JP7364207B2 - air shower - Google Patents

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JP7364207B2
JP7364207B2 JP2019106844A JP2019106844A JP7364207B2 JP 7364207 B2 JP7364207 B2 JP 7364207B2 JP 2019106844 A JP2019106844 A JP 2019106844A JP 2019106844 A JP2019106844 A JP 2019106844A JP 7364207 B2 JP7364207 B2 JP 7364207B2
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air flow
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dust removal
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shower
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真 高柳
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株式会社Trinc
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本発明は、人体や物体等の除塵対象に付着する異物を、開放空間でエアブローを吹き付けて除去するエアシャワー、すなわち、開放型のエアシャワーに関する。 The present invention relates to an air shower that removes foreign matter adhering to objects such as human bodies and objects by blowing air in an open space, that is, an open air shower.

クリーンルーム通用口等に設置されるエアシャワーは、一般に、閉鎖空間であるシャワー室を設け、この閉鎖空間内で側方から除塵対象にエアブローを吹き付け、シャワー室内で集塵するものであるが、インターロックされたドアを開け閉めする閉鎖空間への入退出動作が煩雑であるばかりでなく、ドア有することから大型になり、製造原価は高価であり、高頻度でドア開閉するため、ドア補修等のメンテナンスを要し、多様な経費が発生するという問題がある。 Air showers installed at clean room side entrances generally have a shower room that is a closed space, and inside this closed space, air blows from the side to the target to remove dust, and the dust is collected inside the shower room. Not only is it complicated to enter and exit a closed space by opening and closing a locked door, but the door is also large and the manufacturing cost is high.Since the door is opened and closed frequently, door repairs, etc. are required. There is a problem that maintenance is required and various expenses are incurred.

そこで、特許文献1記載のエアシャワー装置は、シャワー室両側の側面室に、着脱可能な送風部を取り付け、送風部自体も相互組付け可能な別体部材により構成して、コストダウンを図っているが、さらなるコストダウンが望まれていた。
しかし、開放空間でエアブローを行うとすると、除塵対象から除去された異物が周囲に拡散する可能性がある。
Therefore, the air shower device described in Patent Document 1 has removable air blowers attached to the side chambers on both sides of the shower room, and the air blowers themselves are constructed from separate members that can be assembled with each other to reduce costs. However, further cost reductions were desired.
However, if air blowing is performed in an open space, there is a possibility that foreign matter removed from the object to be dusted will spread to the surrounding area.

特許文献2は、ワークに対する作業を行うテーブル上の作業空間等を清浄に維持する清浄空間維持装置に係り、図7、図8に示すように、作業空間の一側面の吹出しユニット102、他側面に吸入ユニット104を配置し、吹出しユニット102から吹出した空気を吸入ユニット104で回収するもので、一見エアシャワーのような印象を与えるが、作業空間の上面は庇118によって塞がれ(図7、図8)、作業空間の後部は、吹出しユニット102、吸入ユニット104を連結する部材120によって塞がれている。このため、作業空間は略箱状に形成され、閉鎖的な特性を備えている。これによって、作業空間内で生じた塵埃は効果的に吸入ユニット104で回収される。一方、特許文献2のような構造のエアシャワーでは、入口と出口が同一であるため、除塵対象である人間の出入が難しい。 Patent Document 2 relates to a clean space maintenance device that maintains clean a work space on a table where work is performed on a workpiece, and as shown in FIGS. 7 and 8, a blow-off unit 102 on one side of the work space, A suction unit 104 is disposed in the air, and the air blown out from the blow-off unit 102 is collected by the suction unit 104. At first glance, it gives the impression of an air shower, but the upper surface of the work space is covered by an eaves 118 (Fig. 7 , FIG. 8), the rear part of the work space is closed by a member 120 that connects the blow-off unit 102 and the suction unit 104. Therefore, the work space is formed in a substantially box shape and has closed characteristics. As a result, dust generated within the work space is effectively collected by the suction unit 104. On the other hand, in an air shower having a structure such as that disclosed in Patent Document 2, since the inlet and outlet are the same, it is difficult for people who are targeted for dust removal to enter and exit.

