JP7372744B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device.

In various processing equipment, various parts and sensors installed in the equipment deteriorate due to equipment operation and changes over time, so regular maintenance and periodic inspections are required to ensure proper operation of the processing equipment. It is recommended (for example, see Patent Document 1).

Japanese Patent Application Publication No. 2015-098063

The timing of maintenance and periodic inspections is managed by each user of the processing device, but the user may be busy with other work, for example, and forget to carry out maintenance or periodic inspections. In addition, when performing maintenance or periodic inspections, it is necessary to stop the operation of the equipment and interrupt production, and even if you remember when to perform maintenance or periodic inspections, if the period of periodic inspections coincides with the busy season. Sometimes it gets put on the back burner.

The problem to be solved by the present invention is to prevent scheduled work such as maintenance and periodic inspection of processing equipment from being forgotten or from being postponed beyond the scheduled timing. That's true.

The present invention is a processing device comprising a processing means for processing a workpiece, a control means for controlling at least the processing means, and an input means for inputting information, wherein the control means is provided with a processing means for processing a workpiece. The processing means includes a date and time storage unit that stores the date and time of the work that is being performed, and a scheduled work completion detection unit that detects the completion of the scheduled work, and the processing means stores the date and time stored in the date and time storage unit. the input means includes a notification stop button for stopping notification from the notification means, and the input means includes a notification stop button for stopping notification from the notification means, and the input means includes a notification stop button for stopping notification from the notification means, and the input means includes a notification stop button for stopping notification from the notification means, and after the scheduled occurrence notification is stopped by the notification stop button, if the completion of the scheduled work is not detected by the scheduled work completion detection unit after a predetermined period of time has elapsed, the notification means notifies an additional notification, If the scheduled work completion detection unit does not detect completion of the work when the date and time stored in the date and time storage unit is reached, the control means disables the stop of the notification by the notification stop button and stops the notification. The processing device further includes a notification stop/disable unit that causes continuous transmission .

In the present invention, the notification means issues a notification for scheduled work such as maintenance or periodic inspection at a timing earlier than a specific date and time. If the work is not completed after a predetermined period of time has elapsed since the notification was stopped, the notification means additionally gives a notification, thereby preventing the user from forgetting to perform the work. Furthermore, since the notification is made at a predetermined timing before the scheduled date and time, sufficient preparation can be made.
If the completion of the work is not detected when the date and time stored in the date and time memory unit is reached, the notification stop button is disabled, which further reduces the risk of forgetting the work or putting it off until later. .

FIG. 2 is a perspective view showing the entire processing device. FIG. 3 is an explanatory diagram showing a state in which the touch panel is displaying a maintenance screen. FIG. 3 is an explanatory diagram showing a state in which the touch panel is displaying a blade replacement screen.

1 Configuration of Processing Apparatus A processing apparatus 1 shown in FIG. 1 is an apparatus for processing a workpiece. The processing device 1 in this embodiment is a cutting device that cuts a semiconductor wafer or the like, but the processing device may be a laser processing device, a grinding device, or the like.

The processing device 1 includes processing means 2. In this embodiment, the processing means 2 is a means for cutting a workpiece such as a semiconductor wafer. The processing means 2 includes a first cutting unit 20 and a second cutting unit 21. The first cutting unit 20 includes a first cutting blade 200, a first spindle (not shown) to which the first cutting blade 200 is attached at one end, and a first cutting blade connected to the other end of the first spindle through the first spindle. and a motor (not shown) that rotates the motor. Similarly, the second cutting unit 21 includes a second cutting blade 210, a second spindle (not shown) to which the second cutting blade 210 is attached at one end, and a second spindle connected to the other end of the second spindle through the second spindle. 2 and a motor (not shown) that rotates two cutting blades.

The first cutting unit 20 and the second cutting unit 21 are each independently movable in the Y-axis direction. Furthermore, the first cutting unit 20 and the second cutting unit 21 are each independently movable up and down in the Z-axis direction.

