JP7364341B2 - Waste liquid treatment equipment - Google Patents

Description

The present invention relates to a waste liquid treatment device for extracting purified water that does not contain processing waste from processing waste that contains processing waste.

Processing equipment that processes workpieces such as semiconductor wafers by supplying processing fluid discharges processing waste fluid containing processing waste. There is also a waste liquid treatment device that removes processing debris from processing waste liquid and reuses the purified water as purified water (for example, see Patent Document 1).

Japanese Patent Application Publication No. 2014-124576

In the waste liquid treatment device described in Patent Document 1, an anode plate and a cathode plate are submerged in water at a predetermined interval in a liquid tank that stores processing waste liquid, DC power is supplied to the cathode plate and the anode plate, and a positive Negatively charged processing waste is attached to a negatively charged anode plate, and purified water from which processing waste has been removed is taken from the water intake located above the cathode plate and located near the liquid level in the liquid tank for reuse. are doing.

However, after a predetermined amount of machining debris has adhered to the anode plate, it is necessary to lift the anode plate out of the liquid tank and scrape off the machining debris that has adhered to the anode plate. There is a problem in that the water intake port is clogged with processing debris due to falling water, making it impossible to take in purified water. Therefore, when purified water is circulated from the waste liquid treatment device to the processing equipment and used as processing water, there is a problem that the processing equipment may run out of processing water.

Therefore, in a waste liquid treatment device for extracting purified water that does not contain processing waste from processing waste that contains processing waste, there is a problem of confirming whether purified water is being appropriately taken in from the water intake port of the water intake pipe.

The present invention for solving the above-mentioned problems is a waste liquid treatment device that extracts purified water that does not contain processing waste from a processing waste liquid containing processing waste discharged from processing equipment, the processing waste liquid containing the processing waste A liquid tank for storing water, a water intake pipe that connects the liquid tank and a pump and has an intake port for driving the pump to take the purified water from the liquid tank, and a water intake pipe that can confirm whether or not the purified water is being taken. The confirmation means includes a cup storing water, and an L-shaped pipe that branches from the water intake pipe and extends vertically downward from the end that branches off from the water intake pipe and connects the lower end to the water. and a confirmation tube whose tip is submerged in the water of the cup, and when the pump was driven to draw the purified water from the water intake, the water intake was blocked due to adhesion of the processing waste. At this time, the air in the confirmation tube is sucked by the pump and the pressure in the confirmation tube decreases, thereby sucking up the water in the cup and raising the water level in the confirmation tube extending vertically to a predetermined height above the cup. This is a waste liquid treatment device that makes it possible to confirm whether or not purified water is being taken from the water intake port depending on whether or not the water is above the water intake port.

Preferably, the confirmation tube is made of a transparent member that allows the water level to be confirmed.

The waste liquid treatment device according to the present invention includes a detection unit that detects whether the water level of the confirmation pipe is above the predetermined height position, and a detection unit that detects whether the water level of the confirmation pipe is above the predetermined height position. It is preferable to include a determining unit that determines that the water intake port is clogged with machining waste when the detecting unit detects the problem .

The waste liquid treatment device according to the present invention, which extracts purified water that does not contain processing waste from the processing waste liquid containing processing waste discharged from processing equipment, includes a liquid tank for storing the processing waste liquid containing processing waste, a liquid tank, and a pump. It is equipped with a water intake pipe having a water intake port that is connected to drive a pump to draw purified water from the liquid tank, and a confirmation means that makes it possible to confirm whether or not purified water is being taken. , and a confirmation tube that branches off from the water intake pipe and submerges its tip in the water in the cup.When the pump is driven to draw clean water from the water intake, the pressure inside the confirmation tube decreases. By checking the water level of the confirmation pipe that sucked up water from the cup, the worker can confirm whether purified water is being taken from the water intake.

By forming the confirmation tube from a transparent member, it becomes easy for an operator to visually confirm the water level in the confirmation tube, for example.

The waste liquid treatment device according to the present invention includes a detection section that detects the water level of the confirmation pipe, and a judgment section that judges whether or not water is being taken from the water intake port based on the detection of the detection section. When it is determined that water is not being taken from the water intake, the judgment department issues a warning or displays a warning, allowing workers to recognize that water is not being taken from the water intake. becomes.

