JP7391393B2 - Actuators and fluid control equipment - Google Patents

Description

The present invention relates to an actuator and a fluid control device.

Patent Document 1 describes a stepping motor valve having a valve body 3 supported in a balanced position by springs 8, 8' and washers 9, 9' so as to be able to move relative to each other in the axial direction. Patent Document 1 describes that the valve body 3 normally rotates together with the rotor 6, and that when the friction between the valve body and the valve seat increases, the rotor 6 can further rotate while the rotation of the valve body 3 remains stopped. ing.

Japanese Patent Application Publication No. 01-098777

The problem to be solved is to provide an actuator and a fluid control device that can realize suitable control.

A method for operating an actuator according to a first aspect of the present invention includes a first control in which the drive unit can be driven with a first drive force, and a second control in which the drive unit can be driven with a second drive force stronger than the first drive force. a control section capable of two-way control, a moving section capable of moving in a predetermined direction, and the moving section moving when at least one of the first driving force and the second driving force is supplied from the driving section. an elastic member capable of supplying a force of A first step of starting the drive of the drive unit by control, and when the drive of the drive unit by the first control stops, the control unit ends the first control and starts the drive of the drive unit by the second control. a second step of starting driving of the drive unit; and a third step of causing the storage unit to store position information of the drive unit when the termination condition is satisfied when the termination condition stored in the storage unit is satisfied. It has a step .

According to the present invention, it is possible to provide an actuator and a fluid control device that can realize suitable control.

FIG. 1 is a diagram for explaining a fluid control device according to a first embodiment. FIG. 2 is a diagram for explaining the actuator of the first embodiment. FIG. 3 is a diagram for explaining the circuit of the actuator of the first embodiment. FIG. 4 is a diagram for explaining the operation of the actuator of the first embodiment. FIG. 5 is another diagram for explaining the operation of the actuator of the first embodiment. FIG. 6 is yet another diagram for explaining the operation of the actuator of the first embodiment. FIG. 7 is a diagram for explaining the operation of the fluid control device of the first embodiment. FIG. 8 is a diagram for explaining the fluid control device of the second embodiment. FIG. 9 is a diagram for explaining the operation of the actuator of the second embodiment. FIG. 10 is another diagram for explaining the operation of the actuator of the second embodiment.

(First embodiment)

FIG. 1 is a diagram for explaining the fluid control device of the first embodiment, FIG. 2 is a diagram for explaining the actuator of the first embodiment, and FIG. 3 is a diagram for explaining the circuit of the actuator of the first embodiment. It is a diagram.

In FIG. 1, a fluid control device 1 is a device that controls the flow rate of a liquid such as water or oil, or a fluid such as powder. The fluid control device 1 includes an actuator 2 and a valve device 3.

The actuator 2 is, for example, an electric actuator. The actuator 2 includes a case 70, an elastic section 40, a drive section 50, and a moving section (drive shaft) 60.

The valve device 3 includes a connecting portion 75 connected to the actuator 2, a valve body 76 connected to the connecting portion 75, a scale 761, a mark 762, and a pipe portion 77 through which fluid 78 flows. A contact portion 771 is provided on the +X direction side of the tube portion 77 .

In the fluid control device 1, by driving the actuator 2, the end portion 611 of the actuator 2 moves in the +X direction or the −X direction. When the end portion 611 of the actuator 2 moves in the +X direction or the −X direction, the connecting portion 75 and the valve body 76 of the valve device 3 also move in the +X direction or −X direction.

The scale 761 is provided on the side surface of the valve body 76 along the X direction. The mark 762 is provided facing the scale 761 so that its relative position with the tube portion 77 does not change. Therefore, the user can know the position of the valve body 76 in the X direction by reading the scale 761 corresponding to the mark 762.

When controlling the valve device 3 in the opening direction, the actuator 2 moves the end portion 611 in the -X direction, and the valve body 76 moves in the -X direction. This widens the flow path of the pipe portion 77 and increases the flow rate of the fluid 78 flowing into the valve device 3.

When controlling the valve device 3 in the closing direction, the actuator 2 moves the end portion 611 in the +X direction, and the valve body 76 moves in the +X direction. As a result, the flow path of the pipe portion 77 becomes narrower, and the flow rate of the fluid 78 flowing into the valve device 3 decreases. The fluid control device 1 can move the actuator 2 in the +X direction until the valve body 76 moves to the position 76a and the contact portion 771 of the pipe portion 77 comes into contact with the valve body 76.

Next, the configuration of the actuator 2 will be explained in detail using FIGS. 2 and 3.

2 and 3, the actuator 2 includes a case 70, an elastic section 40, a drive section 50, a moving section (drive shaft) 60, an operation section 31, a detection section 32, a control section 33, and a mechanism. 34. In FIG. 2, a case 70 houses circuits such as the control section 33, the mechanism section 34, a part of the drive section 50, and the like.

