JP7407518B2

JP7407518B2 - ネガ型感光性樹脂組成物及びその製造方法

ネガ型感光性樹脂組成物及びその製造方法 Download PDF

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Publication number: JP7407518B2
Authority: JP; Japan
Prior art keywords: photosensitive resin; resin composition; polyimide precursor; negative photosensitive; general formula
Prior art date: 2018-04-27
Legal status : Active

Application number

JP2019079223A

Other languages

English (en)

Japanese (ja)

Other versions

JP2020091464A (ja

JP2020091464A5 (fr

Inventor

秀二郎塩崎

知士小倉

竜也平田

Current Assignee

Asahi Kasei Corp

Original Assignee

Asahi Kasei Corp

Priority date

2018-04-27

Filing date

2019-04-18

Publication date

2024-01-04

2019-04-18 Application filed by Asahi Kasei Corp filed Critical Asahi Kasei Corp

2020-06-11 Publication of JP2020091464A publication Critical patent/JP2020091464A/ja

2022-03-04 Publication of JP2020091464A5 publication Critical patent/JP2020091464A5/ja

2023-09-11 Priority to JP2023146953A priority Critical patent/JP2023171788A/ja

2023-12-06 Priority to JP2023206198A priority patent/JP2024019341A/ja

2024-01-04 Application granted granted Critical

2024-01-04 Publication of JP7407518B2 publication Critical patent/JP7407518B2/ja

Status Active legal-status Critical Current

2039-04-18 Anticipated expiration legal-status Critical

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239000011342 resin composition Substances 0.000 title claims description 189
238000004519 manufacturing process Methods 0.000 title claims description 44
229920001721 polyimide Polymers 0.000 claims description 204
239000004642 Polyimide Substances 0.000 claims description 202
239000002243 precursor Substances 0.000 claims description 169
125000000962 organic group Chemical group 0.000 claims description 72
229920005989 resin Polymers 0.000 claims description 51
239000011347 resin Substances 0.000 claims description 51
239000003999 initiator Substances 0.000 claims description 43
239000003795 chemical substances by application Substances 0.000 claims description 38
125000004432 carbon atom Chemical group C* 0.000 claims description 34
229920001187 thermosetting polymer Polymers 0.000 claims description 20
125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 19
239000000758 substrate Substances 0.000 claims description 18
229920000647 polyepoxide Polymers 0.000 claims description 11
239000003822 epoxy resin Substances 0.000 claims description 10
239000000463 material Substances 0.000 claims description 10
CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical compound C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 claims description 9
229920001577 copolymer Polymers 0.000 claims description 8
239000001257 hydrogen Substances 0.000 claims description 8
229910052739 hydrogen Inorganic materials 0.000 claims description 8
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
125000004429 atom Chemical group 0.000 claims description 7
-1 tertiary amine compound Chemical class 0.000 description 113
239000010949 copper Substances 0.000 description 60
239000010410 layer Substances 0.000 description 59
239000000126 substance Substances 0.000 description 55
239000004065 semiconductor Substances 0.000 description 41
239000010408 film Substances 0.000 description 40
150000001875 compounds Chemical class 0.000 description 39
YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 36
150000007513 acids Chemical class 0.000 description 36
238000000034 method Methods 0.000 description 34
229920000642 polymer Polymers 0.000 description 32
239000002904 solvent Substances 0.000 description 24
238000002156 mixing Methods 0.000 description 23
ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 23
125000002887 hydroxy group Chemical group [H]O* 0.000 description 21
238000012360 testing method Methods 0.000 description 21
XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 20
ISAKRJDGNUQOIC-UHFFFAOYSA-N Uracil Chemical class O=C1C=CNC(=O)N1 ISAKRJDGNUQOIC-UHFFFAOYSA-N 0.000 description 18
125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 18
238000003860 storage Methods 0.000 description 18
239000000203 mixture Substances 0.000 description 17
239000000243 solution Substances 0.000 description 17
239000011800 void material Substances 0.000 description 17
235000019441 ethanol Nutrition 0.000 description 16
206010034972 Photosensitivity reaction Diseases 0.000 description 15
239000007983 Tris buffer Substances 0.000 description 15
ZRALSGWEFCBTJO-UHFFFAOYSA-N anhydrous guanidine Natural products NC(N)=N ZRALSGWEFCBTJO-UHFFFAOYSA-N 0.000 description 15
230000036211 photosensitivity Effects 0.000 description 15
239000000047 product Substances 0.000 description 15
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 14
SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 14
CHJJGSNFBQVOTG-UHFFFAOYSA-N N-methyl-guanidine Natural products CNC(N)=N CHJJGSNFBQVOTG-UHFFFAOYSA-N 0.000 description 14
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 14
