JP7324920B2 - EDGE TRIMMING METHOD AND EDGE TRIMMING APPARATUS FOR BONDED WAFER - Google Patents

Description

The present invention relates to a method for edge trimming of a bonded wafer formed by bonding two wafers together. It relates to a trimming method.

2. Description of the Related Art Advances in LSI technology have promoted the integration of semiconductor chips, but further miniaturization of elements is required for further integration. However, there is a limit to miniaturization of elements, and two-dimensional circuit layout is approaching the limit. Therefore, attempts have been made to increase the degree of integration by making the circuit arrangement three-dimensional instead of miniaturizing the elements. As an example, there is a wafer-on-wafer (WOW) type bonded wafer in which two wafers are stacked and bonded together.

In the bonded wafer, two wafers having substantially the same shape are bonded together via an adhesive agent or the like or directly. In the process of bonding two wafers, relative movement between the two wafers occurs due to some cause such as a positional error at the time of bonding or a period until the bonded surfaces of the wafers abut and are fixed. Since there is a possibility, a predetermined positional deviation of, for example, 0.5 mm is allowed.

This misalignment between wafers is eliminated in the subsequent edge trimming process. That is, a perfectly circular bonded wafer can be obtained by determining the center position of the two bonded wafers, rotating the bonded wafer around the determined center, and trimming the edges using a grindstone.

Patent Document 1 discloses an outer peripheral grinding apparatus for grinding the outer peripheral portion of a bonded substrate in which two wafers, a bond wafer placed on the upper side and a base wafer placed on the lower side, are laminated and bonded together. . In this publication, in grinding the outer periphery of the bonded substrate, in order to improve the tolerance of the terrace processing width, alignment means for aligning the bonded substrate and the outer periphery of the bond wafer of the bonded substrate aligned by the alignment means are disclosed. It has grinding means for grinding the part. Alignment means aligns the bonded substrate stack with the base wafer as a reference.

Further, Patent Document 2 discloses a processing method for accurately detecting the outer circumference circle position of a bonded wafer. In this publication, a cutting blade is used to cut a position a predetermined distance from the outer periphery of a bonded wafer, which is a wafer bonded onto a support plate, toward the center of the wafer. Then, the irradiating means irradiates the outer peripheral edge of the bonded wafer with light, and the imaging means facing the irradiating means across the bonded wafer captures the outer peripheral edge of the bonded wafer to form a captured image. is used to detect the outer edge of the bonded wafer. Further, based on the detected outer edge position, a rotating cutting blade is cut at a position spaced apart from the outer edge of the bonded wafer by a predetermined distance toward the center, and the chuck table is rotated to cut the wafer.

Non-Patent Document 1 describes measuring the positional deviation of the center positions of two wafers in a bonded wafer produced by bonding two wafers together. In this document, a shape sensor that scans the side surface of the bonded wafer with a laser and an edge sensor composed of an LED light source and a CCD sensor are arranged, and based on the output from the edge sensor, the center position of each wafer of the bonded wafer I am looking for Then, the positional deviation of the two bonded wafers is calculated from the difference between these two center positions.

JP 2006-253387 A Japanese Patent Application Publication No. 2017-188599

Furuta et al., "Method for measuring deviation of bonded wafers", Kobe Steel Engineering Co., Ltd., Vol. 64, No. 2, pp. 115-118, October 2014

In a bonded wafer formed by vertically bonding two wafers having substantially the same shape, a predetermined range of center position deviation is allowed during bonding as described above. Therefore, the center positions of the upper and lower wafers that are bonded together are not necessarily aligned, and in some cases, part of the upper bond wafer protrudes from the lower base wafer, leaving the portion not supported by the base wafer. Arose and joined. When the bonded wafers in this state are positioned using a laser sensor or the like that detects only the contours of the wafers, the overlapping shape of the upper and lower wafers is detected as the wafer shape, so the centers of the upper and lower wafers are actually shifted. The center position of the bonded wafer is different from the center position of the lower base wafer.

In the conventional edge trimming process, the bonded wafer is rotated around the center position based on the detected outline of the bonded wafer, and a grinding wheel is brought into contact with the outer circumference of the bonded wafer. Therefore, processing is performed with a point different from the center of the base wafer as the center of rotation, and the grindstone may cut to a position different from the initial target position, resulting in an abnormal trimming width. In such a case, in the worst case, damage to the wafer occurs, resulting in a decrease in yield in semiconductor manufacturing.

In the above Patent Document 1, a holding table and a plurality of pins are provided, and the plurality of pins are arranged around the holding table so that the positions thereof can be adjusted. is placed on the holding base. The plurality of position-adjustable pins are height-adjusted so as to contact only the outer periphery of the base wafer without contacting the bond wafer. After that, the central position of the base wafer is obtained from the positions of the adjustable pins, and the outer periphery of the bonded substrate can be processed with the base wafer as a reference.