The processing device 1 includes a holding means 6 including a chuck table 60, a cover 61, and a bellows cover 62. The chuck table 60 has, for example, a substantially circular shape, and can place a workpiece on the chuck table 60 and hold the workpiece. The chuck table 60 can be moved in the X-axis direction by a moving means (not shown), and can rotate about its axis by a rotating means (not shown). The cover 61 and the bellows cover 62 serve to protect the workpiece from being infiltrated by cutting water sprayed onto the workpiece during the cutting process, cutting waste generated by the cutting process, and the like from entering the inside of the apparatus. The cover 61 is movable in the X-axis direction by a moving means (not shown), and moves in the X-axis direction together with the chuck table 60 during grinding. The bellows cover 62 can be expanded and contracted as the cover 61 moves.

The processing device 1 includes alignment means 8 . The alignment means 8 includes an imaging camera (not shown) for aligning both of the blades and the workpiece during cutting. The workpiece is imaged by the imaging camera provided in the alignment means 8, and the processing means 2 and the workpiece are aligned.

The processing device 1 includes at least a control means 3 that controls the processing means 2. For example, the movement of the processing means 2 in the Y-axis direction when aligning with the workpiece, or the movement of the processing means 2 in the Z-axis direction when the first cutting blade 200 or the second cutting blade 210 cuts into the workpiece. The vertical movement of is controlled by the control means 3.

The control means 3 includes a date and time storage unit 30 that stores the date and time of scheduled work, and a scheduled work completion detection unit 32 that detects the completion of the scheduled work. Scheduled operations include, but are not limited to, equipment inspection, blade replacement, cassette removal, and other maintenance, inspection, repair, and replacement. Note that in this embodiment, the scheduled work is blade replacement. The scheduled work completion detection unit 32 detects the completion of the work when receiving a signal indicating the completion of the work.

The processing apparatus 1 includes a cassette mounting mechanism 7 that includes a cassette mounting table 70 and a cassette presence/absence detection sensor 71 . A cassette containing workpieces is placed on the cassette mounting table 70 . The cassette presence/absence detection sensor 71 detects whether a cassette is placed on the cassette mounting table 70 or not. The workpiece is carried out from the cassette placed on the cassette mounting table 70, processed, and then stored in the cassette after processing. When all the workpieces have been processed and stored in the cassette, the cassette is removed by an operator or the like. When the cassette is removed, the cassette presence/absence detection sensor 71 detects the completion of the cassette removal, and a signal is sent to the scheduled work completion detection section 32, thereby recognizing the completion of the cassette removal work. There is.

The processing device 1 includes a notification means 5. The notification means 5 notifies the work schedule as an occurrence schedule notification at a predetermined timing before the date and time of the work stored in the date and time storage section 30. Here, the predetermined timing is, for example, several days before, several hours before, or several minutes before the scheduled work date and time. When the operator inputs the scheduled date and time of the work and stores it in the date and time storage section 30, the predetermined timing is also set by the operator. On the other hand, the processing device 1 may calculate the scheduled date and time of the work, and in that case, the processing device 1 also calculates the predetermined timing.
The notification means 5 includes, for example, an indicator light 50 and a speaker 51. Further, the notification means 5 may be a display monitor that provides notification by displaying characters, marks, etc. on the screen.

The indicator light 50 is, for example, an LED or the like, and lights up or flashes at a predetermined timing to notify an operator or the like of the scheduled work. The indicator light 50 emits light of a predetermined color, such as red, when turned on or blinking. However, the color of the lit light and the blinking pattern are not limited to these.

Further, the speaker 51 emits a notification sound at the timing of the scheduled occurrence notification. The notification sound may have variations in volume, pitch, and tone as long as it is audible enough for the operator to recognize the transmitted notification sound. Further, the notification sound may be, for example, a sound of a predetermined pitch, or may be in the form of a song.

The processing device 1 includes an input means 4 used for inputting information. The input means 4 in this embodiment is a touch panel 4A, and includes a notification stop button 40 and an enter button 41 as shown in FIGS. 2 and 3.

If the notification stop button 40 is touched during the notification of the expected occurrence notification, the transmission of the notification will be stopped, for example. That is, the indicator light 50 that was turned on as a notification of the scheduled occurrence is turned off, and the notification sound that was being emitted from the speaker 51 is stopped. Furthermore, when the enter button 41 is touched, a signal is sent to the scheduled work completion detection unit 32, and the scheduled work completion detection unit 32 detects the completion of the work.

In FIG. 2, a maintenance screen G1 is displayed on the touch panel 4A, and in FIG. 3, a blade replacement screen G2 is displayed on the touch panel 4A, which indicates blade replacement among items to be maintained.

Each inspection item 42 is displayed on the inspection item screen G1 shown in FIG. For each inspection item 42, for example, the name of each inspection item and the scheduled date and time of work for the inspection item are displayed.

In the display on the blade exchange screen G2 shown in FIG. 3, Z1 represents the first cutting blade 200, and Z2 represents the second cutting blade 210, respectively.

After the above scheduled occurrence notification is notified by the notification means 5 and the scheduled occurrence notification is stopped by the notification stop button 40, the scheduled work completion detection unit 32 still detects that the work is completed even after a predetermined time has passed. If no detection is detected, the notification means 5 is configured to send an additional notification.

Additional notifications provided by the notification means 5 include, for example, lighting or blinking of the indicator light 50 described above, or emitting notification sound from the speaker 51. At this time, the lighting of the indicator light 50 in the additional notification may be in the same pattern as the lighting in the initial scheduled notification, or may be in a different pattern. Similarly, the notification sound of the additional notification transmitted from the speaker 51 may be the same as or different from the notification sound of the initial scheduled notification. For example, a warning sound that gives the operator the impression that the scheduled work time is getting closer than the first notification sound, or a warning sound that gives the operator the impression that the scheduled work time is getting closer than the first notification sound, or a warning sound that gives the operator the impression that the scheduled work time is approaching It may be an audio type announcement announcing the time of the event. The notification sound at the time of additional notification is not limited to the above.

If the scheduled work is to be carried out on a predetermined date and time, such as equipment inspection, the date and time storage section 30 provided in the control means 3 stores information input from a predetermined input field displayed on the touch panel 4A. Information such as the date and time of the work performed is stored. Further, when the scheduled work is blade replacement, for example, the date and time storage unit 30 stores the replacement timing of the first cutting blade 200 (Z1) and the second cutting blade 210 (Z2) calculated by the control means 3. be remembered. For this purpose, the control means 3 first recognizes the amount of blade edge protrusion when the blade is not in use. For example, in the case of a hub blade that has a cutting edge formed around the periphery of the base, the blade tip extension amount when it is not in use can be determined by inputting the type of the hub blade from a predetermined input screen by the operator, or by setting The barcode is automatically entered by reading the barcode using a barcode reader. In addition, in the case of a used cutting blade, the value of the blade tip extension amount is manually input from a predetermined input screen.
During cutting, the control means 3 determines that the usage limit, which is input in advance to the control means 3, is determined based on the actual cutting distance and the blade tip position (amount of wear) measured during cutting, that is, the blade needs to be replaced. Calculate and estimate the cutting distance to reach the blade tip extension amount to be determined.
Furthermore, conditions such as the processing distance of the workpiece during processing, the time required for cleaning and drying the workpiece after processing, and the time required for transporting the workpiece in the processing device 1 are taken into consideration, and the The time at which the first cutting blade 200 (Z1) and the second cutting blade 210 (Z2) reach their usage limit (usage limit time) when the workpiece is continued to be machined is calculated.
In addition, if the continuous processing of all the workpieces accommodated in the cassettes on the cassette mounting table 70 shown in FIG. The usage limit time stored in 30 is reset (deleted), blade setup is performed to recognize the tip positions of the first cutting blade 200 (Z1) and the second cutting blade 210 (Z2), and the blade setup is performed based on the tip positions. Then, the usage limit times of both cutting blades are calculated again.
Information on the usage limit time calculated in this way is sent to the date and time storage section 30, so that the scheduled date and time is stored in the date and time storage section 30.