特開2001-70902号公報Japanese Patent Application Publication No. 2001-70902 特開2015-111031号公報Japanese Patent Application Publication No. 2015-111031

本発明は、開放型のエアシャワーを実現することによって、処理能力を上げ、小型化し、コストダウンを図るとともに、充分高い除塵率を確保し、除去された異物の周囲への拡散を防止することを目的とする。 By realizing an open air shower, the present invention increases processing capacity, reduces size, and reduces costs, while ensuring a sufficiently high dust removal rate and preventing removed foreign matter from dispersing to the surrounding area. With the goal.

本発明に係るエアシャワーは、開放空間内の除塵対象に除塵エア流を吹き付ける除塵エア流発生手段と、前記除塵対象を挟んで、前記除塵エア流発生手段の反対側に配置され、吸引力によって、前記除塵対象の周囲を流れる集塵エア流を発生する集塵手段と、を備えたエアシャワーにおいて、前記除塵エア流発生手段が設けられた第1の筐体と、前記集塵手段が設けられた第2の筐体と、前記第2の筐体に設けられ、前記集塵エア流を浄化するフィルタと、前記第1、第2の筐体を連通するとともに、浄化された集塵エア流を、前記除塵エア流発生手段の周囲に帰還させる帰還流路と、前記第1の筐体に設けられたファンを備え、帰還流路によって第1の筐体に帰還した集塵エア流を、前記除塵エア流を厚く囲繞するシースエア流として、前記除塵エア流に沿って流すシースエア流発生手段と、をさらに備え、前記集塵手段は、前記除塵対象に衝突した前記除塵エア流、前記除塵エア流によって除塵された異物、および前記シースエア流を、前記集塵エア流として吸引するものである。 The air shower according to the present invention includes a dust removal air flow generating means for blowing a dust removal air flow onto a dust removal target in an open space, and a dust removal air flow generation means disposed on the opposite side of the dust removal air flow generation means with the dust removal target in between, and , a dust collecting means for generating a dust collecting air flow flowing around the dust removal target, a first casing in which the dust removing air flow generating means is provided, and a dust collecting means provided in the air shower. a filter provided in the second housing that purifies the dust collection air flow, and a filter that communicates with the first and second housings, and which also communicates with the purified dust collection air. A return flow path for returning the air flow to the surroundings of the dust removal air flow generation means, and a fan provided in the first casing, the dust collection air flow returned to the first casing through the return flow path. , further comprising: a sheath air flow generating means that causes a sheath air flow that thickly surrounds the dust removal air flow to flow along the dust removal air flow; The foreign matter removed by the air flow and the sheath air flow are sucked as the dust collecting air flow.

本発明によれば、エアシャワーを開放型として小型化し、処理能力を上げ、コストダウンを図るとともに、充分高い除塵率を確保し、除塵した異物の周囲への拡散を防止することが可能である。 According to the present invention, it is possible to miniaturize the air shower by making it an open type, increase processing capacity, reduce costs, ensure a sufficiently high dust removal rate, and prevent the spread of removed foreign matter to the surrounding area. .

本発明に係るエアシャワーの実施例1を示す部分破断正面図である。1 is a partially cutaway front view showing Example 1 of the air shower according to the present invention. 図1の部分破断平面図である。FIG. 2 is a partially cutaway plan view of FIG. 1; 図1のIII矢視線に沿う右側面図である。FIG. 2 is a right side view taken along the line of arrow III in FIG. 1. FIG. 図1のIV矢視線に沿う側面図である。2 is a side view taken along the line of arrow IV in FIG. 1. FIG. 図1のV矢視線に沿う側面図である。FIG. 2 is a side view taken along the line of arrow V in FIG. 1. FIG. 除塵エア流発生手段および空気イオン放射手段を示す斜視図である。FIG. 3 is a perspective view showing a dust removal air flow generating means and an air ion emitting means. 特許文献2における実施例1を示す平面図(図1)である。FIG. 1 is a plan view (FIG. 1) showing Example 1 in Patent Document 2. 特許文献2における実施例3を示す斜視図(図3)である。FIG. 3 is a perspective view (FIG. 3) showing Example 3 in Patent Document 2.