By the way, since the bonded wafer of the WOW method is made by bonding two wafers having substantially the same shape, the total thickness thereof is approximately the sum of the thicknesses of the respective wafers. Therefore, if the pin height is adjusted within the range of the thickness of the base wafer, for example, if the wafer is 100 μm thick, the adjustment range of the pin height is less than 100 μm, which requires a large number of man-hours. need. In addition, as the pin height increases, the chances of contact between the pins and the wafer increase, so contact between the solid pins and the wafer during adjustment increases the risk of damaging the wafer.

Further, in the method for processing a bonded wafer described in Patent Document 2, an image obtained using an optical means is binarized to detect the contour of the bonded wafer. The wafer processing method described in this publication does not sufficiently consider the case where two vertically stacked wafers are stuck together with their centers misaligned. If so, there is a risk that the wafers will be cut centering on the middle position between the displaced centers of the upper and lower wafers. As a result, the peripheral unbonded portion of the upper bond wafer may not be processed or may be cut too far toward the center.

Non-Patent Document 1 describes detecting the contour of a bonded wafer in which two wafers having substantially the same shape are vertically stacked and bonded together using a laser optical system. However, in the method for measuring the displacement of bonded wafers described in this document, although the displacement amount and the displacement position of the two upper and lower wafers can be measured, how to edge trim the wafer based on the displacement amount is disclosed. There is no

SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the prior art described above. To trim an edge of a wafer periphery by an appropriate amount close to a target processing amount without any influence. Another object of the present invention is to perform processing based on the lower base wafer in the edge trimming of the bonded wafer of the WOW method, and to process the outer peripheral portion of the upper bond wafer over the entire circumference, It is to prevent the yield reduction caused by the occurrence of cracks or breakage of wafer portions that do not contribute to semiconductor manufacturing.

The features of the present invention for achieving the above objects are as follows.

[1] An edge trimming method for processing the peripheral edge of a bonded wafer formed by bonding a base wafer and a bond wafer, wherein the protruding region of the bond wafer protruding from the contour of the base wafer is ground. 2. A method of edge trimming a bonded wafer, wherein the peripheral edge portion of the bond wafer and the peripheral edge portion of the base wafer are simultaneously ground around the center of the base wafer.
[2] Grinding the protruding region with the processing center set based on the trimming width determined based on the maximum and minimum values of the outer diameter of the bonded wafer and the center position of the bond wafer as the center of rotation. The edge trimming processing method for a bonded wafer according to [1], characterized in that
[3] An edge trimming device for processing the peripheral edge of a bonded wafer formed by bonding a base wafer and a bond wafer, wherein the protruding region of the bond wafer protruding from the contour of the base wafer is ground. An edge trimming apparatus comprising: a measuring apparatus; and a processing section for simultaneously grinding the peripheral edge portion of the bond wafer and the peripheral edge portion of the base wafer with the center of the base wafer as the center of rotation.
[4] The measuring device rotates about the processing center set based on the trimming width determined based on the maximum and minimum outer diameters of the bonded wafer and the center position of the bond wafer. The edge trimming device according to [3], wherein the protruding region is ground.

Another feature of the present invention for achieving the above objects is an edge trimming method for processing a peripheral edge of a bonded wafer formed by bonding a base wafer and a bond wafer, wherein the bond wafer constituting the bonded wafer is a first-stage grinding step of detecting a protruding region protruding from the base wafer and grinding only the peripheral edge portion of the bond wafer including the detected protruding region; It is to include a second-stage grinding process for grinding at the same time.

In this feature, it is desirable to use a Y-axis incision in which the bonded wafer approaches the rotating grindstone in a substantially horizontal direction in the first stage grinding process and the second stage grinding process. Preferably, the detection of the protruding area of the bond wafer is performed using a light source and a line sensor arranged facing the outer periphery of the bonded wafer.

Further, in the above feature, in the grinding process of the first stage, the minimum diameter is subtracted from the maximum diameter of the bonded wafer obtained when the protruding region of the bond wafer is detected, and half of the difference is the size of the base wafer. Grinding is performed with a position offset from the center of rotation as the center of rotation, and the maximum protruding region of the bond wafer is ground to substantially the plane position with the base wafer after processing, and the maximum protruding region of the base wafer is ground after processing to the bond. Desirably, the wafer is substantially unground.

Further, in the second stage grinding process, it is preferable to process the bonded wafer that has finished the first stage grinding process to a predetermined cutting depth centering on the center position of the base wafer. Furthermore, the bonded wafer may be two silicon wafers having substantially the same shape.

According to the present invention, the optical contour detection means can be used to detect the center of each wafer of a bonded wafer in which two wafers are bonded vertically, so that the center position of the lower base wafer is used. Edge trimming can be performed, and the edge trimming of the outer periphery of the wafer can be reliably performed by an appropriate amount close to the target amount of processing. In addition, in edge trimming of bonded wafers in the WOW method, processing can be performed with the lower base wafer as a reference, so that the outer periphery of the upper bond wafer can be processed over the entire circumference, resulting in semiconductor manufacturing. It is possible to prevent a decrease in yield due to the occurrence of cracks or breakage of the wafer portion that does not contribute to the reduction of the yield.

1 is a top view of one embodiment of a wafer processing apparatus according to the present invention; FIG. FIG. 2 is a front view of a grinding section provided in the wafer processing apparatus of FIG. 1; 1 is a perspective view of a wafer outer diameter measuring device equipped with a laser sensor; FIG. 4 is a diagram showing an output example of FIG. 3; FIG. It is a figure explaining the method of calculating|requiring an edge trimming process center. It is a figure explaining the edge trimming processing method of a bonded wafer. 4 is a flow chart for explaining an edge trimming method for a bonded wafer;

An embodiment of a wafer edge trimming apparatus according to the present invention will be described below with reference to the drawings. FIG. 1 is a schematic top view of an embodiment of the edge trimming device 10, and FIG. 2 is a front view of the grinding device 16 included in the edge trimming device 10 shown in FIG. The edge trimming device 10 of this embodiment includes two sets of identical grinding devices 16 .

The edge trimming device 10 includes a supply/recovery section 14 , a measurement/alignment section 22 , two grinding devices 16 , a cleaning/drying section 20 , and transport means 24 . Although not shown, it also has an operation panel and a control device for controlling these units 14, 22, 16, 20 and means 24. FIG.

The supply/recovery unit 14 supplies the edge-trimmed bonded wafer W from the wafer cassette 30 to the measurement/alignment unit 22 and the processing unit 19 side, and supplies the edge-trimmed bonded wafer W from the processing unit 19 side. It collects in cassettes 30 and 31 . The supply/recovery section 14 of this embodiment includes three wafer cassettes 30 , a measurement transfer section 12 having one wafer supply/recovery robot 34 , and one reject wafer cassette 31 .

The measurement transfer section 12 takes out the bonded wafers W one by one from each wafer cassette 30 set on the cassette table and supplies them to the measurement/alignment section 22 . At the same time, the bonded wafer W for which edge trimming has been completed is stored in the wafer cassettes 30 and 31 from the measurement/alignment section 22 . At that time, the bonded wafers W that do not satisfy the specifications and are judged as NG by the measurement/alignment unit 22 are stored in the wafer cassette 31 for rejection, and the bonded wafers W that satisfy the specifications are stored in the wafer cassette 30 . The supply/recovery robot 34 is, for example, a three-axis rotating transfer arm, and holds the bonded wafer W by vacuum-sucking the surface of the bonded wafer W with a suction pad. The measurement/transportation unit 12 has, for example, a structure in which the base portion can be moved in a circular motion. It can be collected. On the other hand, the wafer cassettes 30 and 31 and the measurement/alignment section 22 are opened on the side of the measurement transfer section 12 so that the bonded wafer W can be received and removed.

The measurement/alignment unit 22 measures the thickness of the bonded wafer W to be edge-trimmed and the central position of the bonded wafer W, which will be described in detail below. The measurement/alignment section 22 includes a measurement table 50, a thickness sensor 52, an outer diameter measurement device 54, and optionally an edge shape detection sensor. The measurement table 50 rotates the bonded wafer W around its central axis. An edge shape detection sensor 56 (not shown) is a laser sensor, and detects a notch when the outer peripheral edge shape of the bonded wafer W or a notch is formed.

The two grinding devices 16 are arranged in parallel in front of the edge trimming processing device 10, and perform the outer peripheral edge trimming processing of the bonded wafer W in two steps. The two grinding devices 16 have the same configuration, and are composed of a grinding table 60 and a spindle 62 for positioning the bonded wafer W at a predetermined position.

The cleaning/drying unit 20 cleans the bonded wafer W after edge trimming, and then dries the bonded wafer W. A spin cleaning device, for example, is provided that sprays a cleaning liquid onto the surface of the bonded wafer W while rotating the bonded wafer W held on the cleaning table 82 to remove stains adhering to the surface of the bonded wafer W. It also has drying means (not shown) for removing the cleaning liquid.

The transport means 24 transports and recovers the bonded wafer W processed by the grinding device 16 to the cleaning/drying section 20 . The collected bonded wafer W is returned to the grinding device 16 for reprocessing, or transported to the measurement/alignment unit 22 for final shape check and product check for cracks, chips, and the like. When performing shape check or product check in the measurement/alignment section 22 , the transport means 24 transports the ground bonded wafer W to the measurement/alignment section 22 through the back space 66 of the grinding device 16 .

Next, the configuration of the grinding device 16, which is a characteristic part of the present invention shown in part A of FIG. 1, will be described with reference to FIG. Since the two grinding devices 16 have the same configuration, only the portion A in FIG. 1 will be described, but the other grinding device 16 is the same.

The grinding device 16A includes a grinding table 60 on which the bonded wafer W is placed and a spindle 62 on which a grindstone 152 is mounted. In this embodiment, the grinding table 60 is movable within the XY plane, and the spindle 62 is fixed in its position within the XY plane. Therefore, when performing edge trimming, which is the peripheral processing of the bonded wafer W, the bonded wafer W is moved together with the grinding table 60 to approach the grindstone 152 on the spindle 62 .

The grinding table 60 includes an X-axis base 121 mounted on a base 141, two X-axis guide rails 122, four X-axis linear guides 123, and an X-axis driving means 125 composed of a ball screw and a servomotor. Thus, an X-axis driving mechanism 220 is configured by having an X-table 124 that is moved in the X-direction in FIG. Two Y-axis guide rails 126 are mounted on the X table 124, and are driven by four Y-axis linear guides 127, a Y-axis driving means composed of a ball screw and a servomotor (not shown), and a Y-axis driving means. A Y-axis drive mechanism 230 is configured together with the Y-table 128 that is moved in the Y-direction perpendicular to the X-direction.

Above the Y table 128 is a Z table 131 guided by two Z-axis guide rails 129 and four Z-axis linear guides (not shown) and moved in the Z direction of FIG. It has been incorporated. A Z table 131 is moved in the Z direction of FIG. 2 by Z-axis driving means 130 having a ball screw and a stepping motor. The Z-axis driving means 130 and the like constitute a Z-axis driving mechanism 240 . The Z table 131 incorporates a θ-axis motor 132 and a θ-spindle 133 . A wafer table 134 on which the bonded wafer W is mounted by suction is attached to one end of the θ spindle 133 .

The wafer table 134 rotates in the θ direction in FIG. 2 around the center of rotation Og (see FIG. 6). The conveying means 24 shown in FIG. 1 can be arranged on the upper surface of the wafer table 134, and a suction pad is attached downward to the tip of the conveying means 24. As shown in FIG. The suction pad communicates with a vacuum source, and the bonded wafer W to be edge-trimmed is mounted and fixed by suction. The grinding table 60 rotates the bonded wafer W in the θ direction of FIG. 2 and moves it to a predetermined position in the X, Y, and Z directions. In the spindle 62, an AC servomotor 151 is fixedly accommodated in a base 150 and rotated at a rotational speed of 500 rpm (approximately 8.3 Hz), for example, by a direct drive method.

By the way, the bonded wafer W used in this embodiment is formed by bonding together two silicon wafers _W0 having substantially the same shape in a previous process. Each silicon wafer W ₀ is, for example, a 12-inch wafer W having a diameter of 300 mm and a thickness of about 0.6 to 1.0 mm, and is bonded together by bonding means such as an adhesive. Specifically, in bonding, two wafers W ₀ are stacked, and an adhesive means is applied between the two stacked wafers W ₀ and W ₀ . At this time, due to misalignment in lamination of the two wafers W ₀ and misalignment caused by local non-uniformity of the bonding force when the bonding means is solidified, microscopically, they are substantially the same. , the center positions O ₁ and O ₂ of the wafer W ₀ are different from each other.

When the bonded wafers W are bonded together, an error of, for example, 0.5 mm in center positions Oba and Obo between the center positions of the two wafers _Wba and _Wbo is allowed. In the post-process, if the chip is cut without considering the positional error between the center positions, the effective chip area will change, so there is a risk of problems such as poor insulation. become.

Therefore, in order to prevent the misalignment during bonding from affecting the cutting into chips, unnecessary portions such as imperfect bonding formed on the peripheral edge of the bonded wafer W after the bonding process are removed, and the positional deviation is eliminated. Edge trimming is performed to compensate for misalignment. For example, in the edge trimming process, the base wafer W _ba located on the lower side of the bonded wafer W is used as a reference, and the bond wafer W located on the upper side in the outer peripheral portion is about 1 to 7 mm in radial length and in the height direction. Including the total height of _bo and the thickness from the bonded surface of the base wafer _Wba , edge trimming is required to have a thickness of about 100 μm.

Next, a method of measuring the outer diameter of the bonded wafer W performed by the measurement/alignment unit 22 of FIG. 1 before the edge trimming process and a method of determining the processing center position of the bonded wafer W based on the measurement result will be described with reference to FIG. , or will be described with reference to FIG. 3A and 3B are schematic diagrams of the outer diameter measuring device 54 disposed in the measurement/alignment section 22. FIG. 3A is a perspective view thereof, and FIG. 3B is a side view thereof.

The measurement/alignment section 22 is provided with a measurement table 50 on which the bonded wafer W transported by the wafer supply/recovery robot 34 is placed. In this state, although the bonded wafer W is positioned substantially at the center of the measurement table 50, it is not positioned at the precise processing center. As described above, since the positions of the base wafer W _ba and the bond wafer W _bo are not exactly aligned, in order to prevent grinding of an unintended wafer region, especially the chip forming surface of the bond wafer W _bo , in the edge trimming process. , the exact processing center _Obo , which is the center of the base wafer _Wba .

Since the bonded wafer W is formed by bonding together two silicon wafers _Wbo and _Wba sliced by wire cutting or the like, its surface texture is close to a mirror surface, and it transmits light like a glass substrate. I don't even have to. Therefore, the outer diameter of the bonded wafer W is determined by comparing a portion through which light is optically transmitted (or passed) and a portion through which light is reflected without passing. At that time, it cannot be determined whether the light is reflected by the upper surface of the bond wafer _Wbo or the upper surface of the base wafer _Wba . Which surface has reflected the light is determined by shape observing means (not shown) or a visible camera.

The outer diameter measuring device 54 for the bonded wafer W is arranged on the outer periphery of the measuring table 50 . The outer diameter measuring device 54 is provided with two holding members 324 and 326 that are held in a spaced-apart manner in the longitudinal middle portion of a support 322 erected on a base 328 . The two holding members 324 , 326 are arranged so as to substantially coincide with the radial direction of the measuring table 50 . On the side where one holding member 324 faces the other holding member 326 , one or more light sources 310 are arranged so as to match the radial direction of the measurement table 50 . A line sensor 312 having a plurality of sensors corresponding to the light source 310 is arranged on the side where the other holding material 326 faces the one holding material 324 . The line sensor 312 is also arranged substantially in the radial direction of the measuring table 50 . The light source 310 and the line sensor 312 are connected to the control unit 350, and from the light detected by the line sensor 312, the distribution of the center and outer diameter φD of the base wafer _Wba constituting the bonded wafer W is calculated.

From the light source 310, parallel light is emitted downward toward the line sensor 312, and the light path is blocked by the upper surface of at least one of the bond wafer _Wbo and the base wafer _Wba . Radiation 302 is generated which reaches sensor 312 . The outline of the bonded wafer W is detected by continuously rotating the measurement table 50 around the central axis 50a and continuously detecting the boundary between the two types of radiation 304, 302. FIG. Based on the detected contour, the position O _ba of the base wafer W ba with respect to the current rotation center ₍ rotation center of the measurement table 50) O and the outer diameter of the bonded wafer W corresponding to the current rotation center O (up to the contour ) is obtained with respect to the rotation angle α of the measurement table 50 .

FIG. 4A shows an output example of the line sensor 312, and FIG. 4B shows the locus of the outer diameter (contour) of the bonded wafer W with respect to the current rotation center O obtained based on this output example. In FIG. 4A, the horizontal axis is the rotation angle α (°) of the measurement table 50. In FIG. The vertical axis represents the output (V) of the entire line sensor 312 consisting of a plurality of sensors. Indicates whether the bonded wafer W is interrupted. The output (V) of the line sensor is preconfigured with respect to the radial position of the measurement table 50. The lower the output (V), the larger the outer diameter of the bonded wafer W, and the higher the output (V), the greater the diameter of the bonded wafer. It indicates that the outer diameter of W is short.

When the positions of the two silicon wafers _Wba and _Wbo are completely aligned to form the bonded wafer W, and the center of the measurement table 50 and the center of the bonded wafer W are completely aligned, The output is constant with respect to the rotation angle α of the measurement table 50 . Also, even if the two silicon wafers _Wba and _Wbo are perfectly aligned and bonded together, if they are displaced with respect to the measurement table 50, the maximum An output shape is obtained that has one part and one minima. In general, the positions of the two silicon wafers _Wba and _Wbo are not completely aligned, and if the positions are not adjusted, the center of the bonded wafer W must be aligned with the center of the measurement table 50. Therefore, as shown in FIG. 4(a), an output shape having two maxima and two minima is obtained during one rotation of the measurement table 50. FIG.

Based on the output shown in FIG. 4(a), the outer diameter (contour) of the bonded wafer W is displayed in polar coordinates and shown in FIG. 4(b). In order to clarify the center position deviation, for example, the nominal diameter (φ300 for a 12-inch wafer) or the like is set as a reference outer diameter φRef, and the deviation Δρ from this reference outer diameter φRef is calculated by 1 scale with respect to the angle α from the start position. , for example plotted at 50 μm. Here, the reference outer diameter φRef in FIG. 4(b) corresponds to _V0 in FIG. 4(a). From FIG. 4(a), a combined shape of two gourd-shaped arcs is obtained.

Next, a calculation method for obtaining the center positions O ba and O _bo of the base wafer W _ba and the bond wafer _{W bo} that constitute the bonded wafer from the polar coordinate representation thus obtained will be described with reference to FIG. . FIG. 5 is a diagram corresponding to FIG. 4(b). In this calculation, it is assumed that the displacement positional relationship between the base wafer _Wba and the bond wafer _Wbo is known by another method. For example, in FIG. 5, the arc on the left is the contour of the base wafer _Wba detected by the outer diameter measuring device 54, and the arc on the right is the contour of the bond wafer _Wbo .

By selecting three or more points on the arc-shaped portion on the left and approximating the contour line from the three or more points, the arc of radius ρ and its center position are obtained, and the obtained center position is the base. This is the center position Oba of the wafer _Wba . Similarly, the center position Obo of the bond wafer _Wbo is obtained. As a result, the positional deviation vectors A, _B from the current center of rotation O to the center positions Oba, Obo of the wafers _Wbo , Wba are obtained. Therefore, by moving the position of the bonded wafer W by the amount of this positional deviation vector A, the center position Oba of the base wafer _Wba can be aligned with the rotation center O of the measurement table 50, and the position of the base wafer _Wba can be aligned. The bonded wafer W can be rotated around the center Oba (see FIG. 6(c)). These relationships are stored in the controller 350 of the outer diameter measuring device 54 .

Details of edge trimming of the bonded wafer W based on the obtained rotation center Oba of the base wafer Wba will be described with reference to FIG. For comparison, FIG. 6 also shows a conventional edge trimming method for the bonded wafer W (FIGS. 6(d) and 6(e)). In FIG. 6, two grindstones 152 are shown in the circumferential direction of the bonded wafer W by one-dot chain lines, but as is clear from FIG. 2, only one grindstone 152 is used for processing. In order to show the difference in processing due to the difference in the circumferential position of the bonded wafer W, the relative positional relationship is also shown for reference.

As shown in FIG. 6A, the bonded wafer W transported from the wafer cassette 30 to the measurement/alignment unit 22 using the supply/recovery robot 34 is displaced from the rotation center O of the measurement table 50 for measurement. It is placed on the table 50 . In this state, the outer diameter measuring device 54 is used to measure the outline of the bonded wafer W by the method described in FIGS. 4 and 5 to obtain the center position Oba of the base wafer _Wba . Then, it is placed on the wafer table 134 using the supply/recovery robot 34 . At this time, as shown in FIG. 6B, the center position Oba of the base wafer _Wba and the rotation center Og of the grinding table are made to coincide with each other using the measurement and calculation results of the measurement/alignment section 22 .

In the bonded wafer W, which is bonded with an adhesive applied thereto, the adhesive applied to the outer peripheral portion is prevented from protruding from the gap at the edge and contaminating the surfaces other than the bonding surface of the wafer. The amount of adhesive is reduced in the vicinity of the part. As a result, there is a case where a bonded surface on which no adhesive is applied is formed on the outer peripheral edge of each wafer. Since the wafers are not bonded to each other and chips cannot be formed in the portions where there is no adhesive, edge trimming is performed in anticipation of the occurrence of regions where such chips cannot be formed. As described above, the outer periphery of the bonded wafer W is ground with an allowance of 1 to 7 mm in the radial direction from the outer periphery of each wafer as a region where chips cannot be formed. In the present embodiment, by processing including the imperfectly overlapped portion of the two upper and lower wafers constituting the bonded wafer W, that is, the non-overlapping portion, in the range expected as the region where the bonding is incomplete, the edge To prevent the occurrence of grinding with an excessive amount of cut more than expected during trimming.

Therefore, in the present invention, the grinding process is performed in two stages. The first stage is the machining state shown in FIG. 6(b), and the second stage is the machining state shown in FIG. 6(c). In the processing state of the first stage, the protruding portion of the bond wafer _Wbo detected by the outer diameter measuring device 54 is ground. The bonded wafer W is transported to the measurement/alignment section 22 and aligned so that the processing center _O1 of the bonded wafer W, which will be detailed later, coincides with the rotation center Og of the wafer table 134 . The aligned bonded wafer W is moved to the processing section 19 side. After that, Y-axis cutting is performed to bring the grinding table 60 closer to the spindle 62 side shown in FIG. The whetstone 152 attached to the spindle 62 is, for example, a #800 metal whetstone with a diameter of 200 mm.

Before executing the Y-axis cutting, the height of the grindstone 152 is adjusted using the Z-axis drive mechanism 240 provided on the grinding table 60 . Specifically, the bottom surface of the grindstone 152 is aligned with the bonded interface between the bond wafer _Wbo and the base wafer _Wba that constitute the bonded wafer W. As shown in FIG. After that, in the Y-axis cutting, the grinding table 60 is moved horizontally from the outer periphery of the bonded wafer W toward the center. The depth of cut and the processing center _O1 of the bonded wafer W at this time will be described in detail below.

In the first stage of the grinding process, the portion of the bond wafer _Wbo protruding from the base wafer _Wba is removed within a range in which the bonded wafer W is not ground beyond the target shape required after the edge trimming process. At that time, the trimming width (the length of the bonded wafer W in the radial direction) is the maximum and minimum outer diameters of the bonded wafer W detected when the bonded wafer W is measured by the measurement/alignment unit 22. value. The maximum value of the outer diameter of the bonded wafer W is the sum of the outer diameter of the base wafer Wba and the length of the protruding portion of the bond wafer Wbo. The minimum value is the outer diameter of each wafer W _ba , W _bo composing the bonded wafer W. The minimum value of the outer diameter of the bonded wafer W is subtracted from this maximum value to obtain the difference, and edge trimming is performed by the width (trimming width) of the target value (initial set value) and the average value.

