JP7393753B2 - 濃度測定装置 - Google Patents
濃度測定装置 Download PDFInfo
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- JP7393753B2 JP7393753B2 JP2021126348A JP2021126348A JP7393753B2 JP 7393753 B2 JP7393753 B2 JP 7393753B2 JP 2021126348 A JP2021126348 A JP 2021126348A JP 2021126348 A JP2021126348 A JP 2021126348A JP 7393753 B2 JP7393753 B2 JP 7393753B2
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- light
- photodetector
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- 238000005259 measurement Methods 0.000 claims description 47
- 230000003287 optical effect Effects 0.000 claims description 37
- 210000004027 cell Anatomy 0.000 claims description 31
- 238000001514 detection method Methods 0.000 claims description 12
- 210000005056 cell body Anatomy 0.000 claims description 11
- 230000031700 light absorption Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 description 9
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
- 238000002835 absorbance Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 238000011481 absorbance measurement Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002798 spectrophotometry method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
11 ガス流路
12 光路
13 測定セル
14 光源
14a、14b 発光素子
15 第1光検出器
16 第2光検出器
17 貫通孔
18 測定セル本体
19 入射側部材
20 第1透光窓
22 第1凹部
22a 側壁
15b レンズ
27 検出側部材
27a 第2凹部
28 第2透光窓
29 集光レンズ
Claims (6)
- ガス流路と前記ガス流路と交差する光路とを有する測定セルと、
前記光路の一端に配設され、前記光路内に光を出射するための光源と、
前記光源の側方であって前記光源の先端より前記光源の光軸に沿った光出射方向の後方に配設され、前記光源から出射した光を参照光として検出する第1光検出器と、
前記光路の他端に配設され、前記光源から出射した光を光吸収測定用として検出する第2光検出器と、を備え、
前記測定セルは、
前記光路の一部を構成する貫通孔と前記ガス流路とを有する測定セル本体と、
前記貫通孔の一方の開口部に第1透光窓を介して前記測定セル本体に接続されて、前記光源及び前記第1光検出器を備える入射側部材と、を備え、
前記入射側部材は、第1凹部を備え、
前記光源は、前記第1凹部の底部に配設され、
前記第1光検出器は、前記第1凹部の側壁内に埋設されている、濃度測定装置。 - 前記第1光検出器は、前記光源の光軸に対して斜めに向くように、前記入射側部材に固定されている、請求項1に記載の濃度測定装置。
- 前記測定セルは、前記貫通孔の他方の開口部に第2透光窓を介して前記測定セル本体に接続されて前記第2光検出器を備える検出側部材を備え、
前記検出側部材は、前記貫通孔とともに前記光路の一部を構成する第2凹部を備え、
前記第2光検出器が前記第2凹部の底部に配設され、
前記検出側部材は、前記第2光検出器と前記第2透光窓との間に介在された集光レンズを更に備え、
前記集光レンズと前記光源との距離が15mm以下である、請求項1又は2に記載の濃度測定装置。 - 前記光源は、波長の異なる複数の発光素子を含む、請求項1~3の何れかに記載の濃度測定装置。
- 前記複数の発光素子は、波長230nm~320nmの前記発光素子と、波長520nm~680nmの前記発光素子と、を含む、請求項4に記載の濃度測定装置。
- 前記複数の発光素子のそれぞれの光軸は一つの前記第2光検出器に向けられており、前記複数の発光素子から発せられた光が前記第2光検出器で受光されるように構成されている、請求項4又は5に記載の濃度測定装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021126348A JP7393753B2 (ja) | 2021-07-31 | 2021-07-31 | 濃度測定装置 |
KR1020237030672A KR20230140581A (ko) | 2021-07-31 | 2022-06-29 | 농도 측정 장치 |
PCT/JP2022/026037 WO2023013314A1 (ja) | 2021-07-31 | 2022-06-29 | 濃度測定装置 |
TW111126979A TWI827148B (zh) | 2021-07-31 | 2022-07-19 | 濃度測定裝置 |
Applications Claiming Priority (1)
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JP2021126348A JP7393753B2 (ja) | 2021-07-31 | 2021-07-31 | 濃度測定装置 |
Publications (3)
Publication Number | Publication Date |
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JP2023021201A JP2023021201A (ja) | 2023-02-10 |
JP2023021201A5 JP2023021201A5 (ja) | 2023-03-30 |
JP7393753B2 true JP7393753B2 (ja) | 2023-12-07 |
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JP2021126348A Active JP7393753B2 (ja) | 2021-07-31 | 2021-07-31 | 濃度測定装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7393753B2 (ja) |
KR (1) | KR20230140581A (ja) |
TW (1) | TWI827148B (ja) |
WO (1) | WO2023013314A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002374039A (ja) | 2001-02-27 | 2002-12-26 | Ricoh Co Ltd | 光送受信システムおよび光通信システム |
JP2007529012A (ja) | 2004-03-12 | 2007-10-18 | エムケイエス インストゥルメンツ, インコーポレイテッド | オゾン濃度センサー |
JP2018169203A (ja) | 2017-03-29 | 2018-11-01 | 株式会社島津製作所 | ガス吸収分光装置及びガス吸収分光法 |
WO2020213385A1 (ja) | 2019-04-19 | 2020-10-22 | 株式会社フジキン | 濃度測定装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101722013B1 (ko) | 2013-05-09 | 2017-03-31 | 가부시키가이샤 후지킨 | 원료 유체 농도 검출기 |
CN106662524A (zh) | 2014-07-29 | 2017-05-10 | 国立大学法人德岛大学 | 在线型浓度计量装置 |
JP2016033484A (ja) * | 2014-07-31 | 2016-03-10 | 横河電機株式会社 | 参照光分岐用光学系 |
KR102027264B1 (ko) | 2015-08-18 | 2019-10-01 | 가부시키가이샤 후지킨 | 농도 측정 장치 |
JP6912766B2 (ja) * | 2016-07-29 | 2021-08-04 | 国立大学法人徳島大学 | 濃度測定装置 |
-
2021
- 2021-07-31 JP JP2021126348A patent/JP7393753B2/ja active Active
-
2022
- 2022-06-29 KR KR1020237030672A patent/KR20230140581A/ko unknown
- 2022-06-29 WO PCT/JP2022/026037 patent/WO2023013314A1/ja active Application Filing
- 2022-07-19 TW TW111126979A patent/TWI827148B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002374039A (ja) | 2001-02-27 | 2002-12-26 | Ricoh Co Ltd | 光送受信システムおよび光通信システム |
JP2007529012A (ja) | 2004-03-12 | 2007-10-18 | エムケイエス インストゥルメンツ, インコーポレイテッド | オゾン濃度センサー |
JP2018169203A (ja) | 2017-03-29 | 2018-11-01 | 株式会社島津製作所 | ガス吸収分光装置及びガス吸収分光法 |
WO2020213385A1 (ja) | 2019-04-19 | 2020-10-22 | 株式会社フジキン | 濃度測定装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20230140581A (ko) | 2023-10-06 |
TWI827148B (zh) | 2023-12-21 |
JP2023021201A (ja) | 2023-02-10 |
WO2023013314A1 (ja) | 2023-02-09 |
TW202311724A (zh) | 2023-03-16 |
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