 0.000 claims description 33
- 230000008569 process Effects 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000010899 nucleation Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 238000012795 verification Methods 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 230000008054 signal transmission Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000002109 crystal growth method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110114721.5A CN112430844B (zh) | 2021-01-28 | 2021-01-28 | 一种压电晶体称重长晶装置及工作方法 |
CN202110114721.5 | 2021-01-28 | ||
PCT/CN2021/074827 WO2022160361A1 (fr) | 2021-01-28 | 2021-02-02 | Dispositif de croissance de cristal piézoélectrique en fonction de la pesée et procédé de travail |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023514801A JP2023514801A (ja) | 2023-04-11 |
JP7416958B2 true JP7416958B2 (ja) | 2024-01-17 |
Family
ID=74697359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022539735A Active JP7416958B2 (ja) | 2021-01-28 | 2021-02-02 | 圧電結晶秤量結晶成長装置および動作方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7416958B2 (fr) |
CN (1) | CN112430844B (fr) |
WO (1) | WO2022160361A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113897672A (zh) * | 2021-10-12 | 2022-01-07 | 江西匀晶光电技术有限公司 | 一种适用提拉法的单晶生长直径控制装置 |
CN114150373A (zh) * | 2021-10-30 | 2022-03-08 | 江西师范大学 | 一种基于力矩平衡的铌酸锂晶棒定量生长控制装置 |
CN114150370B (zh) * | 2021-10-30 | 2022-10-11 | 江西师范大学 | 一种基于力矩平衡的晶棒生长控制装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000153441A (ja) | 1998-11-17 | 2000-06-06 | Tdk Corp | 天秤型トリミング装置 |
US20150114283A1 (en) | 2013-10-29 | 2015-04-30 | Siemens Medical Solutions Usa, Inc. | Cantilever Device For Extending Capacity Of A Scale Used In A Crystal Growth Apparatus |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3109564B2 (ja) * | 1995-03-27 | 2000-11-20 | 大倉電気株式会社 | 成長結晶体の重量測定装置 |
CN200992593Y (zh) * | 2006-12-16 | 2007-12-19 | 杭州慧翔电液技术开发有限公司 | 传感器外置式晶体提升装置 |
CN201506849U (zh) * | 2009-04-15 | 2010-06-16 | 北京嘉东科技有限公司 | 一种自称重系统提拉生长装置 |
CN103454156B (zh) * | 2012-05-28 | 2018-01-26 | 富泰华工业(深圳)有限公司 | 拉拔力测试机构及拉拔力测试方法 |
CN203411656U (zh) * | 2013-07-30 | 2014-01-29 | 元亮科技有限公司 | 晶体炉用下称重装置 |
CN204385327U (zh) * | 2015-01-03 | 2015-06-10 | 杭州晶一智能科技有限公司 | 泡生法蓝宝石自动长晶设备的精确称重系统 |
CN105821477B (zh) * | 2015-01-10 | 2017-12-08 | 杭州晶一智能科技有限公司 | 泡生法蓝宝石长晶设备的高精度全量程称重系统 |
CN105239153B (zh) * | 2015-09-10 | 2020-01-07 | 上海超硅半导体有限公司 | 含辅助加料结构的单晶炉及其应用 |
CN105177704B (zh) * | 2015-10-23 | 2017-10-27 | 苏州晶特晶体科技有限公司 | 一种稳定性高的长晶炉用晶体称重装置 |
CN205483242U (zh) * | 2016-03-06 | 2016-08-17 | 辽宁旭亚衡器有限公司 | 一种电子计价秤的校准装置 |
CN208818329U (zh) * | 2018-10-07 | 2019-05-03 | 佛山市顺德区顺鹰衡器有限公司 | 一种带有水平调节机构的机械称 |
CN109338468B (zh) * | 2018-11-21 | 2021-04-06 | 南京晶升能源设备有限公司 | 一种晶体称重装置 |
-
2021
- 2021-01-28 CN CN202110114721.5A patent/CN112430844B/zh active Active
- 2021-02-02 JP JP2022539735A patent/JP7416958B2/ja active Active
- 2021-02-02 WO PCT/CN2021/074827 patent/WO2022160361A1/fr active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000153441A (ja) | 1998-11-17 | 2000-06-06 | Tdk Corp | 天秤型トリミング装置 |
US20150114283A1 (en) | 2013-10-29 | 2015-04-30 | Siemens Medical Solutions Usa, Inc. | Cantilever Device For Extending Capacity Of A Scale Used In A Crystal Growth Apparatus |
Also Published As
Publication number | Publication date |
---|---|
WO2022160361A1 (fr) | 2022-08-04 |
JP2023514801A (ja) | 2023-04-11 |
CN112430844B (zh) | 2021-04-30 |
CN112430844A (zh) | 2021-03-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7416958B2 (ja) | 圧電結晶秤量結晶成長装置および動作方法 | |
WO2010048790A1 (fr) | Procédé de contrôle de la méthode de czochralski | |
CN101591802A (zh) | 提拉法晶体生长的等径控制方法 | |
CN203798412U (zh) | 一种多晶硅铸锭炉固液界面测量装置 | |
CN104267752A (zh) | 高温溶液液位探测与控制方法 | |
CN101824649A (zh) | 自动化光电晶体炉的生长前阶段控制方法 | |
KR950004788B1 (ko) | 관상결정체 성장장치의 제어시스템 | |
CN106048713A (zh) | 一种碳化硅溶液法中实时监测并调整固液界面高度的方法 | |
CN109440186A (zh) | 一种单晶炉提拉头动态动平衡机构 | |
TWI438313B (zh) | 用於監控晶體生長狀態的方法及探測系統與可以監控晶體生長狀態的設備 | |
CN106544723B (zh) | 晶体生长界面扰动的原位探测方法、控制方法及控制系统 | |
CN202255536U (zh) | 晶硅铸锭炉用固液界面测量装置 | |
CN212335018U (zh) | 一种vad沉积的光纤预制棒疏松体密度在线检测装置 | |
CN206467327U (zh) | 多晶硅铸锭炉固液界面测量机构 | |
CN105780111B (zh) | 多晶硅铸锭炉长晶速度自动测量装置 | |
CN106757315A (zh) | 一种单晶炉的称重装置 | |
CN105648521B (zh) | 一种晶体生长方法和设备 | |
CN202793517U (zh) | 一种自馈式探测熔融晶体固液界面位置的装置 | |
EP0653382B1 (fr) | Procédé et dispositif pour la fabrication d'une préforme pour fibres optiques | |
CN111982958A (zh) | 籽晶熔化厚度检测装置 | |
CN206607337U (zh) | 一种单晶炉的称重装置 | |
CN219279734U (zh) | 气炼石英砣控制系统 | |
CN214782259U (zh) | 一种用于晶体生长的电子秤恒温装置 | |
CN205653538U (zh) | 多晶硅铸锭炉长晶速度自动测量装置 | |
CN207976222U (zh) | 红外测温流口流量自动控制装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220627 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230725 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230914 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20231219 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240104 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7416958 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |