JP7336983B2 - イオンセンサ装置 - Google Patents

イオンセンサ装置 Download PDF

Info

Publication number
JP7336983B2
JP7336983B2 JP2019236925A JP2019236925A JP7336983B2 JP 7336983 B2 JP7336983 B2 JP 7336983B2 JP 2019236925 A JP2019236925 A JP 2019236925A JP 2019236925 A JP2019236925 A JP 2019236925A JP 7336983 B2 JP7336983 B2 JP 7336983B2
Authority
JP
Japan
Prior art keywords
field effect
potential
sensor device
drain
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019236925A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021105564A5 (https=
JP2021105564A (ja
Inventor
裕之 関根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianma Japan Ltd
Original Assignee
Tianma Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianma Japan Ltd filed Critical Tianma Japan Ltd
Priority to JP2019236925A priority Critical patent/JP7336983B2/ja
Priority to US17/099,976 priority patent/US11846604B2/en
Priority to CN202410985583.1A priority patent/CN118883686A/zh
Priority to CN202011284635.0A priority patent/CN113049658B/zh
Publication of JP2021105564A publication Critical patent/JP2021105564A/ja
Publication of JP2021105564A5 publication Critical patent/JP2021105564A5/ja
Application granted granted Critical
Priority to US18/241,545 priority patent/US12235234B2/en
Publication of JP7336983B2 publication Critical patent/JP7336983B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6733Multi-gate TFTs
    • H10D30/6734Multi-gate TFTs having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Thin Film Transistor (AREA)
JP2019236925A 2019-12-26 2019-12-26 イオンセンサ装置 Active JP7336983B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2019236925A JP7336983B2 (ja) 2019-12-26 2019-12-26 イオンセンサ装置
US17/099,976 US11846604B2 (en) 2019-12-26 2020-11-17 Ion sensing device
CN202410985583.1A CN118883686A (zh) 2019-12-26 2020-11-17 离子感测设备
CN202011284635.0A CN113049658B (zh) 2019-12-26 2020-11-17 离子感测设备
US18/241,545 US12235234B2 (en) 2019-12-26 2023-09-01 Ion sensing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019236925A JP7336983B2 (ja) 2019-12-26 2019-12-26 イオンセンサ装置

Publications (3)

Publication Number Publication Date
JP2021105564A JP2021105564A (ja) 2021-07-26
JP2021105564A5 JP2021105564A5 (https=) 2022-12-01
JP7336983B2 true JP7336983B2 (ja) 2023-09-01

Family

ID=76507905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019236925A Active JP7336983B2 (ja) 2019-12-26 2019-12-26 イオンセンサ装置

Country Status (3)

Country Link
US (2) US11846604B2 (https=)
JP (1) JP7336983B2 (https=)
CN (2) CN113049658B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7336983B2 (ja) * 2019-12-26 2023-09-01 Tianma Japan株式会社 イオンセンサ装置
JP7573836B2 (ja) * 2020-12-16 2024-10-28 Tianma Japan株式会社 イオンセンサ装置
JP7611795B2 (ja) * 2021-09-29 2025-01-10 ラピスセミコンダクタ株式会社 測定装置、測定方法、イオン感応半導体デバイス
CN114002300B (zh) * 2021-10-15 2022-07-12 华中科技大学 一种基于液栅型场效应晶体管生物传感器的电路检测系统
CN114324538B (zh) * 2021-12-31 2024-06-07 上海天马微电子有限公司 检测器件及其检测方法
JP2024060759A (ja) * 2022-10-20 2024-05-07 Tianma Japan株式会社 撮像装置
CN116075159B (zh) * 2023-01-19 2025-11-04 杭州领挚科技有限公司 一种薄膜晶体管传感像素电路、阵列和结构
WO2025142975A1 (ja) * 2023-12-28 2025-07-03 三井金属鉱業株式会社 デバイス及びこれを備える濃度測定装置並びにこれを用いた濃度測定方法
WO2025226794A1 (en) * 2024-04-24 2025-10-30 The University Of Chicago Systems and methods for electrically detecting a biomarker