In FIGS. 2 and 3, the operation unit 31 is, for example, provided outside the case 70, and includes a plurality of operation buttons (not shown) that can be operated by the user, and an external control signal from an external device (not shown). It has an input section that is supplied. The operation unit 31 outputs an operation signal S1 in response to a user's operation of an operation button or an external control signal.

The detection unit 32 is, for example, a sensor for detecting operation (drive), stoppage, etc. of the drive unit 50. The detection unit 32 is, for example, a position detection sensor such as a potentiometer or an encoder. The detection unit 32 may be a sensor that detects linear movement or a sensor that detects rotation. In this embodiment, the detection unit 32 is a potentiometer that detects linear movement. The detection unit 32 is fixed to the case 70, detects movement of the drive unit 50 using a brush (not shown) that slides on the drive unit 50, and outputs a detection signal S2. The detection signal S2 is stored in the storage section 35 of the control section 33.

The control unit 33 includes, for example, a microcomputer (not shown) and a storage unit 35. The control unit 33 determines (detects) whether the drive unit 50 has stopped based on the detection signal S2. The control unit 33 performs calculations using the operation signal S1 output from the operation unit 31, the detection signal S2 output from the detection unit 32, and the information stored in the storage unit 35, and outputs a control signal S3. do. In this embodiment, the control unit 33 performs first control, second control, and normal control, which will be described later.

The mechanism section 34 includes a motor (not shown) and a cam mechanism (not shown). The motor may be, for example, a rotating motor or a linearly driven motor. As the motor, a DC motor, an AC motor, a stepping motor, an ultrasonic motor, etc. can be used. For example, in this embodiment, a stepping motor is used to achieve high precision and high torque.

The cam mechanism can adopt any configuration. For example, it may be a device that converts rotational drive and linear drive, a device that converts rotational drive to rotational drive, a device that converts linear drive to linear drive, or a device that converts rotational drive to rotational drive. However, it may also be converted into one that drives linearly. For example, this embodiment uses a cam mechanism that converts rotational drive of the motor into linear drive (+X direction or -X direction).

In this embodiment, the mechanism section 34 drives the motor based on the control signal S3, and the driving force of the motor is supplied to the cam mechanism. The cam mechanism uses the supplied driving force to drive the drive unit 50 with a predetermined driving force.

In FIG. 2, the drive unit 50 includes a base body 51 extending in the X direction, an end portion 511 that is an end on the +X direction side of the base body 51, and a first protrusion portion extending in the −Y direction from a portion of the base body 51 on the +X direction side. 531, and a second protrusion 532 extending in the -Y direction from the -X direction side portion of the base body 51.

The moving unit 60 includes a base body 61 extending in the X direction, an end portion 611 that is the +X direction side end of the base body 61, a scale 612 provided on a surface facing the drive unit 50, and a −X direction side of the base body 61. The first protrusion 631 extends in the Y direction from a portion of the base body 61 on the +X direction side of the second protrusion 632.

In FIG. 3, the elastic section 40 includes an elastic body 41, a support member 45 provided at one end of the elastic body 41, and a support member 46 provided at the other end of the elastic body 41. The elastic body 41 is, for example, an elastic member such as a metal spring or rubber.

The support member 45 is provided closer to the −X direction than the first protrusion 531 and the first protrusion 631 so as to be able to contact at least one of the first protrusion 531 and the first protrusion 631 . The support member 46 is provided on the +X direction side of the second protrusion 532 and the second protrusion 632 so as to be able to contact at least one of the second protrusion 532 and the second protrusion 632 .

In this embodiment, the natural length x10 [mm] (not shown) of the elastic body 41 is the distance between the first protrusion 531 and the second protrusion 532, or the distance between the first protrusion 631 and the second protrusion 632. longer than the interval between. Therefore, the elastic body 41 presses the support member 45 and the support member 46 with elastic force in a direction in which the distance between the support member 45 and the support member 46 increases.

Next, the operation of the actuator will be explained. 4 to 6 are diagrams for explaining the operation of the actuator of the first embodiment.

FIG. 4(a) is a diagram showing the initial state. In the initial state of this embodiment, the first protrusion 531 and the first protrusion 631 are in opposing positions, and the second protrusion 532 and the second protrusion 632 are in opposing positions. The support member 45 is supported by the first protrusion 531 and the first protrusion 631, and the support member 46 is supported by the second protrusion 532 and the second protrusion 632.

In the initial state shown in FIG. 4A, the control section 33 does not output the control signal S3 for driving the drive section 50, and the drive section 50 is stopped. The detection unit 32 outputs a detection signal S2 to the control unit 33, and the control unit 33 stores position information of the drive unit 50 in the storage unit 35 based on the detection signal S2.

The elastic body 41 is pressurized and compressed by the first protrusion 531 and the first protrusion 631 and the second protrusion 532 and the second protrusion 632, and has a length of x11 [mm]. In the state shown in FIG. 4(a), the elastic body 41 has shrunk by (x10-x11) [mm] from its natural length x10 [mm].

In the state shown in FIG. 4A, the elastic body 41 is sandwiched between the first protrusion 531 and the second protrusion 532. Therefore, the elastic body 41 is compressed by the force F0 (the force by which the first protrusion 531 and the second protrusion 532 compress the elastic body 41) and has a length of x11 [mm]. They produce elastic forces of equal magnitude. Note that when the spring multiplier of the elastic body 41 is k1 [N/mm], the force F0=k1×(x10−x11) [N].

In the state shown in FIG. 4A, the end portion 511 of the drive unit 50 is at the 0 (zero) position on the scale 612 of the moving unit 60. This position is called the first position.

FIG. 4(b) shows a state in which the drive unit 50 is driven in the +X direction by the first driving force from the state shown in FIG. 4(a). The control section 33 outputs a control signal S3 for driving the driving section 50 in the +X direction with the first driving force, and the driving section 50 is driven in the +X direction with the first driving force. The detection unit 32 outputs a detection signal S2 to the control unit 33, and the control unit 33 stores position information of the drive unit 50 in the storage unit 35 based on the detection signal S2.

The first driving force is, for example, a force smaller than the force F0 (the force with which the first protrusion 531 and the second protrusion 532 compress the elastic body 41). It is preferable that the first driving force has a value of, for example, less than or equal to force F0 and greater than or equal to 1/20 of force F0. More preferably, the first driving force has a value of, for example, less than or equal to force F0 and greater than or equal to 1/10 of force F0.

Until the valve body 76 (see FIG. 1) and the contact portion 771 (see FIG. 1) of the pipe portion 77 come into contact, the first driving force of the drive portion 50 is transmitted to the moving portion 60 via the elastic portion 40. Then, the driving section 50 and the moving section 60 move in the +X direction, and the valve body 76 moves in the +X direction.

When the drive section 50 moves a1 in the +X direction from the state shown in FIG. 4A and the valve body 76 and the contact section 771 come into contact, the moving section 60 receives a drag from the contact section 771 and cannot move. Since the first driving force is less than the force F0 and the elastic part 40 does not contract, the driving part 50 also becomes unable to move. At this time, the detection section 32 outputs a detection signal S2 to the control section 33, and the control section 33 stores the position information of the drive section 50 in the storage section 35 as a first reference position based on the detection signal S2.

Note that in FIG. 4B, the elastic body 41 is not contracted (the length of the elastic body 41 is x11), so the end portion 511 of the drive unit 50 is at 0 (zero) on the scale 612 of the moving unit 60. (first position).

FIG. 5(a) is in the same state as FIG. 4(b). FIG. 5(b) shows a state in which the drive unit 50 is driven in the +X direction by the second driving force from the state shown in FIG. 5(a).

In FIG. 5B, the control section 33 outputs a control signal S3 for driving the driving section 50 in the +X direction with the second driving force, and drives the driving section 50 in the +X direction with the second driving force. The second driving force is, for example, a force larger than the force F0 (the force with which the first protrusion 531 and the second protrusion 532 compress the elastic body 41). The detection unit 32 outputs a detection signal S2 to the control unit 33, and the control unit 33 stores position information of the drive unit 50 in the storage unit 35 based on the detection signal S2.

Since the valve body 76 and the contact portion 771 are in contact with each other, the moving portion 60 cannot (almost) move in the +X direction. Therefore, when the drive unit 50 is driven in the +X direction with the second driving force, the elastic body 41 is compressed. The second driving force is transmitted to the moving part 60 via the elastic part 40, and the valve body 76 and the contact part 771 are further pressed (retightened).

Thereafter, when the drive unit 50 moves a2 in the +X direction from the state shown in FIG. mm]) is satisfied, and the drive unit 50 is stopped. At this time, the control unit 33 stores the position information of the drive unit 50 as the second reference position in the storage unit 35 based on the detection signal S2.

In FIG. 5B, the drive unit 50 moves by a2 [mm] with the second driving force, and the length of the elastic body 41 is x12 [mm], which is shorter than x11 [mm]. In this embodiment, x11 [mm]=x12+a2 [mm], and elastic force F1=k1×(x10−x12) [N] is generated in the elastic body 41.

The second driving force is, for example, less than or equal to the rated driving force of the motor of the mechanism section 34 during normal control, and more than or equal to the force F0 (the force with which the first protrusion 531 and the second protrusion 532 compress the elastic body 41). It is preferable that the value is . More preferably, the second driving force is, for example, less than or equal to the rated driving force during normal control of the motor, and more than twice the force F0.

In FIG. 5(b), since the elastic body 41 is shortened by a2 [mm], the end portion 511 of the drive unit 50 is moved by 2 (two scales) in the +X direction from the 0 (zero) position of the scale 612. It's moving. This position will be referred to as the second position.

FIG. 6(a) is a diagram for explaining a state similar to FIG. 4(b). In the fluid control device 1 shown in FIG. 6(a), the position of the moving part 60 is fixed using an external member (not shown) in the state shown in FIG. 4(a). With the position of the moving section 60 fixed, the control section 33 performs first control to drive the driving section 50 in the -X direction with a third driving force. . The third driving force is, for example, a force that is opposite to the first driving force and is equal to the first driving force.
Since the third driving force is, for example, a force smaller than the force F0 (the force by which the first protrusion 531 and the second protrusion 532 compress the elastic body 41), the drive unit 50 cannot be moved. The control unit 33 stores the position information of the drive unit 50 in the storage unit 35 as a third reference position based on the detection signal S2. In addition, in FIG. 6A, the end portion 511 of the drive unit 50 is at the 0 (zero) position (first position) on the scale 612 of the moving unit 60.

In FIG. 6(b), the control unit 33 outputs a control signal S3 for driving the driving unit 50 in the -X direction with the fourth driving force, and the driving unit 50 drives in the -X direction with the fourth driving force. Performs second control. The fourth driving force is, for example, a force that is equal in magnitude to the second driving force and in an opposite direction.

Thereafter, when the drive unit 50 moves by a3 in the -X direction from the state shown in FIG. mm]) is satisfied, and the drive unit 50 is stopped. At this time, the control unit 33 stores the position information of the drive unit 50 as the fourth reference position in the storage unit 35 based on the detection signal S2.

In FIG. 6(b), since the drive unit 50 is driven by the fourth driving force, the length of the elastic body 41 is x13 [mm], which is shorter than x11 [mm]. In this embodiment, x11 [mm]=x13+a3 [mm], and elastic force F2=k1×(x10−x13) [N] is generated in the elastic body 41.

In FIG. 6(b), since the elastic body 41 is shortened by a3 [mm], the end portion 511 of the drive unit 50 is 2 (two scales) in the -X direction from the 0 (zero) position of the scale 612. only moving. This position will be referred to as the third position.

Next, the operation of the fluid control device will be explained. FIG. 7 is a diagram for explaining the operation of the fluid control device of the first embodiment.

As shown in FIG. 7, first, in step 1, equipment is installed. In this embodiment, the moving part 60 (see FIG. 1) of the actuator 2 and the connecting part 75 (see FIG. 1) of the valve device 3 are connected at a site such as a factory. Further, necessary power is supplied to the fluid control device 1.

In step 2, the user uses the operation unit 31 to make predetermined settings. The operation unit 31 outputs information regarding predetermined settings to the control unit 33 as an operation signal S1. The control unit 33 stores information regarding predetermined settings (operation signal S1) in the storage unit 35.

The predetermined settings include, for example, setting the magnitude of the first driving force, setting the magnitude of the second driving force, setting the magnitude of the third driving force, setting the magnitude of the fourth driving force, and setting the magnitude of the second driving force. Examples include setting control termination conditions and setting driving force during normal control. Examples of the driving force during normal control include the rated driving force during normal control, the maximum driving force during normal control, and the minimum driving force during normal control.

For example, the magnitude of the first to fourth driving forces may be set to a value corresponding to the force [N], or may be set to a value corresponding to the pressure [Pa], or the magnitude of the first to fourth driving forces may be set to a value corresponding to the force [N], or may be set to a value corresponding to the pressure [Pa]. 4 It may be set by the length [mm] of the elastic body 41 contracted by applying the driving force to the elastic body 41, or it can be set by the rotation speed of the motor of the mechanism section 34, the current supplied to the motor, etc. You may.

For example, in this embodiment, the natural length x10 of the elastic body 41, the length x11 (see FIG. 4(a)), the force F0 (the force that the first protrusion 531 and the second protrusion 532 compress the elastic body 41), ) is notified to the user in advance. Therefore, the user sets, for example, force F0×(1/10) as the first driving force. For example, in this embodiment, the rated driving force during normal control is set as the second driving force. For example, an integral multiple of the force F0 may be set as the second driving force.

Further, the user can use the operation unit 31 to set the second control termination condition. The second control termination condition is an arbitrary condition for terminating the second control. For example, in the present embodiment shown in FIG. 5, "distance a2 [mm] by which the drive unit 50 is moved by the second control" is set as the second control termination condition.