SIKJAQJRHWYJAI-UHFFFAOYSA-N benzopyrrole Natural products C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 14
SWSQBOPZIKWTGO-UHFFFAOYSA-N dimethylaminoamidine Natural products CN(C)C(N)=N SWSQBOPZIKWTGO-UHFFFAOYSA-N 0.000 description 14
238000011156 evaluation Methods 0.000 description 14
235000013824 polyphenols Nutrition 0.000 description 14
239000010936 titanium Substances 0.000 description 14
239000002253 acid Substances 0.000 description 13
229910052719 titanium Inorganic materials 0.000 description 13
UJOBWOGCFQCDNV-UHFFFAOYSA-N Carbazole Natural products C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 12
150000003609 titanium compounds Chemical class 0.000 description 12
GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 11
235000013877 carbamide Nutrition 0.000 description 11
125000005842 heteroatom Chemical group 0.000 description 11
239000004202 carbamide Substances 0.000 description 10
238000000576 coating method Methods 0.000 description 10
238000001723 curing Methods 0.000 description 10
238000011161 development Methods 0.000 description 10
230000000694 effects Effects 0.000 description 10
PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 10
239000000178 monomer Substances 0.000 description 10
239000003504 photosensitizing agent Substances 0.000 description 10
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
239000011248 coating agent Substances 0.000 description 9
229910052802 copper Inorganic materials 0.000 description 9
238000013007 heat curing Methods 0.000 description 9
RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 9
229910052751 metal Inorganic materials 0.000 description 9
239000002184 metal Substances 0.000 description 9
230000001629 suppression Effects 0.000 description 9
QCXJEYYXVJIFCE-UHFFFAOYSA-N 4-acetamidobenzoic acid Chemical compound CC(=O)NC1=CC=C(C(O)=O)C=C1 QCXJEYYXVJIFCE-UHFFFAOYSA-N 0.000 description 8
239000004793 Polystyrene Substances 0.000 description 8
238000006243 chemical reaction Methods 0.000 description 8
238000010438 heat treatment Methods 0.000 description 8
239000003112 inhibitor Substances 0.000 description 8
FBSFWRHWHYMIOG-UHFFFAOYSA-N methyl 3,4,5-trihydroxybenzoate Chemical compound COC(=O)C1=CC(O)=C(O)C(O)=C1 FBSFWRHWHYMIOG-UHFFFAOYSA-N 0.000 description 8
XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 8
229920002223 polystyrene Polymers 0.000 description 8
238000012719 thermal polymerization Methods 0.000 description 8
230000000052 comparative effect Effects 0.000 description 7
229940091173 hydantoin Drugs 0.000 description 7
239000011229 interlayer Substances 0.000 description 7
239000004973 liquid crystal related substance Substances 0.000 description 7
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 7
150000002923 oximes Chemical class 0.000 description 7
229910000679 solder Inorganic materials 0.000 description 7
IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
QSACCXVHEVWNMX-UHFFFAOYSA-N N-acetylanthranilic acid Chemical compound CC(=O)NC1=CC=CC=C1C(O)=O QSACCXVHEVWNMX-UHFFFAOYSA-N 0.000 description 6
JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 6
239000006087 Silane Coupling Agent Substances 0.000 description 6
KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 6
WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
HNYOPLTXPVRDBG-UHFFFAOYSA-N barbituric acid Chemical compound O=C1CC(=O)NC(=O)N1 HNYOPLTXPVRDBG-UHFFFAOYSA-N 0.000 description 6
OHJMTUPIZMNBFR-UHFFFAOYSA-N biuret Chemical compound NC(=O)NC(N)=O OHJMTUPIZMNBFR-UHFFFAOYSA-N 0.000 description 6
JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 6
150000002148 esters Chemical group 0.000 description 6
LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 6
238000005227 gel permeation chromatography Methods 0.000 description 6
WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 description 6
238000009413 insulation Methods 0.000 description 6
SWHSXWLSBBYLGM-UHFFFAOYSA-N 2-[(2-carboxyphenoxy)methoxy]benzoic acid Chemical compound OC(=O)C1=CC=CC=C1OCOC1=CC=CC=C1C(O)=O SWHSXWLSBBYLGM-UHFFFAOYSA-N 0.000 description 5
229910000881 Cu alloy Inorganic materials 0.000 description 5
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CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 5
125000003118 aryl group Chemical group 0.000 description 5
238000009792 diffusion process Methods 0.000 description 5
125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
150000002430 hydrocarbons Chemical group 0.000 description 5
239000004615 ingredient Substances 0.000 description 5
150000002500 ions Chemical class 0.000 description 5
238000000691 measurement method Methods 0.000 description 5
PMOWTIHVNWZYFI-UHFFFAOYSA-N o-Coumaric acid Natural products OC(=O)C=CC1=CC=CC=C1O PMOWTIHVNWZYFI-UHFFFAOYSA-N 0.000 description 5
NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 5
PMOWTIHVNWZYFI-AATRIKPKSA-N trans-2-coumaric acid Chemical compound OC(=O)\C=C\C1=CC=CC=C1O PMOWTIHVNWZYFI-AATRIKPKSA-N 0.000 description 5
229940035893 uracil Drugs 0.000 description 5
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JFOIBTLTZWOAIC-UHFFFAOYSA-N (4-nitrophenyl) 2,2,2-trifluoroacetate Chemical compound [O-][N+](=O)C1=CC=C(OC(=O)C(F)(F)F)C=C1 JFOIBTLTZWOAIC-UHFFFAOYSA-N 0.000 description 4
KJUGUADJHNHALS-UHFFFAOYSA-N 1H-tetrazole Chemical compound C=1N=NNN=1 KJUGUADJHNHALS-UHFFFAOYSA-N 0.000 description 4
XBNGYFFABRKICK-UHFFFAOYSA-N 2,3,4,5,6-pentafluorophenol Chemical compound OC1=C(F)C(F)=C(F)C(F)=C1F XBNGYFFABRKICK-UHFFFAOYSA-N 0.000 description 4
QXSAKPUBHTZHKW-UHFFFAOYSA-N 4-hydroxybenzamide Chemical compound NC(=O)C1=CC=C(O)C=C1 QXSAKPUBHTZHKW-UHFFFAOYSA-N 0.000 description 4
CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 description 4
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IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
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150000001298 alcohols Chemical class 0.000 description 4
125000001931 aliphatic group Chemical group 0.000 description 4
150000001408 amides Chemical class 0.000 description 4
GGNQRNBDZQJCCN-UHFFFAOYSA-N benzene-1,2,4-triol Chemical compound OC1=CC=C(O)C(O)=C1 GGNQRNBDZQJCCN-UHFFFAOYSA-N 0.000 description 4
230000015572 biosynthetic process Effects 0.000 description 4
IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
230000008859 change Effects 0.000 description 4
125000004386 diacrylate group Chemical group 0.000 description 4
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238000002845 discoloration Methods 0.000 description 4
238000001035 drying Methods 0.000 description 4
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UYTPUPDQBNUYGX-UHFFFAOYSA-N guanine Chemical compound O=C1NC(N)=NC2=C1N=CN2 UYTPUPDQBNUYGX-UHFFFAOYSA-N 0.000 description 4
QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 4
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230000035515 penetration Effects 0.000 description 4
IZUPBVBPLAPZRR-UHFFFAOYSA-N pentachloro-phenol Natural products OC1=C(Cl)C(Cl)=C(Cl)C(Cl)=C1Cl IZUPBVBPLAPZRR-UHFFFAOYSA-N 0.000 description 4
125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
239000002244 precipitate Substances 0.000 description 4
239000011541 reaction mixture Substances 0.000 description 4
239000003566 sealing material Substances 0.000 description 4
238000003756 stirring Methods 0.000 description 4
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 4
FPIRBHDGWMWJEP-UHFFFAOYSA-N 1-hydroxy-7-azabenzotriazole Chemical compound C1=CN=C2N(O)N=NC2=C1 FPIRBHDGWMWJEP-UHFFFAOYSA-N 0.000 description 3
ZCBIFHNDZBSCEP-UHFFFAOYSA-N 1H-indol-5-amine Chemical compound NC1=CC=C2NC=CC2=C1 ZCBIFHNDZBSCEP-UHFFFAOYSA-N 0.000 description 3
VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 3
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NGMMGKYJUWYIIG-UHFFFAOYSA-N 3-hydroxybenzamide Chemical compound NC(=O)C1=CC=CC(O)=C1 NGMMGKYJUWYIIG-UHFFFAOYSA-N 0.000 description 3
YCZUWQOJQGCZKG-UHFFFAOYSA-N 9h-carbazole-3,6-diamine Chemical compound C1=C(N)C=C2C3=CC(N)=CC=C3NC2=C1 YCZUWQOJQGCZKG-UHFFFAOYSA-N 0.000 description 3
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
QOSSAOTZNIDXMA-UHFFFAOYSA-N Dicylcohexylcarbodiimide Chemical compound C1CCCCC1N=C=NC1CCCCC1 QOSSAOTZNIDXMA-UHFFFAOYSA-N 0.000 description 3
XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
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239000000853 adhesive Substances 0.000 description 3
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125000002723 alicyclic group Chemical group 0.000 description 3
150000003851 azoles Chemical class 0.000 description 3
ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
IOVVFSGCNWQFQT-UHFFFAOYSA-N bis(2,3,4,5,6-pentafluorophenyl) carbonate Chemical compound FC1=C(F)C(F)=C(F)C(F)=C1OC(=O)OC1=C(F)C(F)=C(F)C(F)=C1F IOVVFSGCNWQFQT-UHFFFAOYSA-N 0.000 description 3
ACBQROXDOHKANW-UHFFFAOYSA-N bis(4-nitrophenyl) carbonate Chemical compound C1=CC([N+](=O)[O-])=CC=C1OC(=O)OC1=CC=C([N+]([O-])=O)C=C1 ACBQROXDOHKANW-UHFFFAOYSA-N 0.000 description 3
239000013522 chelant Substances 0.000 description 3
229940116333 ethyl lactate Drugs 0.000 description 3
239000007789 gas Substances 0.000 description 3
LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 3
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150000002734 metacrylic acid derivatives Chemical class 0.000 description 3
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229910052757 nitrogen Inorganic materials 0.000 description 3
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WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 3
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150000003212 purines Chemical class 0.000 description 3
UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 3
239000007921 spray Substances 0.000 description 3
238000003786 synthesis reaction Methods 0.000 description 3
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