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015190848A (ja) 2014-03-28 2015-11-02 Nltテクノロジー株式会社 Tftイオンセンサ並びにこれを用いた測定方法及びtftイオンセンサ機器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128345A (ja) * 1983-12-15 1985-07-09 Olympus Optical Co Ltd イオン濃度測定装置
JPH04181150A (ja) * 1990-11-15 1992-06-29 Kaoru Santo 脂質膜型匂いセンサ
JP3112599B2 (ja) * 1993-03-30 2000-11-27 新電元工業株式会社 イオンセンサ及びイオン測定方法
US20040132204A1 (en) * 2003-01-03 2004-07-08 Jung-Chuan Chou Portable pH detector
JP4669213B2 (ja) * 2003-08-29 2011-04-13 独立行政法人科学技術振興機構 電界効果トランジスタ及び単一電子トランジスタ並びにそれを用いたセンサ
TWI241020B (en) * 2004-03-31 2005-10-01 Univ Nat Yunlin Sci & Tech Method of manufacturing TiO2 sensing film, ISFET having TiO2 sensing film, and methods and apparatus for measuring the temperature parameter, drift, and hysteresis thereof
US7544979B2 (en) * 2004-04-16 2009-06-09 Technion Research & Development Foundation Ltd. Ion concentration transistor and dual-mode sensors
US7842174B2 (en) * 2006-06-12 2010-11-30 Utah State University Electrochemical chip with miniaturized sensor array
US8129978B2 (en) * 2006-07-13 2012-03-06 National University Corporation Nagoya University Material detector
US9499981B2 (en) * 2013-05-03 2016-11-22 Ibacos, Inc. Water-management system
JP6656507B2 (ja) 2015-09-18 2020-03-04 Tianma Japan株式会社 バイオセンサ及び検出装置
US10466199B2 (en) * 2015-12-28 2019-11-05 National Taiwan University Biosensor device
US10082481B2 (en) * 2016-07-07 2018-09-25 Sharp Life Science (Eu) Limited Bio-sensor pixel circuit with amplification
JP6891658B2 (ja) * 2017-06-16 2021-06-18 株式会社豊田中央研究所 センサ用トランジスタの駆動回路
JP7336983B2 (ja) * 2019-12-26 2023-09-01 Tianma Japan株式会社 イオンセンサ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015190848A (ja) 2014-03-28 2015-11-02 Nltテクノロジー株式会社 Tftイオンセンサ並びにこれを用いた測定方法及びtftイオンセンサ機器

Also Published As

Publication number Publication date
US11846604B2 (en) 2023-12-19
CN113049658A (zh) 2021-06-29
JP2021105564A (ja) 2021-07-26
CN118883686A (zh) 2024-11-01
US12235234B2 (en) 2025-02-25
US20230408441A1 (en) 2023-12-21
CN113049658B (zh) 2024-08-16
US20210199619A1 (en) 2021-07-01

Similar Documents

Publication Publication Date Title
JP7336983B2 (ja) イオンセンサ装置
Lauks et al. The extended gate chemically sensitive field effect transistor as multi-species microprobe
JP5509118B2 (ja) イオン感応電界効果トランジスタを含む信号処理回路および流体の性質をモニタするための方法
Milgrew et al. Matching the transconductance characteristics of CMOS ISFET arrays by removing trapped charge
JP4883812B2 (ja) 物質検出装置
US10571426B2 (en) Bio-sensor pixel circuit with amplification
CN102778491B (zh) 传感器
US7981264B2 (en) Drift calibration method and device for the potentiometric sensor
Rani et al. ISFET pH sensor characterization: towards biosensor microchip application
US7368917B2 (en) Electronic circuit for ion sensor with body effect reduction
Schöning et al. A novel silicon-based sensor array with capacitive EIS structures
CN110579525B (zh) 传感器装置
US8668822B2 (en) Method for operating an ISFET sensor
CN114624308B (zh) 离子传感设备
KR101729685B1 (ko) 이온 농도 검출 방법 및 장치
CN106921374B (zh) 开关电容式isfet信号读取电路及其控制方法
Van den Vlekkert Ion-sensitive field effect transistors
Das et al. Readout circuits for noise compensation in isfet sensory system
Prathap Silicon Ion Sensitive Field Effect Transistor Circuitry Architectures for Improved On-Chip pH Sensing
Chou et al. Study on the sensitivity and hysteresis behaviour of the commercial Sentron 1090 A1203 gate pil-ISFET
Chou et al. Study on the characteristics of the measurement system for pH array sensors
Chou et al. Sensitivity and hysteresis behavior of the commercial Sentron 1090 Al2O3 gate pH-ISFET
JP2017167064A (ja) 電気化学センサ及び電気化学センサを用いた測定方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221122

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20221122

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230721

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230808

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230822

R150 Certificate of patent or registration of utility model

Ref document number: 7336983

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150