Similarly, regarding the storage of the work date and time in the date and time storage unit 30, if the scheduled work is a cassette removal work, for example, the processing device 1 can store all the workpieces stored in the cassette from the start of processing of the workpieces stored in the cassette. When the machine is a fully automatic type that automatically performs all processes from the start of machining to the end of machining of all workpieces, for example, the time required from the start of machining to the end of machining of all workpieces is automatically calculated. A configuration is also conceivable in which the scheduled date and time of the cassette removal work is automatically stored in the date and time storage section 30 based on the calculated time. The configuration of the processing apparatus 1 for storing the work date and time in the date and time storage section 30 is not limited to the above-mentioned structure.

The control means 3 includes a notification stop disabling section 34. The notification stop invalidation unit 34 disables the notification stop by the notification stop button 40 if the scheduled work completion detection unit 32 does not detect the completion of the work when the scheduled work date and time stored in the date and time storage unit 30 is reached. do.

2 Operation of Processing Apparatus The operation of the processing apparatus 1 having the above configuration will be described below. In this embodiment, it is assumed that a blade replacement operation is scheduled in which both the first cutting blade 200 and the second cutting blade 210 used for cutting are replaced with different cutting blades. is not limited to this.

(Remembering scheduled work date and time)
First, as described above, in the control means 3, the usage limit time of the first cutting blade 200 (Z1) and the second cutting blade 210 (Z2) is calculated, and that time is stored in the date and time storage unit 30 as the scheduled work date and time. is stored as.

(Notification of scheduled occurrence)
For example, before starting continuous processing of all the workpieces stored in the cassette, the number of workpieces in the cassette is counted in advance using a sensor provided in the processing device 1, and each workpiece is The total cutting distance is calculated by multiplying the cutting distance by the number of sheets. If the control means 3 determines that the usable limit time will arrive before the cutting for the total cutting distance is completed, the workpiece that is likely to be cut at a good timing, for example, the workpiece that is being cut at the usable limit time, will be machined. After the cutting of the object is completed and before the cutting of the next workpiece is started, a signal is sent from the date and time storage section 30 to the notification means 5, and the notification means 5 notifies the scheduled occurrence of blade replacement work. do.

At the time of notification of a scheduled occurrence, for example, an indicator light 50 provided in the notification means 5 lights up a light of a predetermined color (for example, red), and a speaker 51 also provided in the notification means 5 emits a sound source, etc. (not shown). It receives an electrical signal and sends out a notification sound.

The notification may be performed only by lighting the indicator light 50, by emitting the notification sound from the speaker 51, or by simultaneously lighting the indicator light 50 and emitting the notification sound from the speaker 51.

At this time, the light of the indicator light 50 may be, for example, a light of a predetermined color or blinking, but is not limited to these. Similarly, the notification sound emitted from the speaker 51 may be in the form of a song instead of simply emitting a sound of a predetermined pitch.

When the occurrence schedule is notified, the display lamp 50 is turned on, the speaker 51 emits a notification sound, and the screen of the touch panel 4A is changed to a predetermined home screen or the like by, for example, transmitting a signal from the date and time storage unit 30 included in the control means 3. The screen switches to the blade replacement screen G2 shown in FIG. Note that switching to the blade replacement screen G2 may be performed automatically or may be performed by an operator's operation.

Next, when the operator touches the notification stop button 40, the lit indicator light 50 turns off and the notification sound emitted from the speaker 51 stops.

(Additional notification)
After the operator touches the notification stop button 40 to stop the above-mentioned scheduled occurrence notification that has been sent, if a predetermined period of time has elapsed and the completion of the work is not detected by the scheduled work completion detection unit 32, the notification will be sent again. be done. In this embodiment, the predetermined time is, for example, 10 minutes. Ten minutes after the notification stop button 40 is touched, the scheduled notification will be sent again as an additional notification.