It is a perspective view showing an example of a waste liquid treatment device. It is a perspective view explaining the confirmation means in which a liquid tank, an anode plate, a cathode plate, and a cup are cylindrical with a bottom. FIG. 6 is a cross-sectional view illustrating a case where confirmation means confirms whether purified water is being taken from the water intake port of the water intake pipe.

The waste liquid treatment device 1 shown in FIG. 1 is a device for extracting purified water that does not contain processing waste from processing waste that contains processing waste discharged from a processing device (not shown). The waste liquid treatment device 1 includes a liquid tank 2 that stores processing waste liquid containing processing waste, and a water intake pipe 39 that has a water intake port 390 that connects the liquid tank 2 and a pump 69 to drive the pump 69 to take purified water from the liquid tank 2. and a confirmation means 7 that makes it possible to confirm whether or not the purified water is being taken.

A processing device whose structure is not shown is, for example, a grinding device that grinds a workpiece such as a silicon wafer to a desired thickness using a grinding wheel that rotates while supplying processing water, or a cutting blade that rotates while supplying processing water. This is a cutting device that cuts the workpiece. The waste liquid treatment device 1 may be integrated into a processing device (not shown), or may be separate from the processing device.

As shown in FIG. 1, the above-mentioned components of the waste liquid treatment apparatus 1 are housed inside a rectangular parallelepiped-shaped housing 10 of the waste liquid treatment apparatus 1.
The approximately rectangular parallelepiped box-shaped liquid tank 2 shown in FIGS. It consists of four side walls that rise integrally in the +Z direction from the base plate 21, and as shown in FIG. 2, processing waste liquid containing processing waste (for example, silicon waste) can be stored in the space surrounded by the bottom plate 21 and each side wall. . In FIGS. 1 to 3, two side walls facing each other in the X-axis direction are referred to as side walls 22a, and two side walls facing each other in the Y-axis direction are referred to as side walls 22b (not shown in FIG. 3).

As shown in FIG. 2, for example, a supply port 223 is formed in a lower region of the side wall 22b, through which a liquid supply pipe 400 to which processing waste liquid discharged from a processing device (not shown) is sent is communicated.
Further, an overflow hole 222a is provided at the upper part of the side wall 22a of the liquid tank 2 to prevent processing waste liquid from overflowing from the liquid tank 2. The overflow hole 222a communicates with a tank (not shown), and therefore, water is prevented from overflowing from the liquid tank 2 into the housing 10 of the waste liquid treatment device 1.

As shown in FIG. 1, the waste liquid treatment device 1 includes cathode plates 30 arranged at equal intervals in a liquid tank 2 and charged negatively, and a cathode plate 30 facing the cathode plate 30 in the Y-axis direction and arranged at a predetermined distance from the cathode plate 30. an anode plate 31 which is arranged so as to be detachable from the liquid tank 2 and is positively charged; and an insertion/removal means 32 which holds the upper part of the anode plate 31 and extracts the anode plate 31 from the liquid tank 2 or inserts it into the liquid tank 2. It is equipped with.

The anode plate 31 is made of an electrochemically noble material and has a rectangular flat plate shape in plan view. For example, the anode plate 31 can be made of a material such as copper, silver, platinum, or gold. In this embodiment, SUS is used as the anode plate 31.
For example, as shown in FIG. 2, anode plate support grooves 222 are formed on the inner surfaces of two side walls 22a facing each other in the X-axis direction of the liquid tank 2, and the anode plate 31 is The anode plate support grooves 222 are inserted into the anode plate support grooves 222 at predetermined intervals, and are disposed in the liquid tank 2 . That is, the plurality of anode plates 31 are spaced apart from each other with their surfaces perpendicular to the longitudinal direction (Y-axis direction) of the liquid tank 2, in other words, parallel to the width direction (X-axis direction) of the liquid tank 2. They are placed with a gap between them.

The upper end surface of the anode plate 31 is provided with, for example, two engaged portions 310 that protrude upward from the center in the width direction (X-axis direction) at a distance from each other. The engaged portion 310 is formed into a rectangular plate shape, and is provided with an engaged hole 310a extending through the center in the X-axis direction. An engaging pin 320a of a holding portion 320 of an inserting/extracting means 32 shown in FIG. 1, which will be described later, enters into the engaged hole 310a and engages with the engaged hole 310a.

