JP7385210B2 - 磁界センサ素子及び磁界センサ装置 - Google Patents
磁界センサ素子及び磁界センサ装置 Download PDFInfo
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- JP7385210B2 JP7385210B2 JP2019177949A JP2019177949A JP7385210B2 JP 7385210 B2 JP7385210 B2 JP 7385210B2 JP 2019177949 A JP2019177949 A JP 2019177949A JP 2019177949 A JP2019177949 A JP 2019177949A JP 7385210 B2 JP7385210 B2 JP 7385210B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 119
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- 230000005294 ferromagnetic effect Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
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- 239000010419 fine particle Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 39
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- 230000000694 effects Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000006249 magnetic particle Substances 0.000 description 8
- 230000010287 polarization Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
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- 238000005259 measurement Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 230000005350 ferromagnetic resonance Effects 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminium flouride Chemical compound F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 1
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910002555 FeNi Inorganic materials 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
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- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001512 metal fluoride Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
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- Measuring Magnetic Variables (AREA)
- Soft Magnetic Materials (AREA)
- Thin Magnetic Films (AREA)
Description
10 磁界センサ素子
20 光ファイバ
30,30’,30’’ 磁性部材
40,40’ 反射膜
50 発光装置
60 受光装置
Claims (7)
- 強磁性金属の微粒子が分散した誘電体で構成され、入射光を透過させ、前記入射光が透過する方向を長手方向とするそれぞれの幅及び高さがミクロンオーダの複数の柱状体に成形された磁性部材と、
前記磁性部材を透過した光を前記磁性部材に向けて反射する反射膜と、
前記入射光を前記磁性部材に出射するとともに、前記反射膜で反射し前記磁性部材を透過した戻り光が入射する光ファイバと、を有し、
前記複数の柱状体のそれぞれの幅が1μm以上かつ3μm以下であり、
前記複数の柱状体同士は互いに接触しておらず、
前記複数の柱状体同士の間隔の平均が1μm以上かつ3μm以下である、
ことを特徴とする磁界センサ素子。 - 前記磁性部材は前記入射光を透過させる支持基板をさらに有し、
前記複数の柱状体は前記支持基板上に形成されている、請求項1に記載の磁界センサ素子。 - 前記支持基板に格子状の凸部及び凹部が形成され、
前記複数の柱状体は前記凸部上及び前記凹部内に形成されている、請求項2に記載の磁界センサ素子。 - 前記反射膜は前記凸部の上面及び前記凹部の底面に成膜され、
前記複数の柱状体は前記反射膜上に形成されている、請求項3に記載の磁界センサ素子。 - 前記反射膜は、前記支持基板の前記複数の柱状体が形成された面とは反対側の面に成膜されている、請求項2又は3に記載の磁界センサ素子。
- 前記複数の柱状体のそれぞれは、幅に対する高さの比が1以上かつ3以下である、
請求項1~5のいずれか一項に記載の磁界センサ素子。 - 請求項1~6のいずれか一項に記載の磁界センサ素子と、
前記光ファイバに前記入射光として直線偏光を入射させる発光装置と、
前記光ファイバから出射された前記戻り光をS偏光成分及びP偏光成分に分離し、前記S偏光成分及び前記P偏光成分を受光して電気信号に変換し、前記電気信号を処理する受光装置と、
を有することを特徴とする磁界センサ装置。
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JP2021056047A JP2021056047A (ja) | 2021-04-08 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007004691A1 (ja) | 2005-06-30 | 2007-01-11 | Nec Corporation | 電界/磁界センサおよびそれらの製造方法 |
JP2019138775A (ja) | 2018-02-09 | 2019-08-22 | シチズンファインデバイス株式会社 | 磁界センサ素子及び磁界センサ装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2777594B2 (ja) * | 1989-05-29 | 1998-07-16 | 株式会社リコー | 磁性膜 |
JPH0387005A (ja) * | 1989-08-30 | 1991-04-11 | Ricoh Co Ltd | 磁性膜 |
JPH03296202A (ja) * | 1990-04-16 | 1991-12-26 | Ricoh Co Ltd | 磁性膜 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2007004691A1 (ja) | 2005-06-30 | 2007-01-11 | Nec Corporation | 電界/磁界センサおよびそれらの製造方法 |
JP2019138775A (ja) | 2018-02-09 | 2019-08-22 | シチズンファインデバイス株式会社 | 磁界センサ素子及び磁界センサ装置 |
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