Since the edge trimming processing width has been determined, the processing center position _O1 is offset from the center position Obo of the bond wafer _Wbo by 1/2 of the trimming width to the maximum value side of the outer diameter. As a result, the maximum protruding portion of the bond wafer _Wbo becomes the planar position along the contour of the base wafer _Wba , while the maximum non-overlapping portion where there is only the base wafer _Wba and the bond wafer _Wbo is not bonded is the bond wafer W The machining allowance for _bo becomes zero. Therefore, the shape of the bonded wafer W after the edge trimming process in the first stage is, when viewed from above, a perfectly circular base wafer _Wba and a slightly smaller bond wafer _Wbo than the base wafer _Wba . , and as a whole shows a perfect circular contour along the outer diameter of the base wafer _Wba .

Next, as shown in FIG. 6(c), the second stage of the grinding process is performed. Before executing the second-stage grinding process, the bonded wafer W that has undergone the first-stage grinding process is transferred to the measurement/alignment section 22 again. Then, the alignment is performed so that the rotation center Og of the wafer table 134 and the center position Oba of the base wafer _Wba constituting the bonded wafer W coincide with each other. After the alignment is completed, the bonded wafer W is moved to the processing section 19 side, and then the grinding table 60 is brought closer to the spindle 62 side shown in FIG.

In the second-stage grinding process, the depth of cut of the grindstone 152 is a predetermined depth of cut required for edge trimming, including a portion of the base wafer _Wba . Also in the second-stage grinding process, the Y-axis incision is performed by bringing the bonded wafer W closer to the grindstone 152 from the substantially horizontal direction. That is, the bottom surface of the grindstone 152 is positioned at a position below the top surface of the bond wafer W _bo by the depth t, and the grinding table 60 is moved in the Y-axis direction to simultaneously process the bond wafer W _bo and the base wafer W _ba . .

After the second-stage grinding process, the maximum processing width Δl ₁ and the minimum processing width Δl ₂ are adjusted by the amount by which the center position Obo of the bond wafer _Wbo is displaced from the center position _Oba of the base wafer Wba. there is a difference between However, since the bonded wafer _W is rotated around the center of rotation Oba of the base wafer Wba for edge trimming, the base wafer _Wba is not excessively ground. Conversely, without affecting the chip formation range of the base wafer Wba, the edge trimming of the outer periphery of the bonded wafer W can be performed so that the design processing diameter φDdes or the most approximate allowable maximum range remains.

On the other hand, the conventional edge trimming method is the same as the present invention in that the bonded wafer W is transported from the wafer cassette 30 to the measurement/alignment section 22 using the supply/recovery robot 34 . In this case, as shown in FIG. 6A, the bonded wafer W is placed on the measurement table 50 with a positional deviation from the center O of the measurement table 50, which is also the same as the present invention.

However, in the conventional edge trimming method, as shown in FIG. was aligned with the rotation center Og of the wafer table 134 . That is, the center O of the bonded wafer W is set at the middle point between the center Oba of the base wafer _Wba and the center _Obo of the bond wafer Wbo, and is aligned with the rotation center Og of the wafer table 134 . The bonded wafer W is rotated around this position. At that time, the depth of cut of the grindstone 152 is set to t, which is the designed depth of cut, and the radial depth of cut is set to the amount at which the design machining diameter φDdes remains. After that, the entire thickness of the bond wafer _Wbo and a part of the height from the bonded surface of the base wafer _Wba are ground in one grinding process.

After the grinding process is completed, as shown in FIG. 6(e), a design machining diameter φDdes having a maximum machining width Δl ₁ and a minimum machining width Δl ₂ is obtained. However, at the maximum processing width Δl of ₁ part, edge trimming is performed beyond the removal range of 1 to 7 mm of unnecessary portions including defective bonding set for each type of bonded wafer W on the base wafer W _ba side. There was a fear that In other words, the base wafer _Wba may be ground to a portion that affects chip formation, resulting in a decrease in yield in semiconductor chip manufacturing. On the other hand, in the edge trimming method according to the present invention, since the second-stage grinding process is performed with the base wafer _Wba as a reference, there is no possibility that the base wafer _Wba will be ground beyond the permissible range.

Next, FIG. 7 shows a flow chart of the procedure for edge trimming of the bonded wafer W described above. See also FIG. In step S<b>710 , the bonded wafer W stored in the wafer cassette 30 of the supply/recovery section 14 is transferred to the measurement/alignment section 22 using the measurement transfer section 12 . After detecting the contour of the bonded wafer W using the outer diameter measuring device 54 or the like, the measurement/alignment unit 22 calculates the center positions Oba and Obo of the wafers _{Wba and} Wbo constituting the bonded wafer W. FIG. In order to perform the first-stage grinding of the bonded wafer W, the rotation center position O of the bonded wafer _W is determined based on the calculated center positions Oba and Obo and the protrusion position and protrusion amount of the bond wafer Wbo. ₁ is obtained and aligned (step S720). The rotation center position _O1 of the aligned bonded wafer W is matched with the center position of the grinding table 60, and the bonded wafer W is held by vacuum suction (step S730).