Like the anode plate 31, the cathode plate 30 is made of an electrochemically noble material, and is formed into a rectangular plate shape in plan view. For example, cathode plate 30 can be constructed from materials such as copper, silver, platinum, or gold. In this embodiment, SUS is used as the cathode plate 30. For example, as shown in FIG. 2, cathode plate support grooves 225 are formed on the inner surfaces of two side walls 22a facing each other in the X-axis direction of the liquid tank 2, and the cathode plate 30 is The cathode plate support grooves 225 are inserted into the cathode plate support grooves 225 at predetermined intervals, and are disposed in the liquid tank 2. The cathode plate 30 is provided between adjacent anode plates 31. That is, a plurality of cathode plates 30 are alternately arranged to face the anode plate 31 in the Y-axis direction, spaced apart from the anode plate 31, and are parallel to the anode plate 31.

A gap of a predetermined width is provided between the lower end of each cathode plate 30 and the lower end of each anode plate 31 and the bottom plate 21 of the liquid tank 2. The waste liquid passes through the gap and rises between the cathode plate 30 and the anode plate 31.

In this embodiment, a DC voltage is applied between the anode plate 31 and the cathode plate 30. That is, each anode plate 31 is electrically connected to the positive (+) side of a direct current power source DC (see FIG. 2), and is positively charged in the processing waste liquid in the liquid tank 2. The anode plate 31 is positively charged in the processing waste liquid and is used to adsorb processing debris such as silicon chips that are negatively charged in the processing waste liquid. On the other hand, the negative (-) side of a direct current power source DC is electrically connected to the cathode plate 30, so that it is negatively charged in the processing waste liquid.

The insertion/extraction means 32 that holds the upper part of the anode plate 31 and extracts the anode plate 31 from the liquid tank 2 or inserts it into the liquid tank 2 shown in FIG. It is possible to reciprocate in the axial direction. The Y-axis direction moving means 34 fixed to the upper part of the inner wall of the housing 10 includes a horizontal ball screw 340 provided parallel to the longitudinal direction (Y-axis direction) of the liquid tank 2, and a motor 343 that rotationally drives the horizontal ball screw 340. , a pair of guide rails 341 for horizontal movement extending in the Y-axis direction, and a movable member 342 whose internal nut is screwed into a horizontal ball screw 340 and whose lower surfaces at both ends are in sliding contact with the guide rails 341. When the horizontal ball screw 340 is rotated by the drive of the motor 343, the insertion/extraction means 32 fixed to the movable member 342 is guided by the guide rail 341 and moves in the Y-axis direction. The horizontal ball screw 340 and the guide rail 341 have a length that extends above the separating section 50 shown in FIG. By moving in the direction, the anode plate 31 held by the holding section 320 of the insertion/extraction means 32 can be moved from the liquid tank 2 to the separation section 50.

The insertion/extraction means 32 includes a vertical plate 329 whose upper end is fixed to a movable member 342, a vertical ball screw 321 provided on the side surface of the vertical plate 329 parallel to the depth direction (Z-axis direction) of the liquid tank 2, and a vertical ball screw. 321, a pair of guide rails 322 extending in the Z-axis direction, and a holding part 320 whose internal nut is screwed to the vertical ball screw 321 and whose side surface is in sliding contact with the guide rail 322. There is. Then, when the vertical ball screw 321 rotates by driving the motor, the holding part 320 is guided by the guide rail 322 and moves in the Z-axis direction.

The holding part 320 that holds the anode plate 31 of the insertion/extraction means 32 includes, for example, a plate member 320d whose internal nut is screwed into a vertical ball screw 321, and a pair of chuck cylinders 320c disposed on the lower surface of the plate member 320d. It is equipped with The pair of chuck cylinders 320c are arranged at intervals in the width direction (X-axis direction) of the liquid tank 2. The pair of chuck cylinders 320c includes a cylinder body 320b attached to a plate member 320d, and an engagement pin 320a provided so as to be able to protrude and retract from the cylinder body 320b in the width direction (X-axis direction) of the liquid tank 2. ing. In the pair of chuck cylinders 320c, for example, the engagement pins 320a protruding from the cylinder body 320b are close to each other in the X-axis direction. When each engaging pin 320a protrudes from the cylinder body 320b with the descending holding part 320 positioned above the anode plate 31, each engaging pin 320a is inserted into the engaged hole 310a of each engaged part 310 of the anode plate 31. be fitted. As a result, the holding portion 320 of the insertion/extraction means 32 is in a state of holding the anode plate 31.