The determination as to whether or not the drive unit 50 has moved a distance a2 [mm] may be made, for example, by the control unit 33 detecting the rotation speed of the motor of the mechanism unit 34, or by the control unit 33 detecting the rotation speed of the motor of the mechanism unit 34. The determination may be made by monitoring the detection signal S2 of No. 32, or may be determined by other methods.

For example, in this embodiment, since a stepping motor is used, there is a one-to-one correspondence between the number of rotations of the motor and the distance traveled by the drive unit 50. Furthermore, when the drive unit 50 moves by a distance a2 [mm] during the second control, the elastic body 41 contracts by a2 [mm].

As explained using FIG. 5(b), x11 [mm] = x12 + a2 [mm], and when the elastic body 41 shrinks by a2 [mm], the length of the elastic body 41 changes from x11 [mm] to x12 [mm]. mm], and an elastic force F1=k1×(x10−x12)[N] is generated in the elastic body 41. The elastic force F1 corresponds to the force with which the valve body 76 pressurizes the contact portion 771 when the second control is completed.

Therefore, the user uses the operation unit 31 to input a desired value corresponding to the elastic force F1=k1×(x10−x12) [N]. The operation section 31 outputs the elastic force F1 to the control section 33 as an operation signal S1.

The control unit 33 calculates the moving distance a2 [mm] of the driving unit 50 from the elastic force F1, calculates the number of rotations A [rotations] of the stepping motor to move the driving unit 50 by the moving distance a2 [mm], The rotation speed A [rotations] is output to the mechanism section 34 as the control signal S3.

When the stepping motor of the mechanism section 34 rotates A, the drive section 50 moves a distance a2 [mm], the elastic body 41 contracts a2 [mm], and the valve body 76 moves the contact section 771 as F1=k1×(x10- x12).

Note that the setting of the second control termination condition is not limited to the above example. For example, if the user knows the spring multiplier k1 [N/mm] of the elastic body 41, the user may input the moving distance a2 [mm] of the drive unit 50 using the operation unit 31. In this case, the operation unit 31 generates the movement distance a2 [mm] as the operation signal S1, and the control unit 33 generates the rotation speed A [rotations] as the control signal S3, so that the stepping motor of the mechanism unit 34 is rotation].

The second control termination condition is not limited to the moving distance of the drive unit 50. For example, the termination condition may be that a predetermined time has elapsed since the start of the second control, or the termination condition may be that the motor of the mechanism section 34 has stopped, or the termination condition may be that the motor of the mechanism section 34 has stopped. The termination condition may be that the installed sensor detects that the pressurizing force between the valve body 76 and the contact portion 771 has exceeded a predetermined value.

In step 3, the first control is started when the user presses the start button SW1 on the operation unit 31. The first control is, for example, control for driving the drive unit 50 with the first driving force.

In the first control, the operation unit 31 outputs an operation signal S1 indicating that the start button SW1 (not shown) has been pressed to the control unit 33. The detection section 32 outputs the detection signal S2 to the control section 33. The control unit 33 generates a control signal S3 to drive the drive unit 50 in the +X direction with the first driving force based on the information stored in the storage unit 35, and outputs it to the mechanism unit 34.

The mechanism section 34 drives the motor based on the control signal S3, and drives the drive section 50 in the +X direction with the first driving force. By driving the drive section 50 in the +X direction, the moving section 60 moves in the +X direction, and the valve body 76 (see FIG. 1) approaches the contact section 771 (see FIG. 1).

Thereafter, by moving the valve body 76 in the +X direction, the valve body 76 comes into contact with the contact portion 771. When the valve body 76 contacts the contact portion 771, the moving portion 60 becomes unable to move. Since the first driving force is smaller than the force F0, the driving section 50 cannot compress the elastic body 41, and the movement of the driving section 50 also stops.

When the drive unit 50 stops, the control unit 33 detects (determines) whether the drive unit 50 has stopped based on the detection signal S2 of the detection unit 32 (step 4).

In step 5, the control unit 33 stores the position information of the drive unit 50 in the storage unit 35 as a first reference position. In this embodiment, the detection signal S2 of the detection section 32 when the drive section 50 stops becomes the first reference position. Note that the end portion 511 of the driving portion 50 is at the 0 (zero) position (first position) on the scale 612 of the moving portion 60 (see FIG. 4(b)).

Since the control unit 33 detects that the drive unit 50 has stopped, it ends the first control and starts the second control (step 6). The second control is, for example, control for driving the drive unit 50 with the second driving force.