次に、本発明に係るエアシャワーの一実施例を図1~図5に基づいて説明する。 Next, an embodiment of the air shower according to the present invention will be described based on FIGS. 1 to 5.

本発明に係るエアシャワー100は、ドア等の開閉手段のない開放空間OS内に、人間等の除塵対象MMを配置し、除塵エア流DRを吹き付けて、除塵対象MMに付着した異物Dを除去する。エアシャワー100は、エア供給ユニット200およびエア吸引ユニット300を有し、除塵エア流DRはエア供給ユニット200から吹き出される。開放空間OSは両ユニット200、300の間に設けられ、エア吸引ユニット300は開放空間OS内のエアを吸引するとともに、除塵対象から除去された異物Dを吸引する。 The air shower 100 according to the present invention places a dust removal target MM such as a person in an open space OS without an opening/closing means such as a door, and blows a dust removal air flow DR to remove foreign matter D attached to the dust removal target MM. do. The air shower 100 includes an air supply unit 200 and an air suction unit 300, and the dust removal air flow DR is blown out from the air supply unit 200. The open space OS is provided between both units 200 and 300, and the air suction unit 300 sucks the air in the open space OS and also sucks the foreign matter D removed from the object to be dusted.

エア供給ユニット200は空洞の、第1の筐体210を有し、筐体210には、開放空間OSに接する略鉛直な送気面220と、送気面220の裏側に略鉛直な吸気面230が設けられている。エア供給ユニット200には、送気面220の左右略中央から、縦一列、略水平に除塵エア流DRを吹き出す除塵エア流発生手段400が設けられており、除塵エア流発生手段400は、吸気面230に開口する吸気フィルタ410と、吸気フィルタ410からエアを吸引して開放空間OS方向にエアを送給するファン420と、ファン420から送給されたエアを開放空間OSに向かって吹き出す吹き出し部430とを備える。吹き出し部430はファン420の下流で上下に延在し、その下流面に、縦一列に配列された吐出孔435が穿設されている。
吸気フィルタ410、ファン420、吹き出し部430は協働して除塵エア流発生手段400として機能する。
The air supply unit 200 has a hollow first casing 210, and the casing 210 has a substantially vertical air supply surface 220 in contact with the open space OS, and a substantially vertical intake surface on the back side of the air supply surface 220. 230 is provided. The air supply unit 200 is provided with a dust removal air flow generation means 400 that blows out a dust removal air flow DR in a vertical line and approximately horizontally from approximately the left and right center of the air supply surface 220. An intake filter 410 that opens on the surface 230, a fan 420 that sucks air from the intake filter 410 and supplies the air toward the open space OS, and a blower that blows out the air supplied from the fan 420 toward the open space OS. 430. The blowout section 430 extends vertically downstream of the fan 420, and has discharge holes 435 arranged in a vertical line formed in its downstream surface.
The intake filter 410, the fan 420, and the blowing section 430 function together as a dust removal air flow generating means 400.

除塵エア流発生手段400における吹き出し口430の近傍には、イオナイザ500が配置され、イオナイザ500が発生したイオンINは除塵エア流DRに乗って、空気イオンAIとして、除塵対象MMに放射される。これによって、異物Dおよび除塵対象MMは除電され、異物Dは除塵対象MMから容易に離脱する。除塵エア流発生手段400とイオナイザ500とは、協働して空気イオン放射手段600として機能する。 An ionizer 500 is disposed near the outlet 430 of the dust removal air flow generating means 400, and the ions IN generated by the ionizer 500 ride on the dust removal air flow DR and are emitted to the dust removal target MM as air ions AI. As a result, the foreign matter D and the dust removal target MM are neutralized, and the foreign matter D easily separates from the dust removal target MM. The dust removal air flow generating means 400 and the ionizer 500 function together as an air ion emitting means 600.

エア供給ユニット200の送気面220には、メッシュ状の保護部材225が設けられ、除塵エア流発生手段400および空気イオン放射手段600は保護部材225によって保護されている。
保護部材225の水平方向中央には、除塵エア流DRを吹き出す除塵エア流吹き出し口226が縦1列に複数設けられ、人体等の縦長の除塵対象MMに対して、その全体に万遍無く除塵エア流DRを吹き付け得る。
除塵エア流吹き出し口226の両側には、それぞれ、空気イオンAIを放射する空気イオン放射口227が縦一列に複数設けられ、人体等の縦長の除塵対象MMに対して、その全体に万遍無く空気イオンAIを吹き付け得る。
A mesh-like protection member 225 is provided on the air supply surface 220 of the air supply unit 200, and the dust removal air flow generating means 400 and the air ion emitting means 600 are protected by the protection member 225.
At the horizontal center of the protection member 225, a plurality of dust removal air flow outlets 226 that blow out the dust removal air flow DR are provided in a vertical row, and dust is evenly removed from the entire vertically long object of dust removal MM such as a human body. Air flow DR can be blown.
A plurality of air ion emitting ports 227 that emit air ion AI are provided in a vertical line on both sides of the dust removal air flow outlet 226, and the air ion emitting ports 227 are arranged in a vertical line on both sides of the dust removal air flow outlet 226, so that air ion emitting ports 227 that emit air ion AI are provided in a vertical line, and the air ion emitting ports 227 are arranged in a vertical line to emit air ion AI evenly over the whole of the vertically elongated dust removal target MM such as a human body. Air ion AI can be sprayed.

エア吸引ユニット300は空洞の、第2の筐体310を有し、筐体310には、送気面220に対向する吸気面320が設けられている。吸気面(吸気口)320には、集塵手段700の吸引力によって、除塵エア流DR、異物D、シースエア流SA、開放空間OS内エアを含む集塵エア流CAが流入する。
筐体310内には、吸気面320に対向するフィルタ900が設けられ、集塵エア流CAはフィルタ900によって浄化される。筐体310は、その底面に帰還流路810が接続され、帰還流路810は底面において筐体210、310を連通する。筐体210には、帰還流路810を通じて、筐体310内のエアを吸引するファン800が設けられ、ファン800は吸引したエアを筐体210内、特に、除塵エア発生手段400の周囲に送給するとともに、送気面220において、除塵エア発生手段400の周囲から、開放空間OSに向かって、シース(鞘)エア流SAを供給する。ファン800は、帰還流路810から筐体210の方向にのみエアを案内するガイドボックス830内に収められ、ファン800はエアを充分に昇圧しつつ筐体210内に送給し、かつ周囲へのエア漏出は防止されている。なお、シースエア流SAの機能については後述する。
筐体310、フィルタ900、帰還流路810、ファン800、筐体210は、協働して、集塵エア流DRを発生するとともに、集塵エア流DRを浄化する集塵手段700として機能し、同時に、筐体310、フィルタ900、帰還流路810、ファン800、筐体210はシース(鞘)エア流SAを発生するシースエア流発生手段820として機能する。
筐体310の吸気面320には、メッシュ状の保護部材325が設けられ、筐体310やフィルタ900が保護されている。
なお、帰還流路810は、必ずしも底面相互を連通する必要はなく、相互に異なる位置、上面(天井)、側面の位置等、エアシャワー100の設置状況に応じて、自由に選択し得る。
The air suction unit 300 has a hollow second housing 310 , and the housing 310 is provided with an intake surface 320 that faces the air supply surface 220 . A dust collection air flow CA containing the dust removal air flow DR, foreign matter D, sheath air flow SA, and air in the open space OS flows into the intake surface (intake port) 320 by the suction force of the dust collection means 700.
A filter 900 facing the intake surface 320 is provided inside the housing 310, and the dust collecting air flow CA is purified by the filter 900. A return passage 810 is connected to the bottom of the housing 310, and the return passage 810 communicates with the housings 210 and 310 at the bottom. The casing 210 is provided with a fan 800 that sucks air inside the casing 310 through a return flow path 810. The fan 800 sends the sucked air into the casing 210, particularly around the dust removal air generating means 400. At the same time, on the air supply surface 220, a sheath air flow SA is supplied from around the dust removal air generation means 400 toward the open space OS. The fan 800 is housed in a guide box 830 that guides air only in the direction of the casing 210 from the return flow path 810, and the fan 800 supplies the air into the casing 210 while sufficiently boosting the pressure and to the surroundings. Air leakage is prevented. Note that the function of the sheath air flow SA will be described later.
The housing 310, the filter 900, the return flow path 810, the fan 800, and the housing 210 work together to generate the dust collection air flow DR and function as the dust collection means 700 that purifies the dust collection air flow DR. At the same time, the casing 310, the filter 900, the return passage 810, the fan 800, and the casing 210 function as a sheath air flow generating means 820 that generates the sheath air flow SA.
A mesh-like protection member 325 is provided on the intake surface 320 of the housing 310 to protect the housing 310 and the filter 900.
Note that the return channels 810 do not necessarily need to communicate with each other on the bottom surfaces, and can be freely selected from mutually different positions, positions on the top surface (ceiling), positions on the side surfaces, etc., depending on the installation situation of the air shower 100.

図4において、除塵エア流吹出口226の存在領域は、送気面220における中央の狭小部分であり、その周囲の広範な領域からシースエア流SAが送給されるため、シースエア流SAが除塵エア流DRを厚く囲繞することは明らかである。 すなわち、シースエア流SAは、送気面220から、除塵対象MMおよび除塵エア流DRを囲繞しつつ、除塵エア流DRに沿って、吸気面320方向に流れるため除塵エア流DRによって除塵された異物Dは、拡散することなく、集塵エア流CAとして、円滑に吸気面320に到達する。 これによって、フィルタ900で浄化された集塵エア流CAが、異物拡散防止効果を有するシースエア流SAとして再利用されつつ、異物の拡散を防止する。このように異物拡散防止効果が保証されたエアシャワー100においては、強力な除塵エア流DRを除塵対象MMに吹き付けることが可能であり、除塵対象MMの除塵率を著しく高めることができる。開放空間OS内に開放空間OSの容量を超えた過剰のエアが存在すると、開放空間OSを包囲するシースエア流SAの一部が開放空間OSからあふれる可能性があるが、シースエア流SAはフィルタ900で浄化されているので、エアシャワー100周辺の環境を汚染することはない。 In FIG. 4, the area where the dust removal air flow outlet 226 exists is a narrow central part of the air supply surface 220, and the sheath air flow SA is fed from a wide area around it, so that the sheath air flow SA is the dust removal air. It is clear that the flow DR is surrounded thickly. That is, since the sheath air flow SA flows from the air supply surface 220 toward the intake surface 320 along the dust removal air flow DR while surrounding the dust removal target MM and the dust removal air flow DR, the foreign matter removed by the dust removal air flow DR is removed. D smoothly reaches the intake surface 320 as a dust collecting air flow CA without being diffused. As a result, the dust collecting air flow CA purified by the filter 900 is reused as the sheath air flow SA having the effect of preventing foreign matter diffusion, and the diffusion of foreign matter is prevented. In the air shower 100 in which the foreign matter diffusion prevention effect is guaranteed in this way, it is possible to blow a powerful dust removal air flow DR to the object MM to be removed, and the dust removal rate of the object MM to be removed can be significantly increased. If there is excess air in the open space OS that exceeds the capacity of the open space OS, a part of the sheath air flow SA surrounding the open space OS may overflow from the open space OS. The environment around the air shower 100 will not be contaminated.