The separation unit 50 shown in FIG. 1 for separating processing waste from the anode plate 31 includes a housing 500 having an opening in the upper part into which the anode plate 31 is inserted. It is equipped with a pair of scrapers (not shown) that can sandwich the material from both sides in the Y-axis direction.

A processing waste tank 56 is provided below the separating section 50 to store processing waste stripped off from the anode plate 31. The processed waste tank 56 is a container with an open top, and is connected to the lower part of the separation section 50 to store processed waste that has been separated and fallen in the separation section 50.

For example, the separation section 50 includes a hydrogen gas discharge means 57 that discharges hydrogen gas generated from the processed waste stored in the processed waste tank 56 to the outside. The hydrogen gas discharge means 57 opens the inside of the separation section 50 to the atmosphere by penetrating the wall of the housing 500 of the separation section 50.

Processing waste liquid (purified water) from which processing waste has been roughly removed by adsorption to the anode plate 31 is taken in by a plurality of water intake pipes 39 having water intake ports 390 shown in FIGS. 1 to 3. Each water intake pipe 39 includes, for example, a purified water suction pipe 391 attached to the upper part of each cathode plate 30 and closed at both ends in the Y-axis direction, and a connecting pipe 392 connected to each purified water suction pipe 391. There is. As shown in FIGS. 1 to 3, a plurality of water intake ports 390 are formed on the side surface of the purified water suction pipe 391 at equal intervals along the pipe's extending direction (X-axis direction). Note that the water intake port 390 may extend in the form of a single slit on the side surface of the purified water suction pipe 391.
Furthermore, it is preferable that the water intake port 390 be disposed between the anode plates 31 .
Furthermore, in the case where processing waste, such as silicon, sinks in water, it is preferable to arrange the water intake port 390 near the water surface as in this embodiment. However, if the processed waste contains a material that floats on water, the water intake port 390 may be disposed underwater.
For example, the connecting pipe 392 extends above the purified water suction pipe 391 and then bends toward the side wall 22a, extends in the -X direction above the side wall 22a, and then bends downward and extends in the -Z direction. are doing.

For example, on the outside of the side wall 22a on the -X direction side of the liquid tank 2, there is a water purification tank 60 into which purified water flows from each connecting pipe 392 and where the purified water is temporarily stored, and a water intake pipe 39 that takes in the purified water. Confirmation means 7 for making it possible to confirm whether or not the present invention is true is arranged side by side.
A pump 69 shown in FIG. 1 is connected to the purified water tank 60 via a communication pipe 690, and when the pump 69 is driven, suction force for drawing purified water from the liquid tank 2 is transmitted to the water intake pipe 39. A purified water delivery pipe 694 is connected to the pump 69, and the purified water delivered to the purified water delivery pipe 694 is then supplied to the processing equipment and reused as processing water.

The confirmation means 7 that makes it possible to confirm whether or not the water intake pipe 39 provided in the waste liquid treatment device 1 according to the present invention shown in FIGS. 1 and 3 is taking purified water from the liquid tank 2 includes a cup 70 that stores water; It is provided with at least a confirmation pipe 71 which branches from the water intake pipe 39 and whose tip is submerged in the water of the cup 70.

In this embodiment, the plurality of confirmation pipes 71 are branched from the plurality of connection pipes 392, and for example, extend horizontally above the water purification tank 60, then bend downward, extend in the -Z direction, and extend at their lower ends. The side extends into the cup 70 to a predetermined depth. The confirmation tube 71 is preferably made of a transparent member (for example, acrylic resin, glass, etc.) that allows the water level to be confirmed as in the present embodiment, but it may also be made of a non-transparent member such as a metal such as SUS or a PVC pipe. It may be formed of.

In the example shown in FIGS. 1 and 3, the cup 70 is formed in the shape of a substantially rectangular parallelepiped box into which all the confirmation tubes 71 enter and extend in the longitudinal direction (Y-axis direction) of the liquid tank 2. The lower end side of each confirmation tube 71 is inserted into the inside through the opening 70a. As shown in FIGS. 1 and 3, an overflow hole 700 is formed through the upper part of the side wall of the cup 70 in the thickness direction (X-axis direction), and a pipe 700a communicating with a tank (not shown) is connected to the overflow hole 700. are doing. Therefore, water is prevented from overflowing from the opening 70a of the cup 70 into the housing 10 of the waste liquid treatment device 1.

As shown in FIG. 3, for example, a supply port 701 for supplying water to the cup 70 is formed through the lower part of the side wall of the cup 70 in the thickness direction (X-axis direction), and the supply port 701 is not shown. Water supply sources are connected.

For example, as shown in FIGS. 1 and 3, the waste liquid treatment device 1 includes a detection unit 75 that detects the water level of the confirmation pipe 71, and a detection unit 75 that detects whether or not water is being taken from the water intake port 390 of the water intake pipe 39. and a determining section 79 that determines.
The detection unit 75 is, for example, a transmission type optical sensor that includes a light emitting unit 750 (+X direction side) and a light receiving unit 751 (−X direction side). They are arranged so that the confirmation tube 71 is sandwiched therebetween. The light receiving section 751 transmits a detection signal regarding the water level of the confirmation tube 71 to the determining section 79 including a CPU, a memory element, etc. via a wireless or wired communication path 790. Note that in FIG. 1, only one light receiving section 751 is connected to the determining section 79 via a communication path 790, but in reality, each of the other light receiving sections 751 is also individually connected to the determining section 79 via a communication path. ing. Therefore, the determination unit 79 can determine which detection unit 75 has transmitted the detection signal.

The waste liquid treatment apparatus 1 may not include the detection section 75 or the judgment section 79, and instead, the operator may check the water level in the confirmation tube 71 made of a transparent member. Furthermore, in cases where the confirmation tube 71 is not made of a transparent member, the detection section 75 may be arranged inside the confirmation tube 71 in a waterproof state. In this case, the detection unit 75 may be a pressure-sensitive sensor or the like that checks the water level based on a pressure change due to contact with water, instead of a transmission type optical sensor. Further, in the case of the confirmation tubes 71 made of a transparent member, the water levels of the plurality of confirmation tubes 71 can be simultaneously recognized using the captured images by capturing images with a camera disposed near the confirmation tubes 71.

The confirmation means 7 is a substantially rectangular parallelepiped box-shaped cup 70 into which all the confirmation tubes 71 shown in FIGS. 1 and 3 extend in the longitudinal direction (Y-axis direction) of the liquid tank 2, as shown in FIG. , a bottomed cylindrical cup 74 into which each confirmation tube 71 enters may be provided. An overflow hole 740 is formed through the upper part of the side wall of the cup 74 in the thickness direction (X-axis direction), and a pipe 740a that communicates with a tank (not shown) communicates with the overflow hole 740. Therefore, water is prevented from overflowing from the opening 74a at the top of the cup 74 into the housing 10 of the waste liquid treatment apparatus 1 shown in FIG.
In addition, in FIG. 2, the water purification tank 60, the pump 69, etc. are shown in a simplified manner.

1 to 3, a case will be described below in which purified water containing no processing waste is extracted from processing waste liquid containing processing waste (for example, silicon waste) in the waste liquid treatment apparatus 1.
In FIGS. 1 to 3, processing waste liquid L (see FIG. 3) that has flowed into the liquid tank 2 from the supply port 223 shown in FIGS. It passes through the gap between the bottom plate 21 and rises between the cathode plate 30 and the anode plate 31. Then, the processing waste liquid L containing processing waste is stored in the liquid tank 2, and the anode plate 31 and the cathode plate 30 are attached to the processing waste liquid L. Then, the anode plate 31 is energized with the plus (+) of the DC power supply DC shown in FIG. 2, while the negative (-) of the DC power supply DC is energized with the cathode plate 30. As a result, an electric field is formed between the anode plate 31 and the cathode plate 30. Processing waste mixed into the processing waste liquid L and charged negatively (-) is repelled by electrophoresis from the negatively charged cathode plate 30, and is repelled from the positively charged anode plate 30 by electrophoresis. It is attracted to the plate 31.

The processing waste liquid L (processing waste liquid L that has become purified water) in the upper part of the liquid tank 2 from which the processing waste has been roughly removed by adsorption to the anode plate 31 is absorbed by the suction force generated by the pump 69 shown in FIG. The water is taken in by the water intake pipe 39 to which the water is transmitted, and is sent to the purified water tank 60.