In the second control, the control unit 33 generates a control signal S3 to drive the drive unit 50 in the +X direction with the second driving force based on the information stored in the storage unit 35, and outputs it to the mechanism unit 34. . The mechanism section 34 drives the motor based on the control signal S3, and drives the drive section 50 in the +X direction with the second driving force.

Since the valve body 76 and the moving part 60 cannot (almost) move in the +X direction, the elastic body 41 contracts as the driving part 50 moves. The valve body 76 contacts the contact portion 771 under pressure.

The control unit 33 repeatedly determines whether the second control termination condition set in step 2 is satisfied. In the present embodiment, the second control termination condition is set to, for example, "distance a2 [mm] (see FIG. 5(b))" in which the drive unit 50 is moved by the second control, so that the control unit 33 determines whether the second control end condition is satisfied by repeatedly detecting the rotation speed of the motor of the mechanism section 34. When the control unit 33 determines that the second control termination condition is satisfied (step 7), the control unit 33 detects the detection signal S2 of the detection unit 32.

In step 8, the control unit 33 stores the position information of the drive unit 50 (detection signal S2 of the detection unit 32) at the time when it is determined that the second control end condition is satisfied in the storage unit 35 as a second reference position.

After storing the second reference position in the storage unit 35, the control unit 33 stops driving the drive unit 50 and ends the second control. Note that the end portion 511 of the driving portion 50 is at the +2 position (second position) on the scale 612 of the moving portion 60 (see FIG. 5(b)).

In step 9, the control unit 33 starts normal control since the second control has ended. The normal control is, for example, control in which the drive unit 50, the moving unit 60, the valve body 76, etc. are moved using at least one of the first to fourth reference positions.

In normal control, the operating section 31 outputs the operation signal S1 based on, for example, an external control signal supplied to the input section of the operating section 31 or an operation of the operating section 31 by the user. The control section 33 generates a control signal S3 for driving the drive section 50 based on the operation signal S1, the detection signal S2, and the information stored in the storage section 35, and outputs it to the mechanism section 34. Thereby, the valve body 76 can be controlled freely.

For example, in the present embodiment, the control unit 33 performs normal control by setting the second reference position to the closed position of the valve device 3 (a state in which the valve device 3 is closed; a state in which the fluid 78 does not flow).

Normal control may use only one of the first reference position, second reference position, third reference position, and fourth reference position, or may use only one of the first reference position, second reference position, third reference position, and fourth reference position. Two or more of the four reference positions may be used. For example, when performing normal control using the first reference position and the second reference position, for example, the first reference position is a state in which almost no fluid 78 flows, and the second reference position is a state in which fluid 78 does not flow at all. It's good as well.
Since the fluid control device 1 is provided with a scale 761 and a mark 762, during normal control, the user can check the open/close state of the valve device 3 and the operation of the valve body 76 by visually checking the scale 761 and the mark 762. can be easily checked

Further, the position of the mark 762 with respect to the scale 761 can also be detected using a position detection sensor (referred to as a second position detection sensor) such as a potentiometer or an encoder. In this case, the output signal of the second position detection sensor is preferably supplied to the control section 33. This is because more advanced control can be achieved by using the detection signal S2 (see FIG. 3) output from the above-mentioned detection unit 32 (see FIG. 3) and the output signal of the second position detection sensor. .

Since the actuator 2 of this embodiment described above uses at least one of the first reference position, the second reference position, the third reference position, and the fourth reference position, suitable control can be realized. The fluid control device 1 can move the valve body 76 to a desired position by controlling the actuator 2.

The actuator 2 of the present embodiment includes a driving section 50 capable of driving at least one of a first driving force and a second driving force, a moving section 60 capable of moving in a predetermined direction, and a first driving force and a second driving force from the driving section 50. The elastic part 40 is supplied with at least one of the driving forces and supplies the moving part 60 with a force for moving the moving part 60.

Therefore, the driving force of the driving section 50 is supplied to the moving section 60 via the elastic section 40, and when the moving section 60 is stopped, driving the driving section 50 compresses the elastic section 40. can do.

The actuator 2 of this embodiment includes the detection unit 32 that supplies the control unit 33 with a detection signal for detecting the stoppage of the drive unit 50. Therefore, after performing the first control, the control unit 33 By detecting the stoppage of the drive unit 50 based on the detection signal, the first control can be ended and the second control can be started.

In this embodiment, the control unit 33 of the actuator 2 has a first control that can drive the drive unit 50 with a first drive force, and a second control that can drive the drive unit 50 with a second drive force that is stronger than the first drive force. is possible.

Therefore, the control section 33 can bring the valve body 76 and the contact section 771 into contact with each other with a weak force through the first control. Further, the second control allows the valve body 76 and the contact portion 771 to be brought into pressurized contact with a strong force.

