JP7316379B2 - 裏側物理的気相堆積の方法及び装置 - Google Patents
裏側物理的気相堆積の方法及び装置 Download PDFInfo
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- JP7316379B2 JP7316379B2 JP2021564871A JP2021564871A JP7316379B2 JP 7316379 B2 JP7316379 B2 JP 7316379B2 JP 2021564871 A JP2021564871 A JP 2021564871A JP 2021564871 A JP2021564871 A JP 2021564871A JP 7316379 B2 JP7316379 B2 JP 7316379B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optics & Photonics (AREA)
- Robotics (AREA)
- Physical Vapour Deposition (AREA)
- Thermal Sciences (AREA)
- Formation Of Insulating Films (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (9)
- 基板の裏側に裏側フィルム層を堆積する方法であって:
前記基板をクラスタツールのファクトリインターフェースにロードすることであって、前記基板は表側及び裏側を有し、前記表側は活性領域を有する、前記ロードすることと;
前記基板の前記裏側が上を向くように、前記ファクトリインターフェースで前記基板を裏返すことと;
裏返した前記基板を前記ファクトリインターフェースから物理的気相堆積チャンバに移すことと;
前記基板の前記裏側に前記裏側フィルム層を堆積することであって、前記裏側フィルム層は、物理的気相堆積を含む方法を使用して堆積される、前記堆積することと
を含み、
ここで、前記基板の前記裏側に前記裏側フィルム層を堆積することが、基板が基板の周辺でリング構造によって保持された状態で実行される、方法。 - 前記基板を裏返すことが、前記ファクトリインターフェースに取り付けられた又は配置されたフリッパーによって実行され、前記フリッパーは、前記基板の前記活性領域に接触することなく前記基板を保持する、請求項1に記載の方法。
- 前記裏側フィルム層が、スパッタターゲットに隣接して配置されたマグネトロンを使用して堆積され、
前記マグネトロンが、1つの磁気極性の内部の複数の磁石を含む内部極と、反対の磁気極性の外部の複数の磁石を含む外部極とを有し、
前記外部極が前記内部極を取り囲む、請求項1に記載の方法。 - 前記内部極と前記外部極との磁場強度の比が0.5以上である、請求項3に記載の方法。
- 基板の裏側に裏側フィルム層を堆積する方法であって:
前記基板をクラスタツールのファクトリインターフェースにロードすることであって、前記基板は表側及び裏側を有し、前記表側は活性領域を有する、前記ロードすることと;
前記裏側が上を向くように、前記ファクトリインターフェースで前記基板を裏返すことと;
裏返した前記基板を前記ファクトリインターフェースから物理的気相堆積チャンバに移すことと;
前記基板の前記裏側に前記裏側フィルム層を堆積することであって、
前記裏側フィルム層は、スパッタターゲットからのスパッタリングから形成され、
前記裏側フィルム層は、前記スパッタターゲットにDC電力を供給することによって堆積され、
前記基板の前記裏側に前記裏側フィルム層を堆積することが、基板が基板の周辺でリング構造によって保持された状態で実行される、前記堆積することと
を含む、方法。 - 前記基板を裏返すことが、前記ファクトリインターフェースに取り付けられた又は配置されたフリッパーによって実行され、前記フリッパーは、前記基板の前記活性領域に接触することなく前記基板を保持する、請求項5に記載の方法。
- 前記裏側フィルム層がケイ素を含む、請求項5に記載の方法。
- 前記基板を約750℃~約950℃の温度に約1分~約180分間加熱することにより、前記基板をアニールプロセスに供することをさらに含む、請求項5に記載の方法。
- 前記スパッタターゲットにRF電力を供給することによって前記裏側フィルム層が堆積され、前記DC電力が約2,000V~約60,000Vの電圧で供給され、前記RF電力レベルと前記DC電力レベルとの比が約2:1~約8:1である、請求項5に記載の方法。
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JPS6218881A (ja) * | 1985-07-18 | 1987-01-27 | Fuji Photo Film Co Ltd | フイ−ルド/フレ−ム変換方式 |
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KR20020034492A (ko) | 2000-11-02 | 2002-05-09 | 박종섭 | 반도체 소자의 제조방법 |
US7169685B2 (en) * | 2002-02-25 | 2007-01-30 | Micron Technology, Inc. | Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive |
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US20100221583A1 (en) | 2009-02-27 | 2010-09-02 | Applied Materials, Inc. | Hdd pattern implant system |
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