In FIG. 1, after the anode plate 31 has adsorbed a certain amount of processing waste, the Y-axis direction moving means 34 shown in FIG. Next, the holding part 320 descends to hold the anode plate 31, and pulls the anode plate 31 out of the processing waste liquid L in the liquid tank 2. Next, the Y-axis direction moving means 34 moves the holding section 320 holding the anode plate 31 to a position directly above the separating section 50 by rotating the horizontal ball screw 340 . Then, as the vertical ball screw 321 rotates in the insertion/extraction means 32, the holding section 320 descends, and the anode plate 31 is inserted into the housing 500 of the separating section 50. At this time, a pair of scrapers (not shown) disposed in the housing 500 of the separating section 50 are in a parallel state with an interval between them in the Y-axis direction.

After the anode plate 31 is lowered into the housing 500, a pair of scrapers sandwich the surface of the anode plate 31. In this state, the holding part 320 holding the anode plate 31 of the insertion/extraction means 32 is pulled upward, so that the pair of scrapers scrapes off the processing waste adhering to the anode plate 31. Processing waste stripped off from the anode plate 31 is stored in a process waste tank 56.

As mentioned above, when the anode plate 31 is taken out from the liquid tank 2, processing waste may fall, and the water intake port 390 of the water intake pipe 39 may be clogged with processing waste, making it impossible to take in purified water. In the waste liquid treatment apparatus 1, the confirmation means 7 continuously confirms whether or not the water intake port 390 is taking in purified water for each water intake pipe 39.

When the waste liquid treatment device 1 is in operation and the water intake port 390 of each water intake pipe 39 is not clogged with processing debris, the suction force generated by the driven pump 69 shown in FIG. The water is transmitted to each water intake port 390 through a connecting pipe 392 and each purified water suction pipe 391. Therefore, the purified water generated above the cathode plate 30 is sucked into the purified water suction pipe 391 from each water intake port 390, reaches the pump 69 through the same path as the above-mentioned path where the suction force is transmitted, and is processed from the pump 69. sent to the device.

When the waste liquid treatment device 1 operates as described above, water is stored in the cup 70 of the confirmation means 7 in preparation, and the tip of the confirmation tube 71 shown in FIG. 3 is submerged in the cup 70. The water surface is located at a predetermined height position Z0 (a height position Z0 lower than the height position of the detection unit 75) in the side pipe. The water stored in the cup 70 may be colored with a predetermined colorant (for example, a black pigment that does not transmit detection light) so that it can be easily seen by the operator.

For example, a plurality of water intake ports 390 of a certain water intake pipe 39 located next to the anode plate 31 taken out as described above are clogged with processing waste, and the processing waste liquid L becomes purified water in the water intake pipe 39. As the suction amount decreases or becomes zero, the suction force of the pump 69 that has been transmitted to the water intake pipe 39 is transmitted to the confirmation pipe 71 branching from the water intake pipe 39. Therefore, the air in the one confirmation tube 71 is sucked by the pump 69 and the pressure in the confirmation tube 71 decreases, and the water surface that was located at the height position Z0 in the confirmation tube 71 moves to the cup 70. It rises as water is sucked up.

As the water level in the confirmation tube 71 rises to a position Z1 higher than the detection section 75, the water (for example, colored The detection unit 75 detects the water level in the confirmation tube 71 by being blocked by water (water). Then, by sending a detection signal from the detection unit 75 to the determination unit 79 via the communication path 790, the determination unit 79 determines whether the amount of water intake from a certain water intake pipe 39 is large or that the water intake port 390 is clogged with processing waste. It is determined that the water intake has fallen below the allowable value, and a warning is issued that there is a water intake pipe 39 whose water intake has fallen below the allowable value. The worker is informed of the position of the water intake pipe 39 that has fallen below the value in the -Y direction in the liquid tank 2 by making an alarm through a speaker or displaying it on a monitor.

If the waste liquid treatment device 1 does not include the detection unit 75 and the determination unit 79, an operator may check the water level of each confirmation pipe 71 formed of a transparent member while the waste liquid treatment device 1 is in operation. It may also be possible to check whether each water intake pipe 39 is taking purified water from the water intake port 390 by looking around. In this case, an allowable water level indicating that the water intake amount of the water intake pipe 39 is within the allowable value is formed on the confirmation pipe 71 as a mark such as a scale, and if the water level in the confirmation pipe 71 exceeds the scale, Additionally, an arrangement may be made in which a worker looking around the confirmation pipe 71 can determine that the water intake pipe 39 is not properly taking in purified water from the water intake port 390.