For example, in the present embodiment, the first driving force is set to a value smaller than the force F0 (the force with which the first protrusion 531 and the second protrusion 532 compress the elastic body 41), so the first control The amount of contraction of the elastic body 41 is zero or a very small value. Since the second driving force is set to a value larger than the force F0, the amount of contraction of the elastic body 41 due to the second control becomes a relatively large value.

In the present embodiment, the second control is started from the state where the valve body 76 and the contact portion 771 are in contact with each other due to the first control, and the “movement amount of the drive unit 50 in the X direction due to the second control” is the “first control”. The amount of contraction of the elastic body 41 from the start of the control to the completion of the second control can be considered to be equal to the amount of contraction of the elastic body 41 from the start of the control to the completion of the second control.

By multiplying "the amount of contraction of the elastic body 41 from the start of the first control to the completion of the second control" by the spring multiplier k1 [N/mm], "the valve body 76 is The force to pressurize (retightening amount) is obtained.

In this embodiment, when the user makes a predetermined setting using the operation unit 31, the control unit 33 sends a control signal S3 corresponding to “the amount of movement of the drive unit 50 in the X direction by the second control” during the second control. By supplying the force to the mechanism section 34, it is possible to realize "the force by which the valve body 76 pressurizes the contact section 771 (retightening amount) upon completion of the second control".

In the fluid control device 1 of this embodiment, the force (retightening amount) with which the valve body 76 pressurizes the contact portion 771 can be easily set using the operation unit 31, so that suitable flow rate control of the fluid 78 can be realized. . For example, even if the preferred retightening amount (the force with which the valve body 76 pressurizes the contact portion 771) varies depending on the temperature and composition of the fluid 78, the degree of aging of the valve body 76 and the contact portion 771, etc., the operating portion 31 The amount of additional tightening can be suitably changed using .

(Second embodiment)

FIG. 8 is a diagram for explaining the fluid control device of the second embodiment, FIG. 9 is a diagram for explaining the operation of the actuator of the second embodiment, and FIG. 10 is a diagram for explaining the operation of the actuator of the second embodiment. Here is another diagram for. In the following description, components similar to those shown in FIGS. 1 to 7 are given the same reference numerals, and redundant description will be omitted.

In FIG. 8, the fluid control device 1' includes an actuator 2 and a valve device 3'. The valve device 3' includes a connecting part 75a, valve bodies 76c, 76e, scales 761a, 761b, and marks instead of the connecting part 75, valve body 76, scale 761, mark 762, fluid 78, pipe part 77, and contact part 771. 762a, 762b, fluids 78a, 78b, pipe portions 77a, 77b, and contact portions 771a, 771b.

The connecting portion 75a is connected to valve bodies 76c and 76e. The valve body 76c is provided on the +X direction side of the connection portion 75a, and the valve body 76e is provided on the −X direction side of the connection portion 75a. Scales 761a and 761b are provided on valve bodies 76c and 76e. Markers 762a and 762b are provided opposite scales 761a and 761b. The contact portions 771a, 771b are provided in the tube portions 77a, 77b.

When the drive section 50 is driven in the +X direction, the valve body 76c comes into contact with the contact section 771a, and the flow of the fluid 78a is restricted. When the drive section 50 is driven in the -X direction, the valve body 76e contacts the contact section 771b, and the flow of the fluid 78b is restricted.

The operations of the valve body 76c, the scale 761a, the mark 762a, the fluid 78a, the pipe portion 77a, and the contact portion 771a are the same as those of the fluid control device 1 of the first embodiment described above, so the valve body 76e, the scale 761b, The operations of the mark 762b, the fluid 78b, the pipe portion 77b, and the contact portion 771b will be mainly explained.

FIG. 9(a) is a diagram showing the initial state. The control section 33 is not outputting the control signal S3 for driving the drive section 50, and the drive section 50 is stopped. In the state shown in FIG. 9A, the end portion 511 of the drive unit 50 is at the 0 (zero) position (first position) on the scale 612 of the moving unit 60.

The elastic body 41 has a length of x11 [mm]. Assuming that the spring multiplier of the elastic body 41 is k1, in the state shown in FIG. Compressed.

FIG. 9(b) shows a state in which the driving unit 50 is driven in the −X direction by the third driving force from the state shown in FIG. 9(a). The third driving force is, for example, a force that is opposite to the first driving force and is equal to the first driving force. The control section 33 outputs a control signal S3 for driving the driving section 50 in the -X direction with the third driving force, and starts a first control in which the driving section 50 drives in the -X direction with the third driving force.

When the drive section 50 moves a4 in the −X direction from the state shown in FIG. 9(a) and the valve body 76e comes into contact with the contact section 771b, the moving section 60 receives a drag from the contact section 771b and cannot move. Since the third driving force is less than the force F0 and the elastic part 40 does not contract, the driving part 50 also becomes unable to move. At this time, the control section 33 stores the position information of the drive section 50 in the storage section 35 as the third reference position based on the detection signal S2 of the detection section 32.