除塵エア流DRは、開放空間OS内に流入する際には集塵手段700の方向に向かう運動量を保有しており、除塵対象MMに衝突して運動量が減少した除塵エア流DRや、除塵対象MMから剥離した異物Dは、運動量が残存する除塵エア流DRと、それを囲繞するシースエア流SAによって、除塵対象MMの周縁に沿って、吸気面320の方向に運ばれる。このとき、異物Dは集塵エア流CAによって導かれて、吸気面320に向かって流れ、吸気面320に流入する。
すなわち、開放空間OS内の除塵対象MMを挟んで、除塵エア流発生手段400の反対側に集塵手段700を配置することにより、異物Dの開放空間OSの周囲への拡散を防止し得る。
When the dust removal air flow DR flows into the open space OS, it has a momentum toward the dust collection means 700, and the dust removal air flow DR whose momentum has decreased by colliding with the dust removal target MM and the dust removal target MM The foreign matter D separated from the MM is carried toward the intake surface 320 along the periphery of the MM to be dust removed by the dust removal air flow DR in which momentum remains and the sheath air flow SA surrounding it. At this time, the foreign matter D is guided by the dust collection air flow CA, flows toward the intake surface 320, and flows into the intake surface 320.
That is, by arranging the dust collection means 700 on the opposite side of the dust removal air flow generation means 400 across the dust removal target MM in the open space OS, it is possible to prevent the foreign matter D from spreading around the open space OS.

以上のとおり、本実施例のエアシャワー100は、ドアを持たず、開放空間OS内で除塵対象MMの除塵を行うので小型化でき、その製造原価、メンテナンス費等の経費を節減し得るとともに、異物Dの拡散を防止し、かつ高い集塵率を確保し得る。 As described above, the air shower 100 of this embodiment does not have a door and removes dust from the MM to be removed in the open space OS, so it can be downsized, and costs such as manufacturing costs and maintenance costs can be reduced. Diffusion of foreign matter D can be prevented and a high dust collection rate can be ensured.

以上の実施例では、除塵対象MMが開放空間OSに静止した状態で、除塵エア流DRを吹き付けたが、開放空間OSを通過するベルトコンベア等搬送手段を設けて置き、移動手段の両側にエア供給ユニット200、エア吸引ユニット300を設置しておき、除塵対象MMが開放空間OSを通過する期間内に吹き付けることも可能である。 In the above embodiment, the dust removal air flow DR was blown onto the dust removal target MM while it remained stationary in the open space OS. It is also possible to install the supply unit 200 and the air suction unit 300 and spray the dust while the object MM passes through the open space OS.

AI 空気イオン
CA 集塵エア流
D 異物
DR 除塵エア流
FB 帰還エア流
IN イオン
MM 除塵対象
OS 開放空間
SA シース(鞘)エア流
100 エアシャワー
200 エア供給ユニット
210 第1の筐体
220 送気面
225 保護部材
226 除塵エア流吹き出し口
227 空気イオン放射口
230 吸気面
300 エア吸引ユニット
310 第2の筐体
320 吸気面
325 保護部材
400 除塵エア流発生手段
410 吸気フィルタ
415 外気吸入口
420 ファン
430 吹き出し口
500 イオナイザ
600 空気イオン放射手段
700 集塵手段
800 ファン
810 帰還流路
820 シースエア流発生手段
830 ガイドボックス
900 フィルタ
AI Air ion CA Dust collection air flow D Foreign object DR Dust removal air flow FB Return air flow IN Ion MM Dust removal target OS Open space SA Sheath air flow 100 Air shower 200 Air supply unit 210 First housing 220 Air supply surface 225 Protective member 226 Dust removal air flow outlet 227 Air ion emission port 230 Intake surface 300 Air suction unit 310 Second housing 320 Intake surface 325 Protective member 400 Dust removal air flow generation means 410 Intake filter 415 Outside air intake port 420 Fan 430 Blowout Port 500 Ionizer 600 Air ion emitting means 700 Dust collecting means 800 Fan 810 Return passage 820 Sheath air flow generating means 830 Guide box 900 Filter