As described above, the waste liquid treatment device 1 according to the present invention which extracts purified water that does not contain processing waste from the processing waste liquid L containing processing waste discharged from the processing equipment has a liquid tank that stores the processing waste liquid L containing processing waste. 2, a water intake pipe 39 having a water intake port 390 that connects the liquid tank 2 and the pump 69 and drives the pump 69 to take purified water from the liquid tank 2; and a confirmation that allows checking whether purified water is being taken. The confirmation means 7 includes a cup 70 (or cup 74) that stores water, and a confirmation pipe 71 that branches from the water intake pipe 39 and has its tip submerged in the water of the cup 70. When the pump 69 is driven to take purified water from the water intake port 390, the pressure in the confirmation tube 71 decreases, and the operator checks the water level in the confirmation tube 71 that has sucked up water from the cup 70. It can be confirmed whether purified water is being taken from the water intake port 390 or not.

Since the confirmation tube 71 is made of a transparent member, it becomes easy for the operator to confirm the water level in the confirmation tube 71.

The waste liquid treatment device 1 according to the present invention includes a detection unit 75 that detects the water level of the confirmation pipe 71, and a determination unit 79 that determines whether water is being taken from the water intake port 390 based on detection by the detection unit 75. For example, when the judgment unit 79 judges that water is not being taken from the water intake port 390, the judgment unit 79 issues a warning or displays a warning, so that the operator can take water from the water intake port 390. This makes it possible to recognize what has not been done.

It goes without saying that the waste liquid treatment device 1 according to the present invention is not limited to the above-described embodiments, and may be implemented in various different forms within the scope of the technical idea. Further, the external shape of each component of the waste liquid treatment device 1 illustrated in the accompanying drawings is not limited to this, and can be changed as appropriate within the range that can achieve the effects of the present invention.

1: Waste liquid treatment device 10: Housing 2: Liquid tank 21: Bottom plate 22a: Side wall 222: Anode plate support groove 222a: Overflow hole 225: Cathode plate support groove 22b: Side wall 223: Supply port 30: Cathode plate
31: Anode plate 310: Engaged portion 310a: Engaged hole
32: Insertion and removal means
320: Holding part 320d: Plate member 320c: Pair of chuck cylinders 320a: Engagement pin 320b: Cylinder body 329: Vertical plate 321: Vertical ball screw 322: Pair of guide rails 34: Y-axis direction moving means 340: Horizontal ball screw 341 : Guide rail 342: Movable member 39: Water intake pipe 390: Water intake 391: Purified water suction pipe 392: Connecting pipe 69: Pump 60: Purified water tank 7: Confirmation means 70: Cup 70a: Opening 700: Overflow hole 71: Confirmation pipe 75 : Detection section 79: Judgment section 74: Cup 50: Separation section 500: Housing 56: Processing waste tank 57: Hydrogen gas discharge means

Claims (3)

A waste liquid treatment device that extracts purified water that does not contain processing waste from processing waste that contains processing waste discharged from processing equipment,
A liquid tank for storing the processing waste liquid containing the processing waste, a water intake pipe having a water intake for connecting the liquid tank and a pump to drive the pump and drawing the purified water from the liquid tank, and a water intake pipe for drawing the purified water from the liquid tank. and confirmation means that enable confirmation of whether or not the
The confirmation means includes a cup storing water and an L-shaped pipe that branches from the water intake pipe and extends vertically downward from the end that extends horizontally, and the lower end is submerged in the water of the cup. A pipe is provided, and when the pump is driven to draw the purified water from the water intake, when the water intake is blocked due to adhesion of processing waste, the air in the confirmation pipe is When the pressure in the confirmation pipe is reduced by the pump, the water in the cup is sucked up, and the water level in the confirmation pipe extending vertically is higher than a predetermined height above the cup. A waste liquid treatment device that makes it possible to confirm whether or not the purified water is being taken from the source. The waste liquid treatment device according to claim 1, wherein the confirmation tube is formed of a transparent member that allows confirmation of the water level. a detection unit that detects whether the water level of the confirmation pipe is above the predetermined height position ; and when the detection unit detects that the water level of the confirmation pipe is above the predetermined height position, the water intake port 3. The waste liquid treatment apparatus according to claim 1, further comprising a determining section that determines that the waste liquid is clogged with processing waste .

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