In the additional notification, the indicator light 50 lights up a predetermined color, for example, red light, and the speaker 51 emits a notification sound, as in the above-mentioned first scheduled occurrence notification.

By touching the notification stop button 40 on the touch panel 4A, the indicator light 50 that was on is turned off, and the notification sound from the speaker 51 is stopped.

(Additional notifications that cannot be stopped)
At the time of notification of additional notification, if the scheduled work time has been reached, the control means 3 will not be able to control the notification even if you touch the notification stop button 40 on the touch panel 4A unless the scheduled work completion detection unit 32 detects the completion of the work. The notification stop disabling unit 34 prevents the notification from being stopped.

The above-described mechanism in which the notification stop disabling section 34 invalidates the stop of notification by the notification stop button 40 prompts the operator to perform the scheduled blade replacement work. Furthermore, for example, when the scheduled work time arrives, a message may be displayed on the screen of the touch panel 4A along with an additional notification to remind the operator to carry out the scheduled blade replacement, etc. .

(Implementation of work)
The cutting blade will be replaced at the scheduled work time. As shown in FIG. 3, Z1 displayed on the screen indicates the first cutting blade 200, and Z2 indicates the second cutting blade 210. Replace the cutting blade appropriately according to the instructions on the screen.

After the replacement of both blades is completed, the operator touches the enter button 41. Then, the scheduled work completion detection unit 32 provided in the control means 3 detects the completion of the work. After the scheduled work completion detection unit 32 detects the completion of the work, touching the notification stop button 40 stops the continuously transmitted notification. That is, by touching the notification stop button 40, the light of the indicator light 50 that was on is turned off, and the notification sound that has been emitted from the speaker 51 is stopped.

As described above, for scheduled work such as maintenance or periodic inspection, the notification means 5 generates a notification at a timing before a specific date and time, and the work is performed after a predetermined period of time has passed after the notification is stopped. If the work is not completed, the notifying means 5 additionally notifies the operator, thereby preventing the operator from forgetting to carry out the work. Furthermore, since the notification is made at a predetermined timing before the scheduled date and time, sufficient preparation can be made.
Furthermore, if the completion of the work is not detected when the date and time stored in the date and time storage unit 30 is reached, the notification stop button 40 is disabled, so there is a risk that the work will be forgotten or postponed. will be further reduced.

1: Processing device 2: Processing means 20: First cutting unit 200: First cutting unit 21: Second cutting unit 210: Second cutting unit 22: Guide rail 3: Control means 30: Date and time storage unit 32: Scheduled work completion Detection unit 34: Notification stop invalidation unit 4: Input means 4A: Touch panel 40: Notification stop button 41: Enter button 42: Each inspection item 42a: Blade replacement details display button 5: Notification means 50: Indicator light 51: Speaker 6: Hold Means 60: Chuck table 61: Cover 62: Bellows cover 7: Cassette mounting mechanism 70: Cassette mounting table 71: Cassette presence detection sensor 8: Alignment means G1: Maintenance screen G2: Blade replacement screen

Claims (1)

A processing device comprising a processing means for processing a workpiece, a control means for controlling at least the processing means, and an input means for inputting information,
The control means has a date and time storage unit that stores the date and time of the scheduled work, and a scheduled work completion detection unit that detects the completion of the scheduled work,
comprising a notification means for notifying the occurrence schedule of the work as an occurrence schedule notification at a predetermined timing before the date and time stored in the date and time storage unit;
The input means has a notification stop button for stopping notification from the notification means,
If the completion of the work is not detected by the scheduled work completion detection unit after a predetermined period of time has elapsed after the scheduled work notification has been notified and the notification of the scheduled work has been stopped using the notification stop button, additional information is added from the notification means. announce the announcement,
If the completion of the scheduled work is not detected by the scheduled work completion detection unit when the date and time stored in the date and time storage unit is reached, the control means disables the stop of the notification by the notification stop button and stops the notification. It is further equipped with a notification stop disabling section that allows continuous transmission of the message.
Processing equipment.

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