Claims (4)

開放空間内の除塵対象に除塵エア流を吹き付ける除塵エア流発生手段と、 前記除塵対象を挟んで、前記除塵エア流発生手段の反対側に配置され、吸引力によって、前記除塵対象の周囲を流れる集塵エア流を発生する集塵手段と、 を備えたエアシャワーにおいて、 前記除塵エア流発生手段が設けられた第1の筐体と、 前記集塵手段が設けられた第2の筐体と、 前記第2の筐体に設けられ、前記集塵エア流を浄化するフィルタと、 前記第1、第2の筐体を連通するとともに、浄化された集塵エア流を、前記除塵エア流発生手段の周囲に帰還させる帰還流路と、前記第1の筐体に設けられたファンを備え、帰還流路によって第1の筐体に帰還した集塵エア流を、前記除塵エア流を厚く囲繞するシースエア流として、前記除塵エア流に沿って流すシースエア流発生手段と、をさらに備え、前記集塵手段は、前記除塵対象に衝突した前記除塵エア流、前記除塵エア流によって除塵された異物、および前記シースエア流を、前記集塵エア流として吸引する、エアシャワー。 a dust removal air flow generating means for blowing a dust removal air flow onto a dust removal target in an open space; and a dust removal air flow generating means disposed on the opposite side of the dust removal air flow generation means with the dust removal target in between, and the dust removal air flow flowing around the dust removal target by suction force. a dust collecting means for generating a dust collecting air flow; an air shower comprising: a first casing in which the dust removing air flow generating means is provided; a second casing in which the dust collecting means is provided; , a filter provided in the second housing that purifies the dust collection air flow communicates with the first and second housings, and the purified dust collection air flow is used to generate the dust removal air flow. A return flow path for returning the air to the periphery of the means and a fan provided in the first casing are provided, and the dust collection air flow returned to the first casing by the return flow path is thickly surrounded by the dust removal air flow. The dust collection means further includes a sheath air flow generating means for causing a sheath air flow to flow along the dust removal air flow, and the dust collection means is configured to generate a sheath air flow that collides with the dust removal target, foreign matter removed by the dust removal air flow, and an air shower that sucks the sheath air flow as the dust collecting air flow. 前記除塵エア流発生手段は、エアシャワー周辺のエアを浄化して取り込むフィルタを有し、このフィルタで浄化したエアを、除塵エア流として除塵対象に吹き付けることを特徴とする請求項1記載のエアシャワー。 The air according to claim 1, wherein the dust removal air flow generating means has a filter that purifies and takes in air around the air shower, and blows the air purified by the filter onto the object to be dusted as a dust removal air flow. shower. 前記除塵エアに乗せる空気イオンを発生し、前記空気イオンを前記除塵エアとともに前記除塵対象表面に放射する空気イオン放射手段をさらに備えた、請求項1または2に記載のエアシャワー。 The air shower according to claim 1 or 2, further comprising air ion emitting means that generates air ions to be carried on the dust removal air flow and radiates the air ions together with the dust removal air flow onto the dust removal target surface. 前記開放空間にはドアなどの開閉手段は設けられていないことを特徴とする請求項1乃至3のいずれか1項に記載のエアシャワー。 The air shower according to any one of claims 1 to 3, wherein the open space is not provided with an opening/closing means such as a door.
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