The X- and Z-axis driving mechanisms 220 and 240 of the grinding table 60 are driven to align the grinding wheel 152 attached to the spindle 62 with the processing direction and processing height. The stepped grinding process is performed by Y-axis incision by a predetermined incision amount (step S740). As described above, in this first-stage grinding process, only the outer peripheral portion of the bond wafer _Wbo is ground. After finishing the first-stage grinding, the transport means 24 is used to transport the bonded wafer W to the cleaning/drying section 20, where it is cleaned and dried (step S750).

After that, the transport means 24 is used to transport the bonded wafer W to the measurement/alignment section 22 . In the measurement/alignment unit 22, the center position Oba of the base wafer _Wba of the bonded wafer W is aligned with the rotation center Og of the wafer table 134 in order to perform the second stage of the grinding process, that is, the final edge trimming process. (step S760). The aligned bonded wafer W is aligned and mounted on the grinding table 60 using the supply/recovery robot 34 of the measurement/conveyance unit 12, and is held by vacuum suction (step S770).

By driving the X- and Z-axis drive mechanisms 220 and 240 of the grinding table 60, the grindstone 152 attached to the spindle 62 and the processing direction and processing height are matched with the set direction and set height, and the Y-axis drive mechanism of the grinding table 60 is operated. 230, a second stage grinding process is performed by a predetermined depth of cut in the Y-axis depth of cut (step S780). In this second-stage grinding process, not only the bond wafer _Wbo but also the base wafer _Wba is partly ground in the height direction at its outer periphery.

When the grinding process of the second stage is completed, the edge trimming process is completed, so the bonded wafer W after the grinding process is transported again to the cleaning/drying section 20 using the transport means 24, and is cleaned and dried ( step S790).

After cleaning and drying, the transport means 24 is used to store the bonded wafer W in the wafer cassette 30 of the supply/recovery section 14 (step S800). In addition, before the bonded wafers W are stored in the wafer cassette 30 , the measurement/alignment unit 22 checks for chipping or cracking of the bonded wafers W, and stores defective wafers W in the reject wafer cassette 31 . Also good.

In the above embodiments, a silicon wafer and a bonded wafer obtained by bonding silicon wafers together have been described. Needless to say, the present invention can be applied even if there is. In addition, in the above embodiment, the two silicon wafers have the same diameter, but it can also be applied to a bonded wafer W in which the diameter of the bond wafer _Wbo is slightly smaller than that of the base wafer _Wba , or vice versa. .

DESCRIPTION OF SYMBOLS 10... Edge trimming processing apparatus 12... Measurement conveyance part 14... Supply recovery part 16... Grinding apparatus 19... Processing side 20... Cleaning/drying part 22... Measurement/alignment part 24... Conveying means 30... Wafer cassette 31 Reject wafer cassette 34 Supply and recovery robot 50 Measurement table 50a Center axis 52 Thickness sensor 54 Outer diameter measuring device 60 Grinding table 62 Spindle 66 Back space 82...Washing table 121...X-axis base 122...X-axis guide rail 123...X-axis linear guide 124...X-table 125...X-axis drive means 126...Y-axis guide rail 127...Y Axis linear guide 128 Y table 129 Z axis guide rail 130 Z axis drive means 131 Z table 132 θ axis motor 133 θ spindle 134 Wafer table 141 Base 150 Base 151 AC servomotor 152 grindstone 220 X-axis drive mechanism 230 Y-axis drive mechanism 240 Z-axis drive mechanism 302, 304 Radiant light 310 Light source 312 Line sensor 322... Support column, 324, 326... Holding material, 328... Base, 350... Control unit, W... Wafer, _Wba ... Base wafer, Wbo... Bond wafer, O... Center of rotation of wafer, _O1 ... Grinding in the first stage Rotation center of wafer during processing, Oba... rotation center of base wafer, Obo... rotation center of bond wafer, Og... rotation center of wafer table

Claims (4)

An edge trimming method for processing a peripheral edge of a bonded wafer formed by bonding a base wafer and a bond wafer, comprising:
Grinding the protruding region of the bond wafer protruding from the contour of the base wafer,
A method of edge trimming a bonded wafer, comprising: simultaneously grinding the peripheral edge portion of the bond wafer and the peripheral edge portion of the base wafer with the center of the base wafer as the center of rotation. Grinding the protruding region around a processing center set based on a center position of the bond wafer and a trimming width determined based on the maximum and minimum values of the outer diameter of the bonded wafer, 2. The edge trimming method for a bonded wafer according to claim 1, wherein: An edge trimming processing apparatus for processing the peripheral edge of a bonded wafer formed by bonding a base wafer and a bond wafer,
a measuring device for grinding a protruding region of the bond wafer protruding from the contour of the base wafer;
An edge trimming apparatus, comprising: a processing section for simultaneously grinding the peripheral edge portion of the bond wafer and the peripheral edge portion of the base wafer with the center of the base wafer as the center of rotation. The measuring device rotates about a processing center set based on a trimming width determined based on the maximum and minimum outer diameters of the bonded wafer and the center position of the bond wafer. 4. The edge trimming device according to claim 3, wherein the edge trimming device grinds the edge.