In FIG. 9B, since the elastic body 41 is not contracted (the length of the elastic body 41 is x11), the end 511 of the drive unit 50 is at 0 (zero) on the scale 612 of the moving unit 60. (first position).

FIG. 10(a) is in the same state as FIG. 9(b). FIG. 10(b) shows a state in which the driving section 50 is driven in the -X direction by the fourth driving force from the state shown in FIG. 10(a).

In FIG. 10(b), the control section 33 outputs a control signal S3 for driving the driving section 50 in the -X direction with the fourth driving force, and drives the driving section 50 in the -X direction with the fourth driving force. Performs second control. The fourth driving force is, for example, a force that is opposite to the second driving force and is equal to the second driving force. The fourth driving force is, for example, a force larger than the force F0 (the force with which the first protrusion 531 and the second protrusion 532 compress the elastic body 41).

Since the valve body 76e and the contact portion 771b are in contact with each other, the moving portion 60 cannot (almost) move in the −X direction. Therefore, when the drive unit 50 is driven in the −X direction with the fourth driving force, the elastic body 41 is compressed. The fourth driving force is transmitted to the moving part 60 via the elastic part 40, and the valve body 76e and the contact part 771b are further pressed (retightened).

Thereafter, when the drive unit 50 moves a5 in the -X direction from the state shown in FIG. a5 [mm]) is satisfied, and the drive unit 50 is stopped. At this time, the control unit 33 stores the position information of the drive unit 50 as the fourth reference position in the storage unit 35 based on the detection signal S2.

In FIG. 10(b), since the elastic body 41 is shortened by a5 [mm], the end portion 511 of the drive unit 50 is moved a5 (1 scale) in the -X direction from the 0 (zero) position of the scale 612. only moving. This position will be referred to as the third position.

The actuator 2 of this embodiment described above has the same configuration as the actuator 2 of the first embodiment, so it can provide the same excellent effects.

The fluid control device 1' of this embodiment described above includes an actuator 2 and a valve device 3'. The valve device 3' has a connecting part 75a, valve bodies 76c, 76e, scales 761a, 761b, marks 762a, 762b, fluids 78a, 78b, pipe parts 77a, 77b, and contact parts 771a, 771b.

Therefore, the control unit 33 can realize suitable control using at least one of the first reference position, the second reference position, the third reference position, and the fourth reference position. The fluid control device 1' can move the valve bodies 76c and 76e to desired positions under the control of the actuator 2.

Further, the fluid control device 1' of the present embodiment drives the drive unit 50 in the +X direction with the first driving force or the second driving force, similar to the operation shown in FIGS. 4 and 5 of the first embodiment. control to bring the valve body 76c and the contact portion 771a into contact with each other and pressurize the contact portion 771a with a predetermined pressure, and as shown in FIGS. By driving in the −X direction with a driving force, it is possible to bring the valve body 76e and the contact portion 771b into contact with each other, and to achieve control to pressurize the valve body 76e with a predetermined pressure.

The configurations of each embodiment described above can be combined with each other. Although various embodiments and modifications have been described above, the present invention is not limited to these embodiments. For example, combinations of the configurations of the embodiments described above and other aspects that can be considered within the scope of the technical idea of the present invention are also included within the scope of the present invention.

According to the present invention, it is possible to provide an actuator and a fluid control device that can realize suitable control.

32 Detection section 33 Control section 40 Elastic section 50 Drive section 60 Moving section

Claims (2)

a control unit that is capable of first control that can drive the drive unit with a first drive force; and second control that can drive the drive unit with a second drive force that is stronger than the first drive force;
a moving part that can move in a predetermined direction;
an elastic member capable of supplying a force for moving the moving unit to the moving unit when at least one of the first driving force and the second driving force is supplied from the driving unit;
A method for operating an actuator, comprising: a storage unit capable of storing termination conditions that are conditions for terminating the second control;
a first step in which the control unit starts driving the drive unit by the first control;
a second step in which, when driving of the drive unit under the first control is stopped, the control unit ends the first control and starts driving the drive unit under the second control;
A method for operating an actuator, comprising: when the termination condition stored in the storage section is satisfied, a third step of storing position information of the driving section when the termination condition is satisfied in the storage section. A method of operating an actuator according to claim 1, comprising:
The driving unit and the moving unit are movable in a pushing and pulling direction,
The driving section is connected to one end of the elastic member, and the moving section is connected to the other end of the elastic member,
A method of operating an actuator, wherein the moving part can be attached to a valve